KR102120406B1 - Fix type local ventilator - Google Patents

Abstract

According to an exemplary embodiment of the present invention, a fixed type local exhaust device includes: a frame part fixing a floor and a ceiling; a discharge pipe positioned in the ceiling; a suction part positioned in a side surface of the frame part and sucking gas to move the same to the discharge pipe; and a coupling part having a connecting part positioned between the suction part and the discharge pipe and a rotating part in which a rotatable rotating member is connected into the connecting part. Therefore, the fixed type local exhaust device can prevent gas leakages.

Description

Fixed type local exhaust system {FIX TYPE LOCAL VENTILATOR}

The present invention relates to a fixed type local exhaust device.

Generally, an exhaust device for exhaust is installed in a manufacturing facility or the like that generates pollutants.

The local exhaust system is located near a source of contamination when a partial source of contamination occurs at a distance from the exhaust port, or when it is difficult to install the exhaust port near a source of pollution due to surrounding structures or installations, or when it is difficult to install an exhaust port due to the occurrence of an instantaneous source of contamination. By being installed, pollutants can be usefully discharged.

In addition, the local exhaust system contributes to improving the quality of products by removing contaminants generated in manufacturing facilities and the like. It also plays an important role in protecting workers from contaminants.

In the casting plant used in the foundry, the injection device of the casting liquid generates oxides, fumes, dust, etc., and a local exhaust device must be installed to collect these pollutants.

However, the connection between the pipe for receiving the pollutants and the pipe connected to the ceiling is not firmly fixed, and the local exhaust device has a problem of leaking contaminants into the foil.

It has been devised in accordance with the technical background. In the semiconductor manufacturing apparatus, chlorine-based gas or fluorine-based gas is used, and after using such gas, a fixed local area that prevents gas leakage when discharging polluted gas to the exhaust pipe attached to the ceiling. It is intended to provide an exhaust system.

The fixed type local exhaust device according to an embodiment of the present invention includes a frame portion for fixing the floor and a ceiling, a discharge pipe located at the ceiling, a suction portion for moving gas to the discharge pipe, and located on the side of the frame portion. It may include a coupling portion having a connecting portion located between the suction portion and the discharge pipe and a rotating member connected to a rotatable rotating member inside the connecting portion.

In addition, the rotating part may include a bushing inserted into the outer surface of the connecting part and a rotatable inserting into the bushing, and a fitting groove is formed at one end to engage a motor.

In addition, the rotating member may have a curved surface with an outer circumferential curved surface.

In addition, it may include a rubber packing fitted to the curved surface.

In addition, the connection portion may include a first connection portion connected to the discharge pipe and a second connection portion connected to a lower end of the connection portion and formed larger than a diameter of the first connection portion.

In addition, the shaft may be spaced apart from the center of the rotating member and connected to the lower surface of the rotating member.

The local exhaust system according to an embodiment of the present invention prevents contaminants from leaking out of the local exhaust system, so that workers are not exposed to pollutants and can safely work.

1 is a perspective view schematically showing a fixed type local exhaust device according to an embodiment of the present invention.
FIG. 2 is a perspective view showing a suction part of the fixed type local exhaust device shown in FIG. 1.
3 is an exploded perspective view of the coupling portion shown in FIG. 2.
4 is a view showing a cross-sectional view of the coupling portion shown in FIG. 2 taken along the cut line IV-IV.
FIG. 5 is a view showing a cross-section of the coupling portion shown in FIG. 2 taken along line V-V.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art to which the present invention pertains can easily practice. The present invention can be implemented in many different forms and is not limited to the embodiments described herein. In the drawings, parts not related to the description are omitted in order to clearly describe the present invention, and the same reference numerals are attached to the same or similar elements throughout the specification.

In this specification, terms such as “include” or “have” are intended to indicate that a feature, number, step, operation, component, part, or combination thereof described in the specification exists, and that one or more other features are present. It should be understood that the presence or addition possibilities of fields or numbers, steps, actions, components, parts or combinations thereof are not excluded in advance. In addition, when a part such as a layer, film, region, plate, etc. is said to be "above" another part, this includes not only the case "directly above" the other part but also another part in the middle. Conversely, when a portion of a layer, film, region, plate, or the like is said to be “under” another portion, this includes not only the case “underneath” another portion, but also another portion in the middle.

