CN109203258A - A kind of conductor chip single-crystal diamond cutting tool - Google Patents
A kind of conductor chip single-crystal diamond cutting tool Download PDFInfo
- Publication number
- CN109203258A CN109203258A CN201811348330.4A CN201811348330A CN109203258A CN 109203258 A CN109203258 A CN 109203258A CN 201811348330 A CN201811348330 A CN 201811348330A CN 109203258 A CN109203258 A CN 109203258A
- Authority
- CN
- China
- Prior art keywords
- knife handle
- cutting
- face
- cutter head
- crystal diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005520 cutting process Methods 0.000 title claims abstract description 83
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 29
- 239000010432 diamond Substances 0.000 title claims abstract description 29
- 239000013078 crystal Substances 0.000 title claims abstract description 26
- 239000004020 conductor Substances 0.000 title claims abstract description 17
- 230000001154 acute effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 13
- 230000000694 effects Effects 0.000 abstract description 10
- 238000012545 processing Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000003698 laser cutting Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
Abstract
The invention discloses a kind of conductor chip single-crystal diamond cutting tools, including cutter head and knife handle, the knife handle is set to cutter head one end, the cutter head includes rectangular cutter hub, there are four triangle rake faces far from setting on one end end face of knife handle for the rectangular cutter hub, joint face is equipped between two neighboring triangle rake face, four joint faces are connected far from one end of knife handle and form four cutting crest lines, four cutting crest lines are connected far from one end of knife handle and form point of a knife, and the knife handle sets that there are four inclined surface on the outside of one end of cutter head.Diamond cutter of the present invention is formed very sharp point of a knife and cutting crest line by four faces, always reasonable cutting obtuse angle is formed with work piece cut face, it is parallel with workpiece face to cut crest line simultaneously, guarantee that when cutting different chip materials be not in chipping, brittle property chip material is cut and is used, with good cutting effect, in terms of cost than old low 100%, workpiece rejection rate reduces 50%-80%.
Description
Technical field
The present invention relates to the single-crystal diamond cutting tool technical fields used in semiconductor wafer manufacturing process, especially
It is related to a kind of conductor chip single-crystal diamond cutting tool.
Background technique
It is usually to carry out chip with the mode of skive, laser cutting in semicon industry wafer manufacturing process
Cutting；And skive usually may require that water is cooled down in use process, easily cause chip because of self structure reason
Pollution and Waffer edge chipping it is excessive and caused by scrap, also as cutting gap is excessive and reduces usable floor area；Swash
Light cutting can leave bigger stress and chipping in chip cut edge.If being changed to Single-crystal Diamond Cutters cut crystal,
Waffer edge chipping and stress can not consider.Cutting gap only has 5-10um, not only increases the integrated level of chip, also reduces
Cost.Because being dry type cutting, there is no and similar zinc oxide (ZnO) is not resistant to water, thermo-labile for the cutting pollution of chip
Semiconductor material bulk quantity of chips also may be implemented.It is domestic at present the cutter structure of this aspect is designed not yet and
Manufacture.In order to reach efficiently, low cost improves use scope；We have invented novel single-crystal diamond cutting tools
Therefore, it is necessary to solve the above problems to invent a kind of conductor chip single-crystal diamond cutting tool.
Summary of the invention
The purpose of the present invention is to provide a kind of conductor chip single-crystal diamond cutting tools, utilize the diamond being ground
Cutter forms very sharp point of a knife and cutting crest line by four faces, formed always with work piece cut face reasonably cut it is blunt
Angle, while cutting that crest line is parallel with workpiece face, guarantee that when cutting different chip materials be not in chipping, for brittle property
Chip material cutting uses, and has good cutting effect, and in terms of cost than old low 100%, workpiece rejection rate is reduced
50%-80% overcomes for skive, laser cutting two ways workpiece high rejection rate, and chip chipping is big, application range
The disadvantages of limited, and cutter of the present invention can reach the cutting effect that first two mode is unable to reach, to solve above-mentioned background
The problem of being proposed in technology.
To achieve the above object, the invention provides the following technical scheme: a kind of conductor chip single-crystal diamond cutting tool,
Including cutter head and knife handle, the knife handle is set to cutter head one end, and the cutter head includes rectangular cutter hub, and the rectangular cutter hub is far from knife
It is set on one end end face of handle there are four triangle rake face, joint face, four companies is equipped between two neighboring triangle rake face
Junction is connected far from one end of knife handle and forms four cutting crest lines, and four cutting crest lines are connected far from one end of knife handle
Connect and formed point of a knife, the knife handle sets that there are four inclined surface on the outside of one end of cutter head.
