KR101258478B1 - Method for manufacturing scribing wheel - Google Patents

Abstract

(Problem) In a scribing wheel, the rotation shake precision of a ridge part is manufactured with very high precision.
(Solving means) The scribing wheel 1A is formed coaxially on the left and right sides of a disc-shaped wheel main body portion 2A and a wheel main body portion 2A formed by a sintered diamond having a circular ridge in a plane at the center thereof. It has a cylindrical shaft part 4 and 5. The left and right end faces of the cylindrical shaft portions 4 and 5 are coaxially polished to have tapered portions 6 and 7, and the wheel body portion 2A is formed by grinding the ridge portion of the disc to a predetermined angle. (3A).

Description

Manufacturing method of scribing wheel {METHOD FOR MANUFACTURING SCRIBING WHEEL}

The present invention relates to a method for producing a scribing wheel for scribing a brittle material substrate such as a glass plate.

When dividing a brittle material substrate, such as a glass plate and a ceramic substrate, conventionally, a scribe line is formed in these board | substrates along a desired line, and it divides along a scribe line after that. The scribing wheel used for scribing has, for example, a disc-shaped abacus shape in which the outer circumferential portion is cut-away from both sides into a disc shape, as shown in Patent Document 1. Fig. 1A is a front view illustrating this example. The scribing wheel 100 has a through hole for inserting the pin 101 in the center of the shaft.

Patent Documents 2, 3, and 4 also show scribing wheels formed by integrating a shaft with a scribing wheel body. 1B is a front view illustrating this example. The scribing wheel 110 has a rhombus shape in which the bottom surfaces of the two conical members are bonded to each other, and both ends thereof are held by the tip holder. Is used.

Japanese Patent No.4219945 International Publication No. WO2003 / 51784 Japanese Utility Model Room Publication No. 4-4028 Japanese Laid-Open Patent Publication No. 2004-223799

By the way, in patent document 1, the thickness of a blade edge | tip part is the same as the thickness of a scribing wheel, Moreover, a pin is inserted in the center axis of a scribing wheel without the core shake, and the axis | shaft of a scribing wheel is carried out even during scribing. Since the pins need to coincide, it is difficult to make the blade tip thin.

Moreover, about the scribing wheel of patent documents 2-4 which integrated the shaft and the wheel, there is little freedom of manufacture, and the angle of the ridgeline part of a blade | tip and the distance between shafts become large, and the thickness of a blade | tip part can not be selected arbitrarily. There was a problem. Therefore, as shown in FIGS. 2A and 2B, in any case, when the tip components 112 and 113 are mounted on the substrate 111, a scribe line of narrow gaps between the tip components of the substrate is scribed. It was impossible to do so, and it was necessary to make the space | interval of a tip component wide, and there existed a fault that extra space was produced around the board | substrate after a division | segmentation.

As shown in Fig. 1 (b), the angle β of both tapered portions serving as the contact portion between the angle α of the blade tip portion and the bearing is that in Patent Document 3, α is 110 to 130 °, and β is 50 to 70. Separately specified by °. However, the sum total of alpha and beta is 180 degrees, and it does not disclose about the combination in the range exceeding 180 degrees in total. In Patent Literature 3, since the blade tip portion and the tapered portion are formed as a continuous outer peripheral surface, the outer peripheral surface is formed between the blade tip portion and the tapered portion to form a notch (support portion) of the outer periphery and concentric circles. This is because the total value of β is limited to 180 degrees. In addition, in patent document 4, the angle (alpha) of the base of a blade edge | tip and the angle (beta) of a taper part are 90 degrees, and other angle ranges are not disclosed. In addition, although the ridge line of the blade tip is polished in two stages, a specific angle is not disclosed.

SUMMARY OF THE INVENTION The present invention has been made in view of such a conventional problem, and even with a pin-integrated scribing wheel, the blade tip can be made thin so that it can be scribed to a narrow part where a part is attached to the substrate, and the shim shakes to arbitrary dimensions. It is an object of the present invention to provide a scribing wheel and a method for manufacturing the same, which can be easily manufactured with high precision without using the same.