1 is a perspective view schematically showing a fixed type local exhaust device according to an embodiment of the present invention.

Referring to FIG. 1, the fixed type local exhaust device 1000 according to an embodiment of the present invention may include a frame part 100, a monitor part 200 and a gas cabinet 300 and a suction part 500. have.

The frame part 100 may include a bottom frame 110, a vertical frame 120, and a horizontal frame.

The floor frame 110 may be formed of a plurality of floors, and the vertical frame 120 and the horizontal frame 130 connected to the vertical frame 120 and the suction part 500 may be fixed.

In addition, the floor frame 110 is located on the outer surface of the gas cabinet 300 to connect the vertical frame 120 and the gas cabinet 300 to the floor.

The vertical frame 120 may be connected to one surface of the floor frame 110 and may be fixed to the ceiling and the floor. In addition, the vertical frame 120 may be a plurality, it is possible to improve the support capacity.

The horizontal frame 130 may be orthogonally connected to the vertical frame 120 between the plurality of vertical frames 120.

The horizontal frame 130 may be formed to extend in the direction of the suction unit 500 to be positioned in the front-rear direction of the suction unit 500, and the horizontal frame 130 connected between the horizontal frames 130 may be positioned. . Through this, the suction unit 500 and the gas cabinet 300 may not interfere with other peripheral devices.

In addition, the monitor unit 200 may be located at a portion where the vertical frame 120 and the horizontal frame 130 are connected to the upper side of the bottom frame 110. The monitor unit 200 may indicate a suction amount, a discharge amount, and a concentration of gas inhaled and discharged from the local exhaust device 1000.

The gas cabinet 300 may be installed to guide various types and large amounts of gas generated in the semiconductor manufacturing process to the process equipment. In a semiconductor manufacturing apparatus that performs a desired treatment on a workpiece such as a semiconductor wafer or LCD, a predetermined gas from a gas supply source is supplied into a processing chamber for processing the workpiece to perform film formation treatment or etching treatment. Can be.

Further, in the gas cabinet 300 used for a semiconductor manufacturing apparatus or the like, a plurality of gas control mechanisms for controlling gas supply may be located therein.

A gas flow control mechanism, a valve mechanism, a gas pressure control mechanism, and the like can be connected by a gas flow path portion forming a gas flow path while connecting these gas control mechanisms, and these gas control mechanism and gas flow path portions may be stainless steel.

In addition, a monitorable display capable of controlling the inside of the gas cabinet 300 may be installed on the outer surface of the gas cabinet 300 in a front diagonal structure to control and manage wind speed.

The suction part 500 is connected to the upper end of the gas cabinet 300 to discharge pollutant gas generated in the gas cabinet 300. At this time, the upper end of the suction unit 500 may be connected to an exhaust pipe that may be formed on the ceiling. That is, the polluted gas generated in the gas cabinet 300 is sucked through the suction unit 500 to induce the polluted gas to the exhaust pipe located on the ceiling.

FIG. 2 is a perspective view showing a suction part of the fixed type local exhaust device shown in FIG. 1.

Referring to FIG. 2, the suction part 500 may include a hood 510, a corrugated tube 520, a receiving tube 530, an electric part 550, a control box 560, and a coupling part 700. .

Through this, the gas generated in the gas cabinet 300 can be sucked and the polluted gas can be easily discharged to the exhaust pipe located on the ceiling.

The hood 510 may have a shape with a wide opening to inhale polluted gas, and may be formed wider from the upper end to the lower end. In addition, the hood 510 can be replaced by selecting a variety of forms, it can be easily replaced with a hood 510 having the same shape as the outlet through which the gas is discharged from the gas cabinet 300.

Corrugated pipe 520 may be connected to the upper end of the hood 510. The corrugated pipe 520 may be detachably installed at the upper end of the hood 510, and the length may be adjusted up and down.

