KR101488059B1 - 탐침 검출 시스템 - Google Patents

탐침 검출 시스템 Download PDF

Info

Publication number
KR101488059B1
KR101488059B1 KR1020117000291A KR20117000291A KR101488059B1 KR 101488059 B1 KR101488059 B1 KR 101488059B1 KR 1020117000291 A KR1020117000291 A KR 1020117000291A KR 20117000291 A KR20117000291 A KR 20117000291A KR 101488059 B1 KR101488059 B1 KR 101488059B1
Authority
KR
South Korea
Prior art keywords
probe
top surface
light
height
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020117000291A
Other languages
English (en)
Korean (ko)
Other versions
KR20110041459A (ko
Inventor
앤드류 험프리스
Original Assignee
인피니트시마 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0810389A external-priority patent/GB0810389D0/en
Priority claimed from GB0822505A external-priority patent/GB0822505D0/en
Application filed by 인피니트시마 리미티드 filed Critical 인피니트시마 리미티드
Publication of KR20110041459A publication Critical patent/KR20110041459A/ko
Application granted granted Critical
Publication of KR101488059B1 publication Critical patent/KR101488059B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
KR1020117000291A 2008-06-06 2009-06-08 탐침 검출 시스템 Active KR101488059B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB0810389.7 2008-06-06
GB0810389A GB0810389D0 (en) 2008-06-06 2008-06-06 Interferometric detection system
GB0822505A GB0822505D0 (en) 2008-12-10 2008-12-10 Interferometic detection system
GB0822505.4 2008-12-10
PCT/GB2009/050637 WO2009147450A1 (en) 2008-06-06 2009-06-08 Probe detection system

Publications (2)

Publication Number Publication Date
KR20110041459A KR20110041459A (ko) 2011-04-21
KR101488059B1 true KR101488059B1 (ko) 2015-01-29

Family

ID=40999765

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117000291A Active KR101488059B1 (ko) 2008-06-06 2009-06-08 탐침 검출 시스템

Country Status (9)

Country Link
US (2) US20110138506A1 (enExample)
EP (1) EP2297546B1 (enExample)
JP (1) JP5580296B2 (enExample)
KR (1) KR101488059B1 (enExample)
CN (1) CN102084431B (enExample)
CA (1) CA2727118A1 (enExample)
IL (1) IL209773A0 (enExample)
RU (1) RU2512674C2 (enExample)
WO (2) WO2009147450A1 (enExample)

