KR20180003425A - Multipoint diamond tool and method of manufactureing the same - Google Patents

Abstract

The present invention is provided to: reduce the replacement number of tools even if a point is worn out by scribing; and prevent damage on another adjacent point when a scribing is being ended by external cutting. First and second upper surfaces (15a to 15h) are formed in a corner inserted between two outer circumference surfaces of a base (11) of a diamond tool (10). Inclined surfaces (16a to 16h, 17a to 17h) are formed so that a part overlaps an upper surface from both lateral sides and an intersecting point between the upper surface and a ridge becomes a point. By the above, a scribing of having the upper surface as a front and the ridge as a rear side does not damage another adjacent point when the scribing is being ended by the external cutting.

Description

[0001] MULTIPOINT DIAMOND TOOL AND METHOD OF MANUFACTURE THE SAME [0002]

The present invention relates to a multipoint diamond tool for scribing a brittle material substrate such as a glass substrate or a silicon wafer by a diamond point, and a method of manufacturing the same.

Conventionally, in order to scribe a glass substrate or a silicon wafer, a tool using a diamond point by a scribing wheel or a single crystal diamond is used. As to the glass substrate, a scribing wheel that transfers mainly to the substrate has been used, but the use of a fixed-point diamond point has also been studied due to the advantages such as improved strength of the substrate after scribing. Patent Literatures 1 and 2 propose a point cutter for scribing a substrate having a high hardness such as a sapphire wafer or an alumina wafer. In these patent documents, a tool having a cut point on the ridgeline of a pyramid or a tool having a cone at the tip is used. Patent Document 3 proposes a scribing apparatus using a glass scriber having a conical tip for scribing a glass plate.

JP 2003-183040 A JP 2005-079529 A JP 2013-043787 A

If scribing is advanced by a tool with a conventional fixed blade, the point is worn out, and the point needs to be changed. In a pyramidal or conical tool, there are two vertices or four vertices that can be used. Therefore, if two or four points are changed, it is necessary to exchange the tools, which increases the frequency of exchange. Further, in scribing by a tool, the point needs to contact the substrate at an appropriate angle. However, in the conventional tool, when the point is changed, it is necessary to rotate the tool in the axial direction, and it is not easy to adjust the contact angle with good precision.

As shown in Fig. 1, each of the vertexes of the prismatic tool is polished so as to be superimposed on both sides so as to form a sloped surface, and a scribing tool 100 (100) having points on both sides of the intersection of the sloped surfaces as points P1, P2, ) Is considered. When the scribing tool is used to scribe the point P1 by pressing the point P1 against the substrate 101 by preceding the ridge line as shown in Fig. 1 (a), the scribing tool Even if scribing is completed on the substrate 101 by so-called external cutting, the other adjacent point P2 is not damaged.

However, as shown in Fig. 1 (b), when the outer cut scribing is performed by tilting the ridgeline forward to the rear using the point P2, There is a possibility that the substrate 101 may come into contact with the surface of the substrate 101 and be damaged.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide a method and apparatus for changing the position of a point used for scribing and reducing the frequency of replacement even when the point used for scribing is worn. And it is an object of the present invention to provide a diamond tool which does not cause damage to other adjacent points and a manufacturing method thereof.

In order to solve this problem, a multi-point diamond tool of the present invention is a prismatic prism having a predetermined thickness and includes a base having two side surfaces and a plurality of outer circumferential surfaces, a second outer circumferential surface First and second inclined surfaces formed to be sandwiched between the first and second upper surfaces, one side surface of the base, and the first and second outer peripheral surfaces; Third and fourth inclined surfaces formed to be sandwiched between the first and second upper surfaces, the other side surface of the base, the first and second outer peripheral surfaces, and the first ridgeline, which is a line of intersection of the first and third inclined surfaces, And a second ridge line intersecting the second and fourth inclined surfaces, at least an outer peripheral surface of the base is formed of diamond, and the first ridge line and the second ridge line, and the second ridge line and the second ridge line The point is to be point.

