CN107553759B

CN107553759B - Multi-edge diamond cutter and manufacturing method thereof

Info

Publication number: CN107553759B
Application number: CN201710465447.XA
Authority: CN
Inventors: 曾山浩
Original assignee: Mitsuboshi Diamond Industrial Co Ltd
Current assignee: Mitsuboshi Diamond Industrial Co Ltd
Priority date: 2016-06-30
Filing date: 2017-06-19
Publication date: 2021-02-26
Anticipated expiration: 2037-06-19
Also published as: TW201801876A; KR102352243B1; CN107553759A; TWI723167B; JP2018001535A; KR20180003425A; JP6771207B2

Abstract

The application discloses a multi-edge diamond cutter and a manufacturing method thereof, which can reduce the replacement times of the cutter even if the cutting edge is abraded due to scribing, and can not damage other adjacent cutting edges under the condition of finishing scribing by external cutting. First and second top surfaces (15 a-15 h) are formed at corners sandwiched between both outer peripheral surfaces of a base (11) of a diamond cutter (10). Inclined surfaces (16 a-16 h, 17 a-17 h) are formed so that a part of the inclined surfaces overlaps the top surface from both side surfaces, and the intersection of the top surface and the ridge line is defined as a blade edge. In this way, even in the scribing line in which the top surface is on the front side of the front ridge line and on the rear side, the other adjacent cutting edges are not damaged at the end of the outward cutting scribing line.

Description

Multi-edge diamond cutter and manufacturing method thereof

Technical Field

The present invention relates to a multi-edge diamond cutter for scribing a brittle material substrate such as a glass substrate or a silicon wafer using a diamond blade and a method for manufacturing the same.

Background

Conventionally, a diamond blade cutter formed of a scribing cutter wheel or a single crystal diamond has been used for scribing a glass substrate or a silicon wafer. The use of a diamond blade having a fixed blade has been studied in order to improve the strength of a scribed substrate, while a scribing cutter wheel rotating relative to the substrate has been mainly used for a glass substrate.

Patent documents

1 and 2 propose a point-scribing cutter for scribing a substrate having high hardness, such as a sapphire wafer or an alumina wafer. In these patent documents, a cutter having a point nicking tool provided on a ridge line of a pyramid and a cutter having a conical tip are used. Further, patent document 3 proposes a glass scribing apparatus using a glass plate having a conical tip for scribing the glass plate.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2003-183040

Patent document 2: japanese patent laid-open publication No. 2005-079529

Patent document 3: japanese patent laid-open publication No. 2013-043787

Disclosure of Invention

Problems to be solved by the invention

Since the scribing blade using the existing fixed-edge cutter is worn, the blade needs to be changed. Pyramidal or conical cutters can be used with 2 or at most 4 points of apex, i.e. cutting edge. Therefore, if the cutting edge is changed at 2 or 4, the tool needs to be replaced, which causes a problem of high replacement frequency. In addition, in scribing with a cutter, the blade needs to contact the substrate at an appropriate angle. However, with the conventional tool, when changing the cutting edge, it is necessary to rotate the tool in the axial direction, and therefore it is not easy to adjust the contact angle degree with high accuracy.

Therefore, as shown in fig. 1, a scribing tool 100 may be considered in which the respective vertexes of the prismatic tool are lapped so as to overlap from both the side surfaces to form inclined surfaces, and the cutting edges P1 and P2 are formed on both sides of the intersection line of the inclined surfaces. When the scribing tool is used to scribe the substrate 101 with the edge line in front and the blade P1 pressed against the substrate 101 as shown in fig. 1 (a), even when the substrate 101 is scribed so as to pass the end of the substrate and the scribing is completed by so-called outer cutting, the adjacent blade P2 is not damaged.

However, as shown in fig. 1 (b), when the ridge is tilted forward using the blade P2 to perform the outer scribe line with the ridge line directed rearward, there is a problem that: the unused blade P1 may contact the surface of the substrate 101 and be damaged when the circumscribing is completed.

In view of the above problems, an object of the present invention is to provide a diamond tool and a method of manufacturing the same, which can easily change the position of a cutting edge for scribing even when the cutting edge is worn, reduce the frequency of replacement, and prevent damage to other cutting edges adjacent to the cutting edge even when scribing is completed by circumscribed cutting.

