KR101661139B1

KR101661139B1 - Residual gas exhaust hood Device for chamber

Info

Publication number: KR101661139B1
Application number: KR1020150075744A
Authority: KR
Inventors: 원영식
Original assignee: 원영식
Priority date: 2015-05-29
Filing date: 2015-05-29
Publication date: 2016-09-29

Abstract

The present invention relates to a residual gas exhaust hood apparatus for a chamber for removing a toxic gas remaining in a process chamber for replacement of a product produced in the process chamber, A horizontal moving part provided on the upper part of the main body so as to be movable along one side and the other side along a horizontal guide part; A lifting unit provided in the horizontal moving unit and being lifted and lowered along the vertical guide unit by operation of the operation lifting unit; The process gas is introduced into the process chamber through the opening of at least one of the opening and closing portions, and the remaining toxic gas in the process chamber is exhausted to the exhaust pipe A chamber upper cover portion for evacuating the chamber; And an exhaust unit provided in the main body and connected to the exhaust pipe to forcibly suck the toxic gas.

Description

[0001] The present invention relates to a residual gas exhaust hood device for a chamber,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a residual gas exhaust hood apparatus for a chamber, and more particularly, to a residual gas exhaust hood apparatus for a chamber which removes toxic gas remaining in a process chamber for replacement of a product produced in the process chamber.

In general, to manufacture semiconductors and flat panel displays (FPDs), process chambers that are shielded from the outside are used. Various mixed gases (toxic, pyrophoric, flammable, and corrosive gas) are quantitatively introduced into the process chamber as reaction gas. In the present technology, only a part of the gases are used, and more than 50% .

Therefore, various kinds of toxic gases are generated in the reaction chamber of the reaction chamber or the unreacted reaction gas in the process chamber for producing semiconductors and FPD, And then discharged to the atmosphere through a purifying process. A toxic gas purifying apparatus including an exhaust duct is essentially installed on the production line.

Accordingly, a known toxic gas purification apparatus includes an exhaust hood detachably provided on an upper portion of a process chamber and including an exhaust pipe, and an exhaust pipe connected to the exhaust pipe for forcibly discharging a toxic gas in the process chamber to a toxic gas purifier The exhaust gas purifying apparatus is mainly composed of three components such as a vacuum pump, a dust collector, and a gas treating apparatus. The vacuum pump discharges the toxic gas from the process chamber to the dust collector and the gas treating apparatus. In the dust collector, the toxic gas moving along the exhaust duct through the vacuum pump acts to filter the powder generated due to the temperature change during movement. The gas processing apparatus is divided into a wet type and a dry type, And is selectively used according to the gas to purify the toxic gas in the gaseous state.

Therefore, conventionally, a reaction gas is injected into a process chamber to produce a product, and a reaction gas, that is, a toxic gas is exhausted while injecting a clean gas to exhaust the reaction gas remaining in the process chamber, It is purified and released into the atmosphere.

When replacing the product of the process chamber in the process of producing the product through the conventional process chamber, first, the supply of the reaction gas is stopped in the reaction gas supply pipe of the process chamber. Then, a clean gas (nitrogen gas) is injected through the reaction gas supply pipe, and the vacuum pump and the toxic gas purifier are operated to purify the toxic gas remaining in the process chamber. Then, we replace the products produced in the process chamber.

When the product produced in the process chamber is replaced as described above, the residual toxic gas in the process chamber is evacuated and purified through the operation of the vacuum pump and the toxic gas purifier. However, in the process of exhausting the residual toxic gas in the process chamber, the clean gas is injected into the process chamber to exhaust the reactive gas, but toxic gas as a reactive gas remains even if the exhaust gas is sufficiently exhausted .

Therefore, when the produced product of the process chamber is replaced as described above, the residual gas remains in the process chamber, so that the residual gas mixed with the reactive gas, which is different from the reactive gas introduced in the production of the new product, In addition, there is a serious problem of causing a safety accident including a fire due to a chemical reaction.

