KR101259350B1 - Electrode pattern inspection apparatus having t-type sensor - Google Patents

Abstract

PURPOSE: An electrode pattern inspection apparatus having a T-type sensor is provided to improve the efficiency of glass panel production by drastically shortening the electric inspection time of an electrode pattern. CONSTITUTION: An electrode pattern inspection apparatus having a T-type sensor includes a probe(120), a first sensor(130), and a second sensor(140). A probe applies an electric signal to an electric pattern formed in a glass panel. A first sensor detects whether an electric pattern formed in an active area is open or short by moving in the perpendicular direction of the electric pattern and receiving an electric signal transmitted through the electric pattern formed in the active area in a non-contact way. A second sensor detects whether an electric pattern formed in a fan out area is open or short by moving in the perpendicular direction of the electric pattern in connection with the first sensor and receiving an electric signal transmitted through the electric pattern formed in the fan out area in a non-contact way.

Description

Electrode pattern inspection device having T-type sensor {ELECTRODE PATTERN INSPECTION APPARATUS HAVING T-TYPE SENSOR}

The present invention relates to an electrode pattern inspection apparatus having a T-type sensor, and more particularly, to the electrical inspection of the electrode pattern formed on the glass panel for flat-panel TVs, that is, whether it is OPEN and SHORT, and the position thereof. It relates to an electrode pattern inspection apparatus having a T-type sensor capable of inspecting.

In general, an electrode pattern is formed on a surface of a flat panel glass panel such as a PDP or LED. For example, in the case of a 42-inch PDP, the line width and pitch of one electrode pattern are 50 μm and 300 μm, respectively, and the length reaches 1 m.

Therefore, in the process of forming the electrode pattern as well as in the subsequent manufacturing process such as repeated heat treatment, the line is frequently disconnected or shorted with the adjacent line. Therefore, inspecting whether the electrode pattern is shorted in the middle of the manufacturing process is an essential process for increasing the yield of the finished product.

Referring to Figure 1 will be described the structure of a typical electrode pattern formed on a glass panel.

1 is a diagram illustrating an electrode pattern formed on a general glass panel.

Referring to FIG. 1, a general electrode pattern 200 may include a plurality of pads 210 for contacting a probe, an active area 220 connected to the pads 210, and an active area ( And a fan out area 230 for distributing output to another location. Here, the plurality of electrode patterns 200 formed in the active area 220 are formed horizontally with each other, but the electrode patterns 200 formed in the fan out area 230 have a glass panel 20 for distributing output to other places. The gap between the electrode patterns 200 adjacent to each other by a predetermined distance toward the end side of the c) is gradually reduced, and then the electrode patterns 200 adjacent to each other extend horizontally to each other.

As described above, the electrode pattern 200 of the general glass panel 20 is formed to be divided into the active area 220 and the fan out area 230 to perform electrical inspection of the electrode pattern 200 using a general electrode pattern inspection device. In order to perform the electrical inspection of the active area 220 and the fan out area 230, each has to perform a separate electrode pattern inspection time takes a long time.

In addition, the general electrode pattern inspection apparatus can detect whether the electrode pattern is open or shorted, but there is a problem in that it is not able to detect the position of the open or shorted electrode pattern.

Accordingly, an object of the present invention is to provide an electrode pattern inspection apparatus having a T-type sensor that can simultaneously detect whether the electrode pattern formed in the active area and the fan out area is open and short, as well as the open and short positions, in one scan operation. It is.

An electrode pattern inspection apparatus having a T-type sensor according to an exemplary embodiment of the present invention, a probe for applying an electrical signal to the electrode pattern formed on the glass panel, and applied from the probe while moving in a direction perpendicular to the electrode pattern And a first sensor unit capable of receiving an electrical signal transmitted through an electrode pattern formed in the active area in a non-contact manner and detecting whether the electrode pattern formed in the active area is open or short, and in a direction perpendicular to the electrode pattern. A non-contact method may be used to detect whether an electrode pattern formed in the fan-out area is open or short by receiving an electrical signal applied from the probe and transmitted through an electrode pattern formed in the fan-out area while moving in association with the first sensor unit. It includes a second sensor unit that can be.

For example, the first sensor unit is installed to be movable in a direction parallel to the electrode pattern.

On the other hand, the first sensor unit is formed by an array sensor in which a plurality of sensors are arranged along the length direction of the electrode pattern, each sensor receives the electrical signal transmitted through the electrode pattern for each position of the electrode pattern active area The open and short positions of the electrode patterns formed therein can also be detected.

For example, the second sensor unit is installed to be movable in a direction parallel to the electrode pattern.