Means for solving the problems

To solve the problem, a multi-edge diamond tool according to the present invention includes: a base having a prism shape with a predetermined thickness and including two side surfaces and a plurality of outer circumferential surfaces; a first top surface and a second top surface at least provided between the first outer peripheral surface and the adjoining second outer peripheral surface of the base; a first inclined surface provided so as to be sandwiched between the first top surface, one side surface of the base, and the first outer peripheral surface; a second inclined surface provided so as to be sandwiched between the second top surface, one side surface of the base, and the second outer peripheral surface; a third inclined surface provided so as to be sandwiched between the first top surface, the other side surface of the base, and the first outer peripheral surface; a fourth inclined surface provided so as to be sandwiched between the second top surface, the other side surface of the base, and the second outer peripheral surface; a first ridge line which is an intersection line of the first inclined surface and the third inclined surface; and a second ridge line which is an intersection line of the second inclined surface and the fourth inclined surface, at least an outer peripheral surface of the base is formed of diamond, and the multi-edge diamond tool has a point formed by the first top surface and the first ridge line, and the second top surface and the second ridge line as a cutting edge.

The above-described multi-edged diamond tool is a tool manufactured by: forming the first top surface at least between the first outer peripheral surface and the adjacent second outer peripheral surface; forming the second top surface between the second outer peripheral surface and the first top surface; grinding the first outer peripheral surface and the first top surface toward one side surface to form the first inclined surface; grinding the second outer circumferential surface and the second top surface toward one side surface to form the second inclined surface; grinding the first outer peripheral surface and the first top surface toward the other side surface to form the third inclined surface; and grinding the second outer circumferential surface and the second top surface toward the other side surface to form the fourth inclined surface.

To solve the problem, a multi-edge diamond tool according to the present invention includes: a base having a prism shape with a predetermined thickness and including two side surfaces and a plurality of outer circumferential surfaces; a first top surface and a second top surface at least provided between the first outer peripheral surface and the adjoining second outer peripheral surface of the base; a first inclined surface provided so as to be sandwiched between the first top surface, one side surface of the base, and the first outer peripheral surface; a second inclined surface provided so as to be sandwiched between the second top surface, one side surface of the base, and the second outer peripheral surface; a third inclined surface provided so as to be sandwiched between the first top surface, the other side surface of the base, and the first outer peripheral surface; a fourth inclined surface provided so as to be sandwiched between the second top surface, the other side surface of the base, and the second outer peripheral surface; a first ridge line which is an intersection line of the first inclined surface and the third inclined surface; a second ridge line which is an intersection line of the second inclined surface and the fourth inclined surface; a fifth inclined surface disposed between the first inclined surface and the second inclined surface and the first top surface and the second top surface; and a sixth inclined surface provided between the third inclined surface and the fourth inclined surface and the first top surface and the second top surface, at least an outer peripheral surface of the base being formed of diamond, the multi-edged diamond tool having a point formed by the first top surface and the first ridge line and a point formed by the second top surface and the second ridge line as a cutting edge.

The above-described multi-edged diamond tool is a tool manufactured by: in a range within 1/2 of the base, a ridge line intersecting the first outer circumferential surface and the second outer circumferential surface is ground between the first outer circumferential surface, the second outer circumferential surface and one side surface which are adjacent to each other to form the fifth inclined surface; in a range within the thickness of the other 1/2 of the base, the sixth inclined surface is formed by grinding a ridge line between the first outer peripheral surface, the second outer peripheral surface, and the other side surface, the ridge line intersecting the first outer peripheral surface and the second outer peripheral surface; forming the first top surface between at least the first outer peripheral surface and the second outer peripheral surface, the fifth inclined surface, and the sixth inclined surface; forming the second top surface between the second outer circumferential surface and the first top surface, the fifth inclined surface, and the sixth inclined surface; grinding the first outer peripheral surface, the first top surface, and the fifth inclined surface toward one side surface to form the first inclined surface; grinding the second outer circumferential surface, the second top surface, and the fifth inclined surface toward one side surface to form the second inclined surface; grinding the first outer peripheral surface, the first top surface, and the sixth inclined surface toward the other side surface to form the third inclined surface; and the fourth inclined surface is formed by grinding the second outer circumferential surface, the second top surface and the sixth inclined surface toward the other side surface.

