KR101327454B1 - Tray transferring apparatus for test handler and tray transferring method using the same - Google Patents

Abstract

The present invention relates to a tray transfer apparatus for a test handler, comprising: a loading stacker for storing a tray on which a semiconductor device to be tested is loaded, and the tray stored in the loading stack and loaded with the semiconductor device to be tested in a tester loading area; A first loading arm for transferring, a second loading arm for recovering the empty tray from the tester loading region, a first unloading arm for transferring the empty tray on which the tested semiconductor device is loaded, to the tester unloading region, and the tester unloading And a second unloading arm for recovering the tray loaded with the semiconductor element tested from the region, and an unloading stacking unit for storing the tray recovered by the second unloading arm.

According to the present invention, four arms are provided in the tester loading / unloading area, each arm responsible for the transfer and recovery of the tray, so that the waiting time can be eliminated to avoid interference between the arms. After the tray is recovered from the area or the tester unloading area, another tray can be continuously transferred, and the check unit and the empty tray stacker are located between the loading stacker and the unloading stacker to improve the transfer and recovery speed of the tray. Can be.

Test handler, tray, feeder, transfer method

Description

Tray transfer apparatus for test handler and tray transfer method using same {Tray transferring apparatus for test handler and tray transferring method using the same}

The present invention relates to a tray feeder for a test handler, and more particularly, four arms are provided to play different roles of tray transfer and withdrawal to the loading and unloading seat, and the identification unit and the empty tray loading unit are provided. The present invention relates to a tray feeder for a test handler which is located between a loading stacking unit and an unloading stacking unit to improve the transfer and withdrawal speed of the tray to the tester loading and unloading area.

In a general semiconductor device post-manufacturing process, a plurality of semiconductor chips cut from a wafer and separated separately are attached to an auxiliary substrate, and then the semiconductor device is completed by wrapping the outside with a molding material. The electrical performance is tested at various temperatures down to low temperatures.

This test process is performed by a test handler including a tray feeder and a tester.

The tray transfer device transfers a customer tray (CT) loaded with a semiconductor device under test to a tester loading area (TLA), and transfers the customer tray CT on which the tested semiconductor device is seated. It recovers from a tester unloading area (TUA).

The tester transfers the test target semiconductor device loaded on the customer tray CT to an empty test tray, loads the test target semiconductor device, and performs an electrical performance test on the test target semiconductor device loaded on the test tray CT. When the test is completed, the tested semiconductor device is transferred from the test tray to the customer tray CT and loaded.

Thereafter, as described above, the customer tray CT on which the tested semiconductor device is loaded is recovered from the tester unloading area TUA.

Such a tray feeder for a test handler according to the related art, as illustrated in FIG. 1, has a loading stacking unit 10, a loading seating unit 20, an unloading seating unit 30, and an unloading stacking unit 40. , A confirmation unit 50, an empty tray stacking unit 60, and a transfer arm 70.

The loading stacking unit 10 is a place where the customer tray CT on which the test target semiconductor device is loaded is stored, and the loading seating unit 20 is mounted with the customer tray CT of the loading stacking unit 10. This is where the tester loading area (TLA) is delivered. The loading seat 20 is provided so as to be lifted and lowered or transferred to the customer tray CT by the transfer arm 70 in a lowered state, thereby raising the customer tray CT to the tester loading area TLA. To pass on.

The unloading seating part 30 is a place where the empty customer tray CT in which the tested semiconductor devices are classified according to grades and in which predetermined predetermined class semiconductor devices are seated is located. The unloading seating unit 30 is provided to be elevated as with the loading seating unit 20. Then, the unloading seating portion 30 is lowered when all the tested semiconductor devices are loaded in the empty customer tray CT in the tester unloading area TUA, and then the transfer arm 70 is unloaded seating portion ( The customer tray CT seated at 30 is stored in the unloading stack 40.

