KR20150089984A - Scribing wheel - Google Patents

Abstract

The present invention relates to a scribing wheel having a ridge part with high precision of rotation vibration. The scribing wheel (1A) includes: a wheel main body part (2A) formed in the shape of a disk, formed by sintered diamond having a circular ridge line in one plane on the center; and circumference shaft parts (4, 5) formed to have the same axis on a left side and a right side of the wheel main body (2A). A left cross-section and a right cross-section of the circumference shaft parts (4, 5) have tapered parts (6, 7) formed by grinding the left cross-section and the right cross-section in the same axis. The wheel main body part (2A) has a blade edge part (3A) formed by polishing the ridge portion of the disk to have a certain angle.

Description

Scribing Wheel {SCRIBING WHEEL}

The present invention relates to a scribing wheel for scribing a brittle material substrate such as a glass plate and a manufacturing method thereof.

Conventionally, when dividing a brittle material substrate such as a glass plate or a ceramic substrate, a scribe line is first formed on these substrates along a desired line, and then divided along the scribe line. The scribing wheel used in the scribing is, for example, as shown in Patent Document 1, in the form of a disc having an abacus-like shape whose outer peripheral portion is cut away from both sides in a tapered shape. 1 (a) is a front view showing this example. The scribing wheel 100 has a through hole for inserting the pin 101 around the center.

Patent Documents 2, 3 and 4 also disclose a scribing wheel formed by integrating a shaft and a scribing wheel body portion. 1 (b) is a front view showing this example. The scribing wheel 110 has a rhombic shape in which the bottom surfaces of the two conical members are adhered to each other and both end portions are held by the tip holder .

Japanese Patent No. 4219945 International Publication No. WO2003 / 51784 Japanese public utility model public disclosure bulletin 4-4028 Japanese Patent Application Laid-Open No. 2004-223799

However, in Patent Document 1, the thickness of the edge portion is equal to the thickness of the scribing wheel, and furthermore, the pin is inserted into the central axis of the scribing wheel without shaking of the core, There is a drawback that it is difficult to reduce the thickness of the blade edge portion because the pins must coincide with each other.

Further, with respect to the scribing wheels of Patent Documents 2 to 4 in which the shaft and the wheel are integrated, the degree of freedom in manufacturing is low, the angle of the ridge portion of the blade edge and the distance between the shafts become large, There was a problem. 2 (a) and 2 (b), in any case, when the tip parts 112 and 113 are mounted on the substrate 111, a line having a narrow gap between the tip parts of the substrate is scribed It is necessary to widen the interval of the tip parts, and there is a drawback that an extra space is formed around the substrate after the division.

As shown in Fig. 1 (b), in the case of Patent Document 3,? Is in the range of 110 to 130 占 and? Is in the range of 50 to 70 °, respectively. However, the sum of? And? Is 180 °, and the combination in a range exceeding 180 ° in total is not disclosed. This is because, in Patent Document 3, after forming the cutting edge and the tapered portion as continuous outer circumferential surfaces, the outer circumferential surface between the blade edge portion and the tapered portion forms the cutout (support portion) concentric with the outer circumference. beta is limited to 180 [deg.]. In Patent Document 4, the angle? Of the base of the blade edge and the angle? Of the tapered portion are all 90 degrees, and other angular ranges are not disclosed. In addition, although the ridge line of the blade edge is polished in two stages, the specific angle is not disclosed.

SUMMARY OF THE INVENTION The present invention has been made in view of such a conventional problem, and it is an object of the present invention to provide a scribing device which can be scribed even in a narrow part where a component is mounted on a substrate, And a method of manufacturing the same.

In order to solve this problem, the scribing wheel of the present invention comprises a disc-shaped wheel body portion formed by sintered diamond having a circular ridge in one plane at the center thereof, A tapered portion formed coaxially with each of the outer ends of the circumferential shaft portion at a predetermined angle; and a tapered portion formed in the ridge portion of the wheel body portion And a nose portion formed so that a vertex angle becomes a predetermined angle.

Here, the wheel body portion may have at least two tapered surfaces, and may be formed by polishing only the tapered surfaces forming the ridges of the edge portions.

In this case, the edge portion may be formed with a groove having a predetermined shape in the ridgeline.

Here, the thickness of the edge portion may be 0.4 mm or less.