Effects of the invention

According to the present invention having such a feature, it is possible to provide the cutting edges on both sides of the side surface of the diamond tool. Therefore, even if one blade is worn, another new blade can be used, and the effect of being able to reduce the frequency of replacement of the diamond cutter can be obtained. In addition, even when the diamond cutter is advanced and scribed so that the top surface is forward and the ridge line is backward, and scribing is completed by the outer cutting, the other cutting edges of the diamond cutter are not damaged.

Drawings

Fig. 1 is a side view showing scribing using a diamond cutter having a prism shape and two cutting edges in a width direction.

Fig. 2 is a side view and a front view showing a manufacturing process of a multi-edged diamond tool according to a first embodiment of the present invention.

Fig. 3 is a side view and a front view of a multi-edged diamond tool according to a first embodiment of the present invention.

Fig. 4 is a side view showing scribing using the multi-edged diamond tool of the first embodiment of the present invention.

Fig. 5 is a front view showing a manufacturing process of a multi-edged diamond tool according to a second embodiment of the present invention.

Fig. 6 is a side view and a front view of a multi-edged diamond tool according to a second embodiment of the present invention.

Fig. 7 is a top view, a side view, and a front view of a multi-edged diamond tool according to a third embodiment of the present invention.

Description of the reference numerals

10. 40, 60: multi-edge diamond cutter

11: base seat

13a to 13d, 63a to 63 c: peripheral surface

14a, 14b, 64a, 64 b: side surface

15a, 15c, 15e, 15g, 65 a: a first top surface

15b, 15d, 15f, 15h, 65 b: second top surface

16a, 16c, 16e, 16g, 66 a: first inclined plane

16b, 16d, 16f, 16h, 66 b: second inclined plane

17a, 17c, 17e, 17g, 67 a: third inclined plane

17b, 17d, 17f, 17h, 67 b: the fourth inclined plane

18a, 18c, 18e, 18g, 68 a: first ridge

18b, 18d, 18f, 18h, 68 b: second ridge

41a to 41 d: fifth inclined plane

42a to 42 d: the sixth inclined plane

P1-P8: knife edge

Detailed Description

Next, a first embodiment of the present invention will be explained. Fig. 2 is a side view and a front view showing a manufacturing process of a multi-edged diamond tool (hereinafter, also simply referred to as a diamond tool) 10 according to the present embodiment, and fig. 3 is a side view and a front view of the diamond tool 10 after completion of machining. The diamond tool 10 has a base 11 formed of a polygonal prism having a certain thickness and an arbitrary number of sides. In this embodiment, the square base 11 is made of single crystal diamond and has a constant thickness. The base 11 has: four outer peripheral surfaces 13a to 13d extending in the thickness direction parallel to a vertical axis (in fig. 2 (a), the axis is perpendicular to the paper surface), and side surfaces 14a and 14b extending perpendicular to the axis.

In the present embodiment, as shown in fig. 2 (b), the base 11 is polished from the outer peripheral surface 13a toward the adjacent outer peripheral surface 13b to form the first top surface 15a at the corner of the base. Next, the second top surface 15b is formed by polishing from the outer peripheral surface 13b toward the first top surface formed on the adjacent outer peripheral surface 13 a. The first and second top surfaces 15a and 15b are formed adjacent to the corner portions sandwiched by the outer peripheral surfaces 13a and 13 b. Similarly, the first top surface 15c is formed by polishing from the outer peripheral surface 13b toward the adjacent outer peripheral surface 13c, and the second top surface 15d is formed by polishing from the outer peripheral surface 13c toward the adjacent first top surface 15c formed on the outer peripheral surface 13 b. Although not shown in fig. 2 (b), similarly, a first top surface 15e is formed by polishing from the outer peripheral surface 13c to the adjacent outer peripheral surface 13d, and a second top surface 15f is formed by polishing from the outer peripheral surface 13d to the adjacent first top surface 15e formed on the outer peripheral surface 13 b. Similarly, top surfaces 15g and 15h are formed between the outer peripheral surface 13d and the outer peripheral surface 13 a. Thereby, the first and second top surfaces adjacent to each other are formed at each corner portion sandwiched by the outer peripheral surfaces of the quadrangular prism.