Preferably, the cutter head is made of single-crystal diamond grinding, and the cutter head and knife handle are welded to connect.
Preferably, four triangle rake faces are disposed as skewed, and tilt angle is acute angle, before four triangles
Knife face inclination focus is collinearly arranged with rectangular cutter hub central axis.
Preferably, the joint face is set as hexagon, and cutting crest line is side of the joint face far from rectangular cutter hub.
Preferably, when any one of cutting crest line is parallel with work piece cut face, cutter head and knife handle and work piece cut face
Between formed cutting obtuse angle.
Preferably, the knife handle is set as cube, and four inclined surface are connected with four sides of knife handle respectively, institute
Triangle rake face is stated to be arranged in parallel with inclined surface.
Technical effect and advantage of the invention:
1, the present invention is formed very sharp point of a knife and cutting crest line by four faces using the diamond cutter being ground, always
Reasonable cutting obtuse angle is formed with work piece cut face, while cutting that crest line is parallel with workpiece face, guarantees the chip different in cutting
Be not in chipping when material, brittle property chip material is cut and is used, there is good cutting effect, want in terms of cost
Than old low 100%, workpiece rejection rate reduces 50%-80%, overcomes for skive, laser cutting two ways workpiece
High rejection rate, chip chipping is big, the disadvantages of being of limited application, and cutter of the present invention can reach first two mode and can not reach
The cutting effect arrived；
2, cutter head is made using single crystal diamond material, improves service life and reduce institute's workpieces processing chipping, and can repair
It reuses, has a wide range of application after mill；
3, it is arranged in parallel by triangle rake face and inclined surface, makes tool sharpening and easy for installation, and connect with knife handle and cutter head
Four sides at place are connect as unified benchmark, while there are four cutting crest lines can be used on cutter head, four cutting crest line replacements use
When, four inclined surface on replacement knife handle are only used, and done label on each inclined surface, is easy to use.
Detailed description of the invention
Fig. 1 is whole side view of the invention.
Fig. 2 is whole front view of the invention.
Fig. 3 is cutter head structure schematic diagram of the invention.
Fig. 4 is cutting effect figure of the invention.
In figure: 1 cutter head, 2 knife handles, 3 rectangular cutter hubs, 4 triangle rake faces, 5 joint faces, 6 cutting crest lines, 7 points of a knife, 8 inclinations
Face.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Embodiment 1:
A kind of conductor chip single-crystal diamond cutting tool according to shown in Fig. 1-2, including cutter head 1 and knife handle 2, the knife handle 2
It is set to 1 one end of cutter head, the cutter head 1 includes rectangular cutter hub 3, and the rectangular cutter hub 3 is equipped with far from one end end face of knife handle 2
Four triangle rake faces 4 are equipped with joint face 5 between two neighboring triangle rake face 4, and four joint faces 5 are far from knife handle 2
One end is connected and forms four cutting crest lines 6, and four cutting crest lines 6 are connected far from one end of knife handle 2 and form knife
Point 7, the knife handle 2 are set on the outside of one end of cutter head 1 there are four inclined surface 8；
The cutter head 1 is made of single-crystal diamond grinding, reusable after reconditioning, has a wide range of application, the cutter head 1 and knife handle
2 are welded to connect, convenience when installing and processing for realizing cutter head 1；
When any one of cutting crest line 6 is parallel with work piece cut face, formed between cutter head 1 and knife handle 2 and work piece cut face
Obtuse angle is cut, guarantees that when cutting different chip materials be not in chipping.
By forming very sharp point of a knife 7 and cutting rib by four joint faces 5 using the diamond cutter being ground
Line 6 forms reasonable cutting obtuse angle with work piece cut face always, while it is parallel with work piece cut face to cut crest line, guarantees cutting
Be not in chipping when cutting different chip materials, brittle property chip material cut and is used, there is good cutting effect,
Cutter head is made using single crystal diamond material, improves service life and reduce institute's workpieces processing chipping, and can be with weight after reconditioning
It is multiple to use, have a wide range of application.
Embodiment 2:
A kind of conductor chip single-crystal diamond cutting tool according to figure 1, four triangle rake faces 4 are disposed as inclining
Ramp-like, tilt angle is acute angle, and four triangle rake faces 4 tilt focus and are collinearly arranged with rectangular 3 central axis of cutter hub, make
It is accurate when the processing manipulation of cutter head 1；
A kind of conductor chip single-crystal diamond cutting tool according to Fig.2, the knife handle 2 is set as cube, described in four
Inclined surface 8 is connected with four sides of knife handle 2 respectively, and the triangle rake face 4 is arranged in parallel with inclined surface 8, processes and pacifies
Dress is convenient；
A kind of conductor chip single-crystal diamond cutting tool according to Fig.3, the joint face 5 is set as hexagon, and cuts
Cutting crest line 6 is side of the joint face 5 far from rectangular cutter hub 3.