The unloading loading part 40 is a place where the customer tray CT of the unloading seating part 30 is classified and stored according to the grade of the tested semiconductor device loaded therein.

The checker 50 checks whether the semiconductor device remains in the remaining empty customer tray CT after all the test target semiconductor devices loaded in the customer tray CT transferred to the tester loading area TLA are supplied to the tester. Check whether or not. The empty customer tray CT which has been confirmed is transferred to the empty tray stacking unit 60 by the transfer arm 70 and stored. Thereafter, the empty customer tray CT of the empty tray loading part 60 is transferred to the unloading seating part 30 by the transfer arm 70.

The transfer arm 70 is between the loading and unloading loading portions 10 and 40, the loading and unloading seating portions 20 and 30, the checking portion 50, and the empty tray loading portion 60 as described above. To move the customer tray (CT).

In the conventional tray feeder for a test handler as described above, one transfer arm 70 moves between all the components, and transfers the customer tray CT, so that the transfer and recovery speed of the customer tray CT is slow. There is a problem.

Recently, in order to solve this problem, a tray feeder for a test handler having two transfer arms 70 has been developed, but in this case, either one of the transfer arms 70 interferes with another transfer arm 70. There is a limit to increase the transfer and recovery speed of the customer tray CT because there is a waiting time to avoid the problem, which prevents the use of the tester which has recently improved the speed of semiconductor device test faster.

In addition, in the tray feeder for a test handler according to the related art, the checking unit 50 and the empty tray stacking unit 60 are spaced apart from each other at a somewhat long distance, and the transfer of the customer tray CT between the two components is also carried by the transfer arm ( 70), the customer's tray (CT) transfer burden of the transfer arm 70 has a big problem. This problem is a major obstacle to improving the delivery and recovery speed of the customer tray CT.

As described above, the conventional tray feeder for test handlers has a low speed of transferring and retrieving the customer tray CT to the tester loading / unloading areas TLA and TUA. , And the number of the tested semiconductor devices to be collected is small, resulting in a low unit production per hour (UPH) of the test handler.

In order to solve the above problems, the present invention eliminates the waiting time to avoid the interference between the arms for transporting the tray, continuously performing the recovery and transfer of the tray, and between the check unit and the empty tray stacking unit. It is to provide a tray transfer device for a test handler that is provided with a separate element that is responsible for the tray transfer can significantly improve the transfer and recovery speed of the tray.

In order to solve the problems as described above, the tray transfer apparatus for a test handler of the present invention is a loading stacking unit for storing a tray loaded with a semiconductor device under test, the loading stacking unit is stored in the loading stacking unit A first loading arm for transferring the tray to the tester loading region, a second loading arm for recovering the empty tray from the tester loading region, and a first language for transferring the empty tray on which the tested semiconductor device is loaded to the tester unloading region A loading arm, a second unloading arm for recovering the tray on which the tested semiconductor device is loaded from the tester unloading area, and an unloading loading part for storing the tray recovered by the second unloading arm. .

The tray transfer apparatus for the test handler may be configured to check whether a semiconductor element remains in the empty tray recovered from the tester loading area, and to form a loading area together with the loading stacking unit and the first and second loading arms. Including, but the identification unit may be located between the loading and unloading loading portion.

The test feeder tray conveying apparatus further includes a bin in which the bin tray, which has been confirmed by the checking unit, stores an unloading region together with the unloading stacking unit and the first and second unloading arms. The apparatus may further include a tray stacker, wherein the empty tray stacker may be located between the loading stacker and the unloading stacker.

The identification unit may include a rotating unit for rotating the empty tray to check whether a semiconductor device remains and a horizontal transfer unit for slidingly transferring the empty tray to the empty tray stacking unit.

The empty tray stacking unit may include a plurality of stoppers for preventing lower transfer so that the empty tray stored therein may be transferred upward, and a lift transfer unit for raising the empty tray stored therein.

The first and second loading arms may be transferred within the loading region, and the first and second unloading arms may be transferred within the unloading region.