Next, as shown in fig. 3 (a), the first inclined surface 16a is formed by polishing between the outer peripheral surface 13a and the top surface 15a toward the side surface 14 a. Similarly, a second inclined surface 16b is formed between the outer peripheral surface 13b and the top surface 15b by polishing toward the side surface 14 a. The other side surface 14b is also polished toward the side surface 14b between the outer peripheral surface 13a and the top surface 15a and between the outer peripheral surface 13b and the top surface 15b to form third and fourth inclined surfaces 17a and 17 b. At this time, the first and third inclined surfaces 16a and 17a are polished so as to intersect each other, and the second and fourth inclined surfaces 16b and 17b are polished so as to intersect each other. As described above, the inclined surfaces 16a and 17a intersect the outer peripheral surface 13a, and thereby a first ridge line 18a parallel to the side surface is formed at the middle of the thickness direction of the base 11, preferably at the center position shown in fig. 3 (b). Similarly, the inclined surfaces 16b and 17b intersect to form a second ridge line 18b parallel to the side surface at the middle, preferably the center, in the thickness direction of the base 11. Thus, a cutting edge P1 formed by the first ridge line 18a and the top surface 15a is formed at the corner sandwiched by the outer peripheral surface 13a and the outer peripheral surface 13b, and the first ridge line 18a is formed by the first and third inclined surfaces 16a and 17 a. Similarly, a cutting edge P2 is formed by the second ridge line 18b formed by the second and fourth inclined surfaces 16b and 17b and the top surface 15 b.

Next, the first and second inclined surfaces 16c and 16d are formed by polishing the outer peripheral surface 13c and the top surfaces 15c and 15d from the side surface 14 a. The third and fourth inclined surfaces 17c and 17d are formed by polishing the outer peripheral surface 13b and the outer peripheral surface 13c and the top surfaces 15c and 15d from the other side surface 14 b. At this time, polishing is performed so that the inclined surfaces 16c and 17c intersect each other, and polishing is performed so that the inclined surfaces 16d and 17d intersect each other. In this way, the first and third inclined surfaces 16c and 17c intersect the outer peripheral surface 13b, and a first ridge line 18c parallel to the side surface is preferably formed at a central position in the middle of the thickness direction of the base 11 as shown in fig. 3 (b). Similarly, the second and fourth inclined surfaces 16d and 17d intersect each other, and a second ridge line 18d parallel to the side surface is formed at a middle, preferably a central position, in the thickness direction of the base 11.

Similarly, the first and second inclined surfaces 16e and 16f are formed by polishing the outer peripheral surface 13c, the outer peripheral surface 13d, and the top surfaces 15e and 15f from the side surface 14 a. The third and fourth inclined surfaces 17e and 17f are formed by polishing the outer peripheral surface 13c, the outer peripheral surface 13d, and the top surfaces 15e and 15f from the side surface 14 b. In this case, polishing is also performed so that the inclined surfaces 16e and 17e intersect each other, and polishing is performed so that the inclined surfaces 16f and 17f intersect each other. In this way, the first and third inclined surfaces 16e and 17e intersect the outer peripheral surface 13c, and a first ridge line 18e is formed at a middle, preferably a central position, in the thickness direction of the base 11. Similarly, the second and fourth inclined surfaces 16f and 17f intersect to form a second ridge line 18f at the middle, preferably the center, in the thickness direction of the base 11.

Similarly, the first and second inclined surfaces 16g and 16h are formed by polishing the outer peripheral surface 13d and the outer peripheral surface 13a from the side surface 14a and the top surfaces 15g and 15h, and the third and fourth inclined surfaces 17g and 17h are formed by polishing the side surface 14 b. In this case, polishing is also performed so that the inclined surfaces 16g and 17g, 16h and 17h intersect with each other. Similarly, the first and third inclined surfaces 16g and 17g intersect with the outer peripheral surface 13d, and a first ridge line 18g is formed at a middle, preferably a central position, in the thickness direction of the base 11. Similarly, the second and fourth inclined surfaces 16h and 17h intersect each other, and a second ridge line 18h is formed at a middle, preferably a central position, in the thickness direction of the base 11.