It is arranged in parallel by triangle rake face 4 and inclined surface 8, makes tool sharpening and easy for installation, and with knife handle 2 and knife
Four sides of first 1 junction are unified benchmark, while there are four cutting crest lines 6 can be used on cutter head 1, four cutting crest lines 6
Replacement is in use, only need to change four inclined surface 8 on knife handle 2.
Embodiment 3:
It is equipped with label on four inclined surface 8, and label does not limit arbitrary form, four cutting crest line 6 replacements is facilitated to make
Used time can quickly judge corresponding inclined surface 8 by label, so that replacing inclined surface 8 realizes four cutting crest lines 6 more
It changes.
Embodiment 4:
In the present invention, the cutting crest line 6 being ground is especially sharp, is detected by atomic force microscope, and the measurement result provided is
100nm, but this not can be shown that cutter actual effect, it is the most direct come verification the verifying results by trial cut, select 40 block semiconductor industries
Chip carries out cutting experiment, and 40 block semiconductor industry chips are divided into four groups of carry out cutting experiments, and every group 10 pieces, and respectively
Cutting experiment is carried out with the corresponding four groups of semicon industry chips of four cutting crest lines 6, experimental data is as follows:
Specific cutting effect is shown in Figure of description 4, and expected requirement is fully achieved.
Working principle of the present invention:
Referring to Figure of description 1-3, in use, cutting work is carried out with dynamic cutter head 1 by knife handle 2, on cutter head 1 there are four settings
Cut crest line 6, four cutting 6 junctions of crest line formation, one very sharp point of a knife 7 when cutting, can cut any one
Crest line 6 is parallel with work piece cut face to be cut, and is formed cutting obtuse angle between cutter head 1 and knife handle 2 and work piece cut face, is guaranteed
It is not in chipping when cutting different chip materials；
It referring to Figure of description 2, is arranged in parallel by triangle rake face 4 and inclined surface 8, makes tool sharpening and easy for installation, and
And with four sides of knife handle 2 and 1 junction of cutter head be unified benchmark, while there are four cutting crest lines 6 can be used on cutter head 1,
Four cutting crest line 6 replacements are in use, only use four inclined surface 8 on replacement knife handle 2, and do on each inclined surface 8
There is label, is easy to use.
Finally, it should be noted that the foregoing is only a preferred embodiment of the present invention, it is not intended to restrict the invention,
Although the present invention is described in detail referring to the foregoing embodiments, for those skilled in the art, still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features,
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in of the invention
Within protection scope.
Claims (6)
1. a kind of conductor chip single-crystal diamond cutting tool, including cutter head (1) and knife handle (2), the knife handle (2) are set to knife
Head (1) one end, it is characterised in that: the cutter head (1) includes rectangular cutter hub (3), and the rectangular cutter hub (3) is far from knife handle (2)
There are four setting on the end face of one end triangle rake face (4), joint face (5) are equipped between two neighboring triangle rake face (4), four institutes
It states joint face (5) to be connected far from the one end of knife handle (2) and form four cutting crest lines (6), four cutting crest lines (6) are remote
One end from knife handle (2) is connected and is formed point of a knife (7), and the knife handle (2) is set on the outside of the one end of cutter head (1) there are four inclining
Inclined-plane (8).
2. a kind of conductor chip single-crystal diamond cutting tool according to claim 1, it is characterised in that: the cutter head
(1) it is made of single-crystal diamond grinding, the cutter head (1) and knife handle (2) are welded to connect.
3. a kind of conductor chip single-crystal diamond cutting tool according to claim 1, it is characterised in that: four described three
Angle rake face (4) is disposed as skewed, and tilt angle is acute angle, four triangle rake faces (4) inclination focuses with it is rectangular
Cutter hub (3) central axis is collinearly arranged.
4. a kind of conductor chip single-crystal diamond cutting tool according to claim 1, it is characterised in that: the joint face
(5) it is set as hexagon, and cutting crest line (6) is the side of joint face (5) far from rectangular cutter hub (3).
5. a kind of conductor chip single-crystal diamond cutting tool according to claim 1, it is characterised in that: any one institute
State cutting crest line (6) it is parallel with work piece cut face when, between cutter head (1) and knife handle (2) and work piece cut face formation cut obtuse angle.