Particularly, when a toxic gas having a completely different reacting gas is input, the process chamber is finely imported and a reaction gas having a different property is introduced. At this time, in order to prevent the residual gas remaining in the process chamber, And the exhaust gas is exhausted through the exhaust hood. However, the conventional exhaust hood does not completely seal the upper part of the opened process chamber, so that the residual gas in the chamber is exhausted to the outside (the indoor space in which the production line is installed) So that many unspecified workers are exposed to the residual gas.

Korea Patent No. 0461601 "Exhaust system used in process chamber of semiconductor device process equipment" (2004.12.03.)

Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art,

It is an object of the present invention to provide a residual gas exhaust hood apparatus for a chamber which can exhaust residual toxic gas in a process chamber while introducing outside air into a process chamber before replacing a product in a process chamber.

It is a further object of the present invention to provide a method and a device for treating a toxic gas in a process chamber through exhaust, selectively opening and closing a hinged door provided around the suction box, So that the inner surface of the process chamber can be more cleanly cleaned by hand.

Another object of the present invention is to provide a residual gas exhaust hood for a chamber which can be attached to a closed other hinged door through a magnet in a state in which a hinged door provided around the suction box is opened to the inside, Device.

It is another object of the present invention to provide an air conditioner which is capable of sucking toxic gas even when the hinged door provided on the other side of the suction box is opened inward by providing a lower hinged door at a lower portion of the hinging door provided at the other side of the front of the suction box So that the residual gas can be discharged to the outside of the chamber.

Another object of the present invention is to provide a residual gas exhaust hood apparatus for a chamber, which further comprises a peripheral sealing packing around the lower portion of the chamber upper cover portion, thereby allowing the toxic gas to be sucked and removed more safely.

It is another object of the present invention to provide a residual gas exhaust hood apparatus for a chamber which allows a horizontal moving unit to be drawn out from a main body without deflection through a horizontal guide unit and vertically elevated and lowered by a vertical guide unit, .

It is a further object of the present invention to provide a process for producing a process for producing a residual gas exhaust gas for a chamber which can more stably support the lower portion of the chamber upper cover portion, Thereby providing a hood device.

Another object of the present invention is to provide a residual gas exhaust hood apparatus for a chamber, which allows the chamber upper cover to be drawn out to one side without being bent downward through the drawing means.

Another object of the present invention is to provide a residual gas exhaust hood apparatus for a chamber which allows a chamber upper cover portion to be placed on an upper portion of a process chamber by a simple operation of an operator.

It is another object of the present invention to provide a gas purifying apparatus capable of further enhancing the exhausting performance of toxic gases by forcibly sucking and discharging gas at an exhaust part provided inside the main body, So that the cleaning efficiency of the toxic gas can be further improved.

Another object of the present invention is to provide a chamber residual gas evacuation hood apparatus which can prevent the insertion of a castor into a hole of a perforated bottom plate constituting the floor of a clean room by constituting the castor with a ball caster.

In order to achieve the above object, a "residual gas exhaust hood apparatus for a chamber" according to the present invention comprises: a body having a plurality of castors at a lower portion thereof; A horizontal moving part provided on the upper part of the main body so as to be movable along one side and the other side along a horizontal guide part; A lifting unit provided in the horizontal moving unit and being lifted and lowered along the vertical guide unit by operation of the operation lifting unit; The process gas is introduced into the process chamber through the opening of at least one of the opening and closing portions, and the remaining toxic gas in the process chamber is exhausted to the exhaust pipe A chamber upper cover portion for evacuating the chamber; And an exhaust unit provided in the main body and connected to the exhaust pipe to forcibly suck the toxic gas.