Wherein the multi-point diamond tool has a first upper surface formed between at least a second circumferential surface adjacent to the first circumferential surface, and a second upper surface between the second circumferential surface and the first upper surface And a first inclined surface is formed by polishing the first outer peripheral surface and the first upper surface to one side so as to polish one side surface between the second outer peripheral surface and the second upper surface to form a second inclined surface A third inclined surface is formed by polishing the first outer peripheral surface and the first upper surface toward the other side surface, and the second inclined surface is polished toward the other side surface between the second outer peripheral surface and the second upper surface, Thereby forming an inclined surface.

In order to solve this problem, a multi-point diamond tool of the present invention is a prismatic prism having a predetermined thickness and includes a base having two side surfaces and a plurality of outer circumferential surfaces, a second outer circumferential surface First and second upper surfaces, first and second upper surfaces, one side of the base, first and second inclined surfaces formed to be sandwiched between the first and second outer circumferential surfaces, Third and fourth inclined surfaces formed to be sandwiched between the first and second upper surfaces, the other side surface of the base, the first and second outer peripheral surfaces, and the first ridgeline, which is a line of intersection of the first and third inclined surfaces, A second ridge line that is a line of intersection of the second and fourth inclined surfaces, a fifth inclined surface formed between the first and second inclined surfaces and the first and second upper surfaces, and a third inclined surface formed between the third and fourth inclined surfaces, And a sixth inclined surface formed between the first upper surface and the second upper surface, It is formed of a, and to the first top surface and the first ridge, and the second point is formed in a top surface and a second ridge to the point.

The multi-point diamond tool is polished toward the intersecting ridges of the first and second outer circumferential surfaces between the adjacent first and second outer circumferential surfaces and one side surface within a half of the thickness of the base A fifth inclined surface is formed between the first and second outer circumferential surfaces and the other side surface in the range of the other half of the thickness of the base and is polished toward the intersecting ridgelines of the first and second outer circumferential surfaces A sixth inclined surface is formed and at least a first upper surface is formed between the second outer peripheral surface, the fifth inclined surface, and the sixth inclined surface with respect to the first outer peripheral surface, and the first upper surface is formed with respect to the second outer peripheral surface, A second upper surface formed between the fifth inclined surface and the sixth inclined surface, and a first inclined surface is formed by polishing between the first outer circumferential surface, the first upper surface, and the fifth inclined surface toward one side, The second outside The second upper surface and the fifth inclined surface are polished toward one side to form a second inclined surface, and a portion between the first upper surface, the first upper surface, and the sixth inclined surface is polished toward the other side surface To form a third inclined face, and polishing the second outer peripheral face, the second upper face, and the sixth inclined face toward the other side face to form a fourth inclined face.

According to the present invention having these features, points can be provided on both sides of the side of the diamond tool. Therefore, even if one point is worn, another new point can be used, and the frequency of replacement of the diamond tool can be reduced. In addition, even when the upper surface is set to be the first, and the diamond tool is run and scribed so that the ridgeline is later, and the scribing is ended by the external cutting, there is no effect of damaging other points of the diamond tool Loses.

1 is a side view showing scribing using a diamond tool having two points in a width direction in a prismatic shape.
2 is a side view and a front view showing a manufacturing process of a multipoint diamond tool according to a first embodiment of the present invention;
3 is a side view and a front view of a multipoint diamond tool according to a first embodiment of the present invention;
4 is a side view showing scribing using a multipoint diamond tool according to the first embodiment;
5 is a front view showing a manufacturing process of a multipoint diamond tool according to a second embodiment of the present invention;
6 is a side view and a front view of a multipoint diamond tool according to a second embodiment of the present invention;
7 is a plan view, a side view, and a front view of a multipoint diamond tool according to a third embodiment of the present invention;

Next, a first embodiment of the present invention will be described. FIG. 2 is a side view and a front view showing a manufacturing process of a multi-point diamond tool (hereinafter simply referred to as "diamond tool") 10 according to the present embodiment, FIG. 3 is a side view of the diamond tool 10 Front view. The diamond tool 10 has a polygonal prism having a predetermined thickness and an arbitrary number of sides as a base 11. In this embodiment, the square base 11 of a certain thickness is constituted by a single crystal diamond. The base 11 has four outer circumferential surfaces 13a to 13d parallel to the axis perpendicular to the thickness direction (axis perpendicular to the paper in FIG. 2 (a)) and side surfaces 14a and 14b perpendicular to the axis have.