Meanwhile, the second sensor unit is formed by an array sensor in which a plurality of sensors are arranged along the length direction of the electrode pattern, and each sensor receives fan by the position of the electrode pattern and receives an electrical signal transmitted through the electrode pattern. Even open and short positions of the electrode pattern formed in the area can be detected.

As described above, an electrode pattern inspection apparatus having a T-type sensor according to an embodiment of the present invention includes an electrode formed in an active area and a fan out area by being applied from a probe while the first sensor part and the second sensor part move in conjunction with each other. By simultaneously receiving the electrical signals transmitted through the patterns in a non-contact manner, there is an advantage in that it is possible to simultaneously detect whether the electrode patterns formed in the active area and the fan out area are opened or shorted by a single scan operation.

In addition, the first sensor and the second sensor are formed by an array sensor arranged along the length direction of the electrode pattern so that each sensor receives an electrical signal for each position of the electrode pattern so that the active area and the fan are executed in one scan operation. There is an advantage of detecting the open and short positions of the electrode pattern formed in the out area.

Therefore, the electrode pattern inspection apparatus having a T-type sensor according to an embodiment of the present invention can significantly shorten the electrical inspection time of the electrode pattern formed on the glass panel, thereby greatly improving the production efficiency of the glass panel. .

1 is a view showing an electrode pattern formed on a typical glass panel
Figure 2 is a schematic diagram for explaining the electrode pattern inspection apparatus having a T-type sensor according to an embodiment of the present invention
Figure 3 is a schematic diagram showing an example of performing an electrical inspection of the electrode pattern by the inspection apparatus according to an embodiment of the present invention

The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present application, the terms "comprising" or "having ", and the like, are intended to specify the presence of stated features, integers, steps, operations, elements, parts, or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art.

Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the meaning in the context of the relevant art and are to be interpreted as ideal or overly formal in meaning unless explicitly defined in the present application Do not.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a schematic diagram for explaining an electrode pattern inspection apparatus having a T-type sensor according to an embodiment of the present invention, Figure 3 is to perform the electrical inspection of the electrode pattern by the inspection apparatus according to an embodiment of the present invention It is a schematic diagram which shows an example.

2 and 3, an electrode pattern inspection apparatus having a T-type sensor according to an embodiment of the present invention includes a moving block 110, a probe 120, a first sensor unit 130, and a second sensor unit. 140.

The moving block 110 is installed to be located above the glass panel 20. Here, the moving block 110 may be installed in a three-axis moving means (not shown) that can move in the three-axis direction. The three-axis moving means capable of moving the moving block 110 in the three-axis direction is generally applied to an electrode pattern inspection device, and for the convenience of description, the schematic and description of the configuration thereof will be omitted. .

The probe 120 applies an electrical signal to the electrode patterns 200 formed on the glass panel 20. For example, the probe 120 may be in contact with the pad portion 210 of the electrode patterns 200 formed on the glass panel 20 to apply an electrical signal to the electrode patterns 200. Probe 120 may be used. Alternatively, the probe 120 may be a non-contact probe 120 that can apply an electrical signal to the electrode patterns 200 formed on the glass panel 20 in a non-contact manner. Here, the probe 120 is installed in the test pin block 150 installed to be movable in the three axis direction next to one side of the first sensor unit 130. Alternatively, the probe 120 may be directly installed in the first sensor unit 130 so that the probe 120 may move in association with the first sensor unit 130. The probe 120 may be attached to the test pin block 150 or the first sensor unit 130 by a wire bonding method, or may be fixed by a plurality of fixing members.

The first sensor unit 130 is installed in the moving block 110 and moves together with the moving block 110 as the moving block 110 moves in a direction perpendicular to the electrode pattern 200. The active area 220 receives an electrical signal applied from the probe 120 and transmitted through the electrode patterns 200 formed in the active area 220 in a non-contact manner while moving in a direction perpendicular to the electrode pattern 200. ) Detects whether the electrode patterns 200 formed in FIG. 2 are open or short. Here, the first sensor unit 130 is installed in the moving block 110 that is movable in the three axis direction can be moved in a direction perpendicular to the electrode patterns 200 in the scan direction, the electrode The pattern 200 may also move in a horizontal direction. On the other hand, the first sensor unit 130 is a plurality of sensors 131 is formed by an array sensor disposed along the longitudinal direction of the electrode pattern 200 to form the electrode patterns 200 formed in the active area 220 Each sensor 131 may receive the electrical signals transmitted through the positions of the electrode patterns 200. Therefore, when it is detected whether the electrode pattern 200 formed in the active area 220 is opened or shorted by the first sensor unit 130, the electrode formed in the active area 220 by the first sensor unit 130 is detected. Even open and short positions of the pattern 200 are detected.

