JP6476883B2 - Multipoint diamond tool - Google Patents

Description

  The present invention relates to a multipoint diamond tool for scribing brittle material substrates such as glass substrates and silicon wafers with diamond points.

  In order to scribe a glass substrate or a silicon wafer conventionally, the tool using the scribing wheel and the diamond point by a single crystal diamond is used. For glass substrates, a scribing wheel has been mainly used to roll on the substrate, but the use of a fixed blade, the diamond point, is also considered from the advantages such as the improvement in the strength of the substrate after scribing. It is coming. Patent documents 1 and 2 propose a point cutter for scribing a substrate of high hardness such as a sapphire wafer or an alumina wafer. In these patent documents, a tool having a cut point on the ridge of a pyramid and a tool having a conical tip are used. Patent Document 3 proposes a scribing apparatus using a glass scriber having a conical tip for scribing a glass plate.

JP 2003-183040 A JP, 2005-079529, A JP, 2013-043787, A

  It is necessary to change the point because the point wears as the scribing is advanced with a tool that is a conventional fixed blade. With pyramidal and conical tools, there are two or at most four possible apex points. Therefore, changing two or four points requires the tool to be replaced, resulting in a problem of frequent replacement. In addition, in scribing with a tool, it is necessary for the points to contact the substrate at an appropriate angle. However, in the conventional tool, when changing the point, it is necessary to rotate the tool in the axial direction, and it has not been easy to adjust the contact angle with high accuracy.

  The present invention has been made in view of such conventional problems, and it is a diamond tool that can easily change the point position and reduce the frequency of replacement even if the point used for scribing wears. Intended to provide.

In order to solve this problem, the multipoint diamond tool of the present invention comprises a polygonal plate-like base having two opposing side surfaces, a plurality of outer peripheral surfaces, and at least one corner of the base, a first inclined surface formed toward the two outer peripheral surface adjacent from one side of said base,
Second inclined surfaces formed toward the two outer peripheral surfaces adjacent to the other side surface of the base ;
And a ridge line at which the first and second inclined surfaces intersect, wherein at least a portion including the ridge line is formed of diamond, and both ends of the ridge line are points.

  Here, a top surface polished from the outer peripheral surface of the base toward both ends of the ridgeline may be provided.

In order to solve this problem, the multipoint diamond tool of the present invention comprises a polygonal plate-like base having two opposing side surfaces, a plurality of outer peripheral surfaces, and at least one corner of the base, The first and second inclined surfaces formed by one side surface of the base, the third and fourth inclined surfaces formed by the other surface of the base, and the first and third inclined surfaces A first ridge line parallel to the surface of the base and a second ridge line at which the second and fourth inclined surfaces intersect and parallel to the surface of the base, at least the first and second The portion including the ridgeline is formed of diamond, and points on both outer ends of the first and second ridgelines.

  Here, a top surface polished from the outer peripheral surface of the base toward both ends of the first and second ridge lines may be provided.

  Here, each of the inclined surfaces may be formed by laser processing.

  Each top surface may be formed by machining.

  According to the present invention having such features, a large number of points can be provided around the diamond tool. Therefore, even if one point wears, a new point can be used by changing the fixing angle of the diamond tool, and it is possible to reduce the frequency of replacing the diamond tool. Furthermore, the contact angle of the point can be easily adjusted because the point can be changed while keeping the attachment angle of the tool constant with respect to the substrate.

FIG. 1 is a side view and a front view of a multipoint diamond tool according to a first embodiment of the present invention. FIG. 2 is a side view and a front view of a multipoint diamond tool according to a modification of the first embodiment. FIG. 3 is a side view and an enlarged view showing a scribe using a diamond tool according to a first embodiment of the present invention. FIG. 4 is a front view showing scribing using a diamond tool according to the first embodiment of the present invention. FIG. 5 is a side view and an enlarged view showing a scribe using a diamond tool according to a first embodiment of the present invention. FIG. 6 is a side view and a front view of a diamond tool according to a second embodiment of the present invention. FIG. 7 is a side view and a front view of a diamond tool according to a modification of the second embodiment of the present invention. FIG. 8 is a side view and a front view of a diamond tool according to a third embodiment of the present invention. FIG. 9 is an enlarged side view and a front view of a main part of a diamond tool according to a third embodiment of the present invention.