In order to solve this problem, the scribing wheel of the present invention comprises a disc-shaped wheel main body formed by sintered diamond having a circular ridge line in one plane at the center thereof, and coaxially to the left and right of the wheel main body part. A scribing wheel having a circumferential shaft portion formed by a sintered diamond layer, comprising: a tapered portion formed at an outer end of each of the circumferential shaft portions so as to have a predetermined angle coaxially, and a ridge portion of the wheel body portion It is provided with the blade edge part formed so that a vertex angle may become a predetermined angle.

The wheel body portion may have at least two tapered surfaces, and may be formed by polishing only the tapered surface forming the ridge line of the blade tip portion.

The blade tip may be provided with a groove having a predetermined shape in the ridge line.

Herein, the thickness of the blade tip portion may be 0.4 mm or less.

Here, only the part which consists of a pair of tapered surface which comprises a ridgeline among the said wheel main-body parts may be made into a blade tip, and the thickness of the said blade tip may be 0.03 mm or more.

Here, the blade end portion may have a disc portion formed in the center of the wheel body portion and a tapered portion at the tip of the disc portion.

The thickness of the disc portion may be in the range of 0.4 to 0.03 mm.

Here, the wheel main body may have a tapered inclined portion with the circumferential shaft portion.

Here, the inclined portion of the wheel body portion may be curved so as to be continuous with the circumferential shaft portion.

Here, the vertex angle α of the blade ridge portion and the angle β of the tapered portion are as follows.

185 ° ≤α + β≤290 °

And the vertex angle of the ridge is

75 ° ≤α≤170 °

And the angle β of the tapered portion

60 ° ≤β≤120 °

May be satisfied.

Where the angle β of the tapered portion is

90 ° <β≤120 °

May be satisfied.

Here, the outer diameter (D) of the wheel body portion is

1mm≤D≤6mm

May be satisfied.

Here, the outer diameter (D) of the wheel body portion is

1mm≤D <2.5mm

May be satisfied.

The outer diameter (D) of the wheel body portion and the length (C) of the circumferential shaft portion are

C <D

May be satisfied.

In order to solve this problem, the manufacturing method of the scribing wheel of this invention uses the cylindrical-shaped workpiece | work material by which the circumferential part of the sintered diamond layer was formed coaxially at one end of the cylindrical member by the cemented carbide, Rotating while holding the portion, a pair of coaxial circumferential shaft portions and a wheel main body portion fitted to the circumferential shaft portion are formed in the sintered diamond layer portion by wire discharge machining, and rotated while holding the circumferential portion of the cemented carbide. The outer edges of each of the outer end portions are formed into a tapered shape, rotated while holding the circumferential portion of the cemented carbide, and the ridge portion of the wheel body portion is polished to a predetermined angle to form a blade tip portion, and the sintered diamond layer and the It is produced by cutting a cemented carbide.

Here, at the time of forming the circumferential shaft portion and the wheel body portion by the wire discharge machining, a tapered portion is simultaneously formed on the outer side of the circumferential shaft portion, and when the tapered portion of the circumferential shaft portion is polished, the deteriorated layer of the surface by the wire discharge machining is removed. You may do so.

According to the scribing wheel of the present invention having such a feature, the thickness of the circumferential shaft portion can be arbitrarily selected by appropriately changing the distance between the machining line (the running trajectory (processing portion) of the wire of the wire electric discharge machine) and the central axis. Moreover, the space | interval between a circumferential shaft part, the thickness of a wheel main-body part, and the angle of a blade edge part can be selected arbitrarily. In the scribing wheel having a rhombus shape in which a conventional shaft and the wheel body are integrated, the angle of the tapered surface of the blade tip portion, the angle and spacing of the tapered surface of the circumferential shaft portion, and the outer diameter of the blade tip portion cannot be freely set. In these, each of them can be independently set. In addition, only the tapered portion and the blade end portion of the circumferential shaft end, which require high precision, are polished, and other portions are left to be discharged, so that a scribing wheel with a desired precision can be obtained with minimum manpower and cost.