In this case, only the portion of the wheel body portion constituted by the pair of tapered surfaces constituting the ridgeline may be a blade tip, and the thickness of the blade tip portion may be 0.03 mm or more.

The edge portion may have a disc portion formed at the center of the wheel body portion and a tapered portion at the tip of the disc portion.

Here, the thickness of the disk portion may be in the range of 0.4 to 0.03 mm.

Here, the wheel body portion may have a tapered inclined portion between the wheel body portion and the circumferential shaft portion.

Here, the inclined portion of the wheel body portion may be curved so as to be continuous with the circumferential shaft portion.

Here, the apex angle alpha of the ridge line portion of the edge and the angle beta of the tapered portion satisfy the following equation

185 占?? +?? 290

, And the apex angle alpha of the ridge portion is

75 °??? 170 °

, And the angle (beta) of the tapered portion is

60 °???? 120 °

.

Here, the angle? Of the tapered portion satisfies the following equation

90 [deg.] ≪

.

Here, the outer diameter (D) of the wheel body portion satisfies the following equation

1mm ≤

.

Here, the outer diameter (D) of the wheel body portion satisfies the following equation

1 mm? D <2.5 mm

.

Here, the outer diameter (D) of the wheel body portion and the length (C) of the circumferential shaft portion satisfy the following equation

C <D

.

In order to solve this problem, a manufacturing method of a scribing wheel of the present invention is a method of manufacturing a scribing wheel using a cylindrical workpiece having a circumferential portion of a sintered diamond layer coaxially formed at one end of a cylindrical member made of a cemented carbide, Thereby forming a pair of coaxial circumferential shaft portions and a wheel body portion sandwiched between the circumferential shaft portions in the sintered diamond layer portion while rotating while holding the circumferential portion of the cemented carbide, The outer edge of each of the sintered diamond layer and the sintered diamond layer is formed into a tapered shape and is rotated while holding a circumferential portion of the cemented carbide to polish the ridgeline portion of the wheel body portion to have a predetermined angle, And cutting the cemented carbide layer.

Here, when forming the circumferential shaft portion and the wheel body portion by the wire electric discharge machining, a tapered portion is simultaneously formed on the outer side of the circumferential shaft portion, and at the time of polishing the tapered portion of the circumferential shaft portion, .

According to the scribing wheel of the present invention having such features, the thickness of the circumferential shaft portion can be arbitrarily selected by suitably changing the distance between the machining line (the running locus (machining portion) of the wire of the wire electric discharge machine) and the central axis. Also, the distance between the circumferential shaft portions, the thickness of the wheel body portion and the angle of the blade edge can be arbitrarily selected. The angle of the tapered surface of the blade edge, the angle and the interval of the tapered surface of the circumferential shaft portion, and the outer diameter of the blade edge can not freely be set in the scrimbling wheel of the side surface of the conventional diamond- They can be set independently of each other. Further, by polishing only the tapered portion and the blade edge of the end portion of the circumferential shaft requiring high precision and leaving the other portion as the electric discharge machining, the scribing wheel can be made to have a desired accuracy with a minimum number of holes and cost.

Further, by setting the thickness of the blade edge to 0.4 mm or less, it is possible to scribe along a narrow line of the board on which the tip component is mounted. Further, if the wheel body portion is formed with inclined portions on both sides, sufficient strength can be maintained even if the thickness of the blade edge portion is reduced. Therefore, by thinning the thickness of the nose portion, it becomes possible to scribe along a narrow line of the substrate on which the tip component is mounted.

Further, the angle? Of the blade can be selected independently at an optimum angle, for example, from 75 to 170 degrees, thereby making it difficult to generate horizontal cracks or chipping (flaws occurring along the scribe line) The scribing performance for the brittle material can be improved. Further, the angle? Of the tapered portion can be independently set to an appropriate angle, for example, 60 to 120 占 from?, And the sliding resistance with the bearing is reduced. Also, the effect that the punch formed on the bearing may be shallow is also obtained.

