KR101267840B1 - Tray transferring apparatus for test handler and tray transferring method using the same - Google Patents

Abstract

The present invention relates to a tray transfer apparatus for a test handler, comprising: a loading stacker having a feed transfer unit configured to store a tray on which a semiconductor device to be tested is loaded and to raise the tray stored therein and supply the tray to a tester loading area; A transfer arm for recovering the empty tray from the loading area, an unloading part for transferring the empty tray to the tester unloading area and recovering the tray on which the tested semiconductor device is loaded, and the tray recovered by the unloading part It includes an unloading loading unit for storing the.

According to the present invention, a feed transfer unit for supplying the tray to the tester loading area and a transfer arm for recovering are provided separately, and an unloading arm for transferring and recovering the tray to the tester unloading area, respectively, is provided. And the empty tray stacking portion are located between the loading stacking portion and the unloading stacking portion to improve the transfer and recovery speed of the tray.

Test handler, tray, feeder, transfer method

Description

Tray transfer apparatus for test handler and tray transfer method using same {Tray transferring apparatus for test handler and tray transferring method using the same}

The present invention relates to a tray feeder for a test handler, and more particularly, four means for supplying and retrieving a tray to a tester loading area and a tray transfer and retrieval to a tester unloading area are provided. And the empty tray stacker are located between the loading stacker and the unloading stacker, and a means for transporting the trays between the empty tray stacker and the checker is provided separately to transfer and retrieve the trays to the tester loading / unloading area. The present invention relates to a tray feeder for a test handler that can improve speed.

In a general semiconductor device post-manufacturing process, a plurality of semiconductor chips cut from a wafer and separated separately are attached to an auxiliary substrate, and then the semiconductor device is completed by wrapping the outside with a molding material. The electrical performance is tested at various temperatures down to low temperatures.

This test process is performed by a test handler including a tray feeder and a tester.

The tray transfer device transfers a customer tray (CT) loaded with a semiconductor device under test to a tester loading area (TLA), and unloads the customer tray CT on which the tested semiconductor device is seated. Recover from a tester unloading area (TUA).

The tester transfers the test target semiconductor device loaded on the customer tray CT to an empty test tray, loads the test target semiconductor device, and performs an electrical performance test on the test target semiconductor device loaded on the test tray CT. When the test is completed, the tested semiconductor device is transferred from the test tray to the customer tray CT and loaded.

Thereafter, as described above, the customer tray CT on which the tested semiconductor device is loaded is recovered from the tester unloading area TUA.

Such a tray feeder for a test handler according to the related art, as illustrated in FIG. 1, has a loading stacking unit 10, a loading seating unit 20, an unloading seating unit 30, and an unloading stacking unit 40. , A confirmation unit 50, an empty tray stacking unit 60, and a transfer arm 70.

The loading stacking unit 10 is a place where the customer tray CT on which the test target semiconductor device is loaded is stored, and the loading seating unit 20 is mounted with the customer tray CT of the loading stacking unit 10. This is where the tester loading area (TLA) is delivered. The loading seat 20 is provided to be elevated and lowered in the lowered state, the customer tray (CT) is seated or transported by the transfer arm 70, and ascends the customer tray (CT) to the tester loading area (TLA) To pass).

The unloading seating part 30 is a place where the empty customer tray CT in which the tested semiconductor devices are classified according to grades and in which predetermined predetermined class semiconductor devices are seated is located. The unloading seating unit 30 is provided to be elevated as with the loading seating unit 20. Then, the unloading seating portion 30 is lowered when all the tested semiconductor devices are loaded in the empty customer tray CT in the tester unloading area TUA, and then the transfer arm 70 is unloaded seating portion ( The customer tray CT seated at 30 is stored in the unloading stack 40.

The unloading loading part 40 is a place where the customer tray CT of the unloading seating part 30 is classified and stored according to the grade of the tested semiconductor device loaded therein.