In the tray transfer method of the present invention, (a) the tray loaded with the semiconductor device to be tested is transferred to the tester loading region by a first loading arm, (b) the semiconductor device to be tested in the tray Supplying to the tester, (c) transferring the empty tray remaining after the semiconductor device to be tested is supplied to the verification unit from the tester loading area by a second loading arm, and (d) the empty tray to which the verification unit is transferred. Determining whether the semiconductor device remains, and then transferring the empty tray to the empty tray stacking portion, (e) the empty tray stored in the empty tray stacking portion is transferred to the tester unloading area by a first unloading arm. (F) loading the semiconductor device tested by the tester into the empty tray, and (g) loading the semiconductor device tested. And recovering the empty tray from the tester unloading area by a second unloading arm.

In the step (a), when the empty tray is seated in the tester loading area, the second loading arm includes the step of transferring the empty tray to the empty tray loading portion, wherein the second loading arm of the second loading arm After the empty tray transfer, the tray transfer of the first loading arm may be continuously performed.

The step (e) includes the second unloading arm recovering the tray when the tray loaded with the semiconductor device tested in the tester unloading area is seated. After the tray recovery of the loading arm, the empty tray transfer of the first unloading arm may be performed continuously.

In the step (d), the identification unit may slide the empty tray and store it in the empty tray stacking unit.

According to the tray transfer apparatus for a test handler of the present invention and the tray transfer method using the same, the tray transfer and recovery of the first and second loading arms and the unloading seat, respectively, are in charge of the transfer and recovery of the tray to the loading seat. The first and second unloading arms, each of which are in charge of each, are provided with a total of four arms, eliminating the waiting time to avoid interference between the arms, and continuously transferring and retracting the trays to the loading and unloading seats. can do.

In addition, the check unit and the empty tray stacking unit are located between the loading stacking unit and the unloading stacking unit, and a separate horizontal transfer unit for transferring the checked empty tray from the check unit to the empty tray stacking unit is provided to reduce the tray transfer burden of the arm. I can alleviate it.

Therefore, the transfer and recovery speed of the tray to the tester loading and unloading area is improved, thereby increasing the number of test target semiconductor devices that can be provided to the tester per hour and the number of tested tested semiconductor devices that can be collected. Can increase the hourly production of.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

The tray feeder for the test handler of the present invention is provided in a test handler including a tester. The tray transfer apparatus for the test handler transfers a customer tray (CT; Customer tray, hereinafter simply referred to as a "tray") on which the semiconductor device to be tested is seated to a tester loading area (TLA), and the tested semiconductor device. The loaded tray is recovered from the tester unloading area (TUA).

The tester transfers a test target semiconductor device loaded on a tray to an empty test tray, loads the test target semiconductor device, and performs an electrical performance test on the test target semiconductor device loaded on the test tray. When the test is completed, the tested semiconductor device is moved back to the tray CT. Thereafter, the tray CT on which the tested semiconductor device is loaded is recovered from the tester unloading area TUA by the tray transfer apparatus for the test handler as described above.

Hereinafter, with reference to the accompanying Figures 2 to 5, the configuration and effect of the preferred embodiment in the tray feeder for the test handler of the present invention will be described in detail.

As shown in FIG. 2, a preferred embodiment of the tray feeder for the test handler of the present invention is largely divided into a loading area 100 and an unloading area 200.

The loading area 100 is a place where a means for transferring and recovering the tray CT on which the semiconductor device is loaded is installed in the tester loading area TLA. The loading area 100, the loading seating part 120, and the checking part are installed. 130, a first loading arm 140, and a second loading arm 150 are installed.

The loading stacking unit 110 stores a tray CT on which the semiconductor device under test is loaded.

The loading seating part 120 is a place where the tray CT on which the test target semiconductor device of the loading stacking part 110 is loaded is seated and transferred to the tester loading area TLA. The loading seating unit 120 is provided to be elevated, and the tray CT is seated by the first loading arm 140 in a lowered state, and ascends, thereby raising the tray CT to the tester loading area TLA. To pass.