Families Citing this family (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009147450A1 (en) * 2008-06-06 2009-12-10 Infinitesima Ltd Probe detection system
KR101569960B1 (ko) * 2008-12-11 2015-11-27 인피니트시마 리미티드 다이나믹 탐침 검출 시스템
GB0901772D0 (en) 2009-02-04 2009-03-11 Infinitesima Ltd Control system for a scanning probe microscope
KR101198178B1 (ko) * 2010-06-14 2012-11-12 삼성전자주식회사 고속 및 고정밀 원자힘 현미경
CA2825038A1 (en) * 2011-01-31 2012-08-09 Infinitesima Limited Adaptive mode scanning probe microscope
TWI577523B (zh) * 2011-06-17 2017-04-11 三菱麗陽股份有限公司 表面具有凹凸結構的模具、光學物品、其製造方法、面發光體用透明基材及面發光體
WO2013019719A1 (en) * 2011-08-01 2013-02-07 The Trustees Of Columbia University In The City Of New York Ultra-compact nanocavity-enhanced scanning probe microscopy and method
FR2979143B1 (fr) * 2011-08-16 2016-03-25 Univ Joseph Fourier Dispositif optique d'analyse interferometrique de l'etat de surface interne d'un tube
WO2013059665A1 (en) 2011-10-19 2013-04-25 The Trustees Of Columbia University In The City Of New York Ultracompact fabry-perot array for ultracompact hyperspectral imaging
GB201201640D0 (en) 2012-01-31 2012-03-14 Infinitesima Ltd Photothermal probe actuation
US8516610B1 (en) * 2012-03-19 2013-08-20 Massachusetts Institute Of Technology High-frequency rheology system
WO2013148349A1 (en) 2012-03-30 2013-10-03 The Trustees Of Columbia University In The City Of New York Graphene photonics for resonator-enhanced electro-optic devices and all-optical interactions
US9829427B2 (en) * 2012-06-07 2017-11-28 Consejo Superior De Investigaciones Cientificas (Csic) Method and system for characterization of nano- and micromechanical structures
GB201215546D0 (en) * 2012-08-31 2012-10-17 Infinitesima Ltd Multiple probe detection and actuation
US10254306B2 (en) * 2012-11-29 2019-04-09 Infinitesima Limited Probe calibration or measurement routine
EP2913682A1 (en) * 2014-02-28 2015-09-02 Infinitesima Limited Probe actuation system with feedback controller
EP2913681A1 (en) 2014-02-28 2015-09-02 Infinitesima Limited Probe system with multiple actuation locations
US9535085B2 (en) * 2014-08-05 2017-01-03 The United States Of America, As Represented By The Secretary Of Commerce Intermittent contact resonance atomic force microscope and process for intermittent contact resonance atomic force microscopy
CN104374954A (zh) * 2014-11-24 2015-02-25 苏州飞时曼精密仪器有限公司 一种扫描探针显微镜的探针与样品趋近装置及方法
KR102012577B1 (ko) * 2015-02-26 2019-08-20 살렌트, 엘엘씨 나노-전자-기계적-시스템 프로브들을 제작하기 위한 방법들 및 시스템들
EP3249348B1 (de) * 2016-05-26 2019-07-03 Baumer Electric AG Sensorvorrichtung zur vermessung einer oberfläche
JP6696570B2 (ja) * 2016-06-02 2020-05-20 株式会社島津製作所 走査型プローブ顕微鏡
US9952387B2 (en) * 2016-09-02 2018-04-24 Acme Microsystem Inc. Optical fiber transmission system with a laser beam splitting and combining device
GB201615307D0 (en) * 2016-09-09 2016-10-26 Renishaw Plc Measurement method and apparatus
US9835679B1 (en) * 2016-09-30 2017-12-05 Intel Corporation Systems, methods, and apparatuses for implementing fast throughput die handling for synchronous multi-die testing
US10228388B2 (en) * 2016-10-29 2019-03-12 Bruker Nano, Inc. Method and apparatus for resolution and sensitivity enhanced atomic force microscope based infrared spectroscopy
US10725061B2 (en) * 2017-02-03 2020-07-28 Pentagon Technologies Group, Inc. Modulated air surface particle detector
JP6885585B2 (ja) * 2017-03-28 2021-06-16 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡、及びその走査方法
GB201705613D0 (en) * 2017-04-07 2017-05-24 Infinitesima Ltd Scanning probe system