  Next, a first embodiment of the present invention will be described. FIG. 1 is a side view and a front view showing an example of a multipoint diamond tool (hereinafter simply referred to as a diamond tool) 10 according to the present embodiment. The diamond tool 10 is based on a polygonal plate material having a fixed thickness and an arbitrary number of rotationally symmetric sides. In this embodiment, a plate-shaped square base 11 of a constant thickness is made of single crystal diamond, and has a through hole 12 at its center. As shown in FIG. 1, the base 11 is polished in a V-shape from both sides of a square corner. That is, the first inclined surface 13a is formed by cutting away from the one side surface 11a toward the outer peripheral surface of the base to a half or more of the thickness of the base 11. At this time, it is preferable that the first inclined surface 13 a and the two adjacent outer peripheral surfaces 16 and 19 of the base 11 be formed so as to have equal angles. Similarly, the first inclined surfaces 13b to 13d are formed at the other corners of the same side surface 11a. Then, similarly, the second side surface 11b of the base 11 is cut to a half of the thickness of the base 11 toward the two adjacent outer peripheral surfaces 16 and 19 of the base 11 to form a second trapezoidal shape. The inclined surfaces 14a to 14d are formed. Such an inclined surface can be easily formed by laser processing. In addition, mechanical polishing may be further performed after laser processing, and a portion where a ridge line is to be formed may be a more precise polished surface. In this manner, the pair of first and second inclined surfaces 13a and 14a with respect to the same corner intersect and the middle of the thickness direction of the base 11, preferably at the central position as shown in FIG. 1 (b) A ridge line 15a parallel to 11a and 11b and perpendicular to the diagonal of the base in side view is formed. Similarly, the first and second inclined surfaces 13b and 14b, 13c and 14c, 13d and 14d intersect each other in the middle of the thickness direction of the base 11, preferably at a central position, parallel to the side faces 11a and 11b of the base The ridge lines 15 b, 15 c and 15 d are formed, and four ridge lines perpendicular to the diagonal of the base are formed at the corner of the base 11. Here, the outer peripheral surfaces of the base 11 in the four directions become top surfaces 16, 17, 18, 19. Here, the top surface refers to a surface that is in contact with the first and second inclined surfaces forming the ridge and shares one end of the ridge. The two ends of the ridgeline where one ridgeline 15a is in contact with the top surfaces 16 and 19, that is, the intersections of the first inclined surface 13a and the second inclined surfaces 14a and the top surfaces 16 and 19 are points P1 and P2. The angle α between the top surface and the ridgeline at the points P1 and P2 is about 135 °. The same applies to the other six inclined surfaces, and points at which the top surfaces of the ridge lines 15b to 15d are in contact with the top surfaces, that is, the first inclined surfaces 13b to 13d, the second slopes 14b to 14d, and the top surfaces 16 to 19 The points of intersection with the points are taken as points P3 to P8, respectively. By setting the ends of the ridge lines 15a to 15d to points P1 to P8 as described above, eight points are formed around the diamond tool 10 that is octagonal in a side view as shown in FIG. 1A. Can.

  Next, a diamond tool 20 according to a modification of the first embodiment will be described. FIG. 2 is a side view and a front view of this modification, and the same parts as in the first embodiment are given the same reference numerals. In this modification, after forming the first inclined surfaces 13a to 13d and the second inclined surfaces 14a to 14d, as shown in FIG. 2, each of the ridges 15a to 15d is further polished from its both end portions toward the outer peripheral surface. The top surface is formed by forming a surface different from the outer peripheral surface of the square of the base 11. That is, the small triangular polishing surfaces shown in FIG. 2B are the top surfaces 21a, 21b, 22a, 22b, 23a, 23b, 24a, 24b, and the angle α between the top surface and the ridge line is 135 in the first embodiment. Will be greater than ° Therefore, in this case, the top surface can be machined with high accuracy, and the position of the point can be machined precisely. Further, the minimum angle between the top surface and the ridgeline can be adjusted to a value larger than 135 ° in accordance with the type and thickness of the brittle material substrate to be scribed.