1 is a view showing an example of a conventional scribing wheel.
2 is a view showing a scribe state of a substrate using a conventional scribing wheel.
3 is a front view and a right side view of the scraping wheel according to the first embodiment of the present invention.
4 is a view showing a scribe state of a substrate using the scribing wheel of the present embodiment.
Fig. 5A is a perspective view showing the material block 10 used for manufacturing the scraping wheel of the present embodiment. Fig.
5B is a perspective view showing the workpiece 20 cut out from the work block.
Fig. 5C is a view showing a machining line (machining area) of the discharge machining in the workpiece.
FIG. 5D is an enlarged view showing a sintered diamond layer after discharge processing. FIG.
6 is a view showing a modification of the first embodiment.
7 is a front view and a right side view of a scraping wheel according to a second embodiment of the present invention.
8 is a front view and a right side view of the scraping wheel according to the third embodiment of the present invention.
9 is a front view and a right side view of a scraping wheel according to a fourth embodiment of the present invention.
10 is a front view and a right side view of a scraping wheel according to a fifth embodiment of the present invention.
11 is a partially enlarged view of a blade edge portion of a scraping wheel according to a fifth embodiment of the present invention.
12 is a partially enlarged view showing an example of a groove of a blade edge of a scribing wheel according to each embodiment of the present invention.

(Mode for carrying out the invention)

(First Embodiment)

A description will be given of a scribing wheel according to a first embodiment of the present invention. Fig. 3 (a) is a front view of the scraping wheel, and Fig. 3 (b) is a right side view thereof. As shown in these drawings, the scribing wheel 1A has a disk-shaped wheel body 2A at the center and has a ridge line of the maximum circumference included in one plane at the center in the thickness direction of the wheel body 2A And a tapered portion is formed as a blade edge portion 3A. And has circumferential shaft portions 4 and 5 coaxially and laterally on both sides of the wheel body portion 2A. Tapered portions 6 and 7 having the same inclination angle are respectively formed at the outer ends of the circumferential shaft portions 4 and 5, respectively. All of the scraping wheels 1A are integrally formed of sintered diamond.

In this embodiment, the thickness of the blade portion 3A is equal to the thickness of the wheel body portion 2A, and the thickness is w1 as shown in Fig. 3 (a). The thickness w1 is, for example, 0.4 mm or less, preferably 0.3 mm or less, more preferably 0.2 mm or less. The side of the edge portion 3A is a surface perpendicular to the surface of the substrate when scribing. As a result, as shown in Figs. 4A and 4B, the tip parts 122 and 123 are mounted on the substrate 121 to be scribed, and when scribing a narrow line image between the parts, Scribing can be performed by inserting only the blade tip between the parts 122 and 123. [

Here, the vertex angle alpha of the ridge line portion of the blade edge portion 3A can be independently set to the optimum angle. For example, the apex angle alpha is in the range of 75 to 170 DEG, more preferably 90 to 170 DEG. If the vertex angle alpha is an obtuse angle, the horizontal cracks and chipping (flaws caused by the scribe lines) of the brittle material are less likely to occur, and the scribing performance can be improved.

On the other hand, the angle? Of the tapered portions 6 and 7 can be set to an optimal angle independently of the tapered portion. Here, the angle? Is 60 to 120 占 preferably 75 to 120 占 more preferably 90 to 120 占 and more preferably 95 to 120 占. If the angle? Is large, the sliding resistance against the bearing tends to decrease, and the punch formed on the bearing may be shallow. However, if? Is too large, the shaking becomes large. On the other hand, if? Is small, the sliding resistance against the bearing becomes large. On the other hand, in the present embodiment, the angle? And? Of the blade can be set independently by setting the shape as shown in Fig. 3, and each angle can be set to a specific angle.

In addition, in this embodiment,? +? Is set in the following range.

185 占? + +?? 290 (1)

In the method of forming the edge portions? Corresponding to the base of the conical shape together with the tapered portions? Corresponding to the vertexes of the conical shapes by forming the conical outer peripheral surfaces on both sides of the conventional wheel, And? +? Was 185 deg., So that it was impossible to manufacture a wheel with integral shaft of? +?? 180 deg..

In the case where the diameter of the scraping wheel is D and the length between both ends of the circumferential shaft portion (when the tapered portions on both sides are conical, the distance between the vertexes of both sides, and when the tapered portion does not have a cone shape (The distance between the vertexes of the conical shapes on both sides assumed when the tapered portion (the contact portion with the bearing or the tangent line thereof) is extended) is denoted by C. In this case, scribing at a scribe load with a small outer diameter D is possible, but if it is too small, manufacturing and handling become difficult. Therefore, the outer diameter D is 1 mm or more and 6 mm or less, preferably 1 mm or more and 2.5 mm or less. Here, in the conventional scribing wheel, it is necessary to reduce the angle? In order to keep the distance C constant while keeping the outer diameter D small in relation to the holder. However, in the present embodiment, Can be set independently.

