KR101787463B1 - Fixed type Local Ventilator - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an exhaust apparatus for sucking a polluted gas generated in a semiconductor manufacturing process and exhausting the polluted gas through a duct, and more particularly to an exhaust apparatus for sucking a pollutant gas A hood in which an inlet is widely opened to suck the polluted gas; A folding tube which is installed to be detached from the upper end of the hood and whose upper and lower lengths are adjusted; A receiving tube which covers the bellows tube and accommodates the bell tube therein and allows the bell tube to enter and exit the lower part of the bell tube according to the vertical length adjustment; A driving unit coupled to an upper end of the receiving tube to allow the contaminant gas to flow in a vertical direction and to adjust the length of the wire while unwinding or winding the wire coupled with the corrugated tube through one side; An air flow accelerating unit installed at an upper end of the driving unit to accelerate the flow of polluting gas rising using compressed air introduced from the outside; An opening and closing unit for opening and closing the flow of the air currents installed on the upper end of the airflow accelerating unit; And a coupling pipe installed at an upper end of the opening and closing part and connected to the duct, wherein the coupling means for detachably attaching the hood and the corrugated pipe includes a coupling hole formed at an upper end of the hood and having an engagement groove formed on an outer surface thereof. An insertion hole formed at the lower end of the bellows pipe to fit the coupling hole; And a locking member which penetrates through the insertion port and rotates a pin provided at the center so that an end of the pin can be inserted into and withdrawn from the locking groove. The locking member is installed at one side of the opening and closing part, And a control box for controlling the operation of the opening and closing part. Accordingly, it is possible to provide a fixed type local exhaust ventilation system in which the function and the convenience are further improved by smoothly sucking and exhausting the polluted gas.

Description

[0002] Fixed type local ventilator [0003]

The present invention relates to a fixed-type local exhaust system for sucking and discharging polluted gas generated in a semiconductor manufacturing process.

Generally, various toxic gases are generated in the semiconductor manufacturing process, and such toxic gas causes serious problems such as deposition on the surface of various equipment in the vicinity or penetration into the human body.

As a means for solving such a problem, Korea Patent No. 0582235 (published on Mar. 23, 2006) discloses a hood for vacuum suction of polluted gas; A folding tube which is mounted on the upper side of the hood at one-touch and adjusts the height; A motor installed at an upper end of the corrugated pipe to adjust a length of the corrugated pipe; A suction pipe installed in the bell pipe and discharging the polluted gas introduced through the hood to a predetermined exhaust duct; A damper for opening / closing the inside of the suction pipe; Rotating means installed on one side of the suction pipe to adjust the direction of the hood while rotating the suction pipe; A vacuum ejector installed in the suction pipe to make the hood and the suction pipe into a vacuum state by using compressed air introduced through the microtubes; A pressure regulator for regulating the pressure of the compressed air supplied to the vacuum ejector; And an automatic valve for opening and closing the compressed air supplied from the pressure regulator to the vacuum ejector.

In this case, the above-mentioned prior art aims to rotate the suction pipe and adjust the direction of the hood for the purpose of the present invention, and it is appropriate that the suction pipe is provided in a bent form as shown in the figure. In order to take a form in which the suction pipe is bent A motor for adjusting the height of the corrugated pipe should be installed on the bent lower portion, and rotary means and a vacuum discharger should be installed on the bent upper portion.

However, such conventional techniques have the following problems.

First, in the related art, the flow of the polluted gas sucked while the suction pipe is bent is not smooth and the path becomes longer, so that the suction force using the vacuum ejector is rapidly deteriorated. In order to compensate for this, it is necessary to increase the pressure of the compressed air supplied to the vacuum ejector, so that a lot of costs are incurred in operating and operating various facilities.