The identification unit 130 checks whether semiconductor elements remain in the empty tray CT recovered from the tester loading region TLA. The checker 130 flips the recovered empty tray CT and discharges the remaining semiconductor device downward when the semiconductor device remains. A collection box (not shown) for collecting the remaining semiconductor devices is provided below the identification unit 130.

The empty tray CT which has been confirmed by the checking unit 130 is an empty tray stacking unit 210 provided in the unloading area 200 which will be described later by a horizontal transfer unit (not shown) provided in the checking unit 130. Sliding conveyed to). In this way, the horizontal transfer unit for sliding conveying the empty tray CT, the pusher for supporting the tray CT and the guide rail for guiding the transfer and pushing the empty tray CT to the empty tray stacking unit 210. It may be made of.

The horizontal transfer unit, in addition to the configuration of the guide rail and the pusher, all elements capable of horizontally transferring the tray CT in one direction may be easily adopted. The configuration of the horizontal transfer unit, as those skilled in the art can easily be combined as a detailed description thereof will be omitted.

The first loading arm 140 mounts the tray CT on which the test target semiconductor device stored in the loading stacking unit 110 is loaded on the loading seating unit 120.

The second loading arm 150 loads the seating unit 120 after the test target semiconductor device of the tray CT transferred to the tester loading region TLA is supplied to the tester for a test process, and the remaining empty tray CT is left. ) Is collected and transferred to the check unit 130.

That is, the loading seating unit 120 is lowered with the empty tray CT remaining after the test target semiconductor device loaded in the tray CT is supplied to the tester, and the empty tray of the lowered loading seating unit 120 ( The second loading arm 150 recovers CT).

As described above, the first and second loading arms 140 and 150 move only in the loading area 100 to transfer and retrieve the tray CT.

The unloading area 200 described above transfers the empty tray CT to the tester unloading area TUA or transfers the tray CT on which the tested semiconductor device discharged from the tester is loaded. Where the component is recovered from the empty tray loading section 210, the unloading seating portion 220, the unloading loading portion 230, the first unloading arm 240, and the second unloading arm ( 250) is installed.

The empty tray stacking unit 210 is a place where the empty tray CT, which has been confirmed by the identification unit 130, is transferred and stored. As shown in FIGS. 3 to 5, the empty tray stacking unit 210 includes an introduction hole 211, a lifting transfer unit 212, and a plurality of stoppers 213.

The introduction hole 211 is formed in the side of the bin tray loading part 210 in the direction of the check unit 130, and is a passage through which the checked bin tray CT is carried from the check unit 130.

The elevating transfer unit 212 includes an elevating plate 212-1 on which the empty tray CT loaded from the checking unit 130 is seated, and a driving unit 212-2 for elevating the elevating plate 212-1. do.

The lifting plate 212-1 supports the empty tray CT. And it is lifted by the drive unit 212-2 serves to transfer the empty tray (CT) stored in the empty tray stacking unit 210 to the upper side. The driving unit 212-2 provides a driving force for elevating the lifting plate 212-1.

The stopper 213 may be provided in plural on both sidewalls of the empty tray stacking unit 210 so as to support the empty tray CT stored in the empty tray stacking unit 210. That is, two or more are provided to support both sides of the empty tray CT located above the lifting plate 212-1.

In addition, the stopper 213 is provided to be rotated upward while supporting the empty tray CT. However, the stopper 213 is provided so as not to be rotated further downward in the state of supporting the empty tray (CT) to stably support the empty tray (CT). In addition, the stopper 213 is provided with an elastic member (not shown), it is provided to return to the original position supporting the empty tray CT by the elastic force provided by the elastic member when rotated upward.