In this embodiment, as shown in Fig. 2 (b), one outer peripheral surface 13a of the base 11 is polished toward the outer peripheral surface 13b from the outer peripheral surface 13a to the corner portion of the base Thereby forming the first upper surface 15a. Subsequently, the second upper surface 15b is formed by polishing from the outer circumferential surface 13b toward the first upper surface 15a formed on the adjacent outer circumferential surface 13a. The first upper surface 15a and the second upper surface 15b are formed adjacent to the edge portions sandwiched between the outer peripheral surfaces 13a and 13b. Similarly, a first upper surface 15c is formed by polishing from the outer circumferential surface 13b toward the adjacent outer circumferential surface 13c, and the first upper surface 15c is formed by cutting from the outer circumferential surface 13c toward the adjacent first upper surface 15c formed on the outer circumferential surface 13b And the second upper surface 15d is formed. The first upper surface 15e is formed by polishing from the outer circumferential surface 13c toward the adjacent outer circumferential surface 13d and the first upper surface 15e is formed from the outer circumferential surface 13d to the adjacent The first upper surface 15e and the second upper surface 15f. Likewise, upper surfaces 15g and 15h are also formed between the outer circumferential surface 13d and the outer circumferential surface 13a. As a result, first and second upper surfaces adjacent to each other are formed at the corner portions sandwiched between the outer peripheral surfaces of the quadrangular column.

Next, as shown in Fig. 3 (a), the first inclined surface 16a is formed by polishing between the outer peripheral surface 13a and the upper surface 15a toward the side surface 14a. The second inclined surface 16b is formed by polishing the side surface 14a between the outer peripheral surface 13b and the upper surface 15b. The other side surface 14b is also polished toward the side surface 14b between the outer peripheral surface 13a and the upper surface 15a and between the outer peripheral surface 13b and the upper surface 15b to form the third and fourth inclined surfaces 17a , 17b. At this time, the first and third inclined surfaces 16a and 17a are polished so as to intersect each other, and the second and fourth inclined surfaces 16b and 17b are polished so as to intersect with each other. In this way, the inclined surfaces 16a and 17a intersect the outer circumferential surface 13a at the middle in the thickness direction of the base 11, preferably at the central position as shown in Fig. 3 (b) A first ridge 18a is formed. Similarly, the second ridgeline 18b parallel to the side surface is formed at the middle of the base 11 in the thickness direction, preferably at the center, so that the inclined surfaces 16b and 17b cross each other. The first ridgeline 18a formed by the first and third inclined surfaces 16a and 17a and the first ridgeline 18a formed by the first and third inclined surfaces 16a and 17a are formed in the corner portions sandwiched between the outer circumferential surface 13a and the outer circumferential surface 13b A point P1 formed is formed. Similarly, a second ridge 18b formed by the second and fourth inclined surfaces 16b and 17b and a point P2 formed by the upper surface 15b are formed.

Next, the outer peripheral surface 13b and the outer peripheral surface 13c and the upper surfaces 15c and 15d are polished from the side surface 14a to form the first and second inclined surfaces 16c and 16d. The third and fourth inclined surfaces 17c and 17d are formed by polishing the outer peripheral surface 13b and the outer peripheral surface 13c and the upper surfaces 15c and 15d on the other side surface 14b. At this time, the inclined surfaces 16c and 17c are polished so as to intersect each other, and the inclined surfaces 16d and 17d are polished so as to intersect with each other. As a result, the first and third inclined faces 16c and 17c intersect with the outer circumferential face 13b at the center in the thickness direction of the base 11, preferably at the center position as shown in Fig. 3 (b) , And a first ridge 18c parallel to the side surface is formed. Likewise, the second and fourth inclined surfaces 16d and 17d intersect to form a second ridge 18d parallel to the side surface in the middle of the base 11 in the thickness direction, preferably at the central position .

