JP2016132112A - Multi-point diamond tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a replacement frequency of a tool even if a point is abraded by scribing.SOLUTION: Both sides of a ridgeline are set as a point by forming an inclined plane from both sides of a base to the corner of the base 11 of a diamond tool 10. Any point of this diamond tool 10 is contacted with a substrate, and is scribed without rolling. When the point is abraded by scribing, the diamond tool 10 is rotated, and is thereby scribed by using another point. Thus, a plurality of points can be used by one diamond tool, so that a replacement frequency of the diamond tool can be reduced.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a multipoint diamond tool for scribing brittle material substrates such as glass substrates and silicon wafers with diamond points.

  Conventionally, a tool using a scribing wheel or a diamond point made of single crystal diamond is used to scribe a glass substrate or a silicon wafer. For glass substrates, scribing wheels that have mainly been rolled with respect to the substrate have been used, but the use of diamond points, which are fixed blades, has also been considered due to advantages such as improved substrate strength after scribing. It is coming. Patent Documents 1 and 2 propose a point cutter for scribing a substrate having high hardness such as a sapphire wafer or an alumina wafer. In these patent documents, a tool having a cut point on a ridge line of a pyramid or a tool having a conical tip is used. Patent Document 3 proposes a scribing device using a glass scriber having a conical tip for scribing a glass plate.

JP 2003-183040 A Japanese Patent Laying-Open No. 2005-079529 JP 2013-043787 A

  When scribing is advanced with a tool that is a conventional fixed blade, the point wears, so it is necessary to change the point. In the pyramid or conical tool, there are two or a maximum of four vertex points that can be used. Therefore, there is a problem in that changing the points at two or four points necessitates replacement of the tool, resulting in high replacement frequency. Further, in scribing with a tool, the points need to contact the substrate at an appropriate angle. However, in the conventional tool, when changing the point, it is necessary to rotate the tool in the axial direction, and it is not easy to accurately adjust the contact angle.

  The present invention has been made in view of such conventional problems, and even if the point used for scribing is worn, the diamond tool can easily change the point position and reduce the replacement frequency. The purpose is to provide.

  In order to solve this problem, a multipoint diamond tool according to the present invention includes a polygonal base and at least one corner of the base that is formed from a side surface of the base toward the other side surface. 1 and a second inclined surface and a ridge line where the first and second inclined surfaces intersect, at least a portion including the ridge line is formed of diamond, and both ends of the ridge line are points. It is.

  Here, you may make it have the top | upper surface grind | polished toward the both ends of the said ridgeline from the outer peripheral surface of the said base.

  In order to solve this problem, a multipoint diamond tool of the present invention includes a polygonal base and first and second sides formed from one side surface of the base with respect to at least one corner of the base. An inclined surface, third and fourth inclined surfaces formed from the other surface of the base, a first ridge line intersecting the first and third inclined surfaces and parallel to the surface of the base, and the first 2 and a fourth ridge line intersecting with the base surface, and at least a portion including the first and second ridge lines is formed of diamond, The outer ends of the second ridge line are used as points.

  Here, you may make it have the top | upper surface grind | polished toward the both ends of the said 1st, 2nd ridgeline from the outer peripheral surface of the said base.

  Here, the inclined surfaces may be formed by laser processing.

  Each of the top surfaces may be formed by machining.

  According to the present invention having such characteristics, a large number of points can be provided around the diamond tool. Therefore, even if one point is worn, a new point can be used by changing the fixed angle of the diamond tool, and the effect that the frequency of replacing the diamond tool can be reduced can be obtained. Furthermore, since the point can be changed with the mounting angle of the tool fixed with respect to the substrate, the contact angle of the point can be easily adjusted.

FIG. 1 is a side view and a front view of a multipoint diamond tool according to a first embodiment of the present invention. FIG. 2 is a side view and a front view of a multipoint diamond tool according to a modification of the first embodiment. FIG. 3 is a side view and an enlarged view showing a scribe using the diamond tool according to the first embodiment of the present invention. FIG. 4 is a front view showing a scribe using the diamond tool according to the first embodiment of the present invention. FIG. 5 is a side view and an enlarged view showing a scribe using the diamond tool according to the first embodiment of the present invention. FIG. 6 is a side view and a front view of a diamond tool according to a second embodiment of the present invention. FIG. 7 is a side view and a front view of a diamond tool according to a modification of the second embodiment of the present invention. FIG. 8 is a side view and a front view of a diamond tool according to the third embodiment of the present invention. FIG. 9 is an enlarged side view and front view of the main part of the diamond tool according to the third embodiment of the present invention.