Therefore, as shown in FIG. 4, when the empty tray CT stored in the empty tray stacking unit 210 is lifted by the lifting transfer unit 212, the stopper 213 is rotated upwards to thereby empty the tray ( Allow CT) to be transported upwards. After the empty tray CT is conveyed upward by one layer, the stopper 213 is returned by the elastic force to support the empty tray CT again.

As such, the empty tray CT brought in from the checker 130 is seated on the lifting plate 212-1, and the driving unit 212-2 is transferred upward, and the stopper 213 is the empty tray CT. By supporting the upper transfer of), as shown in FIG. 5, the elevating plate 212-1 may be empty to allow the next empty tray CT to be seated.

Thereafter, the empty tray CT stored in the empty tray stacking unit 210 is transferred by the first unloading arm 240 to be seated on the unloading seating unit 220, and the unloading seating unit 220 is raised. When the empty tray CT is transferred to the tester unloading area TUA, the tested semiconductor device begins to be loaded into the empty tray CT.

In the above, while the empty tray stacking unit 210 transfers the empty tray CT stored therein to the upper side, the new empty tray CT is continuously slid to the bottom through the introduction hole 211 formed at the lower side. Although described, it is not necessarily limited thereto.

That is, any configuration can be applied as long as the empty tray CT can be slid and transported from the checking unit 130 to the empty tray stacking unit 210. For example, a configuration in which the identification unit 210 is provided to be lifted and lifted into the top tray of the empty tray CT stored in the empty tray stacking unit 210 may be applied.

Meanwhile, the check unit 130 and the empty tray stacking unit 210 as described above are provided between the loading stacking unit 110 and the unloading stacking unit 230. The empty tray CT which has been confirmed by the check unit 110 is transferred and stored in the empty tray stacking unit 210, and the empty tray CT of the empty tray stacking unit 210 is unloading seating unit 220. It is used to transport the tested semiconductor device.

Therefore, when the positions of the check unit 130 and the empty tray stacking unit 210 are provided in this way, the loading stacking unit 110 passes through the check unit 130 and the empty tray stacking unit 210 to unload the stacking unit. There is an advantage that can minimize the transfer path of the tray (CT) to 230.

The unloading seating unit 220 described above is a place where the empty tray CT in which the tested semiconductor device is classified and loaded according to a predetermined grade is positioned. The unloading seating part 220 is provided to be elevated as in the loading seating part 120. The unloading seating unit 220 descends when all of the tested semiconductor devices are loaded in the empty tray CT.

The unloading loading part 230 is a place where the tray CT positioned in the lowered unloading seating part 220 is transferred and stored by the second unloading arm 250. The unloading stacking unit 230 includes a plurality of stackers capable of storing the trays CT, and each of the stackers may store the trays CT having the same class of semiconductor elements loaded thereon.

The first unloading arm 240 transports the empty tray CT located in the empty tray stacking unit 210 to be seated on the unloading seating unit 220. The empty tray CT is raised to the unloading seat 220 and transferred to the tester unloading area TUA so that the tested semiconductor device can be loaded.

When the unloading seat 220 lowers the tray CT on which the unloading seat 220 is loaded, the second unloading arm 250 recovers the tray CT from the unloading seat 220. The loading loading unit 230 is stored. At this time, the tray CT is stored in the corresponding stacker of the unloading stacking unit 230 according to the grade of the test-complete semiconductor device loaded on the tray CT.

As described above, the first and second unloading arms 240 and 250 move only in the unloading area 200 to transfer and retrieve the tray CT.

In general, the operation of recovering and transferring the tray CT to the loading seating unit 120 and recovering and transferring the tray CT to the unloading seating unit 220 is continuously performed.

However, as shown in the present invention, the first and second loading arms 140 and 150 transfer and retrieve the tray CT to the loading seat 120, and the first and second unloading arms 240 and 250 are frozen. When the tray CT is transferred and recovered to the loading seat 220, respectively, the first loading arm 140 or the first unloading arm 240 grips the tray CT to be delivered in advance. When the second loading arm 150 or the second unloading arm 250 recovers the tray CT, the tray CT that has been gripped can be delivered immediately, so that the tray CT delivery and recovery speed can be improved. .