  The case of scribing using the diamond tool 10 or 20 according to this embodiment will be described with reference to FIGS. At the time of scribing, one point P1 of the diamond tool 10 (or 20) is brought into contact with the substrate 25 as shown in FIG. 3 (a), and the arrow A shown in the figure is the ridge line direction at the point P1. Move in the direction and scribe. Since the diamond tool 10 does not roll, scribing can be performed at the same point. At this time, as shown in an enlarged view around the point P1 in FIG. 3B, a diamond is preferably formed so that the angle θ between the ridgeline and the brittle material substrate is preferably 2 to 10 °, more preferably 3 to 7 °. The tool 10 is brought into contact. FIG. 4 is a view showing a scribing state as viewed from the arrow A direction. As shown in the figure, since the scribing wheel is a thin plate-shaped base, the diamond tool is moved to the narrow gap between the parts even if the parts 26 are present on the upper surface of the substrate 25. You can make it scribe.

  When the point P1 in contact with the substrate 25 is deteriorated due to wear, as shown in FIG. 5, the diamond tool 10 is rotated about the through hole 12 to bring the adjacent point P2 into contact with the substrate 25 to make the same. Then, scribing is performed in the arrow B direction which is the ridge line direction at the point P2. FIG. 5B is an enlarged view showing the periphery of the point P2. At this time, the rotation angle is determined according to the angle between the ridge line and the brittle material substrate. That is, the angle θ between the ridge line and the brittle material substrate is made equal in the case of scribing using the point P2 and in the case of using the point P1. If this is repeated, scribing can be performed at new points by the number of points formed around the disc even if the points deteriorate due to wear. In addition, even if the diamond tool 10 is rotated, the angle at which the edge of the cutting edge contacts the substrate in the side view of the diamond tool 10 does not change, so it is easy to adjust the contact angle of the point with the substrate.

  When the diamond tool 10 is used in the same direction, when the point P1 wears, the diamond tool 10 is rotated 90 ° at a time to sequentially use the points P3, P5 and P7, and when all four points wear, diamond Invert tool 10. Then, points P2, P4, P6, and P8 are sequentially brought into contact so that the angle θ between the ridge line and the brittle material substrate is constant, and scribing is performed by changing the point position a total of four times after reversal. In this way, scribing can be performed by changing the points eight times in total. Also when using the diamond tool 20, it is possible to change the point eight times and scribe in the same manner.

  Next, a second embodiment of the present invention will be described with reference to FIG. The diamond tool 30 according to the second embodiment has a through hole 32 at the center of a hexagonal base 31 made of single crystal diamond, and is polished in a V shape like the first embodiment from both sides of the corners of the base 31. The first inclined surfaces 33a to 33f and the second inclined surfaces 34a to 34f are formed. In this way, ridge lines 35a to 35f are formed between the inclined surfaces 33a and 34a, 33b and 34b, and so on. Both ends of each ridge line 35a to 35f are points P1 to P12. Such an inclined surface can be easily formed by laser processing. In addition, mechanical polishing may be further performed after the laser processing to form a more accurate inclined surface by the portion forming the ridge line. Here, the side surfaces of the base 31 are top surfaces 36 to 41. And 12 points can be formed by making the both ends of ridgeline 35a-35f into a point. In this case, the angle between the top surface and the ridgeline is 150 °.

  Next, a diamond tool 50 according to a modification of the second embodiment will be described. FIG. 7 is a front view and a side view of this modification, and the same parts as in the second embodiment are given the same reference numerals. Also in this embodiment, as in the modification of the first embodiment described above, as shown in FIG. 7, polishing is further performed from the side of both end portions of the ridge lines 35 a to 35 f, Form a surface different from the top surface. In this case, the small triangular polishing surfaces from the sides of both end portions of the ridge lines 35a to 35f toward the points P1 to P12 are the top surfaces 51a, 51b, 52a, 52b,... 56a, 56b, and the top surface and the ridgeline The formed angle α is larger than 150 ° in the second embodiment. Accordingly, the positions of the points P1 to P12 are changed, and the ridge line is slightly shortened. In this case, a small top surface can be machined with high precision by grinding, and the position of the point can be machined precisely. Also, the angle between the top surface and the ridge line can be made larger than 150 °, and can be adjusted to an appropriate angle according to the substrate.

  When scribing in this diamond tool 30 or 50 as well, one point P1 is brought into contact with the substrate 25 to perform scribing. Then, when this point is worn, it is rotated along an axis (not shown) inserted in the through hole of the diamond tool 30 or 50 as in the first embodiment, and the adjacent points are brought into contact to perform scribing. . Also in this case, the angle θ between the ridge line and the brittle material substrate is made constant. By repeating this, scribing can be performed at a total of 12 points.