JP6955893B2 (ja) * 2017-04-25 2021-10-27 株式会社ディスコ レーザー加工装置の高さ位置検出ユニットの評価用治具及びレーザー加工装置の高さ位置検出ユニットの評価方法
EP3404424A1 (en) * 2017-05-15 2018-11-21 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Scanning probe microscopy system for and method of mapping nanostructures on the surface of a sample
CN107102174A (zh) * 2017-05-16 2017-08-29 中国计量科学研究院 一种用于针尖型扫描显微测量装置的特种探针的制作方法
EP3441773B1 (en) * 2017-08-11 2022-11-23 Anton Paar GmbH Characterizing a height profile of a sample by side view imaging
CN107576822B (zh) * 2017-09-30 2018-12-14 武汉锐科光纤激光技术股份有限公司 一种扫描探针检测装置
EP3462181A1 (en) * 2017-10-02 2019-04-03 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Z-position motion stage for use in a scanning probe microscopy system, scan head and method of manufacturing
DE102018210098B4 (de) * 2018-06-21 2022-02-03 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren zum Untersuchen und/oder zum Bearbeiten einer Probe
TWI674413B (zh) * 2018-10-31 2019-10-11 致茂電子股份有限公司 探針對準設備
CN109485013B (zh) * 2018-12-29 2020-11-06 哈尔滨工业大学 一种纳米连接装置
CN109704273B (zh) * 2018-12-29 2020-10-13 哈尔滨工业大学 一种纳米连接装置和纳米线与电极连接方法
US10768225B1 (en) * 2019-03-08 2020-09-08 Advanced Micro Devices, Inc. Probe placement for laser probing system
CN109917407A (zh) * 2019-03-22 2019-06-21 中国科学院重庆绿色智能技术研究院 一种基于激光反射的近场探针测距方法及装置
EP3722817B1 (en) * 2019-04-12 2022-05-11 attocube systems AG Active bimodal afm operation for measurements of optical interaction
CN111458537A (zh) * 2019-05-24 2020-07-28 天津大学 三维正交扫描式原子力显微镜测头
CN112212782B (zh) * 2019-06-25 2023-01-17 合肥欣奕华智能机器股份有限公司 一种玻璃基板检测方法、装置及系统
US12091313B2 (en) 2019-08-26 2024-09-17 The Research Foundation For The State University Of New York Electrodynamically levitated actuator
CN110646640B (zh) * 2019-10-09 2022-04-05 中国科学院宁波材料技术与工程研究所 一种基于扫描探针显微镜的材料微/纳尺度的磁热信号探测方法
GB201915539D0 (en) * 2019-10-25 2019-12-11 Infinitesima Ltd Method of imaging a surface using a scanning probe mircoscope
DE102019131421A1 (de) * 2019-11-21 2021-05-27 Bruker Nano Gmbh Messvorrichtung für ein Rastersondenmikroskop und Verfahren zum rastersondenmikroskopischen Untersuchen einer Messprobe mit einem Rastersondenmikroskop
CN113125808A (zh) * 2020-01-10 2021-07-16 精浚科技股份有限公司 聚焦式原子力显微镜
US11835545B2 (en) * 2020-01-14 2023-12-05 The Trustees Of Columbia University In The City Of New York Systems, method and computer-accessible medium for providing balanced asymmetric interferometry for vibrationally isolated optical scanning probe(s)
EP3923078A1 (en) * 2020-06-10 2021-12-15 ASML Netherlands B.V. Heigth measurement method and height measurement system
US11519935B2 (en) * 2020-08-18 2022-12-06 Oxford Instruments Asylum Research, Inc. Atomic force microscope
CN115078771B (zh) * 2021-03-11 2024-12-13 百及纳米技术(上海)有限公司 探针测量的控制方法、处理方法以及装置
US12247998B2 (en) 2021-09-22 2025-03-11 The Research Foundation For The State University Of New York Scattering-type scanning near-field optical microscopy with Akiyama piezo-probes
CN114018921A (zh) * 2021-11-02 2022-02-08 仪晟科学仪器(嘉兴)有限公司 一种基于探针光学定位系统的近场光学显微镜
EP4560324A1 (en) 2023-11-22 2025-05-28 Oxford Instruments Nanotechnology Tools Limited Methods for positioning a measurement spot using a scanning probe microscope
EP4560323A1 (en) * 2023-11-22 2025-05-28 Oxford Instruments Nanotechnology Tools Limited Accurate vector nano-electromechanics
US20250290948A1 (en) * 2024-02-22 2025-09-18 Bruker Nano, Inc. Atomic Force Microscope Based Infrared Spectroscopy With Multiple Laser Pulse Repetition Rate Excitation And Optional Force Volume Operation