The chamber upper cover portion of the "residual gas exhaust hood apparatus for a chamber" according to the present invention further includes a rectangular box-shaped suction box which is openable from the upper portion of the elevating portion to the left and right through the drawing means, An opening and closing part provided on the front, rear and one sides of the suction box; a left and right moving opening part provided on the other side of the suction box so as to be opened lower; and a hinged door provided on the left and right moving opening part. do.

Further, the opening / closing part of the "residual gas exhaust hood apparatus for a chamber" according to the present invention is characterized by comprising a pair of hinged doors.

Further, at least one magnet is further provided inside each of the hinged doors of the "residual gas exhaust hood apparatus for chamber" according to the present invention so that the hinged door can be attached to another closed door in a state in which the hinged door is opened to the inside And at least one iron piece to which the magnet is attached is further provided at an opening of the suction box on which the respective hinges are mounted.

Further, the exhaust pipe of the "residual gas exhaust hood apparatus for a chamber" according to the present invention is provided through connection of a connecting duct to the lower part of the other side of the suction box, A lower hinged door opened and closed by an upper hinge portion to open the connecting duct in a state that the door is open to the inside, and a lower door opening and closing door is provided on the lower door of the hinged door provided on the other side of the suction box, And a magnet attached to each other in a state where the magnet is in a state of being magnetized.

Further, the chamber upper cover portion of the "residual gas exhaust hood apparatus for a chamber" according to the present invention further includes a sealing packing provided around the lower portion and closely contacting the upper portion of the process chamber.

The horizontally moving part of the "residual gas exhaust hood device for a chamber" according to the present invention includes a horizontally moving part connected to the horizontal guide part of the upper part of the main body and moved horizontally, Wherein the elevating and lowering unit includes a platform that is connected to the inside of the horizontally moving unit and is vertically moved and provided with a horizontal bar on the front and rear of the upper part, And an X-shaped link type lifting jack for lifting and lowering the platform through rotation of a screw shaft connected to the handle.

Further, the horizontal moving table of the " residual gas exhaust hood apparatus for a chamber "according to the present invention further includes a support protrusion protruding from one side to the lower side and having a plurality of castors at the lower end thereof and closely contacting the foot plate of the process chamber .

The drawing means of the "residual gas exhaust hood apparatus for a chamber" according to the present invention is characterized in that the drawing means of the residual gas exhaust hood apparatus according to the present invention includes a horizontal guide base provided at the front and rear of the upper portion of the elevation portion, And two horizontal guide rails provided on the rear side of the horizontal guide rail so as to be moved laterally along the horizontal guide rails.

Further, the exhaust part 6 of the "residual gas exhaust hood apparatus for a chamber" according to the present invention includes a filter part provided inside the body so as to be connected to the exhaust pipe to filter and discharge the toxic gas, A gas exhaust pipe connected to a known gas purifying device and a gas exhaust pipe connected to the exhaust gas purifying device and an exhaust brick fan provided inside the body between the gas exhaust pipes for forcibly exhausting the toxic gas and having a filter net at the outside air inlet, .

Further, the above-mentioned "the residual gas exhaust hood apparatus for a chamber" according to the present invention is characterized in that it is constituted by a ball caster.

The present invention as described above has the effect of allowing the residual toxic gas in the process chamber to be exhausted more smoothly while introducing the outside air into the process chamber before replacing the product in the process chamber, The residual toxic gas is not scattered to the indoor space where the production line is installed, so that the indoor space is not contaminated. By discharging the residual toxic gas completely while discharging the outside air, it is possible to prevent the defective product caused by the mixture of the reaction gas and the residual gas, which are introduced in the production of the new product, in advance, It is also possible to prevent a fire caused by a chemical reaction between the reaction gas and the residual gas.

In addition, the present invention is a process chamber for treating a toxic gas in a process chamber through exhaust, selectively opening and closing a hinged door provided around the suction box, and injecting a part of the head and the upper body into the suction box, The inner surface of the process chamber can be more cleanly cleaned, thereby effectively removing residual toxic gas adhering to the inner surface of the process chamber, and preventing the organic volatile substances scattered in the gauze wiping the inner surface of the process chamber from being scattered to the outside There is also an effect.