  Next, a first embodiment of the present invention will be described. FIG. 1 is a side view and a front view showing an example of a multipoint diamond tool (hereinafter simply referred to as a diamond tool) 10 according to the present embodiment. The diamond tool 10 is based on a polygonal plate material having an arbitrary number of rotationally symmetric sides with a constant thickness. In this embodiment, a plate-like and square base 11 having a constant thickness is made of single crystal diamond, and has a through hole 12 at the center thereof. The base 11 is polished into a V shape from both sides of the four corners as shown in FIG. That is, the first inclined surface 13a is formed by cutting from one side surface 11a toward the outer peripheral surface of the base until it becomes 1/2 or more of the thickness of the base 11. At this time, it is preferable that the first inclined surface 13a and the two adjacent outer peripheral surfaces 16 and 19 of the base 11 are notched so that the angles formed respectively are equal. Similarly, the first inclined surfaces 13b to 13d are formed for other corners than the same side surface 11a. Next, the second side surface 11b of the base 11 is cut out in the same manner toward the two adjacent outer peripheral surfaces 16 and 19 of the base 11 until it becomes about ½ of the thickness of the base 11 to form a trapezoidal second shape. Inclined surfaces 14a to 14d are formed. Such an inclined surface can be easily formed by laser processing. Further, mechanical polishing may be further performed after laser processing, and a portion where the ridgeline is formed may be a more precise polished surface. In this way, the pair of first and second inclined surfaces 13a and 14a with respect to the same corner cross each other in the middle of the thickness direction of the base 11, preferably at the center position as shown in FIG. A ridge line 15a that is parallel to 11a and 11b and perpendicular to the diagonal of the base in a side view is formed. Similarly, the first and second inclined surfaces 13b and 14b, 13c and 14c, and 13d and 14d cross each other in the middle of the thickness direction of the base 11, preferably in the center, and parallel to the side surfaces 11a and 11b of the base. The ridge lines 15b, 15c, and 15d are formed, and four ridge lines perpendicular to the diagonal lines of the base are formed at corner portions of the base 11. Here, the four outer peripheral surfaces of the base 11 are the top surfaces 16, 17, 18, and 19. Here, the top surface refers to a surface that is in contact with the first and second inclined surfaces forming the ridge line and shares one end of the ridge line. Points P1 and P2 are the ends of the ridgeline where one ridgeline 15a is in contact with the top surfaces 16 and 19, that is, the intersections of the first inclined surface 13a and the second inclined surface 14a and the top surfaces 16 and 19. The angle α between the top surface and the ridgeline at the points P1 and P2 is about 135 °. The same applies to the other six inclined surfaces, which are in contact with the top surfaces of both ends of the ridges 15b to 15d, that is, the first inclined surfaces 13b to 13d, the second inclined surfaces 14b to 14d, and the top surfaces 16 to 19. Let the intersections with be point P3 to P8, respectively. By forming both ends of the ridges 15a to 15d as points P1 to P8 in this way, eight points are formed around the diamond tool 10 that is octagonal in a side view as shown in FIG. Can do.

  Next, a diamond tool 20 according to a modification of the first embodiment will be described. FIG. 2 is a side view and a front view of this modification, and the same parts as those in the first embodiment are denoted by the same reference numerals. In this modification, after forming the first inclined surfaces 13a to 13d and the second inclined surfaces 14a to 14d, the respective ridgelines 15a to 15d are further polished from the both end portions toward the outer peripheral surface as shown in FIG. Thus, a surface different from the outer peripheral surfaces of the four sides of the base 11 is formed to be a top surface. That is, the triangular small polished surfaces shown in FIG. 2B become the top surfaces 21a, 21b, 22a, 22b, 23a, 23b, 24a, and 24b, and the angle α formed between the top surface and the ridgeline is 135 in the first embodiment. Greater than °. Therefore, in this case, the top surface can be machined with high accuracy, and the position of the point can be precisely machined. Further, the minimum angle between the top surface and the ridgeline can be adjusted to a value larger than 135 ° in accordance with the type and thickness of the brittle material substrate to be scribed.