Hereinafter, with reference to Figure 6, a preferred embodiment of the tray transfer method of the present invention using the tray transfer apparatus for a test handler as described above will be described in detail.

First, a tray CT in which a test target semiconductor device is loaded is stored in the loading stacking unit 110 by an operator. In addition, the first loading arm 140 installed in the loading area 100 transfers the tray CT on which the test target semiconductor device stored in the loading stacking unit 110 is loaded to the loading seating unit 120 (S100).

In this case, when the empty tray CT is seated on the loading seating part 120, first, the second loading arm 150 recovers the empty tray CT to the identification unit 130, and then continuously The first loading arm 140 transfers the tray CT loaded with the test target semiconductor device stored in the loading stacking unit 110 to the loading seating unit 120.

Next, the loading seating unit 120 is raised to transfer the tray CT on which the test target semiconductor device is loaded to the tester loading region TLA (S150). Thereafter, the test target semiconductor device loaded on the transferred tray CT is transferred for the test process by a separate transfer device provided in the tester (S200). The tester transfers the test target semiconductor device to a separate tray and performs a test process.

In addition, the loading seating unit 120 descends while the empty tray CT remaining after the transfer of the test target semiconductor device is seated. Next, the second loading arm 150 recovers the empty tray CT of the loading seating unit 120 to the checking unit 130 (S250).

Thereafter, the verification unit 130 checks whether the semiconductor device remains in the recovered empty tray CT (S300). When the check is completed, the horizontal transfer unit (not shown) slidingly transports the checked empty tray CT and stores it in the empty tray stacking unit 210 (s350).

Meanwhile, the first unloading arm 240 installed in the unloading area 200 transfers the empty tray CT stored in the empty tray loading part 210 to the unloading seating part 220 (S400). In this case, when another tray CT on which the tested semiconductor device is loaded is seated on the unloading seating part 220, the second unloading arm 250 first unloads the tray CT. 230, the first unloading arm 240 continuously transfers the empty tray CT to the unloading seating part 220.

Next, the unloading seating unit 220 rises to transfer the empty tray CT to the tester unloading area TUA (S450). Then, the tested semiconductor device is loaded in the empty tray (CT) delivered by a separate transfer device provided in the tester (s500).

When loading is completed, the unloading seating unit 220 is lowered, and the tray CT on which the tested semiconductor device is loaded is recovered from the tester unloading area TUA (s550). Thereafter, the second unloading arm 250 stores the tray CT on which the recovered tested semiconductor device is loaded in the unloading stacking unit 230 by grade (s600).

As described above, the first and second loading arms 140 and 150 provided in the loading region 100 and the first and second unloading arms 240 and 250 provided in the unloading region 200 are four in total. Since the tray CT is transported in the order of the loading stacking unit 110, the checking unit 130, the empty tray stacking unit 210, and the unloading stacking unit 230 which are arranged in order, the tray is provided. The delivery and recovery rate of can be significantly improved.

Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical spirit of the present invention, and such modifications and variations belong to the appended claims. will be.

1 is a schematic diagram of a tray feeder for a conventional test handler,

2 is a schematic view of a preferred embodiment of the tray feeder for the test handler of the present invention;

3 is a cross-sectional view schematically showing a preferred embodiment in the empty tray stacking unit provided in the tray feeder for a test handler of the present invention;

4 is a cross-sectional view schematically showing a state in which the empty tray stored therein is transferred upward in the empty tray stacking unit provided in the tray feeder for the test handler of the present invention;

5 is a cross-sectional view schematically showing a state after the empty tray stored therein is transferred upward in the empty tray stacking unit provided in the tray feeder for the test handler of the present invention;

Figure 6 is a flow chart showing a preferred embodiment in the tray transfer method of the present invention.