In addition, by making the thickness of the blade tip 0.4 mm or less, it becomes possible to scribe along the narrow line of the board | substrate on which the tip component etc. were mounted. Moreover, if the inclination part is formed in both surfaces in the wheel main body part, even if the thickness of a blade edge part is made thin, sufficient intensity | strength can be maintained. Therefore, by thinning the blade tip portion, it is possible to scribe along the narrow line of the substrate on which the tip component or the like is mounted.

In addition, the angle α of the blade tip can be selected to an optimal angle independently of the blade tip, for example, 75 to 170 °, so that it is difficult to generate horizontal cracks or chippings. The scribe performance for brittle materials can be improved. Moreover, the angle (beta) of a taper part can be set to the appropriate angle independently from (alpha), for example, 60-120 degree, and the sliding resistance with a bearing becomes small. Moreover, the effect which the recesses formed in a bearing may be shallow is also acquired.

1 is a view showing an example of a conventional scribing wheel.
2 is a view showing a scribe state of a substrate using a conventional scribing wheel.
3 is a front view and a right side view of a scribing wheel according to the first embodiment of the present invention.
4 is a view showing a scribe state of a substrate using the scribing wheel of the present embodiment.
FIG. 5A is a perspective view showing the raw material block 10 used for manufacturing the scribing wheel of the present embodiment. FIG.
5B is a perspective view showing the workpiece 20 cut out from the workpiece block.
It is a figure which shows the processing line (processing site | part) of the electric discharge machining in a workpiece.
It is an enlarged view which shows the sintered diamond layer after electric discharge machining.
6 is a diagram illustrating a modification of the first embodiment.
7 is a front view and a right side view of a scribing wheel according to a second embodiment of the present invention.
8 is a front view and a right side view of a scribing wheel according to a third embodiment of the present invention.
9 is a front view and a right side view of a scribing wheel according to a fourth embodiment of the present invention.
10 is a front view and a right side view of a scribing wheel according to a fifth embodiment of the present invention.
It is a partial enlarged view of the blade edge part of the scribing wheel which concerns on 5th Embodiment of this invention.
It is a partial enlarged view which shows an example of the groove of the blade edge | tip of the scribing wheel by each embodiment of this invention.

(Mode for carrying out the invention)

(1st embodiment)

The scribing wheel which concerns on 1st Embodiment of this invention is demonstrated. Fig. 3 (a) is a front view of this scribing wheel, and Fig. 3 (b) is a right side view thereof. As shown in these figures, the scribing wheel 1A has a disc-shaped wheel body portion 2A at its center, and has the largest circumference ridgeline included in one plane at the center of the thickness direction of the wheel body portion 2A. A tapered portion to be included is formed as the blade tip portion 3A. Moreover, it has the circumferential shaft parts 4 and 5 on both sides of the wheel main-body part 2A coaxially. Tapered portions 6 and 7 each having the same inclination angle are formed at the outer ends of the peripheral shaft portions 4 and 5, respectively. All of these scribing wheels 1A are integrally formed of sintered diamond.

In this embodiment, the thickness of 3 A of blade edge parts and 2 A of wheel main bodies is the same, and as shown to FIG. 3 (a), this thickness is made into w1. The thickness w1 is, for example, 0.4 mm or less, preferably less than 0.3 mm, more preferably 0.2 mm or less. The side of the blade tip portion 3A is a surface perpendicular to the surface of the substrate when scribed. In this case, as shown in Figs. 4A and 4B, the tip components 122 and 123 are mounted on the substrate 121 to be scribed, and the tip is used even when scribing a narrow line between the components. Only the blade tip can be inserted between the parts 122 and 123 to scribe.

Here, the vertex angle α of the ridgeline portion of the blade tip portion 3A can be set to the optimum angle independently of the blade tip portion 3A. For example, vertex angle (alpha) is 75-170 degrees, More preferably, it is the range of 90-170 degrees. If the apex angle α is an obtuse angle, horizontal cracking and chipping (a flaw caused by a scribe line) to the brittle material are less likely to occur, and the scribing performance can be improved.

