KR101428864B1 - 초점 위치 변경 장치 및 이를 이용한 공초점 광학 장치 - Google Patents

초점 위치 변경 장치 및 이를 이용한 공초점 광학 장치 Download PDF

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KR101428864B1
KR101428864B1 KR1020120118659A KR20120118659A KR101428864B1 KR 101428864 B1 KR101428864 B1 KR 101428864B1 KR 1020120118659 A KR1020120118659 A KR 1020120118659A KR 20120118659 A KR20120118659 A KR 20120118659A KR 101428864 B1 KR101428864 B1 KR 101428864B1
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South Korea
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light
plate
objective lens
light source
path changing
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Korean (ko)
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KR20130105267A (ko
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미쯔히로 이시하라
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가부시키가이샤 다카오카 세이사쿠쇼
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Assigned to 가부시끼가이샤 도꼬 다까오까 reassignment 가부시끼가이샤 도꼬 다까오까 권리의 전부이전등록 Assignors: 가부시키가이샤 다카오카 세이사쿠쇼
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/14—Mountings, adjusting means, or light-tight connections, for optical elements for lenses adapted to interchange lenses
    • G02B7/16—Rotatable turrets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/248—Base structure objective (or ocular) turrets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Lens Barrels (AREA)
KR1020120118659A 2012-03-14 2012-10-24 초점 위치 변경 장치 및 이를 이용한 공초점 광학 장치 Active KR101428864B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-057103 2012-03-14
JP2012057103A JP5973756B2 (ja) 2012-03-14 2012-03-14 焦点位置変更装置およびこれを用いた共焦点光学装置

Publications (2)

Publication Number Publication Date
KR20130105267A KR20130105267A (ko) 2013-09-25
KR101428864B1 true KR101428864B1 (ko) 2014-08-14

Family

ID=49134432

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120118659A Active KR101428864B1 (ko) 2012-03-14 2012-10-24 초점 위치 변경 장치 및 이를 이용한 공초점 광학 장치

Country Status (5)

Country Link
US (1) US9435982B2 (https=)
JP (1) JP5973756B2 (https=)
KR (1) KR101428864B1 (https=)
CN (1) CN103309030B (https=)
TW (1) TWI486555B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2511852B1 (de) * 2011-04-15 2013-03-13 Sick Ag Beleuchtungsvorrichtung für einen kamerabasierten Codeleser
CN105258686B (zh) * 2015-10-22 2019-02-01 青岛镭创光电技术有限公司 激光投线仪
US10254105B2 (en) * 2016-12-05 2019-04-09 Quality Vision International, Inc. Exchangeable lens module system for probes of optical measuring machines
JP6819362B2 (ja) * 2017-03-02 2021-01-27 オムロン株式会社 共焦点計測装置
EP4044898A4 (en) * 2019-10-19 2023-10-18 Apollo Medical Optics, Ltd. OPTICAL SYSTEM AND ASSOCIATED INTERFERENCE OBJECTIVE MODULE
TWI885129B (zh) * 2021-04-16 2025-06-01 安盟生技股份有限公司 干涉物鏡模組、使用其之干涉系統及成像方法
CN115091107B (zh) * 2022-08-24 2023-04-25 中国工程物理研究院激光聚变研究中心 一种用于激光加工的高精度装夹装置及装夹方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001083426A (ja) 1999-07-09 2001-03-30 Olympus Optical Co Ltd 共焦点顕微鏡
JP2003344778A (ja) 2002-05-24 2003-12-03 Japan Science & Technology Corp 共焦点顕微鏡及び微小開口回転盤
JP2007187945A (ja) 2006-01-16 2007-07-26 Yokogawa Electric Corp 共焦点顕微鏡
JP2009168964A (ja) 2008-01-15 2009-07-30 Nikon Corp 共焦点顕微鏡

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH095046A (ja) * 1995-06-21 1997-01-10 Takaoka Electric Mfg Co Ltd 立体形状測定装置
US6426835B1 (en) * 1999-03-23 2002-07-30 Olympus Optical Co., Ltd. Confocal microscope
JP2001093426A (ja) * 1999-09-28 2001-04-06 Matsushita Electric Ind Co Ltd Ａｃ型プラズマディスプレイパネルおよびその駆動方法
JP2001133695A (ja) * 1999-11-01 2001-05-18 Nikon Corp 顕微鏡装置
DE60131510T2 (de) * 2000-03-27 2008-10-23 Toyota Jidosha Kabushiki Kaisha, Toyota-shi Abgasreinigungsvorrichtung
TW555954B (en) * 2001-02-28 2003-10-01 Olympus Optical Co Confocal microscope, optical height-measurement method, automatic focusing method
JP2005010516A (ja) * 2003-06-19 2005-01-13 Olympus Corp 顕微鏡
US8238019B2 (en) * 2003-11-01 2012-08-07 Silicon Quest Kabushiki-Kaisha Projection apparatus with coherent light source
US7704402B2 (en) * 2004-10-27 2010-04-27 Nikon Corporation Optical element manufacturing method, optical element, Nipkow disk, confocal optical system and 3-D measurement device
JP2006235250A (ja) * 2005-02-25 2006-09-07 Nikon Corp 測定顕微鏡
TWI279580B (en) * 2005-12-22 2007-04-21 Metal Ind Res & Dev Ct Co-focal microscopic imaging system with adjustable light source pattern
JP4678601B2 (ja) * 2006-08-15 2011-04-27 横河電機株式会社 創薬スクリーニング装置
JP2008096895A (ja) * 2006-10-16 2008-04-24 Olympus Corp 顕微鏡用照明装置
JPWO2008069220A1 (ja) * 2006-11-30 2010-03-18 株式会社ニコン 結像装置及び顕微鏡
JP4970211B2 (ja) * 2007-10-18 2012-07-04 ヘキサゴン・メトロジー株式会社 ３次元形状測定器
WO2009055607A1 (en) * 2007-10-23 2009-04-30 Sherman Kenneth L Improved removable, rotatable gobo holder assembly

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001083426A (ja) 1999-07-09 2001-03-30 Olympus Optical Co Ltd 共焦点顕微鏡
JP2003344778A (ja) 2002-05-24 2003-12-03 Japan Science & Technology Corp 共焦点顕微鏡及び微小開口回転盤
JP2007187945A (ja) 2006-01-16 2007-07-26 Yokogawa Electric Corp 共焦点顕微鏡
JP2009168964A (ja) 2008-01-15 2009-07-30 Nikon Corp 共焦点顕微鏡

Also Published As

Publication number Publication date
JP2013190624A (ja) 2013-09-26
US9435982B2 (en) 2016-09-06
CN103309030B (zh) 2016-01-27
CN103309030A (zh) 2013-09-18
TW201337215A (zh) 2013-09-16
JP5973756B2 (ja) 2016-08-23
US20130242396A1 (en) 2013-09-19
KR20130105267A (ko) 2013-09-25
TWI486555B (zh) 2015-06-01

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