Thus, the outer peripheral surface and the top surface are polished from the both side surfaces 14a and 14b, respectively, to form a pair of inclined surfaces and ridge lines 18a to 18 h. In this way, at the corner portion sandwiched between the outer peripheral surface 13a and the outer peripheral surface 13b, the intersection point formed by the top surface 15a and the ridge line 18a becomes the cutting edge P1, and the intersection point of the top surface 15b and the ridge line 18b becomes the cutting edge P2. Even at the corner between the outer peripheral surface 13b and the outer peripheral surface 13c, the intersection of the top surface 15c and the ridge line 18c becomes the cutting edge P3, and the intersection of the top surface 15d and the ridge line 18d becomes the cutting edge P4. The same applies to other outer peripheral surfaces. Since the base 11 has an outer peripheral surface on all sides, two cutting edges are formed for each corner, and 8 cutting edges P1 to P8 are formed.

Such an inclined surface can be easily formed by laser processing. Further, after the laser processing, mechanical polishing may be further performed to make the portion where the ridge line is formed a more precise polished surface.

Next, scribing using the diamond cutter 10 of this embodiment will be described with reference to fig. 4. When scribing the substrate 30, as shown in fig. 4 (a), the angle between the ridge line and the diamond tool 10 with respect to the substrate 30 is changed from the vertical direction to the counterclockwise direction, the diamond tool 10 is slightly inclined from the direction perpendicular to the paper surface, one pointed end P1 is fixed so as to contact the substrate 30, and the diamond tool 10 is moved in the arrow a direction shown in the drawing, thereby scribing is performed. At this time, the top surface 15a of the blade P1 is scribed so as to be forward in the advancing direction and the ridge line 18a is scribed so as to be rearward. Since the diamond cutter 10 is not rotated during this scribing, it becomes scribed with the same cutting edge P1. Further, even if the diamond cutter is advanced to the end of the substrate 30 and scribing is completed by the circumscribed, since the other cutting edge P2 formed at the same corner is advanced, the other cutting edge P2 is not damaged even if the diamond cutter 10 is separated from the position of the substrate 30 as illustrated in the drawing.

When the top surface is scribed so that the front ridge line is behind, it is effective to employ various conditions such as a scribing load over a wide range. Further, when a scribe line without vertical cracks is formed on the substrate, by completing scribing by the circumscribed shape, it is possible to obtain an effect that cracks are generated just under the scribe line with the end portion of the substrate as a base point. According to the present embodiment, even in this case, the outer cutting can be performed without damaging the other blades.

However, as shown in fig. 4 (a), the diamond cutter 10 may be inclined in the opposite direction and scribed with the cutting edge P2, as shown in fig. 4 (b). In this case, since the blade P1 may be damaged, scribing is not completed by circumscribed.

When the cutting edge P1 contacting the substrate 30 is deteriorated by abrasion, the diamond cutter 10 is rotated by 90 ° to contact the cutting edge P3 with the substrate 30, and scribing is similarly performed. In this case, when scribing is performed so that the top surface 15c becomes the forward direction and the ridge line 18c becomes the backward direction, the blade P6 is not damaged even if scribing is completed by the outer-cut scribing. Further, even if the diamond cutter 10 is rotated by 90 °, the angle at which the ridge line of the cutting edge contacts the substrate does not change, and therefore, the contact angle with the substrate at the time of changing the cutting edge can be easily set.

If all the cutting edges at the four positions of the cutting edges P1, P3, P5 and P7 are worn, the diamond cutter 10 is turned over and fixed again so that the ridge line and the brittle material substrate form a predetermined angle, and the cutting edges P2, P4, P6 and P8 on the other side surfaces are brought into contact with each other in order to scribe. In this way, the blade position can be changed four times to perform scribing, and the blade can be changed eight times in total to perform scribing.

Next, a diamond cutter 40 according to a second embodiment of the present invention will be explained. Fig. 5 is a front view showing a manufacturing process of this embodiment, and fig. 6 is a side view and a front view of the diamond cutter 40, and the same reference numerals are given to the same portions as those of the first embodiment. In the second embodiment, first, as shown in fig. 5 (a), the intersecting ridge line extending from the side surface 14a to the outer peripheral surfaces 13a and 13b is polished to form the fifth inclined surface 41a within the range of the thickness 1/2 of the base. Then, the sixth inclined surface 42a is formed symmetrically with the intersecting ridge line extending from the side surface 14b to the outer peripheral surfaces 13a and 13b within the range of the base thickness 1/2. Next, the intersecting ridges extending from the side surface 14a to the outer peripheral surfaces 13b and 13c are polished to form the fifth inclined surface 41b within the range of the thickness 1/2 of the base. Then, the sixth inclined surface 42b is formed symmetrically with respect to the intersecting ridge line extending from the side surface 14b to the outer circumferential surfaces 13b and 13c within the range of the base thickness 1/2. The intersecting ridges extending from the side surface 14a to the outer peripheral surfaces 13c and 13d are polished to form the fifth inclined surface 41c within the range of the thickness 1/2 of the base. Then, the sixth inclined surface 42c is formed symmetrically with the intersecting ridge line extending from the side surface 14b to the outer peripheral surfaces 13c and 13d within the range of the base thickness 1/2. The fifth inclined surface 41d is formed within a range of the base thickness of 1/2 from the side surface 14a toward the outer circumferential surfaces 13d and 13 a. Then, the sixth inclined surface 42d is formed in a range within 1/2 of the base thickness from the side surface 14b toward the outer circumferential surfaces 13d, 13a symmetrically with this.