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030003249A (ko) * 2001-02-06 2003-01-09 유니버시티 오브 브리스톨 근접장 주사 광학 현미경
KR20030015220A (ko) * 2000-03-30 2003-02-20 유니버시티 오브 브리스톨 원자 힘 현미경 검사 방법 및 장치
KR20050043885A (ko) * 2002-07-04 2005-05-11 유니버시티 오브 브리스톨 주사 탐침 현미경

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03123805A (ja) * 1989-10-09 1991-05-27 Olympus Optical Co Ltd 原子間力顕微鏡
US5206702A (en) * 1989-10-09 1993-04-27 Olympus Optical Co., Ltd. Technique for canceling the effect of external vibration on an atomic force microscope
JP2661314B2 (ja) * 1990-03-07 1997-10-08 松下電器産業株式会社 形状測定装置及び形状測定方法
US5298975A (en) * 1991-09-27 1994-03-29 International Business Machines Corporation Combined scanning force microscope and optical metrology tool
US5920067A (en) * 1992-03-13 1999-07-06 The United States Of America As Represented By The Secretary Of Commerce Monocrystalline test and reference structures, and use for calibrating instruments
DE4324983C2 (de) * 1993-07-26 1996-07-11 Fraunhofer Ges Forschung Akustisches Mikroskop
JPH07159155A (ja) * 1993-12-08 1995-06-23 Olympus Optical Co Ltd 走査型プローブ顕微測定法および走査型プローブ顕微鏡
JPH1144695A (ja) * 1997-07-28 1999-02-16 Nikon Corp 光てこ検出機構および走査型プローブ顕微鏡
US6260997B1 (en) * 1997-10-28 2001-07-17 Michael Claybourn Method and apparatus for high spatial resolution spectroscopic microscopy
US6642517B1 (en) * 2000-01-25 2003-11-04 Veeco Instruments, Inc. Method and apparatus for atomic force microscopy
GB2369452B (en) 2000-07-27 2002-07-17 Michael John Downs Beam splitting blocks
US6354133B1 (en) * 2000-10-25 2002-03-12 Advanced Micro Devices, Inc. Use of carbon nanotubes to calibrate conventional tips used in AFM
US6779387B2 (en) * 2001-08-21 2004-08-24 Georgia Tech Research Corporation Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
US7073938B2 (en) * 2001-10-31 2006-07-11 The Regents Of The University Of Michigan Micromachined arrayed thermal probe apparatus, system for thermal scanning a sample in a contact mode and cantilevered reference probe for use therein
US7998528B2 (en) * 2002-02-14 2011-08-16 Massachusetts Institute Of Technology Method for direct fabrication of nanostructures
CN2577274Y (zh) * 2002-10-24 2003-10-01 中国科学院上海光学精密机械研究所 扫描探针显微镜上的观察装置
US6975129B2 (en) * 2003-06-17 2005-12-13 National Applied Research Labratories Electrical scanning probe microscope apparatus
EP1644937A1 (en) 2003-07-15 2006-04-12 University Of Bristol Probe for an atomic force microscope
JPWO2005010502A1 (ja) * 2003-07-23 2006-09-28 日立建機ファインテック株式会社 走査型プローブ顕微鏡の探針交換方法
US7360405B2 (en) * 2003-09-30 2008-04-22 Iowa State University Research Foundation, Inc. Method to transiently detect sample features using cantilevers
US7474410B2 (en) * 2006-04-11 2009-01-06 Massachusetts Institute Of Technology Nanometer-precision tip-to-substrate control and pattern registration for scanning-probe lithography
JP2007320017A (ja) * 2006-06-05 2007-12-13 Sii Nanotechnology Inc 原子間力顕微鏡微細加工装置を用いた加工方法
JP5122775B2 (ja) * 2006-08-23 2013-01-16 株式会社ミツトヨ 測定装置
JP4790551B2 (ja) * 2006-09-21 2011-10-12 株式会社ミツトヨ 微細形状測定装置
US7966867B2 (en) * 2007-04-10 2011-06-28 Hitachi, Ltd. Scanning probe microscope
JP5183989B2 (ja) * 2007-07-19 2013-04-17 株式会社ミツトヨ 形状測定装置
US7770231B2 (en) * 2007-08-02 2010-08-03 Veeco Instruments, Inc. Fast-scanning SPM and method of operating same
WO2009147450A1 (en) 2008-06-06 2009-12-10 Infinitesima Ltd Probe detection system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030015220A (ko) * 2000-03-30 2003-02-20 유니버시티 오브 브리스톨 원자 힘 현미경 검사 방법 및 장치
KR20030003249A (ko) * 2001-02-06 2003-01-09 유니버시티 오브 브리스톨 근접장 주사 광학 현미경
KR20050043885A (ko) * 2002-07-04 2005-05-11 유니버시티 오브 브리스톨 주사 탐침 현미경