Similarly, the first and second inclined surfaces 16e and 16f are formed by polishing the outer peripheral surface 13c, the outer peripheral surface 13d and the upper surfaces 15e and 15f from the side surface 14a. The third and fourth inclined surfaces 17e and 17f are formed by polishing the outer peripheral surface 13c and the outer peripheral surface 13d and the upper surfaces 15e and 15f from the side surface 14b. Even in this case, the inclined surfaces 16e and 17e are polished so as to intersect each other, and the inclined surfaces 16f and 17f are polished so as to intersect with each other. The first ridgeline 18e is formed on the outer circumferential surface 13c at the middle of the base 11 in the thickness direction, preferably at the central position, by intersecting the first and third inclined surfaces 16e and 17e do. Likewise, the second and fourth inclined surfaces 16f and 17f intersect to form the second ridgeline 18f in the middle of the thickness of the base 11, preferably at the center.

The first and second inclined surfaces 16g and 16h are formed by polishing the side surface 14a between the outer peripheral surface 13d and the outer peripheral surface 13a and the upper surfaces 15g and 15h, 3 and the fourth inclined surfaces 17g and 17h. Even in this case, the slopes 16g and 17g, 16h and 17h are polished so as to cross each other. Similarly, the first ridge 18g is formed on the outer peripheral surface 13d so that the first and third inclined surfaces 16g and 17g intersect with each other so that the middle ridge 18g is located at the middle of the thickness of the base 11, . Likewise, the second and fourth inclined surfaces 16h and 17h intersect with each other to form the second ridge 18h in the middle of the thickness of the base 11, preferably at the center.

Thus, the outer peripheral surface and the upper surface are polished from both side surfaces 14a and 14b, respectively, to form a pair of inclined surfaces and ridges 18a to 18h. The intersection formed by the upper surface 15a and the ridgeline 18a becomes the point P1 and the upper surface 15b and the ridge 18b are formed as the point P1 at the corner portion sandwiched between the outer peripheral surface 13a and the outer peripheral surface 13b. ) Becomes the point P2. The intersection formed by the upper surface 15c and the ridgeline 18c becomes the point P3 at the corner between the outer circumferential surface 13b and the outer circumferential surface 13c and the intersection of the upper surface 15d and the ridge 18d This is the point P4. The same applies to other outer circumferential surfaces. Here, since the base 11 has an outer circumferential surface on all four sides, two points and eight points (P1 to P8) can be formed at each corner.

Such an inclined surface can be easily formed by laser machining. Further, mechanical polishing may be further performed after laser processing to make the portion forming the ridgeline a more accurate polishing surface.

Next, a case of scribing using the diamond tool 10 of this embodiment will be described with reference to FIG. When the substrate 30 is scribed, the angle of the diamond tool 10 with respect to the ridgeline and the substrate 30 becomes counterclockwise from the vertical direction as shown in Fig. 4 (a) The diamond tool 10 is tilted a little and the one point P1 is fixed to be in contact with the substrate 30 so that the diamond tool 10 is moved in the direction of the arrow A shown in FIG. At this time, scribing is performed such that the upper surface 15a of the point P1 is in the forward direction and the ridge 18a is in the rear direction. Since the diamond tool 10 is not rotated between scribing points, it is scribed at the same point P1. Even when the diamond tool 10 runs to the end of the substrate 30 and the scribing is finished by the external cutting, the other point P2 formed at the same corner leads the diamond tool 10 to the position of the substrate 30 , There is no possibility that another point P2 will be damaged even if it is dropped as shown in Fig.