The checker 50 checks whether the semiconductor device remains in the remaining empty customer tray CT after all the test target semiconductor devices loaded in the customer tray CT transferred to the tester loading area TLA are supplied to the tester. Check whether or not. The empty customer tray CT which has been confirmed is transferred to the empty tray stacking unit 60 by the transfer arm 70 and stored. Thereafter, the empty customer tray CT of the empty tray loading part 60 is transferred to the unloading seating part 30 by the transfer arm 70.

The transfer arm 70 is between the loading and unloading loading portions 10 and 40, the loading and unloading seating portions 20 and 30, the checking portion 50, and the empty tray loading portion 60 as described above. To move the customer tray (CT).

In the conventional tray feeder for a test handler as described above, one transfer arm 70 moves between all the components, and transfers the customer tray CT, so that the transfer and recovery speed of the customer tray CT is slow. There is a problem.

Recently, in order to solve this problem, a tray feeder for a test handler having two transfer arms 70 has been developed, but in this case, either one of the transfer arms 70 interferes with another transfer arm 70. There is a limit to increase the transfer and recovery speed of the customer tray CT because there is a waiting time to avoid the problem, which prevents the use of the tester which has recently improved the speed of semiconductor device test faster.

In addition, in the tray feeder for a test handler according to the related art, the checking unit 50 and the empty tray stacking unit 60 are spaced apart from each other at a somewhat long distance, and the transfer of the customer tray CT between the two components is also carried by the transfer arm ( 70), the customer's tray (CT) transfer burden of the transfer arm 70 has a big problem. This problem is a major obstacle to improving the delivery and recovery speed of the customer tray CT.

As described above, the conventional tray feeder for test handlers has a low speed of transferring and retrieving the customer tray CT to the tester loading / unloading areas TLA and TUA. , And the number of the tested semiconductor devices to be collected is small, resulting in a low unit production per hour (UPH) of the test handler.

In order to solve the above problems, the present invention eliminates the waiting time to avoid the interference between the arms for transporting the tray, continuously performing the recovery and transfer of the tray, and between the check unit and the empty tray stacking unit. It is to provide a tray transfer device for a test handler that is provided with a separate element that is responsible for the tray transfer can significantly improve the transfer and recovery speed of the tray.

In order to solve the above problems, the tray transfer apparatus for the test handler of the present invention is provided with a supply transfer unit for storing the tray loaded with the semiconductor device under test and raising the tray stored therein and feeding it to the tester loading area. A loading stacker, a transfer arm for recovering an empty tray from the tester loading area, an unloading unit for transferring the empty tray to a tester unloading area and recovering the tray on which the tested semiconductor device is loaded, and the unloading And an unloading stacking unit for storing the tray recovered by the unit.

The tray transfer apparatus for the test handler may include a confirmation unit for confirming whether or not a semiconductor device remains in the empty tray recovered from the tester loading area, and an empty tray stacking unit for storing the empty tray that has been confirmed by the confirmation unit. The check unit and the empty tray stacker may be located between the loading stacker and the unloading stacker.

The transfer arm may include a guide support member formed along the tester loading area and the identification unit, and a transfer picker guided by the guide support member to pick up or separate the tray.

The identification unit may include a lower transfer unit for lowering the empty tray recovered by the transfer arm, and a rotation unit for checking whether a semiconductor device remains by rotating the empty tray lowered by the lower transfer unit.

The confirmation unit may further include a horizontal transfer unit for slidingly transferring the empty tray to the empty tray stacking unit.

The unloading unit may include a first unloading arm configured to transfer an empty tray on which the tested semiconductor device is loaded to the tester unloading area, and to recover the tray on which the tested semiconductor device is loaded from the tester unloading area. It may include a second unloading arm.