Next, as in the first embodiment, as shown in fig. 5 (b), the first top surface 15a is formed from one outer peripheral surface 13a toward the adjacent outer peripheral surface 13 b. Subsequently, the top surfaces 15b to 15h are formed in the same manner as in the first embodiment. Next, as shown in fig. 6 (b), the first inclined surface 16a is formed by polishing the outer peripheral surface 13a, the top surface 15a, and the fifth inclined surface 41a toward the side surface 14 a. Next, the second inclined surface 17a is formed by polishing the outer peripheral surface 13a, the top surface 15a, and the sixth inclined surface 42a toward the side surface 14b, and the intersecting line of the first inclined surface 16a and the second inclined surface 17a is defined as the ridge line 18 a. Similarly, the first inclined surfaces 16b to 16h, the second inclined surfaces 17b to 17h, and the ridge lines 18b to 18h are formed on the other top surfaces 15b to 15 h.

As described above, the top surfaces 15a to 15h are pentagonal in shape with a smaller area than in the first embodiment. Since the top surface needs to be precisely machined, the smaller the area, the longer the grinding time and the grinding amount of the top surface can be reduced, and the manufacturing process of the diamond cutter 40 can be rationalized.

When scribing with the cutting edge P1 of the diamond cutter 40, if the cutting edge P1 is deteriorated due to wear, the diamond cutter 10 is rotated by 90 ° in sequence, and the cutting edges P3, P5, and P7 are used in this order. If the 4 cutting edges are all worn, the diamond tool 10 is turned over. Then, the blades P2, P4, P6 and P8 were brought into contact with each other in this order so that the angle formed by the ridge line and the brittle material substrate became a fixed angle, and the blade position was changed 4 times in total after the inversion to scribe. In this way, scribing can be performed by changing the cutting edge 8 times in total.

Next, a third embodiment of the present invention will be explained. In the first and second embodiments, the base is a regular square base, but a polygon having an arbitrary number of sides may be used as the base. Further, the cutting edges are provided at 8 points around each base, but it is sufficient that at least one corner of the polygon has 1 cutting edge on each of the opposing outer peripheral surfaces. In the third embodiment, as shown in fig. 7, a triangular base 61 is used. The base 61 has three outer peripheral surfaces 63a, 63b, 63c and side surfaces 64a, 64b perpendicular to the axis. Then, as in the first and second embodiments, the first top surface 65a, the first inclined surface 65a, the third inclined surface 67a, and the first ridge 68a are formed on the outer peripheral surface 63 a. The outer peripheral surface 63b is formed with a second top surface 65b, a second inclined surface 66b, a fourth inclined surface 67b, and a second ridge 68 b. In this way, the diamond cutter 60 having only two cutting edges P1, P2 can be formed.

In the first and second embodiments, the cutting edges are provided at 8 positions around the circumference, and the inclined surfaces and the cutting edges are not necessarily provided at all the corners. However, it is preferable to provide as many blades as possible on the outer peripheral portion in a range where adjacent blades do not interfere with each other. Therefore, when each cutting edge is worn, the cutting edge can be replaced only by rotating the diamond cutter, so that the replacement frequency of the diamond cutter can be reduced. The shape of the base is not limited to a triangle or a quadrangle, and may be any polygonal shape such as a hexagon or an octagon.