＊ Explanation of symbols for main part of drawing ＊

100: loading area 110: loading loading part

120: loading seat 130: check unit

140: first loading arm 150: second loading arm

200: unloading area 210: empty tray loading portion

211: introduction hole 212: lifting and transporting unit

212-1: Lifting plate 212-2: Drive part

213: stopper 220: unloading seat

230: unloading loading portion 240: first unloading arm

250: second unloading arm CT: tray

TLA: Tester Loading Area TUA: Tester Unloading Area

Claims (10)

A tray conveying apparatus for transferring a tray loaded with a semiconductor device under test to a tester loading area, and recovering the tested tray loaded with the semiconductor device from a tester unloading area, A loading stacking unit configured to store the tray on which the semiconductor device under test is loaded; A first loading arm stored in the loading loading unit and transferring the tray loaded with the semiconductor device under test to the tester loading area; A second loading arm for recovering the empty tray from the tester loading area; A first unloading arm transferring the empty tray on which the tested semiconductor device is loaded to the tester unloading area; A second unloading arm for recovering the tray on which the tested semiconductor device is loaded from the tester unloading area; An unloading stacking unit for storing the tray recovered by the second unloading arm; And And a confirming unit configured to confirm whether a semiconductor device remains in the empty tray recovered from the tester loading region and to form a loading region together with the loading stacking unit and the first and second loading arms. And the checking unit is located between the loading stacking unit and the unloading stacking unit. delete The method of claim 1, And an empty tray stacking unit configured to store the empty tray which has been confirmed by the identification unit and to form an unloading area together with the unloading stacking unit and the first and second unloading arms. And the empty tray stacking portion is positioned between the loading stacking portion and the unloading stacking portion. The method of claim 3, The verification unit, A rotating unit rotating the empty tray to check whether a semiconductor device remains; And A horizontal conveying unit for slidingly conveying the empty trays to which the empty trays are checked; Tray feeder for the test handler, characterized in that it comprises a. 5. The method of claim 4, The empty tray stacking unit, A plurality of stoppers for preventing a lower conveyance so that the empty tray stored therein can be conveyed upward only; And A lift transfer unit for raising the empty tray stored therein; Tray feeder for the test handler, characterized in that it comprises a. 6. The method according to any one of claims 3 to 5, The first and second loading arms are And the first and second unloading arms are conveyed in the loading region, and the first and second unloading arms are conveyed in the unloading region. In the tray transfer method for transferring the tray loaded with the semiconductor device to be tested to the tester loading area, and recovering the tray loaded with the semiconductor device tested by the tester in the tester unloading area, (a) transferring the tray on which the semiconductor device under test is loaded to the tester loading region by a first loading arm; (b) supplying the semiconductor device under test to the tester from the tray; (c) transferring the empty tray remaining after the semiconductor device to be tested is supplied to the verification unit in the tester loading region by a second loading arm; (d) transferring the empty tray to the empty tray stacking unit after confirming whether the semiconductor device remains in the empty tray which has been transferred; (e) transferring the empty tray stored in the empty tray stacking unit to the tester unloading area by a first unloading arm; (f) loading the semiconductor device tested by the tester into the empty tray; And (g) recovering the empty tray on which the tested semiconductor device is loaded from the tester unloading area by a second unloading arm; Tray conveying method comprising a. The method of claim 7, wherein The step (a) And when the empty tray is seated in the tester loading area, transferring the empty tray to the empty tray stacking unit by the second loading arm. And the tray transfer of the first loading arm is performed continuously after the empty tray transfer of the second loading arm. The method of claim 7, wherein In step (e), And collecting the tray by the second unloading arm when the tray on which the tested semiconductor device is loaded is seated in the tester unloading area. And the empty tray transfer of the first unloading arm is continuously performed after the tray number of the second unloading arm is recovered. 10. The method according to any one of claims 7 to 9, The step (d) And the checking unit slides the empty tray and stores the empty tray in the empty tray stacking unit.

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