On the other hand, the angle (beta) of the taper parts 6 and 7 can be set to an optimal angle independently of a taper part. Here, angle (beta) is 60-120 degrees, Preferably it is 75-120 degrees, More preferably, it is 90-120 degrees, More preferably, it is 95-120 degrees. If the angle β is large, the sliding resistance with the bearing tends to be small, and even if the depression formed on the bearing is shallow, it is sufficient. However, if β is too large, the shaking becomes large. On the other hand, when β is small, the sliding resistance with the bearing increases. On the other hand, in this embodiment, by setting it as the shape shown in FIG. 3, angle (alpha) and (beta) of a blade edge part can be set independently, and each can be made into a specific angle.

In addition, in this embodiment, alpha + beta is in the following range.

185 ° ≤α + β≤290 ° ... (1)

By forming a conical outer peripheral surface on both sides of a conventional wheel, in the method of forming the blade tip α corresponding to the bottom of the conical shape together with the tapered portion β corresponding to the vertex of the conical shape, it is inevitable due to manufacturing restrictions. Α + β became 185 °, and it was not possible to manufacture a shaft-integrated wheel with α + β ≠ 180 °.

In addition, the diameter of the scribing wheel is D, and the length between both ends of the circumferential shaft portion (when the tapered portions on both sides are conical, the distance between the vertices of both sides, and the tapered portion is not conical) Case, etc.), let C be the distance between the conical vertices on both sides virtually extended when the taper portion (contact portion with the bearing or the tangent thereof) is extended. Here, the smaller outer diameter D becomes possible to scribe at a smaller scribe load, but if it is too small, manufacturing and handling become difficult. Therefore, the outer diameter D is 1 mm or more and 6 mm or less, Preferably it is 1 mm or more and 2.5 mm or less. In the conventional scribing wheel, in order to keep the distance C constant while keeping the distance C constant, it is necessary to decrease the angle β, but in the present embodiment, C and D Can be set independently.

Conventionally, since α is 90 degrees or more (β is 90 degrees or less), as shown in FIG. 1 (b), the distance between the distance C between the vertices to pivot and the outer diameter D is It becomes the following.

C≥D ... (2)

On the other hand, in this embodiment, the relationship between the length C and the outer diameter D between the circumferential shaft parts 4 and 5 shall be as follows without depending on the magnitude of angle (alpha) and (beta).

C <D ... (3)

Thereby, the shake at the time of scribing can be suppressed.

Next, the manufacturing method of the scribing wheel 1A which concerns on this embodiment is demonstrated. 5A to 5D are views showing a manufacturing process of the scribing wheel 1A according to the present embodiment. FIG. 5A shows the raw material block 10, and the sintered diamond layer 12 having a predetermined thickness is integrally formed on the columnar cemented carbide layer 11. For example, the material block 10 is 30 mm in diameter and 16 mm in height, the thickness of the sintered diamond layer 12 is 3 mm, and the thickness of the cemented carbide layer 11 is 13 mm.

And a plurality of cylindrical members are cut out by wire discharge machining in parallel with the central axis of the raw material block 10. As a result, for example, 40 to 50 thin and long workpieces 20 can be obtained. This workpiece | work material 20 is made into the diameter which matched the diameter to the outer diameter D of the final scribing wheel, for example, is a cylinder-shaped material of 2.0-6.5 mm and length 16 mm. The workpiece 20 also includes a cemented carbide layer 21 and a sintered diamond layer 22.