The second sensor unit 140 is installed in the first sensor unit 130 to be moved in conjunction with the first sensor unit 130. For example, the second sensor unit 140 may be installed in the first sensor unit 130 to form a 'T' shape with the first sensor unit 130. As described above, the second sensor unit 140 is installed in the first sensor unit 130 and interlocked with the first sensor unit 130 to move in a direction perpendicular to the electrode patterns 200. Opening of the electrode patterns 200 formed in the fan out area 230 by receiving in a non-contact manner an electrical signal applied from the probe 120 and transmitted through the electrode patterns 200 formed in the fan out area 230. And whether or not a short is detected. Although not shown in the drawing, the second sensor unit 140 may be moved independently of the first sensor unit 130 so as to be movable in a horizontal direction with the electrode patterns 200 independently. The first sensor unit 130 may be installed in the first sensor unit 130. Here, like the first sensor unit 130, the second sensor unit 140 also includes a plurality of sensors 141 formed by an array sensor disposed along a length direction of the electrode pattern 200, thereby providing the fan out area. Each sensor 141 may receive the electrical signals transmitted through the electrode patterns 200 formed in the 230 by positions of the electrode patterns 200. Therefore, when it is detected whether the electrode patterns 200 formed in the fan out area 230 are opened or shorted by the second sensor unit 140, the fan out area 230 is detected by the second sensor unit 140. Also, the open and short positions of the electrode patterns 200 formed in FIG. 2 are also detected.

In addition, the electrode pattern inspection apparatus having a T-type sensor according to an embodiment of the present invention, the probe 120 and the alignment of the first sensor unit 130 and the electrode pattern (one side of the probe 120) The camera 160 for checking the alignment between the 200 and the probe 120 may be further installed.

2 and 3 will be described with reference to the process and the effect of the open and short inspection of the electrode pattern using the electrode pattern inspection device having a T-type sensor according to an embodiment of the present invention as follows. .

2 and 3, using the electrode pattern inspection apparatus having a T-type sensor according to an embodiment of the present invention to perform the open and short inspection of the electrode patterns 200 formed on the glass panel 20 In order to first, the test pin block 150 is moved so that the probe 120 installed in the test pin block 150 contacts the pad unit 210 to apply an electrical signal to the electrode pattern 200. On the other hand, when the probe 120 is installed in the first sensor unit 130 by moving the moving block 110 so that the probe 120 is in contact with the pad portion 210 of the electrode pattern 200. An electrical signal is applied to the electrode pattern.

When the probe 120 contacts the pad of the electrode pattern 200 to apply an electrical signal to the electrode pattern 200, the first sensor unit 130 may include an electrode pattern formed in the active area 220. The electrical signal applied to the 200 is received in a non-contact manner to detect whether the electrode pattern 200 formed in the active area 220 is open or short. Here, the first sensor unit 130 is formed by an array sensor in which a plurality of sensors 131 are disposed along the length direction of the electrode pattern 200, thereby being active by the first sensor unit 130. When it is detected whether the electrode pattern 200 formed in the area 220 is opened or shorted, each sensor 131 transmits an electrical signal applied by the probe 120 and transmitted through the electrode pattern 200. The first sensor unit 130 detects even the open and short positions of the electrode pattern 200 formed in the active area 220 by receiving the electrode pattern 200 for each position. For example, when the electrode pattern 200 formed in the active area 220 is opened, electrical signals are no longer applied along the electrode pattern 200 from the open position of the electrode pattern 200. Therefore, the sensor 131 provided from the pad portion 210 to which the probe 120 is in contact with the position before the electrode pattern 200 is opened may detect an electrical signal, but is provided at the open position. Electrical signals are not detected from the sensor 131. Accordingly, the position of the electrode pattern 200 where the sensor 131 on which the electrical signal is not detected is first detected is an open portion, so that even the open position of the electrode pattern 200 can be detected quickly and accurately.

In the above-described state, the first sensor unit 130 moves along the probe 120 in the scan direction, that is, the direction perpendicular to the electrode pattern 200, to form the respective electrode patterns formed in the active area 220. Perform an electrical inspection of 200).

