KR101317731B1 - 판형체 반송 장치 - Google Patents
판형체 반송 장치 Download PDFInfo
- Publication number
- KR101317731B1 KR101317731B1 KR1020110030115A KR20110030115A KR101317731B1 KR 101317731 B1 KR101317731 B1 KR 101317731B1 KR 1020110030115 A KR1020110030115 A KR 1020110030115A KR 20110030115 A KR20110030115 A KR 20110030115A KR 101317731 B1 KR101317731 B1 KR 101317731B1
- Authority
- KR
- South Korea
- Prior art keywords
- support
- plate
- width direction
- shaped
- cover body
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Fluid Mechanics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010094375A JP5088591B2 (ja) | 2010-04-15 | 2010-04-15 | 板状体搬送装置 |
JPJP-P-2010-094375 | 2010-04-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20110115520A KR20110115520A (ko) | 2011-10-21 |
KR101317731B1 true KR101317731B1 (ko) | 2013-10-15 |
Family
ID=44775878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020110030115A KR101317731B1 (ko) | 2010-04-15 | 2011-04-01 | 판형체 반송 장치 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5088591B2 (zh) |
KR (1) | KR101317731B1 (zh) |
CN (1) | CN102219118B (zh) |
TW (1) | TWI465381B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103961942B (zh) * | 2014-04-30 | 2017-01-11 | 成都易态科技有限公司 | 气体过滤装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000007151A (ja) * | 1998-06-17 | 2000-01-11 | Tabai Espec Corp | ワーク浮上用構造体 |
KR20040089568A (ko) * | 2003-04-14 | 2004-10-21 | 가부시키가이샤 다이후쿠 | 판형체 반송 장치 |
JP2009064900A (ja) * | 2007-09-05 | 2009-03-26 | Ihi Corp | クリーン搬送システム |
KR100900381B1 (ko) * | 2007-04-10 | 2009-06-02 | 가부시키가이샤 니혼 셋케이 고교 | 박판 형상 재료 반송 장치와 방법 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4258713B2 (ja) * | 2003-07-08 | 2009-04-30 | 株式会社ダイフク | 板状体搬送装置 |
TWI295658B (en) * | 2003-08-21 | 2008-04-11 | Daifuku Kk | Transporting apparatus |
JP2006312515A (ja) * | 2005-05-09 | 2006-11-16 | Tokyo Kakoki Kk | 薄物基板材の搬送装置 |
JP2006321623A (ja) * | 2005-05-19 | 2006-11-30 | Dainippon Screen Mfg Co Ltd | 基板搬送装置 |
JP4896148B2 (ja) * | 2006-10-10 | 2012-03-14 | 株式会社日本設計工業 | 薄板状材料搬送装置 |
-
2010
- 2010-04-15 JP JP2010094375A patent/JP5088591B2/ja active Active
-
2011
- 2011-03-17 TW TW100109111A patent/TWI465381B/zh active
- 2011-04-01 KR KR1020110030115A patent/KR101317731B1/ko active IP Right Grant
- 2011-04-14 CN CN201110101855.XA patent/CN102219118B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000007151A (ja) * | 1998-06-17 | 2000-01-11 | Tabai Espec Corp | ワーク浮上用構造体 |
KR20040089568A (ko) * | 2003-04-14 | 2004-10-21 | 가부시키가이샤 다이후쿠 | 판형체 반송 장치 |
KR100900381B1 (ko) * | 2007-04-10 | 2009-06-02 | 가부시키가이샤 니혼 셋케이 고교 | 박판 형상 재료 반송 장치와 방법 |
JP2009064900A (ja) * | 2007-09-05 | 2009-03-26 | Ihi Corp | クリーン搬送システム |
Also Published As
Publication number | Publication date |
---|---|
TWI465381B (zh) | 2014-12-21 |
CN102219118B (zh) | 2014-09-24 |
JP2011225300A (ja) | 2011-11-10 |
JP5088591B2 (ja) | 2012-12-05 |
CN102219118A (zh) | 2011-10-19 |
TW201200448A (en) | 2012-01-01 |
KR20110115520A (ko) | 2011-10-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101051681B1 (ko) | 판형체 반송 장치 | |
KR101317731B1 (ko) | 판형체 반송 장치 | |
JP4217963B2 (ja) | 板状体搬送装置 | |
JP5233212B2 (ja) | クリーン搬送システム | |
JP4715383B2 (ja) | 搬送台車 | |
JP3882139B2 (ja) | クリーン搬送車 | |
JP5200868B2 (ja) | 浮上搬送装置 | |
JP4251279B2 (ja) | 板状体搬送装置 | |
JP2007230748A (ja) | 物品保管庫及びクリーンルーム用の物品保管設備 | |
JP4186129B2 (ja) | 板状体搬送装置 | |
JP2004269214A (ja) | 浄化空気通風式の保管設備 | |
JP5125291B2 (ja) | 薄板処理装置及びクリーン薄板処理システム | |
JP2005029360A (ja) | 板状体搬送装置 | |
JP4509613B2 (ja) | 基板処理装置 | |
CN105632986A (zh) | 基板输送系统和采用该基板输送系统的热处理装置 | |
KR101184320B1 (ko) | 물품 수납 설비 | |
JP5495065B2 (ja) | 板状体搬送装置 | |
JP4214468B2 (ja) | 搬送装置 | |
JP6685834B2 (ja) | 浮上搬送装置 | |
JP4067703B2 (ja) | 搬送台車 | |
CN102556565B (zh) | 板状体搬送装置 | |
JP6701966B2 (ja) | ロードポート装置及びefem | |
JP2009107778A (ja) | クリーンルーム用搬送設備 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20160920 Year of fee payment: 4 |
|
FPAY | Annual fee payment |
Payment date: 20170919 Year of fee payment: 5 |
|
FPAY | Annual fee payment |
Payment date: 20180918 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20190917 Year of fee payment: 7 |