JP2007054945A - Diamond tool - Google Patents

Diamond tool Download PDF

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JP2007054945A
JP2007054945A JP2006201460A JP2006201460A JP2007054945A JP 2007054945 A JP2007054945 A JP 2007054945A JP 2006201460 A JP2006201460 A JP 2006201460A JP 2006201460 A JP2006201460 A JP 2006201460A JP 2007054945 A JP2007054945 A JP 2007054945A
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flank
cutting edge
diamond tool
cutting
diamond
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JP4878517B2 (en
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Atsushi Kobayashi
篤史 小林
Shuichi Kawano
収一 川野
Yuhei Fujimoto
雄平 藤本
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Allied Material Corp
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<P>PROBLEM TO BE SOLVED: To provide a diamond tool which includes a cutting edge formed on a diamond tip, and assures high precision with a small cutting resistance when the tool is of micro-structure for ultra-precision processing capable of performing easy processing even if the cutting edge is of an R-form or in a complicated shape. <P>SOLUTION: The diamond tool has the diamond tip having a protruded forefront where the cutting edge is formed, in which the protruded portion has a rake face, a first flank formed as a surface consisting in a combination of a curved surface and/or plane and having a relatively small runoff angle, and a second flank formed from a plurality of planes and having a relatively large runoff angle, wherein the cutting edge is formed at the boundary between the rake face and the first flank, or further even at the boundary between the rake face and the second flank. The PV values of the surface around the part where the cutting edge is formed so as to be 3-300 nm on the rake face and 3-2000 nm on the flanks. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、ダイヤモンドに切刃を形成した精密加工用切削工具に関するものであり、特にテレビ画面や携帯電話などの表示器用光学シートや導光板などの光学素子成形用の金型などの超精密加工を行うためのダイヤモンド工具に関する。   The present invention relates to a cutting tool for precision machining in which a cutting edge is formed on diamond, and in particular, an ultra-precision machining such as a mold for optical element molding such as an optical sheet for a display such as a television screen or a mobile phone or a light guide plate. It is related with the diamond tool for performing.

従来、光ディスク用ピックアップ対物レンズや光学シートなど光学素子の成形用金型の光学面加工には、先端に円弧状切刃を有する単結晶ダイヤモンドのRバイトが用いられており、超精密加工機を使用して切削加工のみにより高精度な光学面を得るために、その円弧の半径が0.05μm〜2.5μm程度のものが用いられている。このRバイトの具体例として、円弧部分の幅が0.8μm、頂角は30°で、第1逃げ面の逃げ角が11°、第2逃げ面の逃げ角が45°の切刃を有するダイヤモンドバイトがあげられている。(例えば、特許文献1参照)
また、切刃が複雑な形状を有する総形形状の切刃を有するダイヤモンドバイトとして、その切刃の加工に紫外線域のレーザを用いて加工を行ったダイヤモンドバイトがある。このダイヤモンドバイトは、切刃稜線が直線や曲線の組み合わせからなる複雑な形状の切刃であっても、波長が紫外線域のレーザを用いることにより、高精度に加工された切刃が得られるものである。(例えば、特許文献2参照)
さらに、微細な溝を加工する工具として、ダイヤモンドに複数のチップを備えたマルチチップダイヤモンド工具が提案されている。この工具は、それぞれのチップに切刃が形成されており、チップの形成には例えば集束イオンビームを使用して形成される。(例えば、特許文献3参照)
特開2003−62707号公報(段落番号0055、第3図) 特開2003−25118号公報(段落番号0019、第1−3図) 特表2005−527394号公報
Conventionally, for the optical surface processing of molds for optical elements such as optical disk pickup objective lenses and optical sheets, single-crystal diamond R cutting tools having an arcuate cutting edge at the tip are used. In order to obtain a high-precision optical surface only by cutting, a circular arc having a radius of about 0.05 μm to 2.5 μm is used. As a specific example of this R bite, there is a cutting edge whose arc part width is 0.8 μm, apex angle is 30 °, relief angle of the first flank is 11 °, and relief angle of the second flank is 45 °. Diamond bite is given. (For example, see Patent Document 1)
In addition, as a diamond cutting tool having a general shape cutting blade with a complicated cutting edge, there is a diamond cutting tool processed using a laser in the ultraviolet region for processing the cutting blade. This diamond tool is capable of obtaining a highly accurate cutting edge by using a laser whose wavelength is in the ultraviolet range, even if the cutting edge ridge is a complex shape consisting of a combination of straight lines and curves. It is. (For example, see Patent Document 2)
Furthermore, as a tool for processing a fine groove, a multi-chip diamond tool having a plurality of chips on a diamond has been proposed. In this tool, a cutting edge is formed on each chip, and the chip is formed using, for example, a focused ion beam. (For example, see Patent Document 3)
JP 2003-62707 A (paragraph number 0055, FIG. 3) Japanese Patent Laid-Open No. 2003-25118 (paragraph number 0019, FIG. 1-3) JP 2005-527394 A

