KR101459692B1 - Movable Local Ventilator Device - Google Patents

Abstract

The present invention relates to a portable local exhaust ventilation device. The portable local exhaust ventilation device includes: a device body which includes an exhaust port formed on a side and has an exhaust line connected to the exhaust port on the inside; a handle arranged on a side of the device body; multiple moving wheels coupled to the lower part of the device body; a contaminant suction duct which is arranged on an area with contaminants to draw in the contaminants; a rotating neck which is linked to the exhaust line and is arranged on the upper surface of the device body; and an arm unit which has an end connected to the rotating neck and the other end connected to the contaminant suction duct.

Description

[0001] Movable Local Ventilator Device [0002]

The present invention relates to a portable local exhaust system, and more particularly, to a portable local exhaust system that can be used not only in semiconductor manufacturing facilities but also in factories, homes, restaurants, etc. where many pollutants are generated, The present invention relates to a mobile local exhaust system that can be used in a general manner and can greatly improve ease of use.

Local exhaust systems can be used in factories, homes and restaurants where pollutants are generated in large numbers. Especially when partial pollutants originate from the floor far away from the exhaust port or other installations, It can be useful in cases where it is difficult to generate, and when there is an instantaneous source of pollution.

A semiconductor manufacturing facility will be described as an example. Conventional semiconductor manufacturing facilities process and process semiconductor wafers under various environments and processes.

Such a semiconductor manufacturing facility is a semiconductor chip manufactured by repeatedly and selectively performing various processes such as photographing, diffusion, etching, chemical vapor deposition, and metal deposition on a wafer. Most of these processes are carried out under various kinds of toxic gases and solutions.

Therefore, the facilities for manufacturing semiconductor devices are always exposed under various and harsh environments, and the equipment is corroded or deformed due to various harmful gases, the lifetime of the equipment is shortened and it is necessary to frequently replace the equipment, The maintenance cost of the equipment also increases.

1 is a structural view of a conventional local exhaust system.

Referring to FIG. 1, a conventional local exhaust system includes a hood 10, a corrugated pipe 20, a suction pipe 40, a vacuum outlet 50, an air compressor 70, a pressure regulator 72, 74 and a control means 80.

The hood 10 is installed above the chamber for manufacturing a semiconductor device to vacuum-suck the polluted gas in the chamber.

The corrugated pipe 20 is installed so that the hood 10 and the gas passage communicate with each other to control the height of the hood 10.

The motor 30 is installed on the upper end of the corrugated pipe 20 and is connected to the corrugated pipe 20 and the gas passage in accordance with a predetermined control signal so that the polluted gas sucked through the hood 10 is supplied to a predetermined exhaust duct (90).

The vacuum exhauster 50 is installed in the suction pipe 40 so as to communicate with the gas passage and is connected to the hood 10 and the suction pipe 40 by the flow of the compressed air supplied from the air compressor 70 through the micro- It is made into a vacuum state.

The pressure regulator 72 is composed of a regulator which is installed in the micro tube 60 so as to communicate with an air passage and operates according to an external control signal to adjust the air pressure supplied to the vacuum ejector 50 to a certain range, The valve 74 is constituted of a solenoid valve or a ball valve which is provided so as to communicate with an air passage in the fine tube 60 and opens and closes the air passage in accordance with an external control signal, Controls the operation of the motor 30 and the air compressor 70, the pressure regulator 72 and the automatic valve 74 so as to discharge the gas.

The damper 76 provided to the gas passage of the suction pipe 40 is opened and closed by the control means 80 to prevent the contaminant gas from flowing back to the hood 10 when the discharge device is not operated.

As described above, the local exhaust system of the type as shown in FIG. 1 is widely applied to a facility for manufacturing semiconductor devices and the like, and since most of them are of a ceiling fixed structure, they are difficult to apply to other places. In fact, the use of the local exhaust system of Fig. 1 in a different place poses a demand for a portable type because it is virtually impossible to disassemble or disassemble the entire apparatus.