  Next, a third embodiment of the present invention will be described using FIG. 8 and FIG. Similarly to the first embodiment, the diamond tool 60 according to this embodiment also has a through hole 62 at the center of a square plate-like base 61 of single crystal diamond and having a constant thickness. In this embodiment, the first and second inclined surfaces 62a and 62b are formed from the side surface 61a forming the corner of the base 61 toward the outer peripheral surface. At this time, the first and second inclined surfaces cross each other by being polished at an angle of, for example, 5 ° from the perpendicular to the diagonal of the polygon of the base 61. Similarly, third and fourth inclined surfaces 63a and 63b are formed from the other side surface 61b. The line of intersection of the first and third inclined surfaces is taken as a first ridgeline 64a, and the line of intersection between the second and fourth inclined surfaces 62b, 63b is taken as a second ridgeline 64b. The two ridge lines 64 a and 64 b are preferably parallel to the side surfaces 61 a and 61 b of the base 61. The first ridgeline 64a and the second ridge 64b are formed, for example, at an angle of about 5 ° with respect to the ridgeline 35a in the first and second embodiments. Therefore, the angle between the first ridge and the second ridge is, for example, about 170 degrees.

  Similarly, with respect to one other corner adjacent to this corner, the first and second inclined surfaces 65a and 65b from one side of the base 61 and the third and fourth inclined surfaces 66a, 66b from the other side. 66b is formed, and the line of intersection of the inclined surfaces 65a and 66a is taken as a first ridge line 67a, and the line of intersection of the inclined surfaces 65b and 66b is taken as a second ridge line 67b. Similarly, the first to fourth inclined surfaces 68a, 68b, 69a and 69b are formed for the other one corner, and the intersections of the inclined surfaces are taken as the first ridgeline 70a and the second 70b. The first to fourth inclined surfaces 71a, 71b, 72a, 72b are also formed at the remaining corners, and the intersections of the inclined surfaces are taken as a first ridgeline 73a and a second ridgeline 73b.

  Next, as shown in FIGS. 8B and 9B, the outer peripheral surface of the base 61 is polished toward the first ridgeline 64a and the second ridgeline 64b to form top surfaces 74a and 74b. In this way, one vertex can be formed by the first and third inclined surfaces 62a and 63a and the top surface 74a, which is referred to as a point P1. Similarly, a vertex can be formed by the second and fourth inclined surfaces 62b and 63b and the top surface 74b polished from the side, and this is defined as a point P2. In this way, two points can be formed at one corner of the base 61.

  The other one corner adjacent to this corner is also polished toward the first ridge line 67a and the second ridge line 67b from the outer peripheral surface of the base 61 to form the top surfaces 75a and 75b. In this way, one apex can be formed by the first and third inclined surfaces 65a and 66a and the top surface 75a, which is referred to as a point P3. Similarly, an apex can be formed by the second and fourth inclined surfaces 65b and 66b and the top surface 75b polished from the side, and this is referred to as a point P4.

  Further, the outer surfaces of the base 61 are polished toward the ridge lines 70a and 70b to form top surfaces 76a and 76b. In this way, one apex can be formed by the first and third inclined surfaces 68a and 69a and the top surface 76a, which will be referred to as a point P5. Similarly, a vertex can be formed by the second and fourth inclined surfaces 68b and 69b and the top surface 76b polished from the side, which is referred to as a point P6.

  Further, the outer surfaces of the base 61 are polished toward the ridge lines 73a and 73b to form top surfaces 77a and 77b. In this way, one apex can be formed by the first and third inclined surfaces 62a and 63a and the top surface 77a, which is referred to as a point P7. Similarly, an apex can be formed by the second and fourth inclined surfaces 62b and 63b and the top surface 77b polished from the side, and this is referred to as a point P8. In this embodiment, since the top surface constituting each point and the two inclined surfaces do not constitute other points but are independent, precise polishing is possible without affecting other points. It becomes possible. In this way, eight points P1 to P8 can be formed around the base.

  In the third embodiment, the upper surface of the triangle is formed by polishing the side surfaces of the edges of the two ridge lines formed by the first, third and second, fourth inclined surfaces. However, the outer peripheral surface of the base 61 may be used as the top surface, and the vertexes formed by the inclined surfaces 62a and 63a and the side surfaces, and the inclined surfaces 62b and 63b and the outer peripheral surface may be formed as points. The same is true for the other corner points.