In addition, the present invention enables a door to be attached through a magnet to another closed door, which is opened when the hinged door provided around the suction box is opened to the inside, It is possible to prevent the opening of the hinged door which is open when the door is cleaned.

Further, the present invention is characterized in that the lower door is further provided at the lower part of the hinged door provided on the other side of the suction box, so that even if the hinged door provided on the other side of the suction box is opened to the inside, .

The present invention also provides an exhaust hood apparatus with improved safety by further including a peripheral sealing packing around the lower portion of the chamber upper cover portion to more effectively absorb and remove toxic gas.

The present invention also provides an exhaust hood apparatus with improved safety by allowing the horizontal moving unit to be pulled out of the main body without deflection through the horizontal guide unit and allowing the platform to vertically move up and down through the vertical guide unit have.

In addition, the present invention further includes a support projection protruding from the bottom of one side of the horizontal moving table in close contact with the scaffold of the process chamber, so that the lower portion of the chamber upper cover can be more stably supported.

The present invention also provides an exhaust hood apparatus having improved safety by allowing the chamber upper cover portion to be drawn out to one side of the elevating portion without being bent downwardly through the drawing means.

The present invention also provides an advantage in that the chamber upper cover can be placed on the upper part of the process chamber by a simple operation of the operator, thereby providing convenience in use.

In addition, the present invention has an effect of further enhancing the exhaust performance of toxic gases by forcibly sucking and discharging the gas at the exhaust part provided inside the main body, and further, the toxic gas is firstly filtered inside the main body, The purification efficiency can be further improved.

It is another object of the present invention to provide an exhaust hood apparatus in which stability of a moving image is secured by preventing a castor from being inserted into a hole of a perforated bottom plate constituting a bottom of a clean room.

1 shows a residual gas exhaust hood apparatus for a chamber according to the present invention,
1A is a perspective view,
1B is a front view showing the main body.
FIG. 2 shows a state in which the upper chamber cover part of the present invention is drawn out,
2A shows a state in which a suction box and a lift portion are pulled together,
2B shows a state in which the suction box is further drawn out.
FIG. 3 shows a state in which the chamber upper cover constituting the present invention covers the upper part of the process chamber,
3A is a perspective view,
3B is a front view.
Fig. 4 shows a chamber upper cover part constituting the present invention,
4A is a front view,
4B is a sectional view taken along the line AA in Fig. 4A.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be understood, however, that the invention can be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

Fig. 1 shows a residual gas exhaust hood apparatus for a chamber according to the present invention. Fig. 1a is a perspective view, and Fig. 1b is a front view showing a main body. Fig. 2 shows a state in which the upper chamber cover part of the present invention is drawn. Fig. 2a shows a state in which a suction box and a lift part are pulled together, and Fig. 2b shows a state in which a suction box is further pulled out. FIG. 3 shows a state in which the chamber upper cover constituting the present invention covers the upper part of the process chamber. FIG. 3a is a perspective view and FIG. 3b is a front view. 4A and 4B show a chamber upper cover portion constituting the present invention. FIG. 4A is a front view, and FIG. 4B is a sectional view taken along the line A-A of FIG. 4A.

The residual gas exhaust hood apparatus according to the present invention is separately installed in the process chamber 10 for replacing a product product in the process chamber 10 and is capable of replacing the product in the process chamber 10 The toxic gas remaining in the process chamber 10 is exhausted to a gas purification unit (not shown) installed in the factory to remove residual toxic gas. That is, the residual toxic gas treatment apparatus according to the present invention is used for disassembling an exhaust hood (not shown) mounted on an upper part of a process chamber 10 and then connecting it to an upper part of the process chamber 10 A detailed description of the state of use will be given later.