上記特許文献1のようなRバイトの形状の切刃を形成する場合、切刃稜線の形状に合わせて逃げ面を形成する加工が行われる。すなわち、先端のR切刃部分およびその後側の直線切刃部分の逃げ角は同じになるように、まず直線切刃部分の逃げ面を研削・ラップ加工し、その後R切刃部分の逃げ面を曲面に研削・ラップ加工する。そして、最後にすくい面を研削・ラップ加工して刃付けを行い、切刃を形成する。しかしながら、R切刃部分の逃げ面は曲面のため加工に長時間を要したり、複雑で手間がかかることになる。また、特許文献2のように、直線やRが組み合わされた複雑な形状の切刃になると、レーザなどを用いて形状を作ることがあるが、加工量が多いため多大な時間を要することになる。さらに、超精密加工用工具の場合、微細な加工になるためバニッシング作用による被加工物の弾性回復現象が起こり、逃げ面が被加工物に干渉して切削抵抗が大きくなる可能性も出てくる。また、特許文献3の溝加工用工具では集束イオンビームにより切刃が形成されるとされているが、集束イオンビームにより形成された切刃はラップ加工により形成された切刃に比べて精度や切れ味が劣り、このような工具で溝加工を行った場合、溝の壁面の精度が悪くなって要求される精度で加工できない恐れがある。本発明は、光学素子成形用の金型などの超精密加工を行うために必要とされるR切刃や複雑な形状の切刃あるいは溝加工用の切刃であっても容易に加工され、微細な超精密加工工具において、高精度で切削抵抗も小さく切れ味の良い切刃を有するダイヤモンド工具を提供するものである。   When forming a cutting edge in the shape of an R bit as in the above-mentioned Patent Document 1, a process for forming a flank according to the shape of the cutting edge ridge line is performed. That is, first, the flank face of the straight cutting edge portion is ground and lapped so that the clearance angle of the R cutting edge portion at the front end and the straight cutting edge portion at the rear side thereof are the same, and then the flank face of the R cutting edge portion is formed. Grinding and lapping on curved surfaces. Finally, the rake face is ground and lapped to perform cutting and form a cutting edge. However, since the flank of the R cutting edge portion is a curved surface, it takes a long time for processing or is complicated and troublesome. Further, as in Patent Document 2, when a cutting blade having a complicated shape in which straight lines and R are combined, a shape may be formed using a laser or the like, but it takes a lot of time because of the large amount of processing. Become. Furthermore, in the case of a tool for ultra-precision machining, since it becomes fine machining, the elastic recovery phenomenon of the workpiece due to the burnishing action occurs, and the flank surface may interfere with the workpiece and increase the cutting resistance. . Further, in the grooving tool of Patent Document 3, it is said that the cutting edge is formed by the focused ion beam, but the cutting edge formed by the focused ion beam is more accurate than the cutting edge formed by lapping. The sharpness is inferior, and when grooving is performed with such a tool, the accuracy of the wall surface of the groove may be deteriorated and machining may not be performed with the required accuracy. The present invention is easily processed even with an R cutting edge, a complicated shape cutting edge or a grooving cutting edge required for performing ultra-precision machining such as a mold for molding an optical element, In a fine ultra-precision machining tool, a diamond tool having a cutting edge with high precision, low cutting resistance and good sharpness is provided.

本発明は、R形状や複雑な形状を有する切刃で複雑な形状となる逃げ面の大部分を平面の組み合わせで構成し、切刃周辺のみを切刃稜の形状に合わせた形状の逃げ面とすることで、複雑な形状の逃げ面の加工量を少なくして、容易に低コストで得られるダイヤモンド工具としたものである。   In the present invention, most of the flank that is complicated with a cutting edge having an R shape or a complicated shape is configured by a combination of planes, and the flank having a shape in which only the periphery of the cutting edge is matched to the shape of the cutting edge. Thus, the amount of machining of the flank face having a complicated shape is reduced, and the diamond tool can be easily obtained at low cost.

本発明のダイヤモンド工具の第1の特徴は、先端が凸状のダイヤモンドチップを有し、前記凸状部分に切刃が形成されたダイヤモンド工具であって、前記凸状部分は、少なくとも前記切刃周辺のPV値が3〜300nmのすくい面と、PV値が3〜2000nmで曲面および/または平面の組合せられた面で構成され相対的に逃げ角の小さい第1の逃げ面と、少なくともPV値が3〜500nmの平面を含む複数の平面で構成される相対的に逃げ角の大きい第2の逃げ面とを有し、前記切刃は前記すくい面と前記第1の逃げ面との境界部に形成されてなることである。なお、PV値とは、平面の場合、加工された面の凹凸の最大幅(山と谷の間の最大距離)のことであり、曲面の場合、加工された面の理論上の面を平面にした時のその平面の凹凸の最大幅(山と谷の最大距離)を表すものとする。   A first feature of the diamond tool of the present invention is a diamond tool having a diamond tip having a convex tip, and a cutting blade formed on the convex portion, wherein the convex portion includes at least the cutting blade. A first flank having a rake face having a peripheral PV value of 3 to 300 nm, a surface having a PV value of 3 to 2000 nm and a combination of a curved surface and / or a flat surface and a relatively small clearance angle, and at least a PV value Has a second flank with a relatively large flank angle, which is composed of a plurality of planes including a plane of 3 to 500 nm, and the cutting edge is a boundary portion between the rake face and the first flank face It is to be formed. The PV value is the maximum width (maximum distance between peaks and troughs) of the processed surface in the case of a flat surface, and the theoretical surface of the processed surface is flat in the case of a curved surface. It represents the maximum width of the uneven surface (maximum distance between peaks and valleys).