The corrugated pipe 520 may be inserted into and connected to the inner side of the accommodating pipe 530, and the corrugated pipe 520 may be formed to be folded or unfolded on the outer surface thereof, and the fully raised corrugated pipe 520 may be inside the accommodating pipe 530 May be inserted into and not exposed to the outside

Due to this, the hood 510 and the corrugated pipe 520 connected to the corrugated pipe 520 may be vertically adjustable.

The receiving tube 530 may include a lower receiving tube 531 and an upper receiving tube 532.

When the contaminant gas inserted into the hood 510 is inserted into the accommodating pipe 530 through the corrugated pipe 520, the accommodation pipe 530 may transfer the contaminated gas to the upper end.

The lower receiving tube 531 and the upper receiving tube 532 may have a cylindrical shape, and a corrugated pipe 520 may be inserted into the lower receiving tube 531.

The upper portion of the lower receiving tube 531 may be connected to the electric unit 550, and the upper portion of the lower receiving tube 550 may be connected to the upper receiving pipe 532.

The transmission unit 550 may be formed to protrude to the outside of the receiving tube 530, and may protrude again perpendicular to the protruding portion. That is, it can be formed into a "a" shape

In addition, the transmission unit 550 can accelerate the air flow inside the receiving tube 530, and connected to the corrugated tube 520 and a wire to adjust the length of the corrugated tube 520 while loosening or winding the wire.

At this time, the lighting unit may be connected toward the lower end of one surface of the protruding portion of the transmission unit 550.

The lighting unit 540 may be formed of a plurality of light bulbs at the bottom of the electric unit 550, and the lighting unit 540 is turned on so that the airflow inside the electric unit 550 is accelerated and the operating state of the electric unit 550 Can be visually confirmed.

The upper receiving tube 532 may be connected to the upper side of the transmission unit 550, and located in a straight line with the lower receiving tube 531, to transfer the gas to the upper side.

At this time, a control box 560 may be installed on the outer surface of the upper receiving tube 532.

The control box 560 may control the length of the corrugated pipe 520 or the coupling portion 700 located above the upper receiving pipe 532.

The coupling portion 700 is connected to the upper receiving pipe 532 on the upper side of the upper receiving pipe 532 and the upper end of the coupling portion 700 may be connected to the discharge pipe 800 connected to the ceiling.

Through this, the contaminated gas inserted into the hood 510 can be discharged to the outside through the discharge pipe 800 connected to the top of the receiving pipe 530 passing through the receiving pipe 530.

FIG. 3 is an exploded perspective view of the coupling portion shown in FIG. 2 and FIG. 4 is a cross-sectional view taken along the cut line IV-IV of the coupling portion shown in FIG. 2, and FIG. 5 is V-V of the coupling portion shown in FIG. 2 It is a view showing the cross-section cut along the perforation line.

3 to 5, the coupling part 700 may include a connecting member 710, a connecting part 720 and a rotating part 730.

The connecting member 710 may include a first connecting member 711 and a second connecting member 712.

The first connecting member 711 is formed in a rectangular cross section, and may be coupled between the upper receiving tube 532 and the connecting portion 720.

The upper receiving tube 532 may be connected to the lower side of the first connecting member 711. At this time, the upper receiving tube 532 is formed with an upper receiving member 532b at the upper end.

At this time, the upper receiving member 532b has a rectangular cross section and may have the same shape as the first connecting member 711 connected to the upper end.

In addition, a lower receiving member 532a spaced apart at a predetermined interval may be formed under the upper end of the upper receiving tube 532.

The lower receiving member 532a is formed of a circle having a larger diameter than the upper receiving tube 532, so that the upper receiving tube 532 can be firmly supported by the lower pipe.

The first connecting member 711 may be formed with a hole in the shape of the upper receiving tube 532 in the center, and gas may be transferred, and a connecting portion 720 may be coupled to the top of the first connecting member 711. .

The second connecting member 712 is formed in a rectangular cross-section and is coupled between the discharge pipe 800 and the connection portion 720, so that the discharge pipe 800 and the connection portion 720 can be firmly fixed.