When scribing is performed so that the upper surface is preceded and the ridge is later, various conditions such as scribing load can be taken in a wide range and are effective. In addition, when forming a scribe line without vertical cracks on the substrate, it is possible to obtain an effect such that a crack is generated immediately below the scribe line at the end of the substrate by terminating the scribing by external cutting. According to the present embodiment, even in this case, the outer cutting can be performed without damaging other points.

4 (b), the diamond tool 10 is tilted in the reverse direction, and the point P2 is tilted in the opposite direction, as shown in Fig. 4 (b) It goes without saying that scribing can also be performed using In this case, there is a possibility that the point P1 is damaged. Therefore, scribing should not be terminated by external cutting.

When the point P1 abutting on the substrate 30 is deteriorated by abrasion, the diamond tool 10 is rotated by 90 degrees, the point P3 is brought into contact with the substrate 30, and scribing is performed in the same manner . Even in this case, when scribing is performed so that the top surface 15c is in the traveling direction and the ridgeline 18c is rearward, the point P6 is not damaged even if the scribing is completed by the external cutting. Further, even when the diamond tool 10 is rotated by 90 degrees, the angle of contact of the ridgeline of the blade to the substrate does not change, so it is easy to set the contact angle with respect to the substrate at the time of point exchange.

When all four points of the points P1, P3, P5 and P7 are worn, the diamond tool 10 is reversed to fix the ridge line and the brittle material substrate to a predetermined angle again, P2, P4, P6, and P8) are sequentially brought into contact with each other to perform scribing. By doing so, scribing can be performed by changing the point position four more times, and scribing can be performed by exchanging points eight times in total.

Next, the diamond tool 40 according to the second embodiment of the present invention will be described. Fig. 5 is a front view showing the manufacturing process of this embodiment, Fig. 6 is a side view and front view of the diamond tool 40, and the same parts as those of the first embodiment are denoted by the same reference numerals. In this second embodiment, first, as shown in Fig. 5 (a), the surface is polished from the side surface 14a toward the ridges intersecting the outer circumferential surfaces 13a and 13b to form the fifth inclined surface 41a. Then, the sixth inclined surface 42a is formed in a range of 1/2 of the thickness of the base toward the intersecting ridge of the outer peripheral surfaces 13a and 13b from the side surface 14b in symmetry with this. Next, the fifth inclined face 41b is formed in the range of 1/2 of the thickness of the base by polishing the side face 14a toward the intersecting ridges of the outer peripheral faces 13b and 13c. Then, a sixth inclined surface 42b is formed in a range of 1/2 of the thickness of the base toward the intersecting ridges of the outer peripheral surfaces 13b and 13c from the side surface 14b in symmetry with this. Further, the fifth inclined surface 41c is formed in a range of 1/2 of the thickness of the base by polishing from the side surface 14a toward the ridges intersecting the outer circumferential surfaces 13c and 13d. Then, a sixth inclined surface 42c is formed in a range of 1/2 of the thickness of the base from the side surface 14b toward the outer peripheral surfaces 13c and 13d in symmetry with this. Further, the fifth inclined surface 41d is formed in the range of 1/2 of the thickness of the base by polishing from the side surface 14a toward the outer circumferential surfaces 13d and 13a. Then, a sixth inclined surface 42d is formed in a range of 1/2 of the thickness of the base from the side surface 14b toward the outer peripheral surface 13d, 13a in symmetry with this.

Subsequently, as in the first embodiment described above, the first upper surface 15a is formed from one outer circumferential surface 13a toward the adjacent outer circumferential surface 13b, as shown in Fig. 5 (b). Then, upper surfaces 15b to 15h are formed similarly to the first embodiment described above. Next, as shown in Fig. 6 (b), the first inclined surface 16a is formed by polishing the outer peripheral surface 13a, the upper surface 15a, and the fifth inclined surface 41a toward the side surface 14a. Subsequently, the second inclined surface 17a is formed by polishing the outer peripheral surface 13a, the upper surface 15a and the sixth inclined surface 42a toward the side surface 14b to form the first inclined surface 16a and the second inclined surface 17a, 17a is referred to as a ridge line 18a. The first inclined surfaces 16b to 16h, the second inclined surfaces 17b to 17h, and the ridgelines 18b to 18h are similarly formed on the other upper surfaces 15b to 15h.