R切刃を有するRバイトや総形加工を行うための直線や曲線が組み合わされた総形バイトでは、上記のように、予め第2の逃げ面として逃げ角を相対的に大きくした平面の逃げ面を複数設けて大まかな形状を形成し、切刃の部分は第1の逃げ面として逃げ角が相対的に小さく切刃形状に従った逃げ面を設けて形成することができるので、第1の逃げ面を形成する際には僅かな加工量でRや直線の組み合わされた切刃が容易に形成される。また、第2の逃げ面は平面であるので容易に高精度の研磨がなされ、第2の逃げ面を高精度な面にした上で第1の逃げ面を形成することができるので、高精度の切刃を容易に形成できる。なお、すくい面のうち、PV値が3〜300nmの面とするのは、少なくとも切刃から0.5mm以内の領域であることが好ましい。   In the R cutting tool having the R cutting edge and the total cutting tool combined with the straight line and the curve for performing the total machining, as described above, the clearance of the plane having a relatively large clearance angle as the second flank as previously described. A plurality of surfaces are provided to form a rough shape, and the portion of the cutting edge can be formed as a first flank by providing a flank according to the cutting edge shape with a relatively small flank angle. When the flank is formed, a cutting blade combined with R and straight lines can be easily formed with a small amount of processing. In addition, since the second flank is a flat surface, it can be easily polished with high accuracy, and the first flank can be formed after the second flank is made highly accurate. Can be easily formed. Of the rake face, the face having a PV value of 3 to 300 nm is preferably at least a region within 0.5 mm from the cutting edge.

第2の特徴は、前記切刃は円弧状切刃であり、前記切刃が形成される部分の前記第1の逃げ面は、円筒状の面であることである。   The second feature is that the cutting edge is an arcuate cutting edge, and the first flank of the portion where the cutting edge is formed is a cylindrical surface.

円弧状切刃とする場合に、第1の逃げ面を円筒状の面とすれば、切刃が摩耗した場合にすくい面を平行に研磨して再度切刃を形成しても、円弧状切刃の形状が変わらないので再研磨が可能となり、工具の寿命を延ばすことが可能になる。   If the first flank is a cylindrical surface when an arc-shaped cutting edge is used, even if the rake face is ground in parallel when the cutting edge is worn, Since the shape of the blade does not change, re-polishing is possible and the tool life can be extended.

第3の特徴は、前記切刃は、Rの異なる曲線および/または直線の組合せで構成される総形形状の切刃であることである。   A third feature is that the cutting edge is a cutting edge having a general shape constituted by a combination of curves and / or straight lines having different Rs.

総形形状の切刃とする場合に、本発明のダイヤモンド工具の構造であれば逃げ面を容易に形成することが可能になり、高精度の切刃が形成される。   In the case of a cutting blade having an overall shape, the flank can be easily formed with the structure of the diamond tool of the present invention, and a highly accurate cutting blade is formed.

本発明のダイヤモンド工具の別の特徴は、先端が凸状のダイヤモンドチップを有し、前記凸状部分に切刃が形成されたダイヤモンド工具であって、前記凸状部分は、少なくとも前記切刃周辺のPV値が3〜300nmのすくい面と、PV値が3〜2000nmで曲面で構成される相対的に逃げ角の小さい第1の逃げ面と、PV値が3〜500nmの複数の平面で構成される相対的に逃げ角の大きい第2の逃げ面とを有し、前記切刃は前記すくい面と第1の逃げ面との境界部に形成されたR切刃と前記すくい面と第2の逃げ面との境界部の少なくとも一部分に形成された直線状切刃とからなることである。   Another feature of the diamond tool of the present invention is a diamond tool having a tip with a convex diamond tip and a cutting edge formed on the convex portion, wherein the convex portion is at least around the cutting edge. A rake face having a PV value of 3 to 300 nm, a first flank face having a PV value of 3 to 2000 nm and a curved surface having a relatively small relief angle, and a plurality of planes having a PV value of 3 to 500 nm A second flank having a relatively large clearance angle, and the cutting edge is formed at the boundary between the rake face and the first flank face, the rake face and the second rake face. It consists of the linear cutting blade formed in at least one part of the boundary part with a flank.