  When scribing using this diamond tool 60, scribing is performed by bringing one point P1 into contact with the substrate. If the position is worn, the diamond tool 60 is rotated to use adjacent points. At this time, the angle θ between the ridge line and the brittle material substrate is made constant at the time of scribing. This makes it possible to scribe by changing the point position eight times. When the point P1 wears, the diamond tool is rotated by 90 ° and points P3, P5 and P7 are used. When all four points wear, the diamond tool is reversed and the angle θ between ridge line and brittle material substrate is constant The points may be adjusted to use the four points P2, P4, P6, and P8, and a total of eight points may be used.

  In each embodiment described above, eight or twelve points are provided around the periphery, but it is sufficient to provide points at at least one corner, and it is not necessary to provide inclined surfaces and points at all the corners. However, it is preferable to provide as many points as possible on the outer peripheral portion in a range in which adjacent points do not interfere with each other. This allows points to be exchanged simply by rotating the diamond tool as each point wears out, and the frequency of diamond tool replacement can be reduced. In addition, the shape of the base is not limited to a quadrangle and a hexagon, and may be any polygon.

  In the embodiment described above, the entire base is made of single crystal diamond, but since it is sufficient if the surface portion in contact with the brittle material substrate is diamond, it is formed using cemented carbide or sintered diamond. A polycrystalline diamond layer may be formed on the outer peripheral surface of the base and the surface of the ridgeline, and this may be further precisely polished to form points. Alternatively, a single crystal or polycrystalline diamond doped with an impurity such as boron to have conductivity may be used. By using a conductive diamond, the inclined surface and the through hole can be easily formed by electrical discharge machining.

  In the embodiment described above, the diamond tool is moved in the ridge line direction at each point to scribe, but may be moved to the top surface direction of each point to scribe.

  The multipoint diamond tool of the present invention can be used in a scribing apparatus for scribing a brittle material substrate, and in particular, it can be effectively used also for a highly hard scribing object in which the wear of the diamond tool increases.

10, 30, 50, 60 Multipoint Diamond Tools 11, 31, 51, 61 Bases 11a, 11b, 61a, 61b Sides 12, 32, 52, 62 Through Holes 13, 33, 43 Polished Surfaces 13a to 13d, 14a to 14d , 33a to 33f, 34a to 34f, 62a, 62b, 63a, 63b, 65a, 65b, 66a, 66b, 68a, 68b, 69a, 69b, 72a, 71b, 72a, 72b inclined surfaces 15a to 15d, 35a to 35f, 64a, 64b, 67a, 67b, 70a, 70b, 73a, ridgelines 16 to 19, 21a, 21b, 22a, 22b, 23a, 23b, 24a, 24b, 36 to 41, 51a to 56b, 74a to 77b top surface P1 ~ P12 points

Claims (6)

A polygonal plate-like base having two opposite side surfaces and a plurality of outer peripheral surfaces;
For at least one corner of the base:
A first inclined surface formed toward the two outer peripheral surface adjacent from one side of said base,
Second inclined surfaces formed toward the two outer peripheral surfaces adjacent to the other side surface of the base;
And a ridge line which is an intersection line of the first and second inclined surfaces,
At least a portion including the ridge line is formed of diamond,
Multipoint diamond tool with points at both ends of the ridgeline.   The multi-point diamond tool according to claim 1, further comprising a polished surface polished from the outer peripheral surface toward both ends of the ridgeline. A polygonal plate-like base having two opposite side surfaces and a plurality of outer peripheral surfaces;
For at least one corner of the base:
First and second inclined planes formed by one side of the base and intersecting each other;
Third and fourth inclined planes formed by the other side of the base and intersecting each other;
It comprises a first ridge line at which the first and third inclined surfaces intersect and a second ridge line at which the second and fourth inclined surfaces intersect.
The portion including at least the first and second ridges is formed of diamond,
A multipoint diamond tool having points outside both ends of the first and second ridges.   The multi-point diamond tool according to claim 3, further comprising a polished surface polished from the outer peripheral surface of the base toward both ends of the first and second ridges.   The multipoint diamond tool according to any one of claims 1 to 4, wherein each of the inclined surfaces is formed by laser processing.   The multi-point diamond tool according to claim 2 or 4, wherein each of the polishing surfaces is formed by machining.

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