Therefore, the residual gas exhaust hood apparatus according to the present invention comprises a main body 1 capable of moving, a horizontal moving unit 2 horizontally moved from the upper portion of the main body 1, And covers the upper portion of the process chamber 10 which is openable to one side in the elevation part 3 and opens the upper part of the elevation part 3. The residual toxic gas is sucked into the exhaust pipe T And an exhaust unit 6 provided inside the main body 1 and connected to the exhaust pipe T for forcibly sucking toxic gas.

The main body 1 has a plurality of frames connected to form a rectangular parallelepiped, and a plurality of casters C are provided at a lower portion of the main body 1 so as to move the main body 1 through the passage of a facility line. Most preferably, the castor C is formed of a ball caster so as to prevent the castor C from being inserted into the hole of the perforated bottom plate constituting the bottom of the clean room. It is most preferable that the interval between the casters C is different from the interval between the holes formed in the perforated bottom plate so as to further prevent the insertion of the caster C into the holes.

In the upper part of the main body 1, the horizontal moving part 2 can be moved to one side (hereinafter referred to as " one side " It is preferable that two horizontal guide portions 12 are provided in front and rear.

1 to 3, the horizontal moving unit 2 constituting the present invention moves along the horizontal guide unit 12 provided at the upper portion of the main body 1 to one side and the other side, So as to support the platform 31.

The horizontal moving unit 2 having the above-described function is horizontally connected to the horizontal guide unit 12, and vertical bars 211 are installed on the front and rear sides of the horizontal moving unit 2 so as to mount the platform 31 . It is preferable that an outgoing guide rail is provided on the front and rear of the horizontal moving part 2 so as to be moved along the horizontal guide part 12. The horizontal guide portion 12 and the guide rail are already known, and a detailed description thereof will be omitted.

A plurality of casters C are provided at one side of the horizontal movement table 21 to protrude downward so as to more stably support the lower part of the chamber upper cover part 5, It is preferable to further include a support projection 23 which is in close contact with the foot plate. Most preferably, the castor C is formed of a ball caster so as to prevent the castor C from being inserted into the hole of the perforated bottom plate constituting the bottom of the clean room. Further, it is most preferable that the spacing between the casters C is different from the interval between the holes formed in the perforated bottom plate so as to further prevent the insertion of the casters C into the holes.

Accordingly, the present invention further includes a support protrusion 23 that is in close contact with the foot plate of the process chamber 10 at one side of the horizontal movement table 21, thereby more stably supporting the lower portion of the chamber upper cover 5 And an exhaust hood device having improved durability.

1 to 3, the elevating part 3 constituting the present invention is provided inside the horizontal moving part 2 and is guided by the operation of the operation elevating means 4, And is supported by the upper chamber cover portion 5 by being lifted up and down along the upper chamber 32.

The lifting and lowering part 3 is connected to the horizontal moving part 2 by the operation lifting means 4 and is vertically moved. The chamber upper cover part 5 is provided at the front and rear of the upper part, A horizontal bar 311 is provided. The vertical guide part 32 includes a fixed rail provided on each vertical bar 211 of the horizontal moving part 2 so as to vertically raise and lower the elevating part 3, And most preferably comprises a draw-out rail provided at each corner and extended along the fixed rail. The vertical guide portion 32 constructed as described above is already known, and a detailed description thereof will be omitted.

The operation elevating means 4 is provided between the horizontal moving table 21 and the platform 31 so that the chamber upper cover portion 5 can be placed on the upper portion of the process chamber 10 by a simple operation of the operator. And an X-shaped link type lifting jack 41 for lifting and lowering the platform 31 through rotation of a screw shaft 412 connected to the handle 413.

Various types of the lifting jacks 41 are known, and in the accompanying drawings, the height is variable between the horizontal moving table 21 and the platform 31, and two pairs of front and rear pairs are formed. And a handle 413 horizontally provided between the two-layered X-shaped link 411 and changing the inclination of the two-dimensional X-shaped link 411 through rotation, And a screw shaft 412 having a screw shaft 412.