Secondly, in the prior art, it is necessary to install the rotating means, the vacuum ejector, the pressure regulator, and the like. When such a structure is exposed to the outside, it is difficult to view and dangerous. Therefore, it is difficult to install the rotating means, the vacuum discharger, the pressure regulator, and the like, and the maintenance or replacement thereof is very inconvenient.

Korean Registered Patent No. 0582235 (Announced on May 23, 2006)

An object of the present invention is to provide a stationary type local exhaust system in which the suction and discharge of the pollutant gas can be performed more smoothly.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a stationary type local exhaust apparatus in which detachment of the hood is made easy.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a stationary type local exhaust system which is simple to install and easy to maintain or repair.

The present invention relates to an exhaust device for sucking a polluted gas generated in a semiconductor manufacturing process and exhausting the polluted gas through a duct, the exhaust device comprising: a hood having an inlet wide opened to suck the polluted gas; A folding tube which is installed to be detached from the upper end of the hood and whose upper and lower lengths are adjusted; A receiving tube which covers the bellows tube and accommodates the bell tube therein and allows the bell tube to enter and exit the lower part of the bell tube according to the vertical length adjustment; A driving unit coupled to an upper end of the receiving tube to allow the contaminant gas to flow in a vertical direction and to adjust the length of the wire while unwinding or winding the wire coupled with the corrugated tube through one side; An airflow accelerating unit installed at an upper end of the driving unit to accelerate the flow of the polluting gas rising using compressed air introduced from the outside; An opening and closing unit for opening and closing the flow of the air currents installed on the upper end of the airflow accelerating unit; And a coupling pipe installed at an upper end of the opening and closing part and connected to the duct, wherein the coupling means for detachably attaching the hood and the bellows pipe comprises: a coupling part provided at an upper end of the hood and having an engagement groove formed on an outer surface thereof; An insertion hole formed at the lower end of the bellows pipe to fit the coupling hole; And a locking member which penetrates through the insertion port and rotates a pin provided at the center so that an end of the pin can be inserted into and withdrawn from the locking groove. The locking member is installed at one side of the opening and closing part, And a control box for controlling the operation of the opening and closing part.

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An auxiliary bellows for freely moving the hood while detaching and connecting the hood and the bellows; And an air pump connected to one side of the auxiliary bellows pipe for sucking the polluted gas through the hood and feeding the bellows to the bellows pipe.

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And a lamp for displaying the operation of the driving unit, the airflow accelerating unit or the opening / closing unit while being controlled by the control box.

According to the fixed local exhaust apparatus of the present invention, the suction and discharge of the pollutant gas can be performed more smoothly with the vertically fixed type, thereby further improving the functionality and convenience of the pollutant gas treatment.

According to the fixed local exhaust apparatus of the present invention, the hood can be easily replaced so that the convenience and easiness of use can be further improved.

According to the fixed type local exhaust apparatus of the present invention, the installation is simple and maintenance or repair is easy, and the usability is further improved.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the appearance of a stationary type local exhaust apparatus to which the present invention is applied; Fig.
2 is a front view showing an installation state of a stationary type local exhaust apparatus to which the present invention is applied;
FIGS. 3 to 5 are explanatory views showing a main part of a stationary type local exhaust device to which the present invention is applied. FIG.
6 is an exemplary view showing a hood of a stationary type local exhaust apparatus to which the present invention is applied;
FIG. 7 is an exemplary view showing an embodiment of a fixed type local exhaust apparatus to which the present invention is applied; FIG.
8 is an illustration showing a receiving tube of a stationary type local exhaust apparatus to which the present invention is applied;
Fig. 9 is an illustration showing an air flow amplifier of a stationary type local exhaust apparatus to which the present invention is applied; Fig.

Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

1 to 9, the fixed type local exhaust system of the present invention includes a hood 100 having a wide inlet opening for sucking the polluted gas, a corrugated pipe (not shown) installed to be detachable from the upper end of the hood, 200, a receiving pipe 300 for covering the bellows pipe and allowing the bell pipe to enter and exit the bell pipe, a driving unit 400 for controlling the length of the bellows pipe coupled to the upper end of the receiving pipe, An air flow accelerator 500 for accelerating the flow of the polluted gas, an opening and closing part 600 for opening and closing the flow of the air stream installed at the upper end of the air stream accelerating part and a connection And a pipe (700).

That is, according to the present invention, the entire construction is vertically fixed, eliminating the bending section while reducing the suction path of the polluted gas, so that the suction and discharge of the polluted gas can be performed more smoothly.

The hood 100 is provided in the form of a cone or square box as shown in FIG. 6 in the form of a wide opening of the inlet for sucking the polluted gas. Therefore, the hood 100 can be selected and used in various forms depending on the application.

1 and 2 and 8, the bellows pipe 200 is installed to be detachable from the upper end of the hood, and is adjusted to have a vertical length. Means for attaching and detaching the hood 100 from the bellows tube 200 and means for adjusting the vertical length of the bellows tube 200 will be described in detail with the following constitution.

As shown in FIG. 8, the receiving tube 300 covers the bellows tube 200 and accommodates the bell tube 200 therein. That is, the receiving tube 300 is not exposed to the outside in a state where the bellows tube 200 is completely raised, and is exposed downward when the bellows tube 200 descends. For example, when the corrugated pipe 200 is fully lifted and used or stored in a state of being accommodated in the accommodation pipe 300, there is no movement of the hood 100, so that it can be used and stored stably. It can be used by descending a certain length.

1, 2, and 8, the driving unit 400 is coupled to the upper end of the receiving tube 300 to allow the contaminant gas to flow in the vertical direction, And the length of the wire is adjusted while unwinding or winding the wire.

As shown in FIGS. 1 and 2 and 9, the airflow accelerating unit 500 is installed at the upper end of the power transmitting unit 400, and accelerates the flow of the polluting gas rising using compressed air introduced from outside. 9, the airflow accelerating unit 500 is coupled to the upper end of the driving unit 400 and is coupled to the lower tubular body and the lower tubular body such that the inner diameter of the upper portion is narrowed, An annular pneumatic chamber is formed in the upper portion of the lower tubular body so as to allow the compressed air flowing through the inlet port to stay therein. A partition wall is provided between the upper ends of the lower tubes for separating the inner space from the lower space and providing a gap so that the compressed air in the pneumatic compartment can escape, And an upper tube body extending upward from the lower tube body and having an inner diameter connected to the opening and closing part so as to be widened in the inner diameter of the upper tube body so that the compressed air flowing into the gap between the upper end of the lower tube body and the separation wall flows So that it can be discharged more quickly.

As shown in FIGS. 1 and 2, the opening / closing part 600 is provided at an upper end of the airflow accelerator 500 to open / close a flow of a rising airflow, and a damper or a valve is installed therein.

1 and 2, the connection pipe 700 is installed at an upper end of the opening / closing part 600 and is connected to the duct. That is, the connecting pipe 700 is for connecting the opening / closing part 600 at the lower part of the ceiling with the duct installed at the upper part of the ceiling.

3 to 5, the hood 100 is installed on the upper surface of the hood 100, and the hood 100 is attached to the outer surface of the hood 100 An insertion port 210 formed at the lower end of the bellows pipe 200 and adapted to receive the coupling hole and a pin 221 inserted through the insertion hole, And a locking member 220 formed to rotate the pin so that the end of the pin can be inserted into and out of the locking groove. 4 and 5, the lock member 220 is formed with one (1) -shaped groove at its outer end, and the pin 221 is inserted into the groove or engaged with the outer end of the pin 221 And a spring (not shown) is installed in the lock member 220 to elastically force the pin 221 into the insertion hole 210. The pin 221 The inner end of the pin 221 is inserted into the engaging groove 111 so that the hood 100 is caught by the lower end of the corrugated pipe 200. When the pin 221 is rotated, The hood 100 can be detached from the corrugated pipe 200 when the inner end of the pin 221 is pulled out of the engaging groove 111. As a result,