The tray conveying method of the present invention comprises the steps of: (a) the semiconductor device to be tested is loaded and the tray stored in the loading stack is lifted by a feed transporter to be supplied to the tester loading area, (b) the semiconductor device to be tested (C) recovering the empty tray remaining after the semiconductor device to be tested is supplied to the tester from the tray to the checker in the tester loading area; and (d) the checker recovered. After checking whether the empty tray has a semiconductor device remaining, transferring the empty tray to the empty tray stacking unit; (e) the empty tray stored in the empty tray stacking unit is connected to the tester unloading area by a first unloading arm. Transferring, (f) loading the semiconductor device tested by the tester into the empty tray, and (g) completing the test. And recovering the empty tray on which the finished semiconductor device is loaded from the tester unloading area by a second unloading arm.

The step (d) may include a step of lowering and moving the empty tray recovered by the checker, and checking whether the semiconductor device remains by rotating the lowered empty tray by a rotating part.

The step (e) includes the second unloading arm recovering the tray when the tray loaded with the semiconductor device tested in the tester unloading area is seated. After the tray recovery of the loading arm, the empty tray transfer of the first unloading arm may be performed continuously.

In the step (d), the identification unit may slide the empty tray and store it in the empty tray stacking unit.

According to the tray feeder for the test handler of the present invention, the feed transfer unit and the transfer arm responsible for feeding and retrieving the tray to the tester loading area, respectively, are responsible for the transfer and recovery of the tray to the tester unloading area, respectively. The first and second unloading arms are provided so that the transfer and withdrawal of the tray to and from the tester loading and unloading area can be performed independently without fear that the respective means may cause interference.

In addition, the check unit and the empty tray stacker are located between the loading stacker and the unloading stacker, and a separate horizontal transfer unit for transporting the checked empty tray from the checker to the empty tray stacker is provided for the tray transfer burden of the transfer arm. Can alleviate

Therefore, the transfer and recovery speed of the tray to the tester loading and unloading area is improved, thereby increasing the number of test target semiconductor devices that can be provided to the tester per hour and the number of tested tested semiconductor devices that can be collected. Can increase the hourly production of.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

The tray feeder for the test handler of the present invention is provided in a test handler including a tester. The tray transfer apparatus for the test handler supplies a customer tray (CT; Customer tray, hereinafter simply referred to as a " tray ") on which the test target semiconductor device is seated to a tester loading area (TLA), and completes the test. The loaded tray is recovered from the tester unloading area (TUA).

The tester transfers the test target semiconductor device loaded on the tray to an empty test tray, loads the test target semiconductor device, and performs an electrical performance test on the test target semiconductor device loaded on the test tray. When the test is completed, the tested semiconductor device is moved back to the tray CT. Thereafter, the tray CT on which the tested semiconductor element is loaded is recovered from the tester unloading area TUA by the tray feeder for the test handler as described above.

Hereinafter, with reference to the accompanying Figures 2 to 6, the configuration and effect of the tray transfer apparatus for a test handler according to a preferred embodiment of the present invention will be described in detail.

As shown in Figure 2 and 3, the tray feeder for the test handler is a loading stacking unit 100, the transfer arm 200, the check unit 300, empty tray stacking unit 400, unloading seating The unit 500, the unloading loading unit 600, and the unloading unit 700 are included.

The loading stacking unit 100 stores a tray CT on which a semiconductor device under test is loaded. In addition, the loading stacking unit 100 is provided with a feed transfer unit 110 for raising the tray CT stored in the loading stacking unit 100 and supplying it to the tester loading area TLA.

The supply and feed unit 110 includes a ball screw 111 (ball screw), the lifting body 112, and the lifting driving unit (113). The ball screw 111 is installed on the side perpendicular to the ground.

The lifting body 112 is coupled to the ball screw 111, it is provided to be elevated according to the rotation of the ball screw. In addition, the elevating body 112 supports the tray CT stored in the loading stacking unit 100, and elevates the tray CT supported by the elevating body. The elevating driving unit 113 is to provide power to elevate the elevating body 112 by rotating the ball screw 111, it is provided as a general motor.