Therefore, when the handle 413 constituting the operation elevating means 4 is rotated in the normal direction or the reverse direction, the screw shaft 412 is rotated in the forward or reverse direction, so that the upper and lower heights of the X- So that the vertical position of the platform 31 and the chamber upper cover part 5 is changed.

1 to 4, the chamber upper cover part 5 constituting the present invention is provided so as to be capable of being pulled out to one side from the elevating part 3 through the drawing means 56, The residual toxic gas in the process chamber 10 is sucked into the process chamber 10 while the upper portion of the process chamber 10 is opened and the atmospheric gas is introduced into the process chamber 10 through the opening of the at least one opening / It plays a role of exhausting.

The chamber upper cover part 5 having such a role serves to cover the upper part of the process chamber 10 and can be moved laterally from the upper part of the elevating part 3 through the drawing means 56 An opening and closing part 52 provided at the front and rear and one side of the suction box 51 and an opening and closing part 52 provided at the other side of the suction box 51 And a hinged door (D) provided in the left and right movement openings (53). That is, when the residual toxic gas in the process chamber 10 is exhausted while the outside air is introduced into the process chamber 10, one of the hatches D is opened so that the outside air flows into the process chamber 10 So that it is injected into the inside.

The lifting unit 56 is provided with a horizontal guide 44 provided at the front and rear of the upper portion of the elevation unit 3 so that the chamber upper cover unit 5 can be drawn out to the one side of the elevation unit 3 without being bent downward. A pair of horizontal guide rail portions 562 provided to be pulled out to one side along the horizontal guide bracket 561 at the front and rear of the upper portion of the upper plate constituting the chamber upper cover portion 5, As shown in FIG.

It is preferable to further include a sealing packing 54 adhered to the upper portion of the process chamber 10 so that the toxic gas can be sucked and removed more safely around the lower periphery of the chamber upper cover portion 5. [

The opening / closing part 52 is preferably composed of a pair of hinged doors D so as to provide convenience of opening and closing. In the respective hinged doors D, the hinged door D is opened so that the hinged door D can be attached to the other hinged door D through the magnet M in a state in which the hinging door D is opened to the inside, , And at least one magnet M is further provided. In order to firmly maintain the closed state of the hinged door D at the opening of the suction box 51 on which the respective hinges D are mounted, (F) is further provided.

Meanwhile, the exhaust pipe (T) is provided at a lower portion of the other side of the suction box (51) through a connection duct. An opening and closing operation is performed through the upper hinge portion H to open the connecting duct in a state that the hinged door D is open at a lower portion of the hinged door D provided at the other side of the suction box 51, And a lower hinged door D1 is provided.

A lower portion of the hinged door D provided on the other side of the suction box 51 and a lower hinged door D1 are further provided with a magnet M attached to each other in a state in which the lower hinged door D1 is opened .

1 to 3, the exhaust unit 6 constituting the present invention sucks and filters the toxic gas in the main body 1 and discharges the exhausted gas.

In order to improve the exhaust performance of the toxic gas, the exhaust unit 6, which is provided in the main body 1, is connected to the exhaust pipe T to filter the toxic gas, A gas exhaust pipe 63 connected to a discharge side of the filter unit 62 and connected to a known gas purifying device through a gas discharge pipe; And an exhaust brick fan 64 for forcibly exhausting the toxic gas. The exhaust brick fan 64 is already known, and a detailed description thereof will be omitted. Further, a filter net may be further provided at the outside air inlet of the brass fan 64.

The filter unit 62 filters the toxic gas, and various kinds are known, and a detailed description thereof will be omitted.

Hereinafter, the operation of the residual gas exhaust hood apparatus according to the present invention will be described.

As shown in FIGS. 1 to 8, when treating residual toxic gas in the process chamber 10 through the residual gas exhaust hood apparatus according to the present invention, the residual gas is first mounted on the upper portion of the process chamber 10 (Not shown) from the process chamber 10.