In this way, each of the top faces 15a to 15h becomes a pentagon having a small area as compared with the first embodiment. Since the upper surface needs to be precisely machined, the smaller the area, the less the polishing time and the amount of polishing of the upper surface, and the manufacturing process of the diamond tool 40 can be rationalized.

Even when scribing is performed using the point P1 of the diamond tool 40, when the point P1 is deteriorated by abrasion, the diamond tool 10 is rotated by 90 degrees to move the points P3, P5, and P7, . When all four points are worn, the diamond tool 10 is reversed. Then, points P2, P4, P6 and P8 are successively brought into contact with each other so that the angle formed by the ridgeline and the brittle material substrate is constant, and scribing is performed by changing the point position four times in total after the reversal. In this way, scribing can be performed with a total of eight changes in point.

Next, a third embodiment of the present invention will be described. Although the square base is used in the first and second embodiments described above, a polygon of any number of sides may be used as a base. In addition, eight points are provided around each base, but at least one corner of the polygon should have one point on the opposite outer circumferential surface. In the third embodiment, a triangular base 61 is used as shown in Fig. The base 61 has three outer peripheral surfaces 63a, 63b and 63c perpendicular to the axis and side surfaces 64a and 64b. The first upper surface 65a, the first inclined surface 66a, the third inclined surface 67a and the first ridge 68a are formed on the outer peripheral surface 63a as in the first and second embodiments described above . The second upper surface 65b, the second inclined surface 66b, the fourth inclined surface 67b, and the second ridgeline 68b are formed on the outer peripheral surface 63b. By doing so, a diamond tool 60 having only two points P1 and P2 can be formed.

In the above-described first and second embodiments, eight points are provided in the periphery, but it is not necessary to provide inclined surfaces and points at all the corners. However, it is desirable to provide as many points as possible in the outer circumferential portion in the range where adjacent points do not interfere with each other. This makes it possible to exchange points only by rotating the diamond tool when each point is worn, thereby reducing the frequency of replacement of the diamond tool. Further, the shape of the base is not limited to a triangle or a quadrangle, but may be any polygon such as a hexagon or an octagon.

In the above-described embodiment, the entire base is made of single crystal diamond. However, since the surface portion contacting the brittle material substrate is only a diamond, it is preferable that the surface of the base and the ridge of the base formed using the cemented carbide or sintered diamond- And this point may be polished more precisely to form points. In addition, monocrystalline or polycrystalline diamond doped with impurities such as boron and made conductive may be used. By using a diamond having conductivity, it is possible to easily form an inclined surface and a through hole by electrical discharge machining.

In the above-described embodiment, the diamond tool is scribed in advance to the upper surface of each point so that the ridgeline is later. However, the ridgeline of each point may be preceded and the upper surface may be scribed later .

The multi-point diamond tool of the present invention can be used in a scribing apparatus for scribing a brittle material substrate, and can effectively be used for a scribe object having a high degree of hardness in which abrasion of a diamond tool is increased.