The tester loading area TLA is located at the top of the loading stacking unit 100. The feed transfer unit 110 having such a configuration has a lower side when the tray CT of the tester loading area TLA is recovered. The tray CT is fed to the tester loading area TLA by raising the tray CT located thereon and transporting it to the uppermost stage.

Meanwhile, the tester transfers the test target semiconductor device loaded in the tray CT supplied to the tester loading area TLA to perform the test.

As described above, the transfer arm 200 recovers an empty tray left after the test target semiconductor device is transferred. The transfer arm 200 includes a guide support member 210, a transfer picker 220, and a transfer driver (not shown).

The guide support member 210 is installed in a straight line horizontally on the upper side along the tester loading area (TLA) and the check unit 300. The guide support member 210 supports the transfer picker 220 and guides the transfer.

The transport picker 220 picks up or separates the tray CT, and is transported along the guide support member 210. The transfer picker 220 collects the empty tray CT of the tester loading area TLA and transfers the empty tray CT to the identification unit 300.

The transfer driving unit provides power to transfer the picker 220 along the guide support member 210. The conveying driving part may be generally composed of a motor, a pulley, and a belt, but is not limited thereto, and may be variously adopted as long as the conveying drive member 220 can reciprocate in one direction along the guide support member 210. have.

On the other hand, the verification unit 300 checks whether or not semiconductor devices remain in the empty tray CT recovered from the tester loading area TLA. The checker 300 flips the recovered empty tray CT and discharges the remaining semiconductor device downward when the semiconductor device remains. A collection box (not shown) for collecting the remaining semiconductor devices is provided below the identification unit 130.

The confirmation unit 300 includes a lower transfer unit 310, a rotation unit 320, and a horizontal transfer unit 330. The lower transfer part 310 lowers the empty tray CT recovered from the tester loading area TLA to the rotating part 320 positioned below.

The rotating unit 320 grips and rotates the empty tray CT lowered by the lower transfer unit 310, thereby discharging the remaining semiconductor element downward when the semiconductor element remains.

The horizontal transfer unit 330 slides the empty tray CT, which has been checked in the rotating unit 320, to the empty tray stacking unit 400. The horizontal transfer unit 330 may include a guide rail for supporting the tray CT and guiding the transfer, and a pusher for pushing the empty tray CT to the empty tray loading unit 400.

The horizontal transfer unit 330, in addition to the configuration of the guide rail and the pusher, all elements capable of horizontally transferring the tray CT in one direction may be appropriately adopted. More specific configuration of the horizontal transfer unit 330, as those skilled in the art to which the present invention belongs can be easily combined as a detailed description thereof will be omitted.

On the other hand, the empty tray stacking unit 400 described above is a place where the empty tray CT, which has been confirmed by the identification unit 300, is transported and stored. As shown in FIGS. 4 to 6, the empty tray stacking unit 400 includes an introduction hole 410, a lifting transfer unit 420, and a plurality of stoppers 430.

The introduction hole 410 is a passage through which the empty tray CT, which is formed at the side surface of the bin tray loading part 400 in the direction of the check unit 300, is carried out from the check unit 300.

The lifting and lowering unit 420 includes an elevating plate 421 on which the empty tray CT loaded from the checking unit 300 is seated, and a driving unit 412 for elevating the elevating plate 421.

The lifting plate 421 supports the empty tray CT. The empty tray CT, which is lifted by the driving unit 412 and is stored in the empty tray stacking unit 400, serves to transfer upward. The driving unit 412 provides a driving force for elevating the elevating plate 421.

The stopper 430 may be provided in plural on both sidewalls of the empty tray stacking unit 400 so as to support the empty tray CT stored in the empty tray stacking unit 400. That is, two or more are provided to support both sides of the empty tray CT located above the lifting plate 421.