Korea Patent Office Application No. 10-2003-0101883 Korea Patent Office Application No. 10-2007-0038831 Korea Patent Office Application No. 10-2010-0117381 Korea Patent Office Application No. 10-2011-0107523

It is an object of the present invention to provide a method of manufacturing a semiconductor device that can be used not only in a semiconductor manufacturing facility but also in a factory, a home, a restaurant, etc. where many pollutants are generated, And to provide a mobile local exhaust which can be greatly improved.

The object of the present invention can be achieved by providing an apparatus main body including an exhaust port formed at one side thereof and an exhaust line communicated with the exhaust port; A handle provided on one side of the apparatus body; A plurality of moving wheels coupled to a lower portion of the apparatus body; A duct disposed in a region where the pollutant is positioned and sucking the pollutant; A rotating neck communicating with the exhaust line and provided on an upper surface of the apparatus main body; And an arm unit connected at one end to the rotating neck and at the other end to the pollutant intake duct.

The arm unit includes: a first corrugated tube connected to the rotating neck; A second bellows pipe connected to the first bellows pipe by a first joint member and movable relative to the first bellows pipe; A third corrugated pipe connected to the second corrugated pipe by the second joint member, the third corrugated pipe being disposed in a direction different from the second corrugated pipe and relatively movable with respect to the second corrugated pipe; And a fourth corrugated pipe connected at one end to the third corrugated pipe by the third joint member and movable relative to the third corrugated pipe, and the other end connected to the duct for suctioning the pollutant.

Wherein at least one of the first to fourth bellows tubes comprises an outer bellows tube having an outer appearance; An inner bellows pipe disposed in the outer bellows pipe; And an inner bell pipe support bar connected to the inner bellows pipe and supporting the inner bellows pipe.

An exhaust pump for causing the exhaust action to proceed through the exhaust line; A pollution sensing unit for sensing a degree of pollution of the pollutant; And a controller for controlling the driving of the exhaust pump based on the information of the contamination detection unit.

The arm unit includes: a bracket member coupled to at least one of the first through third joint members; And a plurality of supporting bars connected to the bracket member for supporting at least one of the first to fourth bellows pipes.

Wherein the duct for suctioning contaminants has a hemispherical or elliptic funnel shape and is further coupled to an inlet region of the duct for suctioning pollutants, The cross-sectional structure of the bar for blocking the vortex may have a triangular shape.

The present invention can be used not only in a semiconductor manufacturing facility but also in a plant where many pollutants are generated, in a home, a restaurant, and the like, and can be widely used in other places requiring exhaust because of easy movement of a place. There is an effect that can be improved.

Therefore, when several mobile local exhaust systems are used, they can be used independently at different positions, so that the exhaust operation can be carried out. In addition, since they can be used in a place where many pollutants are generated, There is an effect.

1 is a structural view of a conventional local exhaust system.
2 is a perspective view of a mobile local exhaust system according to a first embodiment of the present invention.
Figure 3 is a side view of Figure 2;
Fig. 4 is a plan view of Fig. 3 showing the operation of the arm unit. Fig.
Figure 5 is a side view of Figure 2;
FIG. 6 is a structural diagram of the area A in FIG.
7 is a control block diagram of a mobile local exhaust ventilation system according to a second embodiment of the present invention.
8 is a perspective view of a mobile local exhaust system according to a third embodiment of the present invention.
Figs. 9 to 11 are modified examples of ducts for sucking pollutants, respectively.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

FIG. 2 is a perspective view of a mobile local exhaust ventilator according to a first embodiment of the present invention, FIG. 3 is a side view of FIG. 2, and FIG. 4 is a plan view of FIG. And FIG. 6 is a structural view of region A in FIG.

Referring to these drawings, the mobile local exhaust system 100 of the present embodiment can be used not only in a semiconductor manufacturing facility but also in a factory, a home, a restaurant, etc. where many pollutants are generated, The handle 113, the moving wheel 114, the pollutant intake duct 120, the rotating neck 130, and the like, which can be widely used in general, And an arm unit 140, as shown in FIG.

