IL209773A0 - Probe detection system - Google Patents

Probe detection system

Info

Publication number
IL209773A0
IL209773A0 IL209773A IL20977310A IL209773A0 IL 209773 A0 IL209773 A0 IL 209773A0 IL 209773 A IL209773 A IL 209773A IL 20977310 A IL20977310 A IL 20977310A IL 209773 A0 IL209773 A0 IL 209773A0
Authority
IL
Israel
Prior art keywords
detection system
probe detection
probe
detection
Prior art date
Application number
IL209773A
Other languages
English (en)
Original Assignee
Infinitesima Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0810389A external-priority patent/GB0810389D0/en
Priority claimed from GB0822505A external-priority patent/GB0822505D0/en
Application filed by Infinitesima Ltd filed Critical Infinitesima Ltd
Publication of IL209773A0 publication Critical patent/IL209773A0/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
IL209773A 2008-06-06 2010-12-05 Probe detection system IL209773A0 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0810389A GB0810389D0 (en) 2008-06-06 2008-06-06 Interferometric detection system
GB0822505A GB0822505D0 (en) 2008-12-10 2008-12-10 Interferometic detection system
PCT/GB2009/050637 WO2009147450A1 (en) 2008-06-06 2009-06-08 Probe detection system

Publications (1)

Publication Number Publication Date
IL209773A0 true IL209773A0 (en) 2011-04-28

Family

ID=40999765

Family Applications (1)

Application Number Title Priority Date Filing Date
IL209773A IL209773A0 (en) 2008-06-06 2010-12-05 Probe detection system

Country Status (9)

Country Link
US (2) US20110138506A1 (enExample)
EP (1) EP2297546B1 (enExample)
JP (1) JP5580296B2 (enExample)
KR (1) KR101488059B1 (enExample)
CN (1) CN102084431B (enExample)
CA (1) CA2727118A1 (enExample)
IL (1) IL209773A0 (enExample)
RU (1) RU2512674C2 (enExample)
WO (2) WO2009147450A1 (enExample)

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CN113125808A (zh) * 2020-01-10 2021-07-16 精浚科技股份有限公司 聚焦式原子力显微镜
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Also Published As

Publication number Publication date
CN102084431B (zh) 2014-07-02
WO2009147452A1 (en) 2009-12-10
US8528110B2 (en) 2013-09-03
US20110138506A1 (en) 2011-06-09
KR20110041459A (ko) 2011-04-21
WO2009147450A1 (en) 2009-12-10
JP5580296B2 (ja) 2014-08-27
KR101488059B1 (ko) 2015-01-29
EP2297546B1 (en) 2018-09-19
RU2010154664A (ru) 2012-07-20
US20110167525A1 (en) 2011-07-07
EP2297546A1 (en) 2011-03-23
JP2011522273A (ja) 2011-07-28
CN102084431A (zh) 2011-06-01
CA2727118A1 (en) 2009-12-10
RU2512674C2 (ru) 2014-04-10

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