In addition, the stopper 430 may be pivoted upward in a state of supporting the empty tray CT. However, the stopper 430 is provided so as not to be rotated further downward in the state of supporting the empty tray (CT) to stably support the empty tray (CT). In addition, the stopper 430 is provided with an elastic member (not shown), it is provided to return to the original position supporting the empty tray CT by the elastic force provided by the elastic member when rotated upward.

Therefore, as shown in FIG. 5, when the empty tray CT stored in the empty tray stacking unit 400 is lifted by the lifting transfer unit 420, the stopper 430 is rotated upwards to thereby empty the tray ( Allow CT) to be transported upwards. After the empty tray CT is transported upward by one layer, the stopper 430 returns by the elastic force and supports the empty tray CT again.

As such, the empty tray CT brought in from the checking unit 300 is seated on the elevating plate 421, and the driving unit 422 is transferred upward, and the stopper 430 is transferred upward of the empty tray CT. By supporting this, the lifting plate 421 can be made empty so that the next empty tray CT can be seated, as shown in FIG.

In the above, while the empty tray stacking unit 400 transfers the empty tray CT stored therein to the upper side, the new empty tray CT is continuously slid to the bottom through the introduction hole 410 formed at the lower side. Although described, it is not necessarily limited thereto.

For example, the configuration in which the check unit 300 is provided to be elevated and slide-in into the uppermost end of the empty tray CT stored in the empty tray stacking unit 400 may be applied.

On the other hand, the check unit 300 and the empty tray stacking unit 400 as described above is provided between the loading stacking unit 100 and the unloading stacking unit 600. The empty tray CT which has been confirmed by the check unit 300 is transferred to the empty tray stacking unit 400 and stored, and the empty tray CT of the empty tray stacking unit 400 is an unloading seating unit 500. It is used to transport the tested semiconductor device.

Therefore, when the positions of the check unit 300 and the empty tray stacking unit 400 are provided in this way, the loading stacking unit 100 passes through the check unit 300 and the empty tray stacking unit 400 through the unloading stacking unit. There is an advantage that can minimize the transfer path of the tray (CT) up to (600).

The unloading seating part 500 described above is a place where the empty tray CT in which the semiconductor elements tested and transferred from the tester are classified and loaded according to a predetermined grade is positioned. The unloading seating part 500 is provided to be elevated, and the tray CT is seated or transported by the unloading part 700 in the lowered state, and ascends, thereby raising the empty tray CT to the test unloading area. To the (TUA).

The unloading loading part 600 is where the tray CT located in the lowered unloading seating part 500 is transferred and stored by the unloading part 700. The unloading stacking unit 600 includes a plurality of stackers capable of storing the trays CT, and the stacks CT stacking the semiconductor devices of the same grade are stored in each stacker.

The unloading unit 700 transfers the empty tray CT to the unloading seating unit 500 or recovers the tray CT on which the tested semiconductor device is loaded from the unloading seating unit 500. The unloading unit 700 includes a first unloading arm 710 and a second unloading arm 720.

The first unloading arm 710 transfers the empty tray CT located in the empty tray loading part 400 to the unloading seating part 500. The empty tray CT is raised to the unloading seating part 500 and is transferred to the tester unloading area TUA so that the tested semiconductor device can be loaded.

When the unloading seat 500 lowers the tray CT on which the unloaded seat 500 is loaded, the second unloading arm 720 recovers the tray CT from the unloading seat 500. The loading loading unit 600 is stored. At this time, the tray CT is stored in the corresponding stacker of the unloading loading unit 600 according to the grade of the tested semiconductor device loaded on the tray CT.

In general, after recovering the tray CT on which the tested semiconductor device is loaded from the unloading seat 500, the operation of transferring the empty tray CT to the corresponding unloading seat 500 is continuously performed.

However, when the first and second unloading arms 710 and 720 are in charge of the transfer and recovery of the tray CT to the unloading seat 500, respectively, the second unloading arm 720 is unloaded. When the tray CT is recovered from the loading seat 500, the first unloading arm 710 holds the empty tray CT in advance, and after emptying, the empty tray () is placed on the unloading seat 500. CT) can be delivered immediately, so that tray (CT) delivery and recovery speed can be improved.