The apparatus main body 110 forms the appearance of the mobile local exhaust apparatus 100 of this embodiment. Although not necessarily so, the device body 110 may be constructed as a box-shaped structure.

An exhaust port 111 is formed at one side of the apparatus main body 110. Although only the exhaust port 111 is shown in the drawing of this embodiment, a separate exhaust pipe may be connected to the exhaust port 111 and used.

An exhaust line 112 communicating with the exhaust port 111 is provided inside the apparatus main body 110. As a result, the pollutant can form a flow that is exhausted through the pollutant intake duct 120, the arm unit 140, the exhaust line 112, and the exhaust port 111.

The handle 113 is provided on one side of the apparatus main body 110. Since the handle 113 is provided, it is convenient when the mobile local exhaust system 100 of the present embodiment is moved.

The moving wheel 114 is coupled to the lower portion of the apparatus body 110. The moving wheel 114 can be moved by holding the handle 113 and pushing or pulling the mobile local exhaust 100. Although not shown in detail in the drawing, a stopper (not shown) may be added to the moving wheel 114. That is, after the positional movement of the mobile local exhaust system 100 is completed, it is necessary to fix the mobile local exhaust system 100 at that position, at which time a stopper can be used.

On the other hand, the pollutant intake duct 120 is disposed at the place where the pollutant is generated and serves to suck the pollutant for the first time.

In the case of this embodiment, the pollutant intake duct 120 has a hemispherical shape. A flange 121 is formed at the end of the pollutant intake duct 120. The shape of the pollutant intake duct 120 is not deformed due to the flange 121.

The rotating neck 130 is communicated with the exhaust line 112 and is provided on the upper surface of the apparatus main body 110. The rotating neck 130 may be a passive bearing, or the automatic type may be a motor.

The rotating neck 130 allows the arm unit 140 including the pollutant intake duct 120 to move as indicated by the solid line in FIG. 4, thereby improving the suction efficiency of the pollutant.

The arm unit 140 has one end connected to the rotating neck 130 and the other end connected to the pollutant intake duct 120. The arm unit 140 has a wrinkle structure so that positional movement is free.

The arm unit 140 includes a first bell pipe 161 connected to the rotating neck 130 and a first bell pipe 161 connected to the first bell pipe 161 by a first joint member 151, A second bellows pipe 162 connected to the second bellows pipe 162 by the second joint member 152 and disposed in a direction different from the direction of the second bellows pipe 162, And one end is connected to the third corrugated pipe 163 by the third joint member 153 and is movable relative to the third corrugated pipe 163 and the other end is connected to the third corrugated pipe 163, And a fourth bell pipe (164) connected to the substance intake duct (120).

Since the first to fourth bellows pipes 161 to 164 are partially connected to each other by the first to third joint members 151 to 153 as described above, the first to fourth bellows pipes 161 to 164 are shown in the drawing Can be freely bent or bent at an arbitrary angle by the first to third joint members 151 to 153 out of the illustrated angles. Therefore, it is very good to dispose the pollutant intake duct 120 in the region where the pollutant exists.

All of the first to fourth corrugated pipes 161 to 164 may have a structure as shown in FIG. 6 shows the structure of the second corrugated pipe 162, all the first, third and fourth corrugated pipes 161, 163 and 164 may have a structure as shown in FIG.

6, the second corrugated pipe 162 includes an outer corrugated pipe 162a, an inner corrugated pipe 162b disposed in the outer corrugated pipe 162a, and an inner corrugated pipe 162b connected to the inner corrugated pipe 162b. And an inner bell tube support bar 162c that supports the inner bell pipe support bar 162c

As described above, when the second bellows pipe 162 is formed as a double tube of the outer bellows pipe 162a and the inner bellows pipe 162b and the inner bellows pipe 162b is supported by the inner bell pipe support bar 162c, The durability can be improved, and there is an advantage that the phenomenon of leaking in the process of sucking the pollutant can be effectively reduced.