At this time, the upper end of the discharge pipe 800 is connected to the upper discharge member 802, which is larger in diameter than the discharge pipe 800, so that the connection between the upper end of the discharge pipe 800 and the ceiling can be firmly prevented from leaking contaminant gas. have.

In addition, the lower discharge member 801 may be formed at the lower end of the discharge pipe 800, and the lower discharge member 801 may have the same shape as the second connection member 712, so that the lower discharge member 801 and the 2 The connecting member 712 can be securely fixed.

That is, the second connecting member 712 can firmly fix the coupling between the discharge pipe 800 and the connecting portion 720.

The connecting portion 720 may have a rectangular cross section, a circular hole may be formed in the center, and the first connecting portion 723 and the second connecting portion 724 may be included.

In addition, the connection portion 720 may form a hole in the center by a method such as MCT processing. Due to this, holes can be formed close to the epicenter.

For example, the receiving pipe 530 and the discharge pipe 800 may be a cylindrical pipe, and the manufacture of such a pipe may be manufactured by an injection method, so that the circle may be finely crushed and formed to leak contaminant gas. Can be.

At this time, the connecting portion 720 may be made in a manner of drilling a hole in a square plate, and may have a more circular shape than the receiving pipe 530 and the discharge pipe 800, which may be pipes.

That is, the hole formed in the center of the connecting portion 720 may be formed closer to the shape of the circle than the receiving pipe 530 and the discharge pipe 800.

Through this, the receiving pipe 530 and the discharge pipe 800 can easily move the polluted gas through a circle close to the circle to the connection portion 730, and it is possible to prevent the polluted gas from leaking to the outside.

A first connection portion 723 may be formed under the connection portion 720. At this time, the lower end of the first connecting portion 723 is connected to the first connecting member 711 and the upper receiving tube 532 may be coupled to the lower portion of the first connecting member 711.

The first connection part 723 may have a rectangular cross section, and a circular hole may be formed therein. In addition, a second connection portion 724 having a smaller diameter than the first connection portion 723 may be formed on the first connection portion 723.

The second connection part 724 may be formed in a rectangular cross section and a circular hole may be formed in the center.

A second connecting member 712 may be coupled to the upper portion of the second connecting portion 724, and a lower discharge member 801 may be coupled to the upper end of the second connecting member 712.

Through this, the connection between the second connection portion 724 and the discharge pipe 800 can be solid, and it is possible to prevent the pollution gas from rising and leaking.

In addition, a bent portion 725 may be formed between the first connection portion 723 and the second connection portion 724 due to a difference in diameter between the first connection portion 723 and the second connection portion 724.

Due to this, when the polluted gas rises, it can be flexibly raised while passing through the bent portion 725, and a change in speed may occur, so that the gas can be easily increased.

In addition, a rotating portion 730 may be installed at an inner lower end portion of the second connection portion 724.

The rotating part 730 may include a shaft 731, a bushing 732, and a rotating member 733. The shaft 731 may have a cylindrical shape, and the shaft 731 may be located spaced apart from the center of the lower end of the rotating member 733 to the right, and spaced apart from the center of the shaft 731, and a screw hole 731b is formed. Can be.

Due to this, the rotating member 733 connected to the upper end of the shaft 731 may be easily adjusted due to eccentricity.

In addition, one end of the shaft 731 may be formed with a fitting groove (731a). At this time, a motor or the like is connected to the fitting groove 731a to control rotation of the shaft 731.

The shaft 731 may be inserted into the first hole 721 formed on the outer surface of the connecting portion 720, and the bushing 732 may be coupled to the outer surface of the shaft 731.

The bushing 732 may have a circular or square shape, and a hole may be formed in the center. The bushing 732 may be inserted into the first hole 721, and the shaft 731 may be inserted into the bushing 732.

Due to this, the shaft 731 and the connecting portion 720 may be firmly coupled, and the shaft 731 may be rotatable.

In addition, the upper and lower portions of the shaft 731 may be flat, and the side surfaces may be circular.