  The case of scribing using the diamond tool 10 or 20 of this embodiment will be described with reference to FIGS. When scribing, as shown in FIG. 3A, one point P1 of the diamond tool 10 (or 20) is brought into contact with the substrate 25, and the diamond tool 10 is in the direction of the ridge line at the point P1, as shown by an arrow A in the figure. Move in the direction and scribe. Since the diamond tool 10 does not roll, it can be scribed at the same point. At this time, as shown in the enlarged view around the point P1 in FIG. 3B, the angle θ formed by the ridge line and the brittle material substrate is preferably 2 to 10 °, more preferably 3 to 7 °. The tool 10 is brought into contact. FIG. 4 is a diagram showing a state of scribing as viewed from the direction of arrow A. As shown in this figure, the scribing wheel is made by processing a thin plate-like base. Therefore, even when the component 26 is present on the upper surface of the substrate 25, the diamond tool is moved into a narrow gap between the components. You can scribe.

  When the point P1 in contact with the substrate 25 deteriorates due to wear, the diamond tool 10 is rotated around the through-hole 12 as shown in FIG. 5, and the adjacent point P2 is brought into contact with the substrate 25 in the same manner. Then, scribing is performed in the direction of arrow B, which is the direction of the ridgeline at point P2. FIG. 5B is an enlarged view showing the vicinity of the point P2. At this time, the rotation angle is determined according to the angle formed between the ridge line and the brittle material substrate. That is, the angle θ formed between the ridge line and the brittle material substrate is made equal when scribing using the point P2 and when using the point P1. If this process is repeated, even if the points deteriorate due to wear, scribing can be performed with new points as many as the points formed around the disk. Further, even when the diamond tool 10 is rotated, the angle at which the edge line of the blade edge contacts the substrate in the side view of the diamond tool 10 does not change, and therefore, it is easy to adjust the contact angle of the point with respect to the substrate.

  When the diamond tool 10 is used in the same direction, when the point P1 is worn, the diamond tool 10 is rotated by 90 ° and points P3, P5, P7 are used in sequence, and when all four points are worn, the diamond Invert tool 10. Then, the points P2, P4, P6, and P8 are sequentially brought into contact so that the angle θ formed by the ridge line and the brittle material substrate is constant, and scribe is performed by changing the position of the point four times after inversion. In this way, scribing can be performed by changing the points eight times in total. Similarly, when the diamond tool 20 is used, scribing can be performed by changing the point eight times.

  Next, a second embodiment of the present invention will be described with reference to FIG. The diamond tool 30 of the second embodiment is provided with a through hole 32 at the center of a hexagonal base 31 made of single crystal diamond, and polished in a V shape from both sides of the base 31 in the same manner as in the first embodiment. Thus, the first inclined surfaces 33a to 33f and the second inclined surfaces 34a to 34f are formed. In this way, ridge lines 35a to 35f are formed between the inclined surfaces 33a and 34a, 33b and 34b. Both ends of each ridgeline 35a to 35f are points P1 to P12. Such an inclined surface can be easily formed by laser processing. Further, after the laser processing, further mechanical polishing may be performed to form a precise inclined surface at the portion where the ridgeline is formed. Here, the side surfaces of the base 31 are the top surfaces 36 to 41. And twelve points can be formed using both ends of the ridge lines 35a to 35f as points. In this case, the angle between the top surface and the ridgeline is 150 °.

  Next, a diamond tool 50 according to a modification of the second embodiment will be described. FIG. 7 is a front view and a side view of this modification, and the same parts as those of the second embodiment are denoted by the same reference numerals. Also in this embodiment, as in the modification of the first embodiment described above, the outer peripheral surfaces of the four sides of the base 11 are further polished from the sides of both end portions of the ridge lines 35a to 35f as shown in FIG. Form a different surface from that of the top. In this case, small triangular polished surfaces from the sides of the ridges 35a to 35f toward the points P1 to P12 become the top surfaces 51a, 51b, 52a, 52b... 56a, 56b, and the top surface and the ridgeline. The formed angle α is larger than 150 ° of the second embodiment. Accordingly, the positions of the points P1 to P12 are changed, and the ridgeline is slightly shortened. In this case, the small top surface can be processed with high accuracy by polishing, and the position of the point can also be processed precisely. Further, the angle between the top surface and the ridgeline can be made larger than 150 °, and the angle can be adjusted to an appropriate angle according to the substrate.

  In the diamond tool 30 or 50 also, scribing is performed by bringing one point P1 into contact with the substrate 25 when scribing. When this point is worn, it is rotated along an axis (not shown) inserted through the through hole of the diamond tool 30 or 50 as in the first embodiment, and the adjacent points are brought into contact to perform scribing. . Also in this case, the angle θ formed by the ridge line and the brittle material substrate is made constant. By repeating this, scribing can be performed at a total of 12 points.