According to the mobile local exhaust system 100 of the present embodiment having the structure as described above, it can be used not only in semiconductor manufacturing facilities but also in factories, homes, restaurants, etc. where many pollutants are generated. So that the convenience of use can be greatly improved.

Therefore, when a plurality of portable local exhaust systems 100 are used, they can be used independently at different positions to perform exhaust operation. In addition, since they can be concentrated in places where many pollutants are generated, .

7 is a control block diagram of a mobile local exhaust ventilation system according to a second embodiment of the present invention.

In this embodiment, an example is shown in which an exhaust pump 280 for allowing the exhaust action to proceed through the exhaust line 112 (see FIG. 5) and a contamination detecting unit 270 for detecting the contamination degree of the pollutant substance are further provided do.

In this case, the controller 250 controls the driving of the exhaust pump 280 based on the information of the contamination detection unit 270.

The controller 250 performing such a role may include a central processing unit 251 (CPU), a memory 252 (MEMORY), and a support circuit 253 (SUPPORT CIRCUIT) as shown in FIG.

The central processing unit 251 may be one of various computer processors that can be industrially applied to control the driving of the exhaust pump 280 based on the information of the contamination detecting unit 270 in this embodiment.

The memory 252 (MEMORY) is connected to the central processing unit 251. The memory 252 may be a computer readable recording medium and may be located locally or remotely and may be stored in any suitable memory such as, for example, random access memory (RAM), ROM, floppy disk, hard disk, At least one or more memories.

The support circuit 253 (SUPPORT CIRCUIT) is coupled with the central processing unit 251 to support the typical operation of the processor. Such a support circuit 253 may include a cache, a power supply, a clock circuit, an input / output circuit, a subsystem, and the like.

In this embodiment, the controller 250 controls the driving of the exhaust pump 280 based on the information of the contamination detecting unit 270. At this time, a series of processes or the like in which the controller 250 controls the driving of the exhaust pump 280 based on the information of the contamination detecting unit 270 may be stored in the memory 252. [

Typically, software routines may be stored in memory 252. [ The software routines may also be stored or executed by other central processing units (not shown).

Although processes according to the present invention are described as being performed by software routines, it is also possible that at least some of the processes of the present invention may be performed by hardware.

As such, the processes of the present invention may be implemented in software executed on a computer system, or in hardware such as an integrated circuit, or in combination of software and hardware.

8 is a perspective view of a mobile local exhaust system according to a third embodiment of the present invention.

Referring to this drawing, the mobile local exhaust system 300 of the present embodiment differs from the first embodiment in the structure of the arm unit 340 described above.

That is, the arm unit 340 of the present embodiment includes the first through third joint members 151 through 153 and the first through fourth bellows pipes 161 through 164 described in the first embodiment, And a plurality of supporting bars 343 and 344 connected to the bracket members 341 and 342 to support selected ones of the first to fourth bellows pipes 161 to 164, .

If the bracket members 341 and 342 and the supporting bars 343 and 344 are further equipped as in the present embodiment, it is possible to provide a more advantageous effect for fixing the arm unit 340 in position.

Even if the structure of this embodiment is applied, it can be used not only in a semiconductor manufacturing facility but also in factories, homes, restaurants, etc. where many pollutants are generated, and can be widely used in other places requiring exhaust, Can be greatly improved.

Therefore, when a plurality of portable local exhaust systems 100 are used, they can be used independently at different positions to perform exhaust operation. In addition, since they can be concentrated in places where many pollutants are generated, .

Figs. 9 to 11 are modified examples of ducts for sucking pollutants, respectively.

In the case of the above-described embodiment, the pollutant intake duct 120 has a hemispherical shape. However, as shown in Figs. 9 to 11, the pollutant intake ducts 420 and 520 may have an elliptical funnel shape.