Conventionally, since α is set to 90 ° or more (β is 90 ° or less), the interval between the distance C and the outer diameter D between vertexes pivoting is generally .

C? D (2)

On the other hand, in the present embodiment, the relationship between the length C and the outer diameter D between the circumferential shaft portions 4 and 5 is determined as follows, without depending on the magnitude of the angles alpha and beta.

C <D (3)

Thus, shaking of the scribing can be suppressed.

Next, a manufacturing method of the scraping wheel 1A according to the present embodiment will be described. 5A to 5D are views showing a manufacturing process of the scribing wheel 1A according to the present embodiment. 5A shows a material block 10, and a sintered diamond layer 12 having a predetermined thickness is integrally formed on the upper part of the cylindrical cemented carbide layer 11. As shown in FIG. The material block 10 is 30 mm in diameter and 16 mm in height, the sintered diamond layer 12 is 3 mm thick, and the cemented carbide layer 11 is 13 mm thick, for example.

A plurality of columnar members parallel to the center axis of the material block 10 are cut by wire electric discharge machining. As a result, as shown in Fig. 5B, for example, 40 to 50 elongated workpieces 20 can be obtained. The working material 20 has a diameter that is adjusted to the outer diameter D of the final scribing wheel, and is a cylindrical material having a length of, for example, 2.0 to 6.5 mm and a length of 16 mm. The workpiece 20 also comprises a cemented carbide layer 21 and a sintered diamond layer 22.

(Wire discharge machining)

Next, in FIG. 5C, the left portion of the cemented carbide layer 21 of the workpiece 20 is fixed by a chuck and rotated at a high speed around the center axis of the circumference indicated by the one-dot chain line, And the portions of the cemented carbide layer 21 and the sintered diamond layer 22 are cut off as shown in Fig. 5C. Here, the trajectory of the electric discharge machining is represented by the machining lines 30 to 39. The machining line 30 is cut at a predetermined angle with respect to the center axis of the circumference indicated by the dot-dash line. The machining line 31 is parallel to the center axis, and the machining line 32 is tapered Lt; / RTI &gt; The machining line 33 is parallel to the center axis and the machining line 34 is a machining line formed by forming the tapered shape with different diameters after the end of the machining line 33. The machining line 35 is a tapered portion for forming the blade edge 3A in the wheel body portion 2A and the machining line 36 is also a tapered portion having the opposite gradient. The machining line 38 is a machining line parallel to the central axis having the same thickness symmetrical to the machining line 33 and the machining line 39 is a machining line that is parallel to the machining line 33, (32). &Lt; / RTI &gt; Here, the processing lines 31 to 39 are all formed of the sintered diamond layer 22. Further, the machining lines 32 and 39 are set to be slightly larger than the inclined surfaces of the tapered portions 6 and 7, leaving a cut-off portion for polishing to be described later. Further, the machining lines 35 and 36 are set to be slightly larger than the inclined plane of the blade edge portion 3A, leaving a cut-off portion for polishing to be described later.

When the electric discharge machining is finished, the sintered diamond layer 22 almost turns into a rotating body in the shape of a scribing wheel as shown in a partial enlarged view of FIG. 5D. The right side view is almost the same as Fig. 3 (b).

(Rough shape forming (polishing) process)

Next, the rough shape forming process will be described. At the time of electric discharge machining, the surface becomes hot, so that a damaged layer is formed, and the surface is deformed to the inside of several tens of micrometers. For this reason, high accuracy can not be maintained during use while being subjected to electric discharge machining. In particular, since the tapered portions 6 and 7 shown in Fig. 3 (a) are in direct contact with the bearing, it is necessary to form the tapered surfaces accurately after removing the damaged layer. After the discharge machining along the machining line 32 and the machining line 39, a polishing process is further performed to increase the precision of the surface. In the polishing step, the left side of the cemented carbide layer 21 is fixed by a chuck and rotated about the axis of the circumference as in the case of the wire electric discharge machining, and the surface of the tapered surface is polished. The damaged layer formed at the time of processing the machining lines 32 and 39 is removed by the abrasive machining so that the angle of the tapered portion of the tapered portions 6 and 7 at the tip ends of the left and right circumferential shaft portions 4 and 5 is accurately .