先端にR切刃を有しその後側に直線状切刃を有する溝加工用バイトの場合、溝の境界を形成する壁面の部分の精度が要求されるため、先端のR切刃以上に直線状切刃が高精度であることが要求される。上記のように、予め第2の逃げ面として逃げ角を相対的に大きくした平面の逃げ面を複数設けておき、その後先端部に逃げ角が相対的に小さく曲面からなる第1の逃げ面を形成した構造とすれば、第2の逃げ面は平面であるので容易に高精度の研磨がなされて非常に鋭利な直線状切刃が形成され、その後第1の逃げ面を形成する際には僅かな加工量で曲線状の切刃が高精度に形成される。   In the case of a grooving tool having an R cutting edge at the tip and a straight cutting edge on the rear side, the accuracy of the wall surface forming the boundary of the groove is required. The cutting blade is required to have high accuracy. As described above, a plurality of planar relief surfaces having a relatively large relief angle are provided in advance as the second relief surface, and then the first relief surface having a relatively small relief angle and a curved surface is provided at the tip. With the formed structure, since the second flank is a flat surface, it is easily polished with high precision to form a very sharp linear cutting edge, and then the first flank is formed. A curved cutting edge is formed with high accuracy with a small amount of machining.

第4の特徴は、前記第1の逃げ面の幅は、60μm以下であることである。   A fourth feature is that the width of the first flank is 60 μm or less.

このように曲面や平面の組み合わされた面からなる第1の逃げ面の幅を小さくすることで、複雑な形状の逃げ面の加工量が少なくなって容易に形成できるとともに、微細な加工を行う場合に逃げ面が被加工物に干渉するのを防止することができる。なお、第1の逃げ面は研磨痕のない鏡面にするのが好ましい。   In this way, by reducing the width of the first flank formed of a curved surface or a combined surface, the amount of processing of the flank having a complicated shape can be easily reduced and fine processing can be performed. In this case, the flank can be prevented from interfering with the workpiece. The first flank is preferably a mirror surface with no polishing marks.

第5の特徴は、前記第1の逃げ面の逃げ角と、前記第2の逃げ面の逃げ角との差は、10〜75°であることである。   The fifth feature is that the difference between the clearance angle of the first flank and the clearance angle of the second flank is 10 to 75 °.

10°以上の逃げ角の差を設けることで、微細な加工を行う場合においても第2の逃げ面が被加工物に干渉するのを防止でき、75°以下とすることで刃先の強度を確保する。この逃げ角の差を大きくすればするほど、第1の逃げ面の加工量を減らせることが可能になるので、特に総形形状の複雑な切刃の場合には、可能な限り逃げ角の差が大きい方が好ましく、60°以上が好ましい。   By providing a difference in clearance angle of 10 ° or more, the second flank can be prevented from interfering with the workpiece even when fine machining is performed, and the strength of the blade edge is ensured by setting it to 75 ° or less. To do. The larger the clearance angle difference is, the more the machining amount of the first clearance surface can be reduced. Therefore, especially in the case of a complex-shaped cutting blade, the clearance angle should be as much as possible. A larger difference is preferable, and 60 ° or more is preferable.

本発明のダイヤモンド工具は、逃げ面の大部分が平面で形成されるので、容易に高精度の研磨がなされ、高精度に研磨された第2の逃げ面とすくい面との間に第1の逃げ面が形成されるので、第1の逃げ面を高精度に仕上げることが容易になり、しかも曲面や平面が組み合わされてなる第1の逃げ面は加工量が少なくなるので切刃を容易に形成でき、高精度の切刃が効率よく容易に形成される。
また、二段の逃げ面にすることで、超精密加工用の微小な刃先である場合にも刃先の強度を確保しながら、被削材との干渉も防止することができる。
In the diamond tool of the present invention, since most of the flank is formed as a flat surface, high-accuracy polishing is easily performed, and the first flank and rake surface polished with high accuracy are easily in contact with the first flank. Since the flank is formed, it is easy to finish the first flank with high precision, and the first flank that is a combination of a curved surface and a flat surface reduces the amount of processing, making it easy to cut the cutting edge. A high-precision cutting blade can be formed efficiently and easily.
In addition, by using a two-step flank, it is possible to prevent interference with the work material while ensuring the strength of the cutting edge even in the case of a fine cutting edge for ultra-precision machining.