In the above embodiment, the entire base is made of single crystal diamond, but since the surface portion in contact with the brittle material substrate may be made of diamond, a polycrystalline diamond layer may be formed on the outer peripheral surface and the surface of the ridge line of the base made of cemented carbide or diamond sintered, and the cutting edge may be formed by further precision polishing. Further, single crystal or polycrystalline diamond having conductivity may be used by doping with an impurity such as boron. By using conductive diamond, an inclined surface or a through hole can be easily formed by electric discharge machining.

In the above embodiment, the diamond cutter is used to scribe the line such that the ridge line of each blade is located behind the front ridge line, but the line may be scribed such that the ridge line of each blade is located behind the front ridge line.

Industrial applicability of the invention

The multi-edge diamond tool of the present invention can be used in a scribing apparatus for scribing a brittle material substrate, and in particular, can be effectively used for a hard scribing object in which the diamond tool is worn more.

Claims

1. A multi-edged diamond tool comprising:

a base having a prism shape with a predetermined thickness and including two side surfaces and a plurality of outer circumferential surfaces;

a first top surface and a second top surface at least provided between the first outer peripheral surface and the adjoining second outer peripheral surface of the base;

a first inclined surface provided so as to be sandwiched between the first top surface, one side surface of the base, and the first outer peripheral surface;

a second inclined surface provided so as to be sandwiched between the second top surface, one side surface of the base, and the second outer peripheral surface;

a third inclined surface provided so as to be sandwiched between the first top surface, the other side surface of the base, and the first outer peripheral surface;

a fourth inclined surface provided so as to be sandwiched between the second top surface, the other side surface of the base, and the second outer peripheral surface;

a first ridge line which is an intersection line of the first inclined surface and the third inclined surface; and

a second ridge line which is an intersection line of the second inclined surface and the fourth inclined surface,

at least the outer peripheral surface of the susceptor is formed of diamond,

the multi-edged diamond tool has a point formed by the first top surface and the first ridge, and the second top surface and the second ridge as a cutting edge.

2. A multi-edged diamond tool comprising:

a first ridge line which is an intersection line of the first inclined surface and the third inclined surface;

a second ridge line which is an intersection line of the second inclined surface and the fourth inclined surface;

a fifth inclined surface disposed between the first inclined surface and the second inclined surface and the first top surface and the second top surface; and

a sixth inclined surface provided between the third inclined surface and the fourth inclined surface and the first top surface and the second top surface,

at least the outer peripheral surface of the susceptor is formed of diamond,

3. A method of manufacturing a multi-edge diamond tool, the multi-edge diamond tool according to claim 1 being manufactured, the method comprising:

forming the first top surface at least between the first outer peripheral surface and the adjacent second outer peripheral surface;

forming the second top surface between the second outer peripheral surface and the first top surface;

grinding the first outer peripheral surface and the first top surface toward one side surface to form the first inclined surface;

grinding the second outer circumferential surface and the second top surface toward one side surface to form the second inclined surface;

grinding the first outer peripheral surface and the first top surface toward the other side surface to form the third inclined surface; and

and the fourth inclined surface is formed by grinding between the second outer circumferential surface and the second top surface toward the other side surface.

4. A method of manufacturing a multi-edge diamond tool, the multi-edge diamond tool of claim 2 being manufactured, comprising:

in a range within 1/2 of the base, a ridge line intersecting the first outer circumferential surface and the second outer circumferential surface is ground between the first outer circumferential surface, the second outer circumferential surface and one side surface which are adjacent to each other to form the fifth inclined surface;

in a range within the thickness of the other 1/2 of the base, the sixth inclined surface is formed by grinding a ridge line between the first outer peripheral surface, the second outer peripheral surface, and the other side surface, the ridge line intersecting the first outer peripheral surface and the second outer peripheral surface;

forming the first top surface at least between the first outer peripheral surface and the second outer peripheral surface, the fifth inclined surface, and the sixth inclined surface;

forming the second top surface between the second outer circumferential surface and the first top surface, the fifth inclined surface, and the sixth inclined surface;

grinding the first outer peripheral surface, the first top surface, and the fifth inclined surface toward one side surface to form the first inclined surface;

grinding the second outer circumferential surface, the second top surface, and the fifth inclined surface toward one side surface to form the second inclined surface;

grinding the first outer peripheral surface, the first top surface, and the sixth inclined surface toward the other side surface to form the third inclined surface; and

and the fourth inclined surface is formed by grinding the second outer circumferential surface, the second top surface and the sixth inclined surface toward the other side surface.