Further, the edge portion 3A of the wheel body portion 2A is similarly polished. Particularly, since the blade edge portion 3A shown in Fig. 3 (a) directly contacts with the glass plate or the like to be scribed, it is necessary to provide an accurate surface. Thus, in order to remove the damaged layer formed along the machining lines 35 and 36, the cemented carbide layer 21 is fixed by a chuck and rotated about the circumference of the circumference to perform polishing. It is possible to precisely set the angle of the sharp pointed end portion 3A while removing the denatured layer by polishing. The angle of the knife edge portion 3A is set to 75 to 170 DEG as described above, and more preferably to 90 DEG or more and 150 DEG or less.

(Cutting process)

5D, the sintered diamond layer on the side of the cemented carbide layer 21 indicated by the one-dotted chain line is peeled off so that all of the wheel body portion 2A and the circumferential shaft portions 4 and 5 are separated from the sintered diamond layer 22 can be obtained as a scribing wheel 1A. In this case, the cut surface may be polished to be laterally symmetrical. However, since the tip portion is further inserted into the through-hole of the bearing at the time of use, the tip end of the tapered portion 6 is slightly It may be left or not polished.

The scribing wheel 1A completed in this way has the wheel body portion 2A and the circumferential shaft portions 4 and 5 ) Can be precisely aligned. The thickness of the circumferential shaft portions 4 and 5 can be arbitrarily selected by suitably changing the distance between the processing lines 33 and 38 and the central axis. The distance between the circumferential shaft portions 4 and 5 and the thickness of the wheel main body 2A can be adjusted by changing the distance between the machining lines 34 and 37 so that the width of the sharp point portion 3A is equal to the distance between the machining lines 34 and 37 The angle of the blade edge portion 3A can be arbitrarily selected in accordance with the angle of the processing lines 35 and 36. [ Since this scraping wheel integrates the wheel body portion and the circular main shaft portion, sufficient strength can be secured even if the thickness of the blade edge portion 3A is reduced.

The angle of the tapered surface of the blade edge, the angle and the interval of the tapered surface of the circumferential shaft portion, and the outer diameter of the blade edge can not freely be set in the scrimbling wheel of the side surface of the conventional diamond- They can be set independently of each other. In addition, by polishing only the tapered portion and the blade edge of the circumferential shaft portion requiring high precision and leaving the other portions as the electric discharge machining, a scribing wheel with a desired accuracy can be achieved with a minimum number of air and costs.

(Second Embodiment)

Next, a second embodiment of the present invention will be described with reference to Fig. The scraping wheel 1B according to the second embodiment is the same as the first embodiment except for the wheel body portion 2B and the blade edge portion 3B. In this scribing wheel 1B, the wheel body portion 2B is made to have two tapered surfaces as shown in Fig. 7 (a). The other structures are the same as in the first embodiment. The polishing of the left and right tapered portions 6 and 7 is the same as that of the first embodiment. The grinding of the wheel body portion 2B is sufficient for the right and left inclined surfaces which are inclined portions close to the ridge of the blade edge portion 3B. In this case, the angle of the polishing process can be appropriately selected only by the blade edge portion 3B. And thereafter cut at the tip of the tapered portion 6 to complete the scribing wheel 1B.

In this embodiment, the thickness of the wheel body portion 2B is w2a, and the thickness of the blade portion 3B is w2b. In this case, the thickness w2b of the blade edge portion 3B is set to 0.4 mm or less, preferably 0.3 mm or less, more preferably 0.2 mm or less. In this case, since the thicknesses of the wheel body portion and the blade edge portion are independent of each other, the thickness of the blade edge portion can be determined according to the thickness of the substrate to be scribed and the mounting density of the component. In order to widen the range of application of the scribing wheel 1B, it is preferable to further reduce the thickness w2b, and it may be 0.05 mm or less, for example. The lower limit of the thickness w2b of the blade 3B is determined according to the required strength, but is preferably 0.03 mm or more, for example. For example, in the case where fine tip parts are mounted at high density on a thin substrate made of a brittle material such as a glass plate or a semiconductor substrate having a thickness of 0.7 mm or less, scribing is performed using a scribing wheel having such a thin edge portion .