When the pollutant intake ducts 420 and 520 have an elliptical funnel shape as shown in FIGS. 9 to 11, it is possible to provide an advantageous effect for sucking in pollutants in a narrow area.

10 and 11, a vortex-blocking bar 530 may be further coupled to the inlet region of the pollutant intake duct 520 to block the vortex of the contaminants being sucked.

In this embodiment, the vortex prevention bar 530 can be arranged in a cross shape in the inlet area of the pollutant intake duct 520. By having this structure, the inlet area of the pollutant intake duct 520 can be arranged in a cross Divided into four regions.

Therefore, it is possible to prevent concentration of pollutants in one place, which can prevent the swirling phenomenon of inhaled pollutants.

In the case of this embodiment, the cross-sectional structure of the vortex-blocking bar 530 may have a triangular shape. In this case, the inclined surfaces 531 and 532 facing the vortex blocking bar 530 may be formed. Since the contaminants sucked through the inclined surfaces 531 and 532 can be guided, suction of the contaminants can be induced smoothly .

Even if the structure of this embodiment is applied, it can be used not only in a semiconductor manufacturing facility but also in factories, homes, restaurants, etc. where many pollutants are generated, and can be widely used in other places requiring exhaust, Can be greatly improved.

Therefore, when a plurality of portable local exhaust systems 100 are used, they can be used independently at different positions to perform exhaust operation. In addition, since they can be concentrated in places where many pollutants are generated, .

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

100: Portable local exhaust device 110: Device body
111: exhaust port 112: exhaust line
113: handle 114: moving wheel
120: Duct for suction of contaminants 130: Rotating neck
140: arm unit 151 to 153: joint member
161 to 164:

Claims (6)

An apparatus main body in which an exhaust port is formed at one side and an exhaust line communicating with the exhaust port is provided therein;
A duct disposed in a region where the pollutant is positioned and sucking the pollutant;
A rotating neck communicating with the exhaust line and provided on an upper surface of the apparatus main body;
An arm unit having one end connected to the rotating neck and the other end connected to the pollutant suction duct and having a plurality of corrugated tubes;
An exhaust pump for causing the exhaust action to proceed through the exhaust line;
A pollution sensing unit for sensing a degree of pollution of the pollutant; And
And a controller for controlling the driving of the exhaust pump based on the information of the contamination detecting unit,
Wherein the duct for sucking contaminants has a hemispherical or elliptic funnel shape and a vortex blocking bar is formed in the inlet area to prevent swirling of the contaminants that are sucked in.
The method according to claim 1,
The arm unit includes:
A first corrugated tube connected to the rotating neck;
A second bellows pipe connected to the first bellows pipe by a first joint member and movable relative to the first bellows pipe;
A third corrugated pipe connected to the second corrugated pipe by the second joint member, the third corrugated pipe being disposed in a direction different from the second corrugated pipe and relatively movable with respect to the second corrugated pipe; And
And a fourth corrugated pipe connected at one end to the third corrugated pipe by the third joint member and movable relative to the third corrugated pipe and the other end connected to the duct for suctioning the pollutant, Exhaust system.
3. The method of claim 2,
Wherein at least one of the first to fourth bellows tubes has a bellows-
An outer corrugated tube which forms an appearance;
An inner bellows pipe disposed in the outer bellows pipe; And
And an inner bell pipe support bar connected to the inner bellows pipe and supporting the inner bellows pipe.
delete 3. The method of claim 2,
The arm unit includes:
A bracket member coupled to at least one of the first to third joint members; And
Further comprising a plurality of supporting bars connected to the bracket member for supporting at least one of the first to fourth bellows pipes.
The method according to claim 1,
Wherein the vortex blocking bar is divided into four regions arranged in a cross shape in an inlet region of the pollutant intake duct,
Wherein the vortex blocking bar has a triangular cross-sectional structure so that the contaminant is guided through the inclined surface.

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