10, 40, 60: Multi-point diamond tool
11: Base
13a to 13d, 63a to 63c:
14a, 14b, 64a, 64b:
15a, 15c, 15e, 15g, 65a: a first upper surface
15b, 15d, 15f, 15h, 65b: a second upper surface
16a, 16c, 16e, 16g, 66a: a first inclined surface
16b, 16d, 16f, 16h, 66b:
17a, 17c, 17e, 17g, 67a: a third inclined surface
17b, 17d, 17f, 17h, 67b: a fourth inclined surface
18a, 18c, 18e, 18g, 68a: first ridge
18b, 18d, 18f, 18h, 68b: a second ridge
41a to 41d: a fifth inclined surface
42a to 42d: a sixth inclined surface
P1 to P8: Points

Claims (4)

As a multipoint diamond tool,
A base having a prismatic shape with a predetermined thickness and having two side surfaces and a plurality of outer peripheral surfaces;
First and second upper surfaces formed between at least a first outer peripheral surface of the base and a second outer peripheral surface adjacent to the base;
First and second inclined surfaces formed to be sandwiched between the first and second upper surfaces, one side surface of the base, and the first and second outer peripheral surfaces;
Third and fourth inclined surfaces formed to be sandwiched between the first and second upper surfaces, the other side surfaces of the base, and the first and second outer peripheral surfaces; And
A first ridge line that is a line of intersection of the first and third inclined planes and a second ridge line that is a line of intersection of the second and fourth inclined planes,
At least an outer circumferential surface of the base is formed of diamond,
The point being formed by the first upper surface and the first ridge, and the point formed by the second upper surface and the second ridge. As a multipoint diamond tool,
A base having a prismatic shape with a predetermined thickness and having two side surfaces and a plurality of outer peripheral surfaces;
First and second upper surfaces formed between at least a first outer peripheral surface of the base and a second outer peripheral surface adjacent to the base;
First and second inclined surfaces formed to be sandwiched between the first and second upper surfaces, one side surface of the base, and the first and second outer peripheral surfaces;
Third and fourth inclined surfaces formed to be sandwiched between the first and second upper surfaces, the other side surfaces of the base, and the first and second outer peripheral surfaces;
A first ridge line that is a line of intersection of the first and third inclined planes; a second ridge line that is a line of intersection of the second and fourth inclined planes; And
A fifth inclined surface formed between the first and second inclined surfaces and the first and second upper surfaces and a sixth inclined surface formed between the third and fourth inclined surfaces and the first and second upper surfaces,
At least an outer circumferential surface of the base is formed of diamond,
The point being formed by the first upper surface and the first ridge, and the point formed by the second upper surface and the second ridge. A method of manufacturing a multipoint diamond tool according to claim 1,
Forming a first upper surface between at least a second outer circumferential surface adjacent to the first outer circumferential surface;
Forming a second upper surface between the second outer circumferential surface and the first upper surface;
Polishing the first outer circumferential surface and the first upper surface toward one side to form a first inclined surface;
Polishing the first outer peripheral surface and the second upper peripheral surface to form a second inclined surface;
Polishing the first outer circumferential surface and the first upper surface toward the other side surface to form a third inclined surface; And
And polishing the second outer peripheral surface and the second upper surface toward the other side to form a fourth inclined surface. A method of manufacturing a multipoint diamond tool according to claim 2,
Forming a fifth inclined surface by polishing between the first and second outer circumferential surfaces and one side surface adjacent to each other within a half of the thickness of the base toward the ridges intersecting the first and second outer circumferential surfaces ;
And a sixth inclined surface is formed between the first and second outer circumferential surfaces and the other side surface in a range within a half of the thickness of the base toward the intersecting ridges of the first and second outer circumferential surfaces step;
Forming a first upper surface between at least the second outer peripheral surface, the fifth inclined surface and the sixth inclined surface with respect to the first outer peripheral surface;
Forming a second upper surface between the first upper surface, the fifth ramp surface, and the sixth ramp surface with respect to the second outer circumferential surface;
Polishing the first outer circumferential surface, the first upper surface, and the fifth inclined surface toward one side to form a first inclined surface;
Polishing the second outer peripheral surface, the second upper surface, and the fifth inclined surface toward one side to form a second inclined surface;
Polishing the first outer circumferential surface, the first upper surface, and the sixth inclined surface toward the other side surface to form a third inclined surface; And
And polishing the second outer circumferential surface, the second upper surface, and the sixth inclined surface toward the other side surface to form a fourth inclined surface.

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