本発明のダイヤモンド工具の第1の例として、単結晶ダイヤモンドバイトを図1に、そのチップの拡大斜視図を図2に示す。ダイヤモンドバイト1は超硬合金などからなる工具本体3の先端部に単結晶ダイヤモンドからなるチップ2がろう付けなどにより固定されている。チップ2は先端が凸状になっており、その凸状部分に円弧状切刃7が形成され、その切刃7はすくい面4と第1の逃げ面5とが交差することにより形成されている。円弧状切刃7の後方には直線状の稜線が形成されているが、この部分は切刃としては作用しない。第1の逃げ面5のすくい面4と反対側には複数の平面からなる第2の逃げ面6が形成されており、この第2の逃げ面6は第1の逃げ面5よりも逃げ角が大きくなっている。すなわち、第1の逃げ面5は、すくい面4と第2の逃げ面6との交差部に設けられており、その幅は60μm以下である。そして、第1の逃げ面5と第2の逃げ面6との逃げ角の差は10〜75°となっている。また、通常のダイヤモンド工具では円弧状切刃の逃げ面は円錐状の面で形成されることが多いが、本発明のダイヤモンド工具では、第1の逃げ面5が円筒状の面になっている。このような面にすれば、切刃7が摩耗した時にすくい面4を平行に研磨すると円弧状切刃7のRの大きさが変化せず、同じ形状の切刃7を再生することができる。また、円弧状切刃7の後方にある直線状の稜線はすくい面4と第2の逃げ面6aおよび6bとの交差により形成されている。   As a first example of the diamond tool of the present invention, a single crystal diamond tool is shown in FIG. 1, and an enlarged perspective view of the tip is shown in FIG. In the diamond tool 1, a tip 2 made of single crystal diamond is fixed to the tip of a tool body 3 made of cemented carbide by brazing or the like. The tip 2 has a convex tip, and an arcuate cutting edge 7 is formed on the convex portion. The cutting edge 7 is formed by the rake face 4 and the first flank 5 intersecting each other. Yes. A straight ridge line is formed behind the arcuate cutting edge 7, but this portion does not act as a cutting edge. On the opposite side of the first flank 5 from the rake face 4, a second flank 6 having a plurality of planes is formed. The second flank 6 has a clearance angle larger than that of the first flank 5. Is getting bigger. That is, the first flank 5 is provided at the intersection of the rake face 4 and the second flank 6 and has a width of 60 μm or less. And the difference of the flank angle of the 1st flank 5 and the 2nd flank 6 is 10-75 degrees. Further, in the normal diamond tool, the flank of the arcuate cutting blade is often formed as a conical surface, but in the diamond tool of the present invention, the first flank 5 is a cylindrical surface. . With such a surface, when the rake face 4 is polished in parallel when the cutting edge 7 is worn, the radius R of the arcuate cutting edge 7 does not change, and the cutting edge 7 having the same shape can be regenerated. . A straight ridge line behind the arcuate cutting edge 7 is formed by the intersection of the rake face 4 and the second flank faces 6a and 6b.

ダイヤモンドチップ2の各面のPV値は、すくい面4の少なくとも切刃7から0.5mmまでの範囲の部分が3〜300nm、第1の逃げ面5は3〜2000nm、第2の逃げ面6は面によって3〜500nmと0.1〜5μmとなっている。   The PV value of each face of the diamond tip 2 is 3 to 300 nm at least in the range from the cutting edge 7 to 0.5 mm of the rake face 4, 3 to 2000 nm for the first flank 5, and the second flank 6. Is 3 to 500 nm and 0.1 to 5 μm depending on the surface.

本発明のダイヤモンド工具のチップの第2の例を図3に示す。上記の例と同様にチップ2は先端が凸状になっており、その凸状部分の一部に円弧状切刃7が形成されているが、上記の例と異なる点として、円弧状切刃7に連続してRの異なる曲線の切刃7aが形成されており、これらの切刃7および7aはすくい面4と第1の逃げ面5とが交差することにより形成されている。Rの異なる曲線の切刃7aの後方には直線状の稜線が形成され、この稜線はすくい面4と第2の逃げ面6aおよび6bとの交差により形成されているが、Rの異なる曲線の切刃7aと直線状の稜線との間には段差が形成されている。その他の点については、上記の例と同様である。   A second example of the tip of the diamond tool of the present invention is shown in FIG. As in the above example, the tip 2 has a convex tip, and an arcuate cutting edge 7 is formed on a part of the convex part. 7, cutting edges 7a having different curves of R are formed. These cutting edges 7 and 7a are formed by the rake face 4 and the first flank 5 intersecting each other. A straight ridge line is formed behind the cutting edge 7a having a different curve R. This ridge line is formed by the intersection of the rake face 4 and the second flank faces 6a and 6b. A step is formed between the cutting edge 7a and the linear ridge line. About another point, it is the same as that of said example.

本発明のダイヤモンド工具のチップの第3の例を図4に示す。上記の例と同様にチップ2は先端が凸状になっており、その凸状部分の先端にはジグザグ状の総形の切刃7が形成されている。この総形の切刃7は直線切刃をジグザグ状につないだ形状になっており、これらの切刃7はすくい面4と第1の逃げ面5(5a〜5h)とが交差することにより形成されている。切刃7の後方には、直線状の稜線が形成され、この稜線はすくい面4と第2の逃げ面6aおよび6cとの交差により形成されている。なお、この例では第2の逃げ面6は6a、6b、6cの3つの面で構成されており、第2の逃げ面6aおよび6cのPV値は3〜500nmであり、第2の逃げ面6bは0.1〜5μmである。   A third example of the tip of the diamond tool of the present invention is shown in FIG. Like the above example, the tip 2 has a convex tip, and a zigzag cutting blade 7 is formed at the tip of the convex portion. The total cutting edge 7 has a shape in which straight cutting edges are connected in a zigzag shape. These cutting edges 7 are formed by the rake face 4 and the first flank 5 (5a to 5h) intersecting each other. Is formed. A straight ridge line is formed behind the cutting edge 7, and this ridge line is formed by the intersection of the rake face 4 and the second flank faces 6a and 6c. In this example, the second flank 6 is composed of three surfaces 6a, 6b, and 6c, and the PV values of the second flank 6a and 6c are 3 to 500 nm. 6b is 0.1-5 micrometers.