Next, the main body 1 is moved in the passage of the equipment line to position the exhaust hood unit around the process chamber 10.

The worker pulls out the horizontal moving part 2 from the main body 1 to one side in a state where the main body 1 is positioned in the vicinity of the process chamber 10 as described above, The elevator portion 3 and the chamber upper cover portion 5 are raised by operating the handle 413 constituting the main body 4.

The upper chamber cover part 5 is positioned at the upper part of the process chamber 10 by the next operator holding the chamber upper cover part 5 and drawing the chamber upper cover part 5 to one side, The lower portion of the chamber upper cover portion 5 is tightly sealed around the upper portion of the process chamber 10 by operating the handle 413 constituting the chamber upper cover portion 5 to lower the chamber upper cover portion 5.

Next, the exhaust blower fan 64 of the exhaust unit 6 is operated, and at the same time, one of the door openings D provided in the chamber upper cover unit 5 is opened. The toxic gas in the process chamber 10 is passed through the exhaust pipe T, the filter unit 62, and the gas exhaust pipe 63 through the exhaust pipe T provided at the center of the chamber upper cover part 5 And exhausted to a gas purifying device (not shown) for processing. In the process of exhausting the toxic gas through the exhaust pipe T, the outside air is introduced into the process chamber 10 as a part of the opening of the hinged door D and is uniformly diffused.

Accordingly, the present invention can prevent the toxic gas remaining inside the process chamber 10 from being mixed with the inside of the process chamber 10 as the outside air introduced into the process chamber 10 is uniformly diffused inside the process chamber 10. So that almost all of the toxic gas can be exhausted to the gas purifier through the gas exhaust pipe 63 and purified. Therefore, the present invention is not limited to the process chamber 10, as it evacuates toxic gas inside the process chamber 10 while introducing outside air into the process chamber 10 before replacing the product in the process chamber 10. It is possible to prevent the toxic gas from remaining in the exhaust gas.

A part of the head and the upper body is connected to the suction box 51 while selectively opening and closing the hinged door D provided around the suction box 51 after the toxic gas in the process chamber 10 is treated through the exhaust, So that the inner surface of the process chamber can be more cleanly cleaned by hand. Therefore, the present invention is advantageous in that the toxic gas remaining on the inner surface of the process chamber is removed.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It is clear that the present invention can be suitably modified and applied in the same manner. Therefore, the above description does not limit the scope of the invention defined by the limitations of the following claims.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the scope of the present invention.

1: Body
12: Horizontal guide portion
2: Horizontal moving part
21: Horizontal moving table
211: Vertical stand
23: support protrusion
3:
31: platform
311: Horizontal band
32: vertical guide portion
4: Operation elevating means
41: lifting jack
411: X-shaped link, 412: Screw shaft, 413: Handle
5: chamber upper cover part
51: suction box
52:
53: left and right moving opening
54: Sealing packing
56:
561: horizontal guide stand, 562: horizontal guide rail part
6:
62:
63: gas exhaust pipe
64: Exhaust Brush Fan
10: Process chamber
C: Caster
T: Exhaust pipe
D: Hinged door
D1: Lower door
H: Hinge section
M: Magnet
F: Iron piece

Claims

A main body 1 having a plurality of casters C at its lower portion;
A horizontal moving part 2 provided on the upper part of the main body 1 so as to be movable along one side and the other side along the horizontal guide part 12;
A lifting unit 3 provided in the horizontal moving unit 2 and being lifted and lowered along the vertical guide unit 32 through the operation of the operation lifting unit 4;
The process chamber 10 is provided to be capable of being pulled out from the lifting unit 3 through the drawing means 56 and covers the upper portion of the process chamber 10, A chamber upper cover portion 5 for introducing outside air into the process chamber 10 and exhausting residual toxic gas in the process chamber 10 to the exhaust pipe T;
An exhaust unit 6 provided inside the main body 1 and connected to the exhaust pipe T for forcibly sucking a toxic gas;
And an exhaust gas recirculation valve for exhausting the remaining gas.