  Next, a third embodiment of the present invention will be described with reference to FIGS. Similarly to the first embodiment, the diamond tool 60 of this embodiment also has a through hole 62 at the center of a plate-like base 61 of a square shape with a certain thickness made of single crystal diamond. In this embodiment, the first and second inclined surfaces 62a and 62b are formed from one side surface 61a forming the corner of the base 61 toward the outer peripheral surface. At this time, the first and second inclined surfaces intersect with each other by being polished with an inclination of, for example, 5 ° from the perpendicular to the polygonal diagonal of the base 61. Similarly, third and fourth inclined surfaces 63a and 63b are formed from the other side surface 61b. The intersection line of the first and third inclined surfaces is defined as a first ridge line 64a, and the intersection line of the second and fourth inclined surfaces 62b and 63b is defined as a second ridge line 64b. The two ridge lines 64 a and 64 b are preferably parallel to the side surfaces 61 a and 61 b of the base 61. The first ridgeline 64a and the second ridgeline 64b are formed so as to be inclined by about 5 °, for example, with respect to the ridgeline 35a in the first and second embodiments. Therefore, the angle formed by the first ridge line and the second ridge line is, for example, about 170 °.

  Similarly, for the other corner adjacent to this corner, the first and second inclined surfaces 65a and 65b from one side surface of the base 61, and the third and fourth inclined surfaces 66a and 65b from the other side surface, respectively. 66b is formed, and an intersection line between the inclined surfaces 65a and 66a is defined as a first ridge line 67a, and an intersection line between the inclined surfaces 65b and 66b is defined as a second ridge line 67b. Similarly, the first to fourth inclined surfaces 68a, 68b, 69a, 69b are formed for the other one corner, and the intersecting line of the inclined surfaces is defined as a first ridge line 70a and a second 70b. The first to fourth inclined surfaces 71a, 71b, 72a, 72b are also formed for the remaining corners, and the intersecting lines of the inclined surfaces are defined as a first ridge line 73a and a second ridge line 73b.

  Next, as shown in FIGS. 8B and 9B, the top surfaces 74a and 74b are formed by polishing from the outer peripheral surface of the base 61 toward the first ridge line 64a and the second ridge line 64b. If it carries out like this, the 1st, 3rd inclined surface 62a, 63a and the top surface 74a can form one vertex, and let this be the point P1. Similarly, a vertex can be formed by the second and fourth inclined surfaces 62b and 63b and the top surface 74b polished from the side, and this is designated as point P2. In this way, two points can be formed for one corner of the base 61.

  The other corner adjacent to this corner is also polished from the outer peripheral surface of the base 61 toward the first ridgeline 67a and the second ridgeline 67b to form the top surfaces 75a and 75b. If it carries out like this, the 1st, 3rd inclined surface 65a, 66a and the top surface 75a can form one vertex, and let this be the point P3. Similarly, a vertex can be formed by the second and fourth inclined surfaces 65b and 66b and the top surface 75b polished from the side, and this is designated as point P4.

  Further, the top surfaces 76a and 76b are formed by polishing from the outer peripheral surface of the base 61 toward the ridges 70a and 70b. If it carries out like this, the 1st, 3rd inclined surface 68a, 69a and the top | upper surface 76a can form one vertex, and let this be the point P5. Similarly, a vertex can be formed by the second and fourth inclined surfaces 68b and 69b and the top surface 76b polished from the side, and this is designated as point P6.

  Furthermore, it grind | polishes toward the ridgelines 73a and 73b from the outer peripheral surface of the base 61, and forms the top surfaces 77a and 77b. If it carries out like this, the 1st, 3rd inclined surfaces 62a and 63a and the top surface 77a can form one vertex, and let this be the point P7. Similarly, a vertex can be formed by the second and fourth inclined surfaces 62b and 63b and the top surface 77b polished from the side, and this is designated as point P8. In this embodiment, since the top surface and the two inclined surfaces constituting each point are independent of each other and do not constitute other points, precise polishing can be performed without affecting other points. It becomes possible. In this way, eight points P1 to P8 can be formed around the base.

