KR101273720B1 - 제전기 - Google Patents

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Publication number
KR101273720B1
KR101273720B1 KR1020080130466A KR20080130466A KR101273720B1 KR 101273720 B1 KR101273720 B1 KR 101273720B1 KR 1020080130466 A KR1020080130466 A KR 1020080130466A KR 20080130466 A KR20080130466 A KR 20080130466A KR 101273720 B1 KR101273720 B1 KR 101273720B1
Authority
KR
South Korea
Prior art keywords
discharge electrode
gas
static eliminator
ground electrode
gas reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020080130466A
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English (en)
Korean (ko)
Other versions
KR20090072975A (ko
Inventor
고지 후카이
데뻬이 이마타카
Original Assignee
가부시키가이샤 키엔스
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Publication date
Application filed by 가부시키가이샤 키엔스 filed Critical 가부시키가이샤 키엔스
Publication of KR20090072975A publication Critical patent/KR20090072975A/ko
Application granted granted Critical
Publication of KR101273720B1 publication Critical patent/KR101273720B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere

Landscapes

  • Elimination Of Static Electricity (AREA)
KR1020080130466A 2007-12-28 2008-12-19 제전기 Expired - Fee Related KR101273720B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-341093 2007-12-28
JP2007341093A JP5154216B2 (ja) 2007-12-28 2007-12-28 除電器

Publications (2)

Publication Number Publication Date
KR20090072975A KR20090072975A (ko) 2009-07-02
KR101273720B1 true KR101273720B1 (ko) 2013-06-12

Family

ID=40798010

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080130466A Expired - Fee Related KR101273720B1 (ko) 2007-12-28 2008-12-19 제전기

Country Status (5)

Country Link
US (1) US8134821B2 (enExample)
JP (1) JP5154216B2 (enExample)
KR (1) KR101273720B1 (enExample)
CN (1) CN101472377B (enExample)
TW (1) TWI433609B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9543151B2 (en) 2014-08-20 2017-01-10 Samsung Electronics Co., Ltd. Ionizer and substrate transfer system having the same, and method of manufacturing a semiconductor device using the same

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8564924B1 (en) 2008-10-14 2013-10-22 Global Plasma Solutions, Llc Systems and methods of air treatment using bipolar ionization
KR101175987B1 (ko) 2009-12-04 2012-08-22 (주) 브이에스아이 전자선 발생 모듈
JP4773568B2 (ja) * 2010-02-17 2011-09-14 株式会社コガネイ イオン生成装置
CN102123556A (zh) * 2010-12-22 2011-07-13 苏州天华超净科技股份有限公司 离子风机发射针
US9847623B2 (en) 2014-12-24 2017-12-19 Plasma Air International, Inc Ion generating device enclosure
FR3044834A1 (fr) * 2015-12-02 2017-06-09 Pierre Guitton Dispositif de generation d'ions
US9660425B1 (en) 2015-12-30 2017-05-23 Plasma Air International, Inc Ion generator device support
US10980911B2 (en) 2016-01-21 2021-04-20 Global Plasma Solutions, Inc. Flexible ion generator device
US11283245B2 (en) 2016-08-08 2022-03-22 Global Plasma Solutions, Inc. Modular ion generator device
US11695259B2 (en) 2016-08-08 2023-07-04 Global Plasma Solutions, Inc. Modular ion generator device
JP6658459B2 (ja) * 2016-11-02 2020-03-04 株式会社ダイフク イオナイザーユニット
JP6960582B2 (ja) * 2017-10-19 2021-11-05 Smc株式会社 イオナイザ
AU2019218258A1 (en) 2018-02-12 2020-08-27 Global Plasma Solutions, Inc Self cleaning ion generator device
US11581709B2 (en) 2019-06-07 2023-02-14 Global Plasma Solutions, Inc. Self-cleaning ion generator device
CN110856328B (zh) * 2019-10-21 2025-03-14 上海安平静电科技有限公司 一种闭环式静电监测与消除系统
CN115988722A (zh) * 2023-01-28 2023-04-18 河南旭阳光电科技有限公司 静电棒安装绝缘横梁及静电棒安装机构
JP7578857B1 (ja) * 2024-05-30 2024-11-06 株式会社キーエンス 除電器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4048667A (en) 1975-08-13 1977-09-13 Hermann Brennecke Device for discharging static electricity
JPH04370697A (ja) * 1991-06-20 1992-12-24 Takasago Thermal Eng Co Ltd 帯電物体の中和装置
JPH08112549A (ja) * 1994-10-17 1996-05-07 Masuda Yoshiko 炭素繊維を放電極としたコロナ放電ユニットとそれを用 いた電気集塵装置、ガス浄化装置ならびに除電装置
KR20020061477A (ko) * 2001-01-18 2002-07-24 가부시키가이샤 키엔스 이온화 장치 및 이것의 방전 전극봉

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
US4423462A (en) * 1982-07-21 1983-12-27 The Simco Company, Inc. Controlled emission static bar
JP4636710B2 (ja) 2001-03-01 2011-02-23 株式会社キーエンス イオン化装置
US6850403B1 (en) * 2001-11-30 2005-02-01 Ion Systems, Inc. Air ionizer and method
JP2005063869A (ja) * 2003-08-18 2005-03-10 Sony Corp スイッチ付入出力プラグ
TWI362682B (en) * 2003-12-02 2012-04-21 Keyence Co Ltd Ionizer and discharge electrode assembly mounted therein
KR100512137B1 (ko) * 2004-08-13 2005-09-02 (주)선재하이테크 공기통을 갖춘 펄스 교류고전압 코로나방전식 막대형정전기 제거장치
KR101104101B1 (ko) * 2005-06-20 2012-01-12 휴글엘렉트로닉스가부시키가이샤 교류식 이오나이저용 방전 유닛
JP5002451B2 (ja) * 2007-12-28 2012-08-15 株式会社キーエンス 除電器
JP5002450B2 (ja) * 2007-12-28 2012-08-15 株式会社キーエンス 除電器及びこれに組み込まれる放電電極ユニット

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4048667A (en) 1975-08-13 1977-09-13 Hermann Brennecke Device for discharging static electricity
JPH04370697A (ja) * 1991-06-20 1992-12-24 Takasago Thermal Eng Co Ltd 帯電物体の中和装置
JPH08112549A (ja) * 1994-10-17 1996-05-07 Masuda Yoshiko 炭素繊維を放電極としたコロナ放電ユニットとそれを用 いた電気集塵装置、ガス浄化装置ならびに除電装置
KR20020061477A (ko) * 2001-01-18 2002-07-24 가부시키가이샤 키엔스 이온화 장치 및 이것의 방전 전극봉

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9543151B2 (en) 2014-08-20 2017-01-10 Samsung Electronics Co., Ltd. Ionizer and substrate transfer system having the same, and method of manufacturing a semiconductor device using the same

Also Published As

Publication number Publication date
JP2009163950A (ja) 2009-07-23
CN101472377A (zh) 2009-07-01
CN101472377B (zh) 2013-08-21
TW200942088A (en) 2009-10-01
US20090168287A1 (en) 2009-07-02
JP5154216B2 (ja) 2013-02-27
US8134821B2 (en) 2012-03-13
KR20090072975A (ko) 2009-07-02
TWI433609B (zh) 2014-04-01

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