KR101317731B1 - 판형체 반송 장치 - Google Patents

판형체 반송 장치 Download PDF

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Publication number
KR101317731B1
KR101317731B1 KR1020110030115A KR20110030115A KR101317731B1 KR 101317731 B1 KR101317731 B1 KR 101317731B1 KR 1020110030115 A KR1020110030115 A KR 1020110030115A KR 20110030115 A KR20110030115 A KR 20110030115A KR 101317731 B1 KR101317731 B1 KR 101317731B1
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KR
South Korea
Prior art keywords
support
plate
width direction
shaped
cover body
Prior art date
Application number
KR1020110030115A
Other languages
English (en)
Korean (ko)
Other versions
KR20110115520A (ko
Inventor
다쓰오 나카오
다쓰히사 쓰지
Original Assignee
가부시키가이샤 다이후쿠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 다이후쿠 filed Critical 가부시키가이샤 다이후쿠
Publication of KR20110115520A publication Critical patent/KR20110115520A/ko
Application granted granted Critical
Publication of KR101317731B1 publication Critical patent/KR101317731B1/ko

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • B65G49/065Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04Arrangements of vacuum systems or suction cups
    • B65G2249/045Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Fluid Mechanics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020110030115A 2010-04-15 2011-04-01 판형체 반송 장치 KR101317731B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010094375A JP5088591B2 (ja) 2010-04-15 2010-04-15 板状体搬送装置
JPJP-P-2010-094375 2010-04-15

Publications (2)

Publication Number Publication Date
KR20110115520A KR20110115520A (ko) 2011-10-21
KR101317731B1 true KR101317731B1 (ko) 2013-10-15

Family

ID=44775878

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110030115A KR101317731B1 (ko) 2010-04-15 2011-04-01 판형체 반송 장치

Country Status (4)

Country Link
JP (1) JP5088591B2 (zh)
KR (1) KR101317731B1 (zh)
CN (1) CN102219118B (zh)
TW (1) TWI465381B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103961942B (zh) * 2014-04-30 2017-01-11 成都易态科技有限公司 气体过滤装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000007151A (ja) * 1998-06-17 2000-01-11 Tabai Espec Corp ワーク浮上用構造体
KR20040089568A (ko) * 2003-04-14 2004-10-21 가부시키가이샤 다이후쿠 판형체 반송 장치
JP2009064900A (ja) * 2007-09-05 2009-03-26 Ihi Corp クリーン搬送システム
KR100900381B1 (ko) * 2007-04-10 2009-06-02 가부시키가이샤 니혼 셋케이 고교 박판 형상 재료 반송 장치와 방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4258713B2 (ja) * 2003-07-08 2009-04-30 株式会社ダイフク 板状体搬送装置
TWI295658B (en) * 2003-08-21 2008-04-11 Daifuku Kk Transporting apparatus
JP2006312515A (ja) * 2005-05-09 2006-11-16 Tokyo Kakoki Kk 薄物基板材の搬送装置
JP2006321623A (ja) * 2005-05-19 2006-11-30 Dainippon Screen Mfg Co Ltd 基板搬送装置
JP4896148B2 (ja) * 2006-10-10 2012-03-14 株式会社日本設計工業 薄板状材料搬送装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000007151A (ja) * 1998-06-17 2000-01-11 Tabai Espec Corp ワーク浮上用構造体
KR20040089568A (ko) * 2003-04-14 2004-10-21 가부시키가이샤 다이후쿠 판형체 반송 장치
KR100900381B1 (ko) * 2007-04-10 2009-06-02 가부시키가이샤 니혼 셋케이 고교 박판 형상 재료 반송 장치와 방법
JP2009064900A (ja) * 2007-09-05 2009-03-26 Ihi Corp クリーン搬送システム

Also Published As

Publication number Publication date
TWI465381B (zh) 2014-12-21
CN102219118B (zh) 2014-09-24
JP2011225300A (ja) 2011-11-10
JP5088591B2 (ja) 2012-12-05
CN102219118A (zh) 2011-10-19
TW201200448A (en) 2012-01-01
KR20110115520A (ko) 2011-10-21

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