The auxiliary pouring tube 230 for moving the hood freely while detachably connecting the hood 100 and the pouring tube 200 as shown in FIG. 7 as means for moving the position of the hood, if necessary, And an air pump 240 connected to one end of the auxiliary bell pipe 230 for sucking the polluted gas through the hood 100 and feeding the polluted gas to the bell pipe 200. At this time, the attachment / detachment between the hood 100 and the auxiliary bellows pipe 230 and the attachment / detachment between the bell pipe 200 and the auxiliary bellows pipe 230 can be easily performed by using the coupling means described above.

1 and 2, a control box (not shown) for controlling the operation of the electromotive unit 400, the airflow acceleration unit 500, and the opening and closing unit 600 is installed at one side of the opening / closing unit 600 800). The control box 800 is installed on one side of the opening and closing part 600 so that the control of the driving part 400, the airflow accelerating part 500 and the opening and closing part 600 is simplified, Can be conveniently performed.

1 and 2, the present invention includes a lamp 900 for indicating the operation of the driving unit, the airflow accelerating unit or the opening and closing unit while being controlled by the control box 800. [ Since the operation state of the electric current driving unit 400, the airflow accelerating unit 500 and the opening and closing unit 600 can be checked through the lamp 900 as described above, it is possible to promptly cope with a malfunction.

According to the structure of the present invention, the suction and discharge of the pollutant gas can be performed more smoothly, so that the functionality and convenience of the pollutant gas treatment can be further improved, and the hood can be easily replaced. It is further improved, the installation is simple, and maintenance or repair is convenient, so that usability can be further improved.

100: hood 110:
111:
200: corrugated pipe 210:
220: Locking member 221: Pin
230: auxiliary bellows 240: air pump
300: storage tube
400:
500: airflow accelerator
600:
700: Connector
800: Control box
900: Lamp

Claims (5)

An exhaust device for sucking a polluted gas generated in a semiconductor manufacturing process and discharging the polluted gas through a duct,
A hood in which an inlet is widely opened to suck the polluted gas; A folding tube which is installed to be detached from the upper end of the hood and whose upper and lower lengths are adjusted; A receiving tube which covers the bellows tube and accommodates the bell tube therein and allows the bell tube to enter and exit the lower part of the bell tube according to the vertical length adjustment; A driving unit coupled to an upper end of the receiving tube to allow the contaminant gas to flow in a vertical direction, and to adjust the length of the wire while unwinding or winding the wire coupled with the corrugated tube through one side; An air flow accelerating unit installed at an upper end of the driving unit to accelerate the flow of polluting gas rising using compressed air introduced from the outside; An opening and closing unit for opening and closing the flow of the air currents installed on the upper end of the airflow accelerating unit; And a connection pipe installed at an upper end of the opening and closing part and connected to the duct,
The coupling means for detachably attaching the hood and the corrugated tube may include a coupling means provided at an upper end of the hood and having a locking groove formed on the outer surface thereof; An insertion hole formed at the lower end of the bellows pipe to fit the coupling hole; And a lock member coupled through the insertion port to rotate the pin provided at the center so that an end of the pin enters and exits the latching groove,
And a control box installed at one side of the opening and closing part to control operations of the driving unit, the airflow accelerating unit, and the opening and closing unit.
delete [2] The hood according to claim 1, further comprising: an auxiliary bellows for freely moving the hood while detaching and connecting the hood and the bellows; And
And an air pump connected to one side of the auxiliary bellows pipe for sucking the polluted gas through the hood and feeding the polluted gas to the bellows pipe.
delete The stationary type local exhaust ventilator according to claim 1, further comprising a lamp for indicating operation of the driving unit, the airflow accelerating unit, or the opening / closing unit while being controlled by the control box.

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