Also Published As

Publication number Publication date
CN102084431B (zh) 2014-07-02
WO2009147452A1 (en) 2009-12-10
US8528110B2 (en) 2013-09-03
US20110138506A1 (en) 2011-06-09
KR20110041459A (ko) 2011-04-21
WO2009147450A1 (en) 2009-12-10
JP5580296B2 (ja) 2014-08-27
EP2297546B1 (en) 2018-09-19
RU2010154664A (ru) 2012-07-20
US20110167525A1 (en) 2011-07-07
EP2297546A1 (en) 2011-03-23
JP2011522273A (ja) 2011-07-28
CN102084431A (zh) 2011-06-01
CA2727118A1 (en) 2009-12-10
RU2512674C2 (ru) 2014-04-10
IL209773A0 (en) 2011-04-28

Similar Documents

Publication Publication Date Title
KR101488059B1 (ko) 탐침 검출 시스템
KR101569960B1 (ko) 다이나믹 탐침 검출 시스템
JP6117705B2 (ja) 適応モード走査型プローブ顕微鏡
US8732861B2 (en) Control system for a scanning probe microscope
JPH05231863A (ja) 限界寸法測定装置及び方法
WO2009019513A1 (en) Vibration compensation in probe microscopy
JP2006329973A (ja) 走査プローブ顕微鏡およびこれを用いた試料観察方法およびデバイス製造方法
US20100207039A1 (en) Probe Microscopy and Probe Position Monitoring Apparatus
US9134340B2 (en) Method of investigating a sample surface
JP2009128139A (ja) 走査プローブ顕微鏡及び走査プローブ顕微鏡用探針ユニット
KR101198178B1 (ko) 고속 및 고정밀 원자힘 현미경
KR101263033B1 (ko) 진동형 캔틸레버 홀더 및 스캐닝 프로브 현미경
JPWO2006090593A1 (ja) 走査型プローブ顕微鏡用変位検出機構およびこれを用いた走査型プローブ顕微鏡

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20110106

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
A302 Request for accelerated examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20140530

Comment text: Request for Examination of Application

PA0302 Request for accelerated examination

Patent event date: 20140530

Patent event code: PA03022R01D

Comment text: Request for Accelerated Examination

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20140814

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20141119

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20150123

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20150123

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
FPAY Annual fee payment

Payment date: 20180619

Year of fee payment: 4

PR1001 Payment of annual fee

Payment date: 20180619

Start annual number: 4

End annual number: 4

FPAY Annual fee payment

Payment date: 20190122

Year of fee payment: 5

PR1001 Payment of annual fee

Payment date: 20190122

Start annual number: 5

End annual number: 5

FPAY Annual fee payment

Payment date: 20200109

Year of fee payment: 6

PR1001 Payment of annual fee

Payment date: 20200109

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 20210115

Start annual number: 7

End annual number: 7

PR1001 Payment of annual fee

Payment date: 20230117

Start annual number: 9

End annual number: 9

PR1001 Payment of annual fee

Payment date: 20240111

Start annual number: 10

End annual number: 10