KR101374529B1 - 프로브 장치 및 프로브 장치의 프로브 카드 장착 방법 - Google Patents

프로브 장치 및 프로브 장치의 프로브 카드 장착 방법 Download PDF

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Publication number
KR101374529B1
KR101374529B1 KR1020130024513A KR20130024513A KR101374529B1 KR 101374529 B1 KR101374529 B1 KR 101374529B1 KR 1020130024513 A KR1020130024513 A KR 1020130024513A KR 20130024513 A KR20130024513 A KR 20130024513A KR 101374529 B1 KR101374529 B1 KR 101374529B1
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KR
South Korea
Prior art keywords
tray
probe
probe card
mark
transfer
Prior art date
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KR1020130024513A
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English (en)
Korean (ko)
Other versions
KR20130105397A (ko
Inventor
슈지 아키야마
히로시 아메미야
Original Assignee
도쿄엘렉트론가부시키가이샤
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Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20130105397A publication Critical patent/KR20130105397A/ko
Application granted granted Critical
Publication of KR101374529B1 publication Critical patent/KR101374529B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020130024513A 2012-03-14 2013-03-07 프로브 장치 및 프로브 장치의 프로브 카드 장착 방법 KR101374529B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-057236 2012-03-14
JP2012057236A JP2013191741A (ja) 2012-03-14 2012-03-14 プローブ装置及びプローブ装置のプローブカード装着方法

Publications (2)

Publication Number Publication Date
KR20130105397A KR20130105397A (ko) 2013-09-25
KR101374529B1 true KR101374529B1 (ko) 2014-03-13

Family

ID=49134176

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130024513A KR101374529B1 (ko) 2012-03-14 2013-03-07 프로브 장치 및 프로브 장치의 프로브 카드 장착 방법

Country Status (4)

Country Link
JP (1) JP2013191741A (zh)
KR (1) KR101374529B1 (zh)
CN (1) CN103308734A (zh)
TW (1) TW201348709A (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104820181A (zh) * 2015-05-14 2015-08-05 中南大学 一种封装晶圆阵列微探针全自动测试系统及方法
JP6478891B2 (ja) 2015-10-07 2019-03-06 三菱電機株式会社 プローブ位置検査装置
US11125814B2 (en) * 2017-02-22 2021-09-21 Sintokogio, Ltd. Test system
CN106910444B (zh) * 2017-02-28 2020-11-27 京东方科技集团股份有限公司 点灯装置和点灯测试方法
JP7018784B2 (ja) * 2018-02-23 2022-02-14 東京エレクトロン株式会社 コンタクト精度保証方法および検査装置
JP7076360B2 (ja) * 2018-11-14 2022-05-27 東京エレクトロン株式会社 挿抜機構及びブロック部材の交換方法
CN109782031A (zh) * 2018-12-27 2019-05-21 上海华岭集成电路技术股份有限公司 一种高低温测试环境自动更换探针卡的方法
CN110095708B (zh) * 2019-05-14 2020-05-01 日本电产理德机器装置(浙江)有限公司 窄边基板用检查装置和窄边基板的检查方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06118115A (ja) * 1992-09-30 1994-04-28 Nitto Seiko Co Ltd 両面基板検査装置
JPH06129831A (ja) * 1992-10-14 1994-05-13 Nitto Seiko Co Ltd 基板検査装置
KR100809600B1 (ko) * 2007-02-05 2008-03-04 뉴센트 주식회사 웨이퍼 검사장치
KR20100056727A (ko) * 2008-11-20 2010-05-28 주식회사 쎄믹스 웨이퍼 프로브 스테이션 및 그의 제어방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4104099B2 (ja) * 1999-07-09 2008-06-18 東京エレクトロン株式会社 プローブカード搬送機構
US7026832B2 (en) * 2002-10-28 2006-04-11 Dainippon Screen Mfg. Co., Ltd. Probe mark reading device and probe mark reading method
JP5032170B2 (ja) * 2007-03-23 2012-09-26 東京エレクトロン株式会社 検査装置
JP4954608B2 (ja) * 2006-05-16 2012-06-20 東京エレクトロン株式会社 被撮像物の移動方法及びこの方法を用いる処理装置
CN201508323U (zh) * 2009-09-24 2010-06-16 清华大学 Led晶圆显微定位测试装置
KR101257570B1 (ko) * 2010-04-26 2013-04-23 가부시키가이샤 히다치 하이테크놀로지즈 표시 패널 모듈 조립 장치

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06118115A (ja) * 1992-09-30 1994-04-28 Nitto Seiko Co Ltd 両面基板検査装置
JPH06129831A (ja) * 1992-10-14 1994-05-13 Nitto Seiko Co Ltd 基板検査装置
KR100809600B1 (ko) * 2007-02-05 2008-03-04 뉴센트 주식회사 웨이퍼 검사장치
KR20100056727A (ko) * 2008-11-20 2010-05-28 주식회사 쎄믹스 웨이퍼 프로브 스테이션 및 그의 제어방법

Also Published As

Publication number Publication date
CN103308734A (zh) 2013-09-18
KR20130105397A (ko) 2013-09-25
JP2013191741A (ja) 2013-09-26
TW201348709A (zh) 2013-12-01

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