  In the third embodiment, the end of the two ridge lines formed by the first, third, second, and fourth inclined surfaces are further polished from the side surface to form a triangular top surface. However, the outer peripheral surface of the base 61 may be used as a top surface as it is, and the apexes formed by the inclined surfaces 62a and 63a and the side surfaces and the inclined surfaces 62b and 63b and the outer peripheral surface may be formed as points. The same applies to the other corner points.

  When scribing using the diamond tool 60, scribing is performed by bringing one point P1 into contact with the substrate. When the position is worn, the diamond tool 60 is rotated and the adjacent point is used. At this time, the angle θ formed between the ridge line and the brittle material substrate is made constant during scribing. In this way, scribing can be performed by changing the point position eight times. When the point P1 is worn, the diamond tool is rotated by 90 ° and points P3, P5, and P7 are used. When all four points are worn, the diamond tool is reversed and the angle θ between the ridgeline and the brittle material substrate is constant. The four points P2, P4, P6, and P8 may be used by adjusting so that a total of eight points may be used.

  In each of the above-described embodiments, 8 or 12 points are provided around the periphery, but it is only necessary to provide points at at least one corner, and it is not always necessary to provide inclined surfaces and points at all corners. However, it is preferable to provide as many points as possible on the outer peripheral portion as long as adjacent points do not interfere with each other. As a result, when each point is worn, the point can be exchanged by simply rotating the diamond tool, and the frequency of diamond tool exchange can be reduced. Further, the shape of the base is not limited to a square and a hexagon, and can be an arbitrary polygon.

  In the embodiment described above, the entire base is composed of single crystal diamond, but it is sufficient if the surface portion in contact with the brittle material substrate is diamond, so that the base is formed using cemented carbide or sintered diamond. A polycrystalline diamond layer may be formed on the outer peripheral surface of the base and the surface of the ridgeline, and this may be polished more precisely to form points. Alternatively, single crystal or polycrystalline diamond doped with an impurity such as boron and having conductivity may be used. By using conductive diamond, it is possible to easily form inclined surfaces and through holes by electric discharge machining.

  In the above-described embodiment, scribing is performed by moving the diamond tool in the ridge line direction at each point. However, scribing may be performed by moving the diamond tool in the top surface direction of each point.

  The multipoint diamond tool of the present invention can be used in a scribing apparatus for scribing a brittle material substrate, and can be effectively used for a scribe object having a high hardness, especially where the wear of the diamond tool increases.

10, 30, 50, 60 Multi-point diamond tool 11, 31, 51, 61 Base 11a, 11b, 61a, 61b Side surface 12, 32, 52, 62 Through hole 13, 33, 43 Polished surface 13a-13d, 14a-14d , 33a to 33f, 34a to 34f, 62a, 62b, 63a, 63b, 65a, 65b, 66a, 66b, 68a, 68b, 69a, 69b, 72a, 71b, 72a, 72b inclined surfaces 15a to 15d, 35a to 35f, 64a, 64b, 67a, 67b, 70a, 70b, 73a, 73b Ridge lines 16-19, 21a, 21b, 22a, 22b, 23a, 23b, 24a, 24b, 36-41, 51a-56b, 74a-77b Top surface P1 ~ P12 points

Claims (6)

A polygonal base having a side surface and a plurality of outer peripheral surfaces;
For at least one corner of the base,
The first and second inclined surfaces formed toward the two outer peripheral surfaces adjacent from both side surfaces of the base, and a ridge line that is an intersection line of the first and second inclined surfaces,
The portion including at least the ridgeline is formed of diamond,
A multi-point diamond tool with points at both ends of the ridgeline.   The multipoint diamond tool according to claim 1, further comprising a polished surface that is polished from the outer peripheral surface toward both ends of the ridge line. A polygonal base having a side surface and a plurality of outer peripheral surfaces;
For at least one corner of the base,
A first inclined surface formed from one side surface of the base and intersecting each other;
Third and fourth inclined surfaces formed from the other surface of the base and intersecting each other;
A first ridge line where the first and third inclined surfaces intersect; and a second ridge line where the second and fourth inclined surfaces intersect;
A portion including at least the first and second ridge lines is formed of diamond;
A multipoint diamond tool having points at both ends outside the first and second ridge lines.   The multipoint diamond tool according to claim 3, wherein the multipoint diamond tool has a polished surface that is polished from the outer peripheral surface of the base toward both ends of the first and second ridge lines.   The multipoint diamond tool according to claim 1, wherein each inclined surface is formed by laser processing.   The multipoint diamond tool according to claim 2 or 4, wherein each of the polished surfaces is formed by machining.

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