KR101378012B1 - 멀티 어레이형 초음파 프로브 장치 및 멀티 어레이형 초음파 프로브 장치의 제조 방법 - Google Patents
멀티 어레이형 초음파 프로브 장치 및 멀티 어레이형 초음파 프로브 장치의 제조 방법 Download PDFInfo
- Publication number
- KR101378012B1 KR101378012B1 KR1020120026098A KR20120026098A KR101378012B1 KR 101378012 B1 KR101378012 B1 KR 101378012B1 KR 1020120026098 A KR1020120026098 A KR 1020120026098A KR 20120026098 A KR20120026098 A KR 20120026098A KR 101378012 B1 KR101378012 B1 KR 101378012B1
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- ultrasonic probe
- probe device
- tile
- seating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
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- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/004—Mounting transducers, e.g. provided with mechanical moving or orienting device
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Mechanical Engineering (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Immunology (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- Biophysics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Medical Informatics (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120026098A KR101378012B1 (ko) | 2012-03-14 | 2012-03-14 | 멀티 어레이형 초음파 프로브 장치 및 멀티 어레이형 초음파 프로브 장치의 제조 방법 |
| US13/741,907 US9071893B2 (en) | 2012-03-14 | 2013-01-15 | Multi-array ultrasonic probe apparatus and method for manufacturing multi-array probe apparatus |
| CN201310077389.5A CN103300882B (zh) | 2012-03-14 | 2013-03-12 | 多阵列超声波探头设备及其制造方法和装置 |
| JP2013049912A JP5666640B2 (ja) | 2012-03-14 | 2013-03-13 | マルチアレイ超音波プローブ装置及びその製造方法 |
| EP13159231.3A EP2639789B1 (en) | 2012-03-14 | 2013-03-14 | Multi-array ultrasonic probe apparatus and method for manufacturing multi-array probe apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120026098A KR101378012B1 (ko) | 2012-03-14 | 2012-03-14 | 멀티 어레이형 초음파 프로브 장치 및 멀티 어레이형 초음파 프로브 장치의 제조 방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20130104531A KR20130104531A (ko) | 2013-09-25 |
| KR101378012B1 true KR101378012B1 (ko) | 2014-03-24 |
Family
ID=47913010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020120026098A Active KR101378012B1 (ko) | 2012-03-14 | 2012-03-14 | 멀티 어레이형 초음파 프로브 장치 및 멀티 어레이형 초음파 프로브 장치의 제조 방법 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9071893B2 (enExample) |
| EP (1) | EP2639789B1 (enExample) |
| JP (1) | JP5666640B2 (enExample) |
| KR (1) | KR101378012B1 (enExample) |
| CN (1) | CN103300882B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220135909A (ko) * | 2021-03-31 | 2022-10-07 | 국방과학연구소 | 압전단결정 복합체 음향센서 및 이를 포함하는 배열 음향센서 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108348217B (zh) * | 2015-11-02 | 2021-07-20 | 皇家飞利浦有限公司 | 超声换能器阵列、探头和系统 |
| CN109310882B (zh) * | 2016-06-09 | 2021-02-26 | 皇家飞利浦有限公司 | 超声探头、超声系统和用于产生超声图像的方法 |
| JP6712917B2 (ja) * | 2016-07-14 | 2020-06-24 | 株式会社日立製作所 | 半導体センサチップアレイ、および超音波診断装置 |
| US11744553B2 (en) * | 2016-09-29 | 2023-09-05 | Koninklijke Philips N.V. | Ultrasound system, method and computer program product |
| KR101915255B1 (ko) * | 2017-01-11 | 2018-11-05 | 삼성메디슨 주식회사 | 초음파 프로브의 제조 방법 및 그 초음파 프로브 |
| WO2021142554A1 (en) * | 2020-01-17 | 2021-07-22 | The University Of British Columbia | Flexible capacitive micromachined ultrasonic transducer arrays |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002058098A (ja) | 2000-08-11 | 2002-02-22 | Murata Mfg Co Ltd | センサアレイおよび送受信装置 |
| JP2008518553A (ja) | 2004-10-29 | 2008-05-29 | ゼネラル・エレクトリック・カンパニイ | センサ素子の再構成可能なアレイのためのスイッチング回路 |
| JP2012015851A (ja) | 2010-07-01 | 2012-01-19 | Hitachi Aloka Medical Ltd | 超音波探触子の製造方法、および、超音波探触子 |
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| ATE87767T1 (de) * | 1989-11-09 | 1993-04-15 | Contraves Ag | Verfahren zur herstellung von hybridschaltungen mit einem array aus gleichen elektronischen elementen. |