本発明のダイヤモンド工具のチップの第4の例を図5に示す。上記の第1の例と同様にチップ2は先端が凸状になっており、その凸状部分の一部に円弧状切刃7が形成されているが、第1の例と異なる点として、円弧状切刃7に連続して直線の切刃7bが形成されており、円弧状切刃7はすくい面4と第1の逃げ面5とが交差することにより形成され、直線切刃7bはすくい面4と第2の逃げ面6とが交差することにより形成されている。円弧状切刃7と直線切刃7bとの境界部は段差がなく連続した稜線に切刃が形成されている。第2の逃げ面6は6aと6bの2つの面で形成されるが、どちらの面もPV値は3〜500nmの高精度に研磨された面になっている。その他の点については、上記の例と同様である。   A fourth example of the tip of the diamond tool of the present invention is shown in FIG. As in the first example, the tip 2 has a convex tip, and an arcuate cutting edge 7 is formed on a part of the convex part, but the point different from the first example is as follows: A linear cutting edge 7b is formed continuously with the arcuate cutting edge 7, and the arcuate cutting edge 7 is formed by the rake face 4 and the first flank 5 intersecting, and the linear cutting edge 7b is The rake face 4 and the second flank 6 intersect each other. The boundary between the arcuate cutting edge 7 and the linear cutting edge 7b has no step and the cutting edge is formed on a continuous ridgeline. The second flank 6 is formed by two surfaces 6a and 6b, both of which are polished surfaces with a high PV value of 3 to 500 nm. About another point, it is the same as that of said example.

以上のような本発明のダイヤモンド工具は、すくい面および第2の逃げ面を研削および研磨により高精度な面を形成しておき、最後に第1の逃げ面を形成することで得られるが、第1の逃げ面を形成するには研削や研磨による加工の他、レーザ、集束イオンビームなどを用いた加工によることもできる。   The diamond tool of the present invention as described above can be obtained by forming a highly accurate surface by grinding and polishing the rake surface and the second flank, and finally forming the first flank, The first flank can be formed by processing using a laser, a focused ion beam, or the like in addition to processing by grinding or polishing.

本発明のダイヤモンド工具として、図2に示す形状のチップを有するダイヤモンドバイトを製作し、従来のダイヤモンド工具として、図6に示す形状のチップを有するダイヤモンドバイトを製作して、切削加工試験を行った。本発明のダイヤモンド工具のチップは、各面のPV値は、すくい面4が100nm、第1の逃げ面5が100nm、第2の逃げ面6は2つの平面からなり、一方の面6aおよびもう一方の面6bは50nmである。第1の逃げ面5の幅(図2で上下方向の長さ)は、最大の部分で45μmとなっており、逃げ角は、第1の逃げ面5が7°、第2の逃げ面6は一方の面6aおよびもう一方の面6bともに13°である。切刃7の形状は、サイズの異なる3種類のRを複合させた形状であり、第2の逃げ面を高精度に形成しておくことにより、その後第1の逃げ面をレーザや集束イオンビームによる加工を併用した加工により高精度に加工することが可能となって高精度の切刃が得られ、従来の構成の逃げ面では製作が極めて困難であった形状の切刃を創生することができた。一方、従来の構成の逃げ面を有し、サイズの異なる3種類のRを複合させた形状の切刃を有するダイヤモンド工具を製作することを試みたが、目標とする形状の切刃を高精度に創生することができなかった。   A diamond cutting tool having a chip having the shape shown in FIG. 2 was manufactured as a diamond tool of the present invention, and a diamond cutting tool having a chip having a shape shown in FIG. 6 was manufactured as a conventional diamond tool, and a cutting test was performed. . In the diamond tool tip of the present invention, the PV value of each surface is such that the rake face 4 is 100 nm, the first flank 5 is 100 nm, the second flank 6 is composed of two flat surfaces, one surface 6a and the other. One surface 6b is 50 nm. The width of the first flank 5 (length in the vertical direction in FIG. 2) is 45 μm at the maximum, and the flank angle is 7 ° for the first flank 5 and the second flank 6. Is 13 ° on one side 6a and the other side 6b. The shape of the cutting edge 7 is a shape in which three types of Rs having different sizes are combined. By forming the second flank with high accuracy, the first flank is then formed into a laser or focused ion beam. High-precision cutting blades can be obtained with high-precision machining by machining combined with machining, and a cutting blade with a shape that was extremely difficult to manufacture with the conventional flank face is created. I was able to. On the other hand, we tried to produce a diamond tool that has a flank with a conventional configuration and has a cutting edge with a shape that combines three types of Rs with different sizes. Could not be created.

上記の本発明のダイヤモンド工具を用いて、無酸素銅の切削加工を行った。加工は、フライカットにより10μmの深さの溝を形成するものであり、切削条件は、切削速度565m/min、工具切り込み5μm、送り40mm/minである。   Using the diamond tool of the present invention, oxygen-free copper was cut. The machining is to form a groove having a depth of 10 μm by fly cutting, and the cutting conditions are a cutting speed of 565 m / min, a tool cutting of 5 μm, and a feed of 40 mm / min.