(Wire discharge processing)

Next, in FIG. 5C, the left portion of the cemented carbide layer 21 of the workpiece 20 is fixed by a chuck to be rotated at a high speed about the center axis of the circumference represented by a dashed line, thereby providing a wire discharge machine. And the portions of the cemented carbide layer 21 and the sintered diamond layer 22 are cut off as shown in Fig. 5C. The trajectory of electric discharge machining is shown here by the process line 30-39. The machining line 30 cuts at a predetermined angle with respect to the central axis of the circumference indicated by a dashed line, the machining line 31 is parallel to the central axis, and the machining line 32 is slightly thicker than this. To form. The machining line 33 is parallel to the central axis, and the machining line 34 is a machining line formed by forming a taper shape with a different diameter after the termination of the machining line 33. The machining line 35 is a tapered portion for forming the blade tip portion 3A at the wheel body portion 2A, and the machining line 36 is also a tapered portion having the opposite slope. Further, the processing line 37 is a line for reducing the diameter, the processing line 38 is a processing line parallel to the central axis having the same thickness symmetrically with the processing line 33, and the processing line 39 is a processing line It is a processing line which has the inclination which is symmetrical with (32). Here, the processing lines 31 to 39 are all formed of the sintered diamond layer 22. Moreover, the processing lines 32 and 39 are set slightly larger than the inclined surfaces of the tapered parts 6 and 7, and leave the shaving part for the grinding | polishing process mentioned later. Moreover, the processing lines 35 and 36 are set slightly larger than the inclined surface of 3 A of blade edge | tips, and leave the shaving part for the grinding | polishing process mentioned later.

And when electric discharge machining is complete | finished, as shown in the partial enlarged view of the front surface in FIG. 5D, the sintered diamond layer 22 turns into a rotating body of the shape of a scribing wheel. The right side view is almost the same as in Fig. 3 (b).

(Rough Shape Molding (Polishing) Process)

Next, the rough shape forming process will be described. At the time of electric discharge machining, since a surface becomes high temperature, a process altered layer is formed and it deteriorates from the surface to several tens of micrometers inside. For this reason, high precision cannot be maintained at the time of use with electric discharge machining. In particular, since the tapered portions 6 and 7 shown in Fig. 3A are in direct contact with the bearing, it is necessary to make an accurate tapered surface after removing the deteriorated working layer. Therefore, after performing the electric discharge machining along the processing line 32 and the processing line 39, polishing processing is further performed to increase the surface precision. In the polishing step, the left side of the cemented carbide layer 21 is fixed by a chuck and rotated around the circumference of the circumferentially as in the case of wire discharge machining to polish the surface of the tapered surface. By this grinding | polishing process, the deterioration layer formed at the time of the process of the process lines 32 and 39 is removed, and the angle of the tapered part of the taper part 6 and 7 of the front-end | tip of the left and right circumferential shaft parts 4 and 5 is accurately corrected. Can be formed.

Moreover, the grinding | polishing process is similarly performed also to the blade edge | tip 3A of 2 A of wheel main-body parts. In particular, since the blade edge portion 3A shown in Fig. 3A is in direct contact with the glass plate or the like that is the object of the scribe, it is necessary to make an accurate surface. Thus, in order to remove the deteriorated layer formed along the processing lines 35 and 36, the cemented carbide layer 21 is fixed by a chuck, rotated about the circumferential axis, and polished. The polishing layer is removed, and the angle of the sharp edge 3A can be set accurately. As described above, the angle of the blade tip 3A is set to 75 to 170 degrees, more preferably 90 degrees or more and 150 degrees or less.

(Cutting process)

By removing the part of the sintered diamond layer on the cemented carbide layer 21 side shown by the dashed-dotted line in FIG. 5D, as shown in FIG. 3, the wheel main-body part 2A and the circumferential shaft parts 4 and 5 are all sintered diamond layer ( The scribing wheel 1A which consists of 22) can be obtained. In this case, the cut surface may be polished so as to be symmetrical. However, since the tip portion enters the through hole of the bearing when in use, the tip portion of the tapered portion 6 is slightly reduced as shown in FIG. It may be left or not polished.