| JP3131485B2 (ja) | 1992-02-04 | 2001-01-31 | オリンパス光学工業株式会社 | 超音波プローブ |
| JP3535204B2 (ja) | 1994-02-28 | 2004-06-07 | 株式会社東芝 | 超音波プローブ及びその製造方法 |
| US5655276A (en) | 1995-02-06 | 1997-08-12 | General Electric Company | Method of manufacturing two-dimensional array ultrasonic transducers |
| US6043590A (en) | 1997-04-18 | 2000-03-28 | Atl Ultrasound | Composite transducer with connective backing block |
| JP4723732B2 (ja) * | 2000-07-12 | 2011-07-13 | セイコーインスツル株式会社 | 脈検出装置及び超音波診断装置 |
| JP4562106B2 (ja) * | 2000-11-27 | 2010-10-13 | セイコーインスツル株式会社 | 超音波診断装置 |
| KR100684677B1 (ko) | 2002-06-05 | 2007-02-23 | 야마이치덴키 가부시키가이샤 | 프로브 유닛 및 그 제조 방법 |
| JP4261298B2 (ja) | 2003-09-19 | 2009-04-30 | 富士フイルム株式会社 | 積層構造体アレイ及びその製造方法、並びに、超音波トランスデューサアレイの製造方法 |
| GB2430259B (en) | 2004-01-08 | 2007-07-25 | Schlumberger Holdings | Integrated Acoustic Transducer Assembly |
| JP2005342337A (ja) * | 2004-06-04 | 2005-12-15 | Matsushita Electric Ind Co Ltd | 超音波探触子 |
| KR20070083514A (ko) | 2004-07-28 | 2007-08-24 | 에스브이 프로브 피티이 엘티디 | 동일 평면상에 있는 접착 패드를 기판에 형성하는 방법과장치 |
| US7459795B2 (en) | 2004-08-19 | 2008-12-02 | Formfactor, Inc. | Method to build a wirebond probe card in a many at a time fashion |
| US20070152685A1 (en) | 2006-01-03 | 2007-07-05 | Formfactor, Inc. | A probe array structure and a method of making a probe array structure |
| JP5038808B2 (ja) * | 2007-08-02 | 2012-10-03 | 株式会社東芝 | 超音波トランスデューサおよび超音波トランスデューサを備えた超音波プローブ |
| US8815653B2 (en) * | 2007-12-03 | 2014-08-26 | Kolo Technologies, Inc. | Packaging and connecting electrostatic transducer arrays |
| KR100967024B1 (ko) | 2008-04-14 | 2010-06-30 | 삼성전기주식회사 | 프로브 기판 제조 방법 |
| KR100996150B1 (ko) | 2008-05-23 | 2010-11-24 | 주식회사 엠아이티 | 프로브핀의 정열판과 통전판 및 그의 기판 제조방법 |
| JP2010022931A (ja) | 2008-07-18 | 2010-02-04 | Fujifilm Corp | 接着剤はみ出し防止構造を有する超音波探触子 |
| KR101137262B1 (ko) | 2009-03-18 | 2012-04-20 | 삼성메디슨 주식회사 | 초음파 진단장치용 프로브 및 그 제조방법 |
| US8345508B2 (en) | 2009-09-20 | 2013-01-01 | General Electric Company | Large area modular sensor array assembly and method for making the same |
| US20120029393A1 (en) * | 2010-07-30 | 2012-02-02 | General Electric Company | Compact ultrasound transducer assembly and methods of making and using the same |
| US8776335B2 (en) | 2010-11-17 | 2014-07-15 | General Electric Company | Methods of fabricating ultrasonic transducer assemblies |
| KR101354603B1 (ko) | 2012-01-02 | 2014-01-23 | 삼성메디슨 주식회사 | 초음파 프로브 및 그 제조방법 |
-
2012
- 2012-03-14 KR KR1020120026098A patent/KR101378012B1/ko active Active
-
2013
- 2013-01-15 US US13/741,907 patent/US9071893B2/en active Active
- 2013-03-12 CN CN201310077389.5A patent/CN103300882B/zh active Active
- 2013-03-13 JP JP2013049912A patent/JP5666640B2/ja active Active
- 2013-03-14 EP EP13159231.3A patent/EP2639789B1/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002058098A (ja) | 2000-08-11 | 2002-02-22 | Murata Mfg Co Ltd | センサアレイおよび送受信装置 |
| JP2008518553A (ja) | 2004-10-29 | 2008-05-29 | ゼネラル・エレクトリック・カンパニイ | センサ素子の再構成可能なアレイのためのスイッチング回路 |
| JP2012015851A (ja) | 2010-07-01 | 2012-01-19 | Hitachi Aloka Medical Ltd | 超音波探触子の製造方法、および、超音波探触子 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220135909A (ko) * | 2021-03-31 | 2022-10-07 | 국방과학연구소 | 압전단결정 복합체 음향센서 및 이를 포함하는 배열 음향센서 |
| KR102492901B1 (ko) | 2021-03-31 | 2023-01-30 | 국방과학연구소 | 압전단결정 복합체 음향센서 및 이를 포함하는 배열 음향센서 |
Also Published As
| Publication number | Publication date |
|---|---|
| US9071893B2 (en) | 2015-06-30 |
| KR20130104531A (ko) | 2013-09-25 |
| US20130242705A1 (en) | 2013-09-19 |
| EP2639789A2 (en) | 2013-09-18 |
| JP2013192228A (ja) | 2013-09-26 |
| JP5666640B2 (ja) | 2015-02-12 |
| EP2639789A3 (en) | 2014-02-26 |
| CN103300882B (zh) | 2016-03-30 |
| CN103300882A (zh) | 2013-09-18 |
| EP2639789B1 (en) | 2016-06-08 |
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