以上の条件で切削加工試験を行った結果、本発明のダイヤモンド工具は100nmの良好な形状転写が認められ、本発明のダイヤモンド工具は高精度な加工ができることがわかった。また、刃先の強度が高くなってチッピングが起こりにくいために寿命が向上し、被加工物との干渉も発生しなかった。   As a result of conducting a cutting test under the above conditions, it was found that the diamond tool of the present invention had a good shape transfer of 100 nm, and that the diamond tool of the present invention can perform high-precision processing. Further, since the strength of the blade edge was high and chipping was difficult to occur, the life was improved and no interference with the workpiece was generated.

本発明のダイヤモンド工具の実施例2として、図5に示す形状のチップを有するダイヤモンドバイトを製作し、従来のダイヤモンド工具として、図6に示す形状のチップを有するダイヤモンドバイトを製作して、切削加工試験を行った。本発明のダイヤモンド工具のチップは、各面のPV値は、すくい面4が100nm、第1の逃げ面5が500nm、第2の逃げ面6は2つの平面からなり、どちらの面も50nmである。第1の逃げ面5の幅(図2で上下方向の長さ)は、最大の部分で25μmとなっており、逃げ角は、第1の逃げ面5が7°、第2の逃げ面6はどちらの面も13°である。切刃7の形状は、一定のR形状であり、その後側に形成された直線切刃7aとは段差なく滑らかに繋がっている。一方、従来のダイヤモンド工具のチップとして、先端に円錐状の逃げ面を有し、その後側に平面の逃げ面を形成するよう研削と研磨加工により製作した。   As Example 2 of the diamond tool of the present invention, a diamond cutting tool having a chip shape shown in FIG. 5 was manufactured, and as a conventional diamond tool, a diamond cutting tool having a chip shape shown in FIG. A test was conducted. In the diamond tool tip of the present invention, the PV value of each face is 100 nm for the rake face 4, 500 nm for the first flank face 5, and the second flank face 6 is composed of two flat surfaces, both of which are 50 nm. is there. The width of the first flank 5 (vertical length in FIG. 2) is 25 μm at the maximum, and the flank angle is 7 ° for the first flank 5 and the second flank 6. Is 13 ° on both sides. The shape of the cutting edge 7 is a constant R shape, and is smoothly connected to the straight cutting edge 7a formed on the rear side thereof without any step. On the other hand, the tip of a conventional diamond tool was manufactured by grinding and polishing so as to have a conical flank at the tip and a flat flank on the rear side.

上記の本発明のダイヤモンド工具を用いて、無酸素銅の切削加工を行った。加工は、フライカットにより35μmの深さの溝を形成するものであり、切削条件は、切削速度565m/min、工具切り込み5μm、送り40mm/minである。   Using the diamond tool of the present invention, oxygen-free copper was cut. The machining is to form a groove having a depth of 35 μm by fly cutting, and the cutting conditions are a cutting speed of 565 m / min, a tool cutting of 5 μm, and a feed of 40 mm / min.

以上の条件で切削加工試験を行った結果、本発明のダイヤモンド工具は700nmの良好な形状転写が認められ、本発明のダイヤモンド工具は高精度な加工ができることがわかった。また、刃先の強度が高くなってチッピングが起こりにくいために寿命が向上し、被加工物との干渉も発生しなかった。   As a result of performing a cutting test under the above conditions, it was found that the diamond tool of the present invention had a good shape transfer of 700 nm, and that the diamond tool of the present invention can perform high-precision processing. Further, since the strength of the blade edge was high and chipping was difficult to occur, the life was improved and no interference with the workpiece was generated.

本発明のダイヤモンド工具の例を示す図で、(a)は平面図、(b)は正面図である。It is a figure which shows the example of the diamond tool of this invention, (a) is a top view, (b) is a front view. 本発明のダイヤモンド工具のチップの第1の例を示す斜視図である。It is a perspective view which shows the 1st example of the chip | tip of the diamond tool of this invention. 本発明のダイヤモンド工具のチップの第2の例を示す斜視図である。It is a perspective view which shows the 2nd example of the chip | tip of the diamond tool of this invention. 本発明のダイヤモンド工具のチップの第3の例を示す斜視図である。It is a perspective view which shows the 3rd example of the chip | tip of the diamond tool of this invention. 本発明のダイヤモンド工具のチップの第4の例を示す斜視図である。It is a perspective view which shows the 4th example of the chip | tip of the diamond tool of this invention. 従来のダイヤモンド工具のチップの例を示す斜視図である。It is a perspective view which shows the example of the chip | tip of the conventional diamond tool.