Hereinafter, a preferred embodiment of the tray transfer method of the present invention using the tray transfer apparatus for the test handler as described above will be described in detail with reference to FIG. 7.

First, a tray CT in which a test target semiconductor device is loaded is stored in the loading stacking unit 100 by an operator. In addition, the supply transfer unit 110 installed in the loading stacking unit 100 raises the tray CT stored in the loading stacking unit 100 and supplies it to the tester loading area TLA (s100).

Next, the tester transfers the test target semiconductor device loaded in the tray CT supplied to the tester loading area TLA using a separate transfer device for the test process (S150). Subsequently, the tester transfers the test target semiconductor device to a separate tray and performs a test process.

After the transfer arm 200 completes the transfer of the test target semiconductor device, the transfer arm 200 recovers the empty tray CT remaining in the tester loading area TLA to the verification unit 300 (S200). Thereafter, the lower transfer part 310 lowers the empty tray CT collected by the rotation part 320 (S250).

Thereafter, the rotating unit 320 receives and rotates the empty tray CT recovered from the lower transfer unit 310 to check whether the semiconductor device remains in the empty tray CT (S300). Then, the horizontal transfer unit 330 is sliding and transported to the empty tray (CT) is confirmed and stored in the empty tray stacking unit 400 (s350).

Meanwhile, the empty tray CT stored in the empty tray stacking unit 400 is transferred to the unloading seating unit 500 by the first unloading arm 710 (S400). In this case, when another tray CT on which the tested semiconductor device is loaded is seated on the unloading seating part 500, the second unloading arm 720 first unloads the tray CT. 600, the first unloading arm 710 continuously grasps the empty tray CT, and then transfers the unloading seat 500 to the unloading seat 500.

Next, the unloading seating part 500 is raised to transfer the empty tray CT to the tester unloading area TUA (S450). Then, the tested semiconductor device is loaded in the empty tray (CT) delivered by a separate transfer device provided in the tester (s500).

When the loading is completed, the unloading seating unit 500 is lowered, and the tray CT on which the tested semiconductor device is loaded is recovered from the tester unloading area TUA (s550). Subsequently, the second unloading arm 720 stores the tray CT on which the recovered tested semiconductor device is loaded in the unloading loading unit 600 according to the grade (s600).

As such, the first feeder 110 and the transfer arm 200, which are in charge of supply and recovery of the tray to the tester loading area TLA, and the first, which is responsible for the transfer and recovery of the tray to the tester unloading area TUA. The second unloading arms 710 and 720 are provided, and are sequentially arranged in the loading stacking unit 100, the checking unit 300, the empty tray stacking unit 400, and the unloading stacking unit 600. Due to the transfer of the tray CT, the transfer and withdrawal speed of the tray can be significantly improved.

Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical spirit of the present invention, and such modifications and variations belong to the appended claims. will be.

1 is a front view schematically showing a tray feeder for a conventional test handler,

Figure 2 is a front view schematically showing a preferred embodiment in the tray feeder for a test handler of the present invention,

3 is a plan view schematically showing a preferred embodiment of the tray feeder for a test handler of the present invention;

Figure 4 is a cross-sectional view schematically showing a preferred embodiment in the empty tray stacking portion provided in the tray feeder for the test handler of the present invention,

5 is a cross-sectional view schematically showing a state in which the empty tray stored therein is conveyed upward in the empty tray stacking unit provided in the tray feeder for the test handler of the present invention;

6 is a cross-sectional view schematically showing a state after the empty tray stored therein is transferred upward in the empty tray stacking unit provided in the tray feeder for the test handler of the present invention;

7 is a flowchart showing a preferred embodiment in the tray transport method of the present invention.