6. a kind of conductor chip single-crystal diamond cutting tool according to claim 1, it is characterised in that: the knife handle
(2) it is set as cube, four inclined surface (8) are connected with four sides of knife handle (2) respectively, the triangle rake face
(4) it is arranged in parallel with inclined surface (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811348330.4A CN109203258A (en) | 2018-11-13 | 2018-11-13 | A kind of conductor chip single-crystal diamond cutting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811348330.4A CN109203258A (en) | 2018-11-13 | 2018-11-13 | A kind of conductor chip single-crystal diamond cutting tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109203258A true CN109203258A (en) | 2019-01-15 |
Family
ID=64996133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811348330.4A Pending CN109203258A (en) | 2018-11-13 | 2018-11-13 | A kind of conductor chip single-crystal diamond cutting tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109203258A (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH055320U (en) * | 1991-07-12 | 1993-01-26 | 株式会社東京ダイヤモンド工具製作所 | Center drill |
| JPH07132499A (en) * | 1993-11-09 | 1995-05-23 | Toto Ltd | Diamond tool |
| JP2002036017A (en) * | 2000-07-25 | 2002-02-05 | Nishie Hiroshi | Drill having single crystal diamond at its tip |
| JP2003127019A (en) * | 2001-10-23 | 2003-05-08 | Micro Diamond Kk | Endmill having single-crystal diamond provided at its top |
| JP2003260612A (en) * | 2002-03-07 | 2003-09-16 | Noritake Co Ltd | Diamond tool |
| JP2004345031A (en) * | 2003-05-22 | 2004-12-09 | Allied Material Corp | Single crystal diamond end mill |
| JP2005289703A (en) * | 2004-03-31 | 2005-10-20 | Asahi Diamond Industrial Co Ltd | Diamond scriber and method for manufacturing the same |
| JP2007054945A (en) * | 2005-07-27 | 2007-03-08 | Allied Material Corp | Diamond tool |
| CN203592585U (en) * | 2013-12-02 | 2014-05-14 | 林翔 | Diamond cutting tool for graving nonmetal hard and brittle material |
| CN105799073A (en) * | 2015-01-16 | 2016-07-27 | 三星钻石工业股份有限公司 | Multi-edge diamond cutter |
| JP2017149078A (en) * | 2016-02-26 | 2017-08-31 | 三星ダイヤモンド工業株式会社 | Segmentation method for brittle substrate |
| CN209718252U (en) * | 2018-11-13 | 2019-12-03 | 无锡温特金刚石科技有限公司 | A kind of conductor chip single-crystal diamond cutting tool |
-
2018
- 2018-11-13 CN CN201811348330.4A patent/CN109203258A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH055320U (en) * | 1991-07-12 | 1993-01-26 | 株式会社東京ダイヤモンド工具製作所 | Center drill |
| JPH07132499A (en) * | 1993-11-09 | 1995-05-23 | Toto Ltd | Diamond tool |
| JP2002036017A (en) * | 2000-07-25 | 2002-02-05 | Nishie Hiroshi | Drill having single crystal diamond at its tip |
| JP2003127019A (en) * | 2001-10-23 | 2003-05-08 | Micro Diamond Kk | Endmill having single-crystal diamond provided at its top |
| JP2003260612A (en) * | 2002-03-07 | 2003-09-16 | Noritake Co Ltd | Diamond tool |
| JP2004345031A (en) * | 2003-05-22 | 2004-12-09 | Allied Material Corp | Single crystal diamond end mill |
| JP2005289703A (en) * | 2004-03-31 | 2005-10-20 | Asahi Diamond Industrial Co Ltd | Diamond scriber and method for manufacturing the same |
| JP2007054945A (en) * | 2005-07-27 | 2007-03-08 | Allied Material Corp | Diamond tool |
| CN203592585U (en) * | 2013-12-02 | 2014-05-14 | 林翔 | Diamond cutting tool for graving nonmetal hard and brittle material |
| CN105799073A (en) * | 2015-01-16 | 2016-07-27 | 三星钻石工业股份有限公司 | Multi-edge diamond cutter |
| JP2017149078A (en) * | 2016-02-26 | 2017-08-31 | 三星ダイヤモンド工業株式会社 | Segmentation method for brittle substrate |
| CN209718252U (en) * | 2018-11-13 | 2019-12-03 | 无锡温特金刚石科技有限公司 | A kind of conductor chip single-crystal diamond cutting tool |
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