符号の説明Explanation of symbols

1 ダイヤモンド工具
2 ダイヤモンドチップ
3 工具本体
4 すくい面
5 第1の逃げ面
6 第2の逃げ面
7 切刃
DESCRIPTION OF SYMBOLS 1 Diamond tool 2 Diamond tip 3 Tool main body 4 Rake face 5 First flank 6 Second flank 7 Cutting edge

Claims (6)

先端が凸状のダイヤモンドチップを有し、前記凸状部分に切刃が形成されたダイヤモンド工具であって、
前記凸状部分は、少なくとも前記切刃周辺のPV値が3〜300nmのすくい面と、PV値が3〜2000nmで曲面および/または平面の組合せられた面で構成され相対的に逃げ角の小さい第1の逃げ面と、少なくともPV値が3〜500nmの平面を含む複数の平面で構成される相対的に逃げ角の大きい第2の逃げ面とを有し、前記切刃は前記すくい面と前記第1の逃げ面との境界部に形成されてなるダイヤモンド工具。
A diamond tool having a tip with a convex diamond tip and a cutting edge formed on the convex portion,
The convex portion is composed of at least a rake face having a PV value of 3 to 300 nm around the cutting edge and a curved surface and / or a plane having a PV value of 3 to 2000 nm and a relatively small clearance angle. A first flank and a second flank having a relatively large flank angle composed of a plurality of planes including a plane having a PV value of at least 3 to 500 nm, and the cutting edge includes the rake face and A diamond tool formed at a boundary with the first flank.
前記切刃は円弧状切刃であり、前記切刃が形成される部分の前記第1の逃げ面は、円筒状の面であることを特徴とする請求項1に記載のダイヤモンド工具。   2. The diamond tool according to claim 1, wherein the cutting edge is an arcuate cutting edge, and the first flank of a portion where the cutting edge is formed is a cylindrical surface. 前記切刃は、Rの異なる曲線および/または直線の組合せで構成される総形形状の切刃であることを特徴とする請求項1に記載のダイヤモンド工具。   2. The diamond tool according to claim 1, wherein the cutting blade is a cutting blade having a general shape formed by a combination of curves and / or straight lines having different Rs. 先端が凸状のダイヤモンドチップを有し、前記凸状部分に切刃が形成されたダイヤモンド工具であって、
前記凸状部分は、少なくとも前記切刃周辺のPV値が3〜300nmのすくい面と、PV値が3〜2000nmで曲面で構成される相対的に逃げ角の小さい第1の逃げ面と、PV値が3〜500nmの複数の平面で構成される相対的に逃げ角の大きい第2の逃げ面とを有し、前記切刃は前記すくい面と第1の逃げ面との境界部に形成されたR切刃と前記すくい面と第2の逃げ面との境界部の少なくとも一部分に形成された直線状切刃とからなるダイヤモンド工具。
A diamond tool having a tip with a convex diamond tip and a cutting edge formed on the convex portion,
The convex portion includes at least a rake face having a PV value of 3 to 300 nm around the cutting edge, a first flank face having a PV value of 3 to 2000 nm and a curved surface having a relatively small clearance angle, and PV And a second flank having a relatively large flank angle composed of a plurality of planes having a value of 3 to 500 nm, and the cutting edge is formed at a boundary between the rake face and the first flank. A diamond tool comprising an R cutting edge and a linear cutting edge formed at least at a part of a boundary portion between the rake face and the second flank face.
前記第1の逃げ面の幅は、60μm以下であることを特徴とする請求項1〜4のいずれかに記載のダイヤモンド工具。   The diamond tool according to claim 1, wherein a width of the first flank is 60 μm or less. 前記第1の逃げ面の逃げ角と前記第2の逃げ面の逃げ角との差は、10〜75°であることを特徴とする請求項1〜5のいずれかに記載のダイヤモンド工具。   The diamond tool according to any one of claims 1 to 5, wherein a difference between a clearance angle of the first flank and a clearance angle of the second flank is 10 to 75 °.
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DE112008001036T5 (en) 2007-09-28 2010-04-08 Aisin Aw Co., Ltd. cutting tool
JP2010005723A (en) * 2008-06-26 2010-01-14 Allied Material Corp Single-crystal diamond cutware
CN102266955A (en) * 2010-06-02 2011-12-07 山特维克知识产权股份有限公司 A cemented carbide insert as well as a cemented carbide blank for the manufacture of such cutting inserts
KR20110132528A (en) * 2010-06-02 2011-12-08 산드빅 인터렉츄얼 프로퍼티 에이비 A cemented carbide insert as well as a cemented carbide blank for the manufacture of such cutting inserts
JP2011251403A (en) * 2010-06-02 2011-12-15 Sandvik Intellectual Property Ab Cemented carbide insert, and cemented carbide blank for manufacturing cemented carbide insert
KR101671532B1 (en) * 2010-06-02 2016-11-01 산드빅 인터렉츄얼 프로퍼티 에이비 A cemented carbide insert as well as a cemented carbide blank for the manufacture of such cutting inserts
JP2013088333A (en) * 2011-10-20 2013-05-13 Daipura Uintesu Kk Sample analysis method, sample slice collection device, and cutting-edge for sample slice collection
CN109203258A (en) * 2018-11-13 2019-01-15 无锡温特金刚石科技有限公司 A kind of conductor chip single-crystal diamond cutting tool

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