As described above, the first sensor unit 130 checks whether the electrode patterns 200 formed in the active area 220 are opened and shorted, and at the same time, the second sensor unit 140 has a fan out area. The electrical signal applied to the electrode pattern 200 formed in the 230 is received in a non-contact manner to detect whether the electrode pattern 200 formed in the fan out area 230 is open or short. Here, the second sensor unit 140 is also formed by an array sensor disposed along the length direction of the electrode pattern 200, similarly to the first sensor unit 130, thereby providing the second sensor unit 140 with the second sensor unit 140. When it is detected whether the electrode pattern 200 formed in the fan out area 230 is opened or shorted, the electrical signal applied by the probe 120 and transmitted through the electrode pattern 200 is transferred to each sensor ( The second sensor unit 140 detects the open and short positions of the electrode pattern 200 formed in the fan out area 230 by receiving the 141 by the position of the electrode pattern 140.

For example, when the electrode pattern 200 formed in the fan out area 230 is opened, the electrical signal is no longer applied along the electrode pattern 200 from the open position of the electrode pattern 200. . Therefore, the sensor 141 provided from the electrode pattern 200 to which the probe 120 is in contact with the position before the electrode pattern 200 is opened may detect an electrical signal, but the sensor provided at the open position ( From 141, no electrical signal is detected. Accordingly, the position of the electrode pattern 200 in which the sensor 141 in which the electrical signal is not detected is first detected is an open portion, so that even the open position of the electrode pattern 200 can be detected quickly and accurately.

The second sensor unit 140 as described above is interlocked with the first sensor unit 130 to move in a scan direction, that is, a direction perpendicular to the electrode pattern 200, and each electrode formed in the fan out area 230. Electrical inspection of the patterns 200 is performed.

As described above, the electrode pattern inspection apparatus having the T-type sensor according to an embodiment of the present invention is applied from the probe 120 while the first sensor unit 130 and the second sensor unit 140 move in cooperation with each other. By receiving electrical signals transmitted through the electrode patterns 200 formed in the active area 220 and the fan out area 230 at the same time in a non-contact manner, the active area 220 and the fan out area 230 are only scanned once. The open and short of the electrode patterns 200 formed in the X can be detected at the same time.

In addition, the first sensor unit 130 and the second sensor unit 140 are formed by an array sensor disposed along the length direction of the electrode pattern 200, so that each sensor ( 131 and 141 may receive an electrical signal and detect open and short positions of the electrode pattern 200 formed in the active area 220 and the fan out area 230 in one scan operation.

Therefore, the electrode pattern inspection apparatus having a T-type sensor according to an embodiment of the present invention can significantly shorten the electrical inspection time of the electrode pattern 200 formed on the glass panel 20, so that the production efficiency of the glass panel 20 is improved. Can be greatly improved.

In the detailed description of the present invention described above with reference to the preferred embodiments of the present invention, those skilled in the art or those skilled in the art having ordinary skill in the art will be described in the claims to be described later It will be understood that various modifications and variations can be made in the present invention without departing from the scope of the present invention.

(110): moving block (120): probe
130: first sensor unit 140: second sensor unit
150: Test Pin Block 160: Camera

Claims (5)

In the inspection apparatus for performing an electrical inspection of the electrode pattern formed on the glass panel,
A probe for applying an electrical signal to an electrode pattern formed on the glass panel;
It is possible to detect whether the electrode pattern formed in the active area is open or short by receiving an electrical signal applied from the probe and transmitted through the electrode pattern formed in the active area while moving in a direction perpendicular to the electrode pattern. A first sensor unit; And
An electrode pattern formed in the fan out area by receiving a non-contact electrical signal applied from the probe and transmitted through an electrode pattern formed in the fan out area while moving in association with the first sensor unit in a direction perpendicular to the electrode pattern; Electrode pattern inspection apparatus having a T-type sensor comprising a second sensor unit capable of detecting whether the opening and the short. The method of claim 1,
The first sensor unit,
Electrode pattern inspection apparatus having a T-type sensor, characterized in that installed to be movable in a horizontal direction with the electrode pattern. The method of claim 1,
The first sensor unit is formed by an array sensor in which a plurality of sensors are disposed along a length direction of an electrode pattern, and each sensor receives an electrical signal transmitted through the electrode pattern for each position of the electrode pattern and is formed in an active area. Electrode pattern inspection apparatus having a T-type sensor characterized in that it can also detect the open and short position of the electrode pattern. The method of claim 1,
The second sensor unit,
Electrode pattern inspection apparatus having a T-type sensor, characterized in that installed to be movable in a horizontal direction with the electrode pattern. The method of claim 4, wherein
The second sensor unit,
A plurality of sensors are formed by an array sensor arranged along the length direction of the electrode pattern, and each sensor receives the electrical signals transmitted through the electrode pattern for each position of the electrode pattern to open the electrode pattern formed in the fan out area. And a T-type sensor which can detect even a short position.

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