(Third Embodiment)

Next, a third embodiment of the present invention will be described with reference to Fig. The scraping wheel 1C according to the third embodiment is the same as the first embodiment except for the wheel body portion 2C and the blade edge portion 3C. The scribing wheel 1C is configured so that the wheel body portion 2C is tapered in two stages by the inclined portions 41 and 42. [ The other structures are the same as in the first embodiment. The grinding of the wheel body portion 2C is sufficient for only the right and left inclined surfaces which are inclined portions of the sharp edges 3C close to the ridgeline. Even in this case, the angle of the abrasive machining can be appropriately selected only by the blade edge portion 3C. And then cut at the tip of the tapered portion 6 to complete the scraping wheel 1C.

In this embodiment, the thickness of the wheel body portion 2C is w3a, and the thickness of the blade edge portion 3C is w3b. In this case, the thickness w3b of the blade edge portion 3C is 0.4 mm or less, preferably 0.3 mm or less, more preferably 0.2 mm or less. In this case, since the thicknesses of the wheel body portion and the blade edge portion are independent of each other, the thickness of the blade edge portion can be determined according to the thickness of the substrate to be scribed and the mounting density of the component. In order to increase the range of application of the scraping wheel 1C, it is preferable to further reduce the thickness w3b, and it may be 0.05 mm or less, for example. The lower limit of the thickness w3b of the blade 3C is determined according to the required strength, but is preferably 0.03 mm or more, for example. For example, in the case where fine tip parts are mounted at high density on a thin substrate made of a brittle material such as a glass plate or a semiconductor substrate having a thickness of 0.7 mm or less, scribing is performed using a scribing wheel having such a thin edge portion .

(Fourth Embodiment)

Next, a fourth embodiment of the present invention will be described with reference to Fig. The scribing wheel 1D according to the fourth embodiment is also the same as the first embodiment except for the wheel body portion 2D and the nose portion 3D. In this scribing wheel 1D, the wheel body portion 2D is made to have three tapered surfaces. That is, instead of the inclined portions 41 and 42, three inclined portions 43 and 44 are formed, and a sharp edge portion 3D is formed at the center. The other structures are the same as in the first embodiment. The polishing of the left and right tapered portions 6 and 7 is the same as that of the first embodiment. The grinding of the wheel body portion 2D is sufficient for polishing only the right and left inclined surfaces which are inclined portions of the blade tip portion 3D close to the ridgeline. Even in this case, the angle of the grinding process can be appropriately selected only by the blade tip portion 3D. Thereafter, the scribing wheel 1D is cut off at the tip of the tapered portion 6 to complete the scribing wheel 1D. The inclined portions 43 and 44 may be formed as so-called R surfaces in which the central portions of the inclined portions 43 and 44 are curved so as to be gently continuous with the circumferential shaft portions 4 and 5. In this case, Discharge processing becomes easy.

In this embodiment, the thickness of the wheel body portion 2D is w4a, and the thickness of the blade portion 3D is w4b. In this case, the thickness w4b of the blade edge portion 3D is 0.4 mm or less, preferably 0.3 mm or less, more preferably 0.2 mm or less. In this case as well, since the thicknesses of the wheel body portion and the blade edge portion are independent, the thickness of the blade edge portion can be determined according to the thickness of the substrate to be scribed and the mounting density of the component. In order to widen the range of application of the scribing wheel 1D, it is preferable to further reduce the thickness w4b, for example, to 0.05 mm or less. Further, the lower limit of the thickness w4b of the blade edge portion 3D is determined according to the required strength, but is preferably 0.03 mm or more, for example. For example, in the case where fine tip parts are mounted at high density on a thin substrate made of a brittle material such as a glass plate or a semiconductor substrate having a thickness of 0.7 mm or less, scribing is performed using a scribing wheel having such a thin edge portion .

(Fifth Embodiment)

Next, a fifth embodiment of the present invention will be described with reference to Fig. The scribing wheel 1E according to the fifth embodiment is different from the scribing wheel 1E only in the wheel body portion 2E and the blade edge portion 3E, and the other portions are the same as those in the first embodiment. In the scribing wheel 1E of the fifth embodiment, the edge portion 3E has the disc portion 40 formed at the center of the wheel body portion 2E, as shown in the enlarged view of Figs. 9 and 10 , And the ridge line is formed at the tip of the tapered blade. The thickness of the disk portion 40 is the thickness of the blade edge portion 3E, which is referred to as w5b. At both sides of the disk portion 40, tapered inclined portions 46, 47 and 48, 49 are formed. Even if the thickness w5b of the disk portion 40 is reduced, the strength is maintained by the inclined portions 46 to 49. [ The polishing of the left and right tapered portions 6, 7 is the same as that of the first embodiment. The polishing of the wheel body portion 2E is sufficient for only the inclined surface forming the ridge of the blade edge 3E. Even in this case, the angle of the polishing process can be appropriately selected only by the blade edge 3E. And then cut at the tip of the tapered portion 6 to complete the scraping wheel 1E. The inclined portions 46 to 49 may be formed as so-called R surfaces that are curved so as to be gently continuous between the circumferential shaft portions 4 and 5 and between the inclined portions 46 and 47 and 48 and 49, The wire discharge machining becomes easy.