Due to this, the rotating member 733 is easily coupled to the upper portion of the shaft 731, and the shaft 731 may be smaller than the size of the hole formed in the bushing 732, so that the gap between the shaft 731 and the bushing 732 This is formed can be easy to rotate the shaft 731.

A shaft 731 is inserted therein, and a rotating member 733 may be coupled to an upper side of the shaft 731 penetrating the inside of the connecting portion 720.

The rotating member 733 may be a circular plate, and a coupling hole 733b spaced from the center may be formed. At this time, the coupling hole 733b may coincide with the screw hole 731b of the shaft 731 positioned below the rotating member 733.

Through this, a screw inserted into the coupling hole 733b may be inserted into the screw hole 731b to couple the shaft 731 and the rotating member 733.

The shaft 731 coupled with the rotating member 733 is rotated through control of a motor connected to a fitting groove 731a formed at one end, and when rotated, rotates the rotating member 733 to rotate the angle of the rotating member 733 The opening and closing of the gas can be controlled by adjusting.

In addition, a curved portion 733a may be formed to be curved inward on the outer surface of the rotating member 733. At this time, the rubber packing 734 may be inserted into the curved portion 733a to be combined.

That is, the rubber packing 734 may be inserted and coupled between the inner surface of the lower end of the first connecting portion 723 and the curved portion 733a. Through this, it is possible to prevent the contaminant gas from leaking out finely.

By connecting the receiving pipe 530 and the discharge pipe 800 due to the connecting portion 720, it is possible to control the opening and closing of the polluted gas, by passing through the connecting portion 720 having a hole formed as a source of a pipe that can be finely crushed , It is possible to prevent the pollution gas from leaking to the outside, and the degree of emission of the pollution gas can be controlled by controlling rotation through the rotating member 733.

In addition, the connection portion 720 may be easily detached between the receiving pipe 530 and the discharge pipe 800.

Although one embodiment of the present invention has been described above, the spirit of the present invention is not limited to the embodiments presented herein, and those skilled in the art to understand the spirit of the present invention can add elements within the scope of the same spirit. However, other embodiments may be easily proposed by changing, deleting, adding, or the like, but this will also be considered to be within the scope of the present invention.

1000: local exhaust system 100: frame portion
110: floor frame 120: vertical frame
130, 140: horizontal frame 200: monitor
300: gas cabinet
500: suction unit 510: hood
520: corrugated pipe 530: accommodation pipe
531: lower receiving tube 532: upper receiving tube
532a: lower receiving member 532b: upper receiving member
540: lighting unit 550: electric unit
560: control box 700: coupling
710: connecting member 711: first connecting member
712: second connecting member 720: connecting portion
721: Hall 1 722: Hall 2
723: first connection 724: second connection
725: bent portion 730: rotating portion
731: shaft 731a: fitting groove
731b: Screw hole 732: Bushing
733: rotating member 733a: curved portion
733b: Coupling hole
734: rubber packing 800: discharge pipe
801: lower discharge member 802: upper discharge member

Claims (6)

A frame part fixing the floor and the ceiling;
A discharge pipe located on the ceiling;
Located on the side of the frame portion, the suction portion for sucking the gas to move to the discharge pipe and
A coupling portion having a connecting portion positioned between the suction portion and the discharge pipe, and an eccentric rotation rotatable inside the connecting portion, a curved surface having an outer circumferential curved surface formed therein, and a rotating member having a rubber packing inserted in the curved surface connected thereto Including,
The connecting portion,
MCT is processed, the first connection portion connected to the suction portion and the first connection portion connected to the upper end, and includes a second connection portion formed smaller than the diameter of the first connection portion,
A fixed local exhaust device including a bent portion formed between the first connection portion and the second connection portion. According to claim 1,
The rotating part,
The bushing inserted in the outer surface of the connection part
A fixed local exhaust device including a shaft inserted into the bushing and rotatable, and a fitting groove is formed at one end to which a motor is coupled. delete delete delete According to claim 2,
The shaft,
A stationary local exhaust device spaced apart from the center of the rotating member so that the rotating member is eccentrically rotated and connected to a lower surface of the rotating member.

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