＊ Explanation of symbols for main part of drawing ＊

100: loading loading unit 110: supply transfer unit

111: ball screw 112: lifting body

113: lifting drive 200: transfer arm

210: guide support member 220: transfer picker

300: check unit 310: descending transfer unit

320: rotation unit 330: horizontal transfer unit

400: empty tray loading part 410: introduction hole

420: lifting transfer unit 421: lifting plate

422: drive unit 430: stopper

500: unloading seating part 600: unloading loading part

700: unloading unit 710: first unloading arm

720: second unloading arm CT: tray

TLA: Tester Loading Area TUA: Tester Unloading Area

Claims (10)

A tray conveying apparatus for supplying a tray on which a semiconductor device to be tested is loaded to a tester loading area, and recovering a tray on which the tested semiconductor device is loaded from a tester unloading area, A loading stacking unit configured to store the tray on which the semiconductor device to be tested is loaded and to supply the tray stored therein to the tester loading area by raising the tray; A transfer arm for recovering an empty tray from the tester loading area; An unloading unit transferring the empty tray to the tester unloading area and recovering the tray on which the tested semiconductor device is loaded; An unloading stacking unit for storing the tray recovered by the unloading unit; A checking unit to check whether a semiconductor device remains in the empty tray recovered from the tester loading area; And Includes; empty tray stacking unit for storing the empty tray is confirmed by the identification unit, The confirmation unit and the empty tray stacking unit, And a tray transfer device positioned between the loading loader and the unloading loader. delete The method of claim 1, The transfer arm is, A guide support member formed along the tester loading region and the identification portion; And A transport picker guided by the guide support member to pick up or separate the tray; Tray feeder for the test handler, characterized in that it comprises a. The method of claim 1, The verification unit, A lower feeder for lowering the empty tray recovered by the transfer arm; And A rotating unit rotating the empty tray lowered by the lower transfer unit to check whether a semiconductor element remains; Tray feeder for the test handler, characterized in that it comprises a. 5. The method of claim 4, The verification unit, A horizontal conveying unit for slidingly conveying the empty trays to which the empty trays are checked; Tray tester for the test handler, characterized in that it further comprises. 6. The method according to any one of claims 1 to 5, The unloading unit, A first unloading arm transferring the empty tray on which the tested semiconductor device is loaded to the tester unloading area; And A second unloading arm for recovering the tray on which the tested semiconductor device is loaded from the tester unloading area; Tray feeder for the test handler, characterized in that it comprises a. In the tray transfer method for transferring the tray loaded with the semiconductor device to be tested to the tester loading area, and recovering the tray loaded with the semiconductor device tested by the tester in the tester unloading area, (a) loading the tray to be loaded with the semiconductor device under test and stored in the loading stacker and supplied to the tester loading area by being lifted by a feed transfer unit; (b) supplying the semiconductor device under test to the tester from the tray; (c) recovering the empty tray left after the semiconductor device to be tested is supplied to the identification unit in the tester loading region by a transfer arm; (d) transferring the empty tray to the empty tray stacking unit after confirming whether the semiconductor device remains in the recovered empty tray; (e) transferring the empty tray stored in the empty tray stacking unit to the tester unloading area by a first unloading arm; (f) loading the semiconductor device tested by the tester into the empty tray; And (g) recovering the empty tray on which the tested semiconductor device is loaded from the tester unloading area by a second unloading arm; Tray conveying method comprising a. The method of claim 7, wherein The step (d) Lowering and transporting the empty tray recovered by the checking unit; And Confirming whether a semiconductor device remains by rotating a rotating part of the lowered empty tray; The tray transport method comprising a. The method of claim 7, wherein In step (e), And collecting the tray by the second unloading arm when the tray on which the tested semiconductor device is loaded is seated in the tester unloading area. And the empty tray transfer of the first unloading arm is continuously performed after the tray number of the second unloading arm is recovered. 10. The method according to any one of claims 7 to 9, The step (d) And the checking unit slides the empty tray and stores the empty tray in the empty tray stacking unit.

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