The scribing wheel 1A thus completed holds the left portion of the cemented carbide layer 21 with the chuck, and is rotated to perform wire discharge machining or polishing, so that the wheel main body portion 2A and the cylindrical shaft portions 4, 5 ) Can be precisely aligned. Further, by appropriately changing the distance between the machining lines 33 and 38 and the central axis, the thicknesses of the peripheral shaft portions 4 and 5 can be arbitrarily selected. The interval between the circumferential shaft portions 4 and 5 and the thickness of the wheel body portion 2A vary the intervals between the machining lines 34 and 37, so that the width of the blade tip portion 3A is the interval between the machining lines 34 and 37. According to this, the angle of the blade tip 3A can be arbitrarily selected according to the angles of the machining lines 35 and 36. Since this scribing wheel integrates the wheel main body part and the circumferential shaft part, sufficient strength can be ensured even if the thickness of the blade tip part 3A is thin.

In the scribing wheel having a rhombic shape in which a conventional shaft and the wheel body are integrated, the angle of the tapered surface of the blade tip portion, the angle and spacing of the tapered surface of the circumferential shaft portion, and the outer diameter of the blade tip portion cannot be freely set. In the form, these can be arbitrarily set independently of each other. Further, only the tapered portion and the blade tip portion of the circumferential shaft portion requiring high precision are polished, and other portions are left to be discharged, so that a scribing wheel with a desired precision can be obtained with minimum man-hours and cost.

(Second Embodiment)

Next, 2nd Embodiment of this invention is described using FIG. The scribing wheel 1B which concerns on 2nd Embodiment is also the same as that of 1st Embodiment except the wheel main-body part 2B and the blade edge part 3B. In this scribing wheel 1B, the wheel main body 2B is made to have a two-step taper surface as shown to Fig.7 (a). The other structure is the same as that of 1st Embodiment. And the grinding | polishing of the left and right taper parts 6 and 7 is the same as that of 1st Embodiment. The grinding | polishing of the wheel main-body part 2B is enough by grinding | polishing of the left and right inclined surfaces which are inclined parts near the ridgeline of the blade edge | tip part 3B. In this case, the angle of polishing can be appropriately selected only by the blade edge portion 3B. Thereafter, the scribing wheel 1B is completed by cutting at the tip of the tapered portion 6.

In this embodiment, the thickness of the wheel main body part 2B is made w2a, and the thickness of the blade tip part 3B is made w2b. Also in this case, the thickness w2b of the blade tip portion 3B is 0.4 mm or less, preferably less than 0.3 mm, more preferably 0.2 mm or less. In this case, since the thickness of the wheel main body and the blade tip are independent, the thickness of the blade tip can be determined according to the thickness of the substrate to be scribed and the mounting density of the component. In order to widen the application range of the scribing wheel 1B, it is preferable to make thickness w2b thinner, for example, it can be 0.05 mm or less. Moreover, although the minimum of the thickness w2b of the blade edge | tip 3B is determined according to the intensity | strength required, it is preferable to set it as 0.03 mm or more, for example. For example, when fine tip components are mounted at a high density on a thin substrate made of a brittle material such as a glass plate or a semiconductor substrate having a thickness of 0.7 mm or less, scribing using a scribing wheel having such a thin blade tip is performed. Becomes valid.

(Third embodiment)

Next, 3rd Embodiment of this invention is described using FIG. The scribing wheel 1C according to the third embodiment is also the same as the first embodiment except for the wheel main body 2C and the blade tip 3C. The scribing wheel 1C is such that the wheel main body 2C is provided with two tapered surfaces by the inclined portions 41 and 42. The other structure is the same as that of 1st Embodiment. Polishing of the wheel main body 2C is sufficient by polishing only the left and right inclined surfaces that are the inclined portions of the blade tip 3C close to the ridge line. Also in this case, the angle of polishing can be appropriately selected only by the blade tip portion 3C. After that, the scribing wheel 1C is completed by cutting at the tip of the tapered portion 6.

