KR101435875B1 - 폴리실리콘 제조용 흑연척 재활용 방법 - Google Patents

폴리실리콘 제조용 흑연척 재활용 방법 Download PDF

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Publication number
KR101435875B1
KR101435875B1 KR1020120024780A KR20120024780A KR101435875B1 KR 101435875 B1 KR101435875 B1 KR 101435875B1 KR 1020120024780 A KR1020120024780 A KR 1020120024780A KR 20120024780 A KR20120024780 A KR 20120024780A KR 101435875 B1 KR101435875 B1 KR 101435875B1
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KR
South Korea
Prior art keywords
polysilicon
chuck
graphite chuck
graphite
separating
Prior art date
Application number
KR1020120024780A
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English (en)
Korean (ko)
Other versions
KR20130103841A (ko
Inventor
김종제
Original Assignee
(주)아폴로테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=49129693&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR101435875(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by (주)아폴로테크 filed Critical (주)아폴로테크
Priority to KR1020120024780A priority Critical patent/KR101435875B1/ko
Priority to TW101109884A priority patent/TW201337026A/zh
Priority to CN2012100888042A priority patent/CN103303925A/zh
Publication of KR20130103841A publication Critical patent/KR20130103841A/ko
Application granted granted Critical
Publication of KR101435875B1 publication Critical patent/KR101435875B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
    • B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
    • B09B3/00—Destroying solid waste or transforming solid waste into something useful or harmless
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/20—Graphite
    • C01B32/21—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00—Technologies for solid waste management
    • Y02W30/50—Reuse, recycling or recovery technologies

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Silicon Compounds (AREA)
KR1020120024780A 2012-03-12 2012-03-12 폴리실리콘 제조용 흑연척 재활용 방법 KR101435875B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020120024780A KR101435875B1 (ko) 2012-03-12 2012-03-12 폴리실리콘 제조용 흑연척 재활용 방법
TW101109884A TW201337026A (zh) 2012-03-12 2012-03-22 多晶矽製造用石墨夾頭再利用方法
CN2012100888042A CN103303925A (zh) 2012-03-12 2012-03-29 多晶硅制造用石墨夹头再利用方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120024780A KR101435875B1 (ko) 2012-03-12 2012-03-12 폴리실리콘 제조용 흑연척 재활용 방법

Publications (2)

Publication Number Publication Date
KR20130103841A KR20130103841A (ko) 2013-09-25
KR101435875B1 true KR101435875B1 (ko) 2014-09-01

Family

ID=49129693

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120024780A KR101435875B1 (ko) 2012-03-12 2012-03-12 폴리실리콘 제조용 흑연척 재활용 방법

Country Status (3)

Country Link
KR (1) KR101435875B1 (zh)
CN (1) CN103303925A (zh)
TW (1) TW201337026A (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101590607B1 (ko) * 2013-11-20 2016-02-01 한화케미칼 주식회사 폴리실리콘 제조 장치
KR101487651B1 (ko) * 2014-07-08 2015-02-02 주효돈 흑연척-폴리실리콘 말단의 폴리실리콘 회수방법
US20180086044A1 (en) * 2016-09-23 2018-03-29 Oci Company Ltd. Apparatus and method for separating polysilicon-carbon chuck

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR950013069B1 (ko) * 1989-12-26 1995-10-24 어드밴스드 실리콘 머티어리얼즈 인코포레이티드 수소 침투 방지용 외부 코팅층을 갖는 흑연 척 및 탄소가 거의 없는 다결정 실리콘 제조 방법
KR960003734B1 (ko) * 1990-06-27 1996-03-21 유니온 카바이드 코팅즈 서비스 테크놀러지 코포레이션 다결정 실리콘 제조에서의 스타터 필라멘트용 흑연 척 및 그 보호 방법
KR20070019067A (ko) * 2005-08-11 2007-02-15 삼성전자주식회사 폴리실리콘 제거용 조성물, 이를 이용한 폴리실리콘 제거방법 및 반도체 장치의 제조 방법
WO2011027803A1 (ja) 2009-09-02 2011-03-10 東洋炭素株式会社 シード保持部材及びそのシード保持部材を用いた多結晶シリコン製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006240934A (ja) * 2005-03-04 2006-09-14 Tokuyama Corp 多結晶シリコンの製造装置
CN101935040A (zh) * 2009-06-29 2011-01-05 上海奇谋能源技术开发有限公司 一种利用真空电弧熔炼法除去硅中低温杂质的方法
CN102336407A (zh) * 2011-09-26 2012-02-01 江西赛维Ldk光伏硅科技有限公司 一种可重复利用石墨夹头

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR950013069B1 (ko) * 1989-12-26 1995-10-24 어드밴스드 실리콘 머티어리얼즈 인코포레이티드 수소 침투 방지용 외부 코팅층을 갖는 흑연 척 및 탄소가 거의 없는 다결정 실리콘 제조 방법
KR960003734B1 (ko) * 1990-06-27 1996-03-21 유니온 카바이드 코팅즈 서비스 테크놀러지 코포레이션 다결정 실리콘 제조에서의 스타터 필라멘트용 흑연 척 및 그 보호 방법
KR20070019067A (ko) * 2005-08-11 2007-02-15 삼성전자주식회사 폴리실리콘 제거용 조성물, 이를 이용한 폴리실리콘 제거방법 및 반도체 장치의 제조 방법
WO2011027803A1 (ja) 2009-09-02 2011-03-10 東洋炭素株式会社 シード保持部材及びそのシード保持部材を用いた多結晶シリコン製造方法

Also Published As

Publication number Publication date
CN103303925A (zh) 2013-09-18
TW201337026A (zh) 2013-09-16
KR20130103841A (ko) 2013-09-25

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