The method according to claim 1,
The chamber upper cover part (5)
A suction box 51 in the form of a rectangular parallelepiped having a bottom opened so as to be movable laterally through the drawing means 56 from the upper portion of the elevating portion 3,

Closing portions 52 provided at the front, rear, and one sides of the suction box 51,
A left and right movement opening portion 53 provided on the other side of the suction box 51 so as to be opened at a lower portion thereof,
A door (D) provided on the left and right movement openings (53)
And an exhaust gas recirculation valve for exhausting the residual gas.

3. The method of claim 2,
The opening / closing part (52)
And a pair of hinged doors (D).

The method of claim 3,
And at least one magnet M is further provided inside each of the hinges D so as to be attached to the other hinged door D which is closed when the hinging door D is open to the inside,
Characterized in that at least one iron piece (F) to which the magnet (M) is attached is further provided at an opening of a suction box (51) to which each of the hinges (D) .

5. The method of claim 4,
The exhaust pipe T is provided through a connection of a connecting duct to a lower portion of the other side of the suction box 51,
The lower portion of the hinged door D provided on the other side of the suction box 51 is opened and closed through the upper hinge portion H so as to open the connecting duct in a state in which the hinged door D is opened inside A lower hinged door D1 is provided,
A magnet M attached to the lower portion of the hinged door D and the lower hinged door D1 provided on the other side of the suction box 51 in a state in which the lower hinged door D1 is opened And the remaining gas exhaust hood device for the chamber.

3. The method of claim 2,
The chamber upper cover part (5)
Further comprising a sealing packing (54) provided on the lower periphery and closely contacting the upper portion of the process chamber.

3. The method of claim 2,
The horizontal moving unit 2 includes a horizontal moving table 21 connected to the horizontal guide unit 12 on the upper side of the main body 1 and moved horizontally and having a vertical table 211 on the front and rear sides of both sides thereof ,
The elevating part 3 includes a platform 31 connected to the horizontal moving part 2 by the operation elevating device 4 and vertically moved and having a horizontal bar 311 at the front and rear of the upper part thereof and,
The operation elevating means 4 is provided between the horizontal moving table 21 and the platform 31 and moves the elevating table 31 up and down through rotation of the screw shaft 412 connected to the handle 413 Type link lifting jack (41). &Lt; RTI ID = 0.0 > 41. < / RTI >

8. The method of claim 7,
The horizontal moving table (21)
A support protrusion 23 protruding downward from one side and equipped with a plurality of casters C at the lower end and closely contacting the foot plate of the process chamber 10,
Further comprising: an exhaust gas recirculation device for exhausting residual gas from the exhaust gas recirculation device.

8. The method of claim 7,
The drawing means (56)
A horizontal guide base 561 provided at the front and rear of the upper portion of the elevating unit 3,
Two horizontal guide rail portions 562 provided to be moved laterally along the horizontal guide base 561 at the front and rear of the upper portion of the upper plate constituting the chamber upper cover portion 5,
And an exhaust gas recirculation valve for exhausting the remaining gas.

3. The method of claim 2,
The exhaust part (6)
A filter unit 62 connected to the exhaust pipe T to filter the toxic gas and discharge the toxic gas,
A gas exhaust pipe 63 connected to a discharge side of the filter unit 62 and connected to a known gas purifier through a gas discharge pipe,
An exhaust brass fan 64 provided inside the main body 1 between the gas exhaust pipes 63 for forcibly exhausting the toxic gas and equipped with a filter net at the outside air inlet,
And an exhaust gas recirculation valve for exhausting the residual gas.

The method according to claim 1 or 8,
Wherein the caster (C) is constituted by a ball caster.