In this embodiment, the thickness of the wheel main body part 2C is made w3a, and the thickness of the blade tip part 3C is made w3b. Also in this case, the thickness w3b of the blade tip portion 3C is 0.4 mm or less, preferably less than 0.3 mm, more preferably 0.2 mm or less. In this case, since the thickness of the wheel main body and the blade tip are independent, the thickness of the blade tip can be determined according to the thickness of the substrate to be scribed and the mounting density of the component. In order to widen the application range of the scribing wheel 1C, it is preferable to make thickness w3b thinner, for example, it can be made 0.05 mm or less. The lower limit of the thickness w3b of the blade tip portion 3C is determined depending on the required strength, but is preferably set to 0.03 mm or more. For example, when fine tip components are mounted at a high density on a thin substrate made of a brittle material such as a glass plate or a semiconductor substrate having a thickness of 0.7 mm or less, scribing using a scribing wheel having such a thin blade tip is performed. Becomes valid.

(Fourth Embodiment)

Next, 4th Embodiment of this invention is described using FIG. The scribing wheel 1D according to the fourth embodiment is also the same as in the first embodiment except for the wheel body 2D and the blade tip 3D. This scribing wheel 1D is to make the wheel main-body part 2D into three steps of taper surfaces. In other words, instead of the inclined portions 41 and 42, three inclined portions 43 and 44 are formed, and a blade tip portion 3D is formed in the center thereof. The other structure is the same as that of 1st Embodiment. And the grinding | polishing of the left and right taper parts 6 and 7 is the same as that of 1st Embodiment. Polishing of the wheel main body 2D is sufficient for polishing only the left and right inclined surfaces that are the inclined portions of the blade tip portion 3D near the ridgeline. Also in this case, the angle of polishing can be appropriately selected only by the blade tip 3D. Thereafter, the scribing wheel 1D is completed by cutting at the tip of the tapered portion 6. Incidentally, the inclined portions 43 and 44 may be formed as so-called R surfaces, which are curved between the circumferential shaft portions 4 and 5 and the central portions of the inclined portions 43 and 44 so as to be continuous. In this case, the wires Electric discharge machining becomes easy.

In this embodiment, the thickness of the wheel main body 2D is set to w4a, and the thickness of the blade tip portion 3D is set to w4b. Also in this case, the thickness w4b of the blade tip portion 3D is 0.4 mm or less, preferably less than 0.3 mm, more preferably 0.2 mm or less. Also in this case, since the thickness of the wheel main body part and the blade tip part is independent, the thickness of the blade tip part can be determined according to the thickness of the substrate to be scribed and the mounting density of the part. In order to widen the application range of the scribing wheel 1D, it is preferable to make thickness w4b thinner, for example, it can be made 0.05 mm or less. Moreover, although the minimum of the thickness w4b of the blade edge | tip 3D is determined according to the intensity | strength required, it is preferable to set it as 0.03 mm or more, for example. For example, when fine tip components are mounted at a high density on a thin substrate made of a brittle material such as a glass plate or a semiconductor substrate having a thickness of 0.7 mm or less, scribing using a scribing wheel having such a thin blade tip is performed. Becomes valid.

(Fifth Embodiment)

Next, 5th Embodiment of this invention is described using FIG. The scribing wheel 1E according to the fifth embodiment also differs only in the wheel main body 2E and the blade tip 3E, and the other parts are the same as in the first embodiment. In the scribing wheel 1E of 5th Embodiment, as shown to the partial enlarged view of FIG. 9 and FIG. 10, the blade edge part 3E has the disk part 40 formed in the center of the wheel main-body part 2E. The ridgeline is formed on the tapered blade tip. The thickness of the disc portion 40 is the thickness of the blade tip 3E, which is referred to as w5b. Tapered inclined portions 46, 47, 48, and 49 are formed on both sides of the disc portion 40. In this way, even if the thickness w5b of the disc part 40 is made thin, the intensity | strength is maintained by the inclination parts 46-49. In addition, the grinding | polishing of the left and right taper parts 6 and 7 is the same as that of 1st Embodiment. Polishing of the wheel main body 2E is sufficient for polishing only the inclined surface forming the ridgeline of the blade tip 3E. Also in this case, the angle of polishing can be appropriately selected only by the blade tip 3E. Thereafter, the scribing wheel 1E is completed by cutting at the tip of the tapered portion 6. Incidentally, the inclined portions 46 to 49 may be formed as so-called R surfaces, which are curved so as to be gently connected between the peripheral shaft portions 4 and 5 and between the inclined portions 46 and 47, 48 and 49. In this case, wire electric discharge machining becomes easy.