In this embodiment, the thickness of the wheel body portion 2E is w5a, and the thickness of the blade edge 3E is w5b. In this case, the thickness w5b of the blade edge 3E should be 0.4 mm or less, preferably 0.3 mm or less, more preferably 0.2 mm or less. In this case, since the thicknesses of the wheel body portion and the blade edge portion are independent of each other, the thickness of the blade edge portion can be determined according to the thickness of the substrate to be scribed and the mounting density of the component. In order to widen the range of application of the scribing wheel 1E, it is preferable to further reduce the thickness w5b, for example, to 0.05 mm or less. The lower limit of the thickness w5b of the blade edge 3E is determined according to the required strength, but is preferably set to 0.03 mm or more, for example. For example, in the case where fine tip parts are mounted at high density on a thin substrate made of a brittle material such as a glass plate or a semiconductor substrate having a thickness of 0.7 mm or less, scribing is performed using a scribing wheel having such a thin edge portion .

In this embodiment, since the disc portion 40 having a constant thickness is formed, only the distance d shown in Fig. 11 changes depending on the degree of polishing of the edge portion 3E, whereby the edge portion w5b changes There is no work.

Further, in each of the above-described embodiments, as shown in Japanese Patent No. 3074143 or International Publication WO2007 / 004700, a groove having a predetermined shape may be formed in the ridge portion of the blade edge. Here, the predetermined shape of the groove may be, for example, a U-shaped or V-shaped small wavy or rectangular groove as shown in Figs. 12 (a) to 12 (d). Such grooves can be formed by grinding, fine discharge, or thermal processing such as laser, so that protrusions at predetermined intervals can be formed on the outer peripheral portion of the scribing wheel. Here, the pitch of the grooves is, for example, 20 占 퐉 or more according to the outer diameter, and the depth of the grooves is, for example, 2 to 20 占 퐉 according to the outer shape. By forming such grooves, the scribe line is not slipped when a scribe line is formed on a brittle material substrate such as a glass substrate, and the vertical crack can be extended to a depth, so that the scribe can be easily divided. By appropriately selecting the pitch and the depth of the groove, it is possible to balance the sticking performance with the surface of the substrate such as glass and the performance with which the vertical crack is extended.

The present invention can be usefully used in a scribe apparatus for scribing and dividing a brittle material substrate.

1A, 1B, 1C, 1D, 1E: scribing wheel
2A, 2B, 2C, 2D, 2E:
3A, 3B, 3C, 3D, 3E:
4, 5: circumferential shaft portion
6, 7: tapered portion
10: Material block
11, 21: Cemented carbide layer
12, 22: sintered diamond layer
20: Working material
30 to 39: Processing line
40:
41 to 49:

Claims (4)

A disk-shaped wheel body portion formed by sintered diamond having a circular ridgeline in one plane in the center,
And a circumferential shaft portion formed by coaxial sintered diamond layers on the right and left sides of the wheel body portion,
A tapered portion formed coaxially at a predetermined angle to each of the outer ends of the circumferential shaft portion,
And a nose portion formed so that an apex angle of the ridge portion of the wheel body portion is a predetermined angle,
And the thickness of the blade edge portion is set to 0.4 mm or less. The method according to claim 1,
Wherein the blade is formed with a groove having a predetermined shape on a ridgeline. The method according to claim 1,
Wherein a portion of the wheel body portion constituted by a pair of tapered surfaces constituting a ridge line is formed as a blade tip portion, and the thickness of the blade tip portion is 0.03 mm or more. The method according to claim 1,
Wherein the blade has a disc portion formed at the center of the wheel body portion and a tapered portion formed on the outer periphery of the disc portion, and the thickness of the disc portion is in the range of 0.4 to 0.03 mm.

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