In this embodiment, the thickness of the wheel main body 2E is set to w5a, and the thickness of the blade tip portion 3E is set to w5b. Also in this case, the thickness w5b of the blade tip portion 3E is 0.4 mm or less, preferably less than 0.3 mm, more preferably 0.2 mm or less. In this case, since the thickness of the wheel main body and the blade tip are independent, the thickness of the blade tip can be determined according to the thickness of the substrate to be scribed and the mounting density of the component. In order to widen the application range of the scribing wheel 1E, it is preferable to make thickness w5b thinner, for example, it can be 0.05 mm or less. Moreover, although the minimum of the thickness w5b of the blade edge | tip 3E is determined according to the intensity | strength required, it is preferable to set it as 0.03 mm or more, for example. For example, when fine tip components are mounted at a high density on a thin substrate made of a brittle material such as a glass plate or a semiconductor substrate having a thickness of 0.7 mm or less, scribing using a scribing wheel having such a thin blade tip is performed. Becomes valid.

In this embodiment, since the disk part 40 with a constant thickness is formed, the blade part w5b changes only by changing the distance d shown in FIG. 11 according to the grinding | polishing degree of the blade part 3E. There is no work.

In each of the above-described embodiments, as shown in Japanese Patent No. 3074143 and International Publication WO2007 / 004700, a groove having a predetermined shape may be formed in the ridge portion of the blade tip. Here, the predetermined shape of the groove can be, for example, a U-shaped, V-shaped small wavy or rectangular groove as shown in Figs. 12A to 12D. Such grooves may be formed by grinding, microdischarge, or thermal processing such as a laser to form protrusions at predetermined intervals on the outer peripheral portion of the scribing wheel. Here, the pitch of the grooves is, for example, 20 µm or more depending on the outer diameter, and the depth of the grooves is, for example, 2-20 µm, depending on the outer shape. By forming such a groove, when a scribe line is formed in a brittle material substrate, such as a glass substrate, it does not slip and can extend a vertical crack deeply, and the division after scribing becomes easy. By appropriately selecting the pitch and the depth of the grooves, it is possible to balance the performance of sticking to the surface of the substrate such as glass and the performance of vertically extending the vertical crack.

The present invention can be usefully used in a scribing apparatus for scribing and dividing a brittle material substrate.

1A, 1B, 1C, 1D, 1E: Scribing Wheel
2A, 2B, 2C, 2D, 2E: Wheel Body
3A, 3B, 3C, 3D, 3E: Blade tip
4, 5: circumferential shaft
6, 7: taper
10 material block
11, 21: cemented carbide layer
12, 22: sintered diamond layer
20: processing material
30 to 39: processing line
40: disc part
41 to 49: inclined portion

Claims (2)

Using a cylindrically shaped workpiece having a circumferential portion of the sintered diamond layer coaxially formed at one end of the cylindrical member made of cemented carbide,
Rotating the cylindrical portion of the cemented carbide while holding, forming a pair of coaxial circumferential shaft portion and the wheel body portion fitted to the circumferential shaft portion in the sintered diamond layer portion by wire discharge machining,
Rotating while holding the circumferential portion of the cemented carbide, and formed into a tapered shape by polishing the outer end of each of the circumferential shaft portion,
Rotating while holding the circumferential portion of the cemented carbide, grinding the ridge portion of the wheel body portion to a predetermined angle to form a blade tip,
A method of manufacturing a scribing wheel produced by cutting the sintered diamond layer and the cemented carbide. The method of claim 1,
At the time of formation of the circumferential shaft portion and the wheel body portion by the wire discharge machining, a tapered portion is simultaneously formed on the outer side of the circumferential shaft portion,
A method for producing a scribing wheel for removing the altered layer on the surface by wire discharge machining during polishing of the tapered portion of the circumferential shaft portion.

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