KR101154908B1 - Washing device, washing method, auxiliary discharge device and application device - Google Patents

Abstract

There is provided a cleaning apparatus, a cleaning method, a preliminary ejection apparatus and a coating apparatus, in which a high cleaning property is obtained in a preliminary ejection apparatus that does not use a priming roller during the preliminary ejection operation. The said cleaning apparatus is the apparatus 100 which wash | cleans the preliminary ejection surface 81 of the preliminary ejection apparatus used for the preliminary ejection operation | movement in a coating apparatus. This washing apparatus has a plurality of squeegees 110a, 110b, 110c which slide on the preliminary ejection surface 81 on which the liquid is applied to scrape off the liquid, or at least one squeegee is the preliminary ejection surface 81. It has a washing | cleaning liquid supply part which supports the longitudinal direction of the contact point with an oblique direction to the sliding direction, or supplies a washing | cleaning liquid to the surface of the sliding direction side of a squeegee.

Description

Cleaning device, cleaning method, preliminary ejection device and coating device {WASHING DEVICE, WASHING METHOD, AUXILIARY DISCHARGE DEVICE AND APPLICATION DEVICE}

The present invention relates to a cleaning apparatus, a cleaning method, a preliminary ejection apparatus and a coating apparatus.

Fine patterns, such as a wiring pattern and an electrode pattern, are formed on the glass substrate which comprises display panels, such as a liquid crystal display. In general, such a pattern is formed by a technique such as photolithography. In the photolithography method, the process of forming a resist film on a glass substrate, the process of pattern-exposing this resist film, and the process of developing the said resist film after that are performed, respectively.

As a device for applying a resist film onto a substrate, a coating device for fixing a slit nozzle and applying a resist (liquid body) to a glass substrate moving under the slit nozzle is known (see Patent Document 1, for example). In such a coating apparatus, in order to obtain the uniformity of a coating film, nozzle tip management, such as nozzle cleaning and the preliminary ejection operation | movement before resist coating, is implemented, for example.

Patent Document 1: Japanese Unexamined Patent Publication No. 2005-236092

In the coating device of the said patent document 1, the resist is discharged (coated) on the roller surface called a priming roller as a preliminary discharge operation. However, in the said structure, when wash | cleaning the coating liquid discharged (coated) on the roller, there existed a problem which a large amount of cleaning liquid was needed. Therefore, it is desired to provide a method for enabling a good cleaning in the preliminary ejection apparatus having a new configuration which does not use the priming roller during the preliminary ejection operation.

This invention is made | formed in view of such a situation, and an object of this invention is to provide the washing | cleaning apparatus, the washing | cleaning method, the preliminary discharge apparatus, and the coating apparatus which obtain high cleaning property in the preliminary discharge apparatus which does not use a priming roller at the time of preliminary discharge operation. I am doing it.

According to the washing | cleaning apparatus of 1st aspect of this invention, the liquid body scraped off by the squeegee which slides on the preliminary discharge surface will be pushed to the sliding direction side along the surface of the squeegee. Therefore, the liquid scraped off by the squeegee can be prevented from interfering with the sliding of the squeegee, and high cleaning property can be obtained.

 Moreover, in the said washing | cleaning apparatus, it is preferable that the crossing angle of the longitudinal direction of the said contact end and the said sliding direction is 85 degrees or less.

By setting the crossing angle at the above angle, the liquid can be pushed out well, and the preliminary discharge surface can be washed well.

 Moreover, in the said washing | cleaning apparatus, it is preferable to provide two or more squeegees.

According to this structure, the liquid body on a preliminary discharge surface can be scraped off favorably by a some squeegee, and high cleaning property can be exhibited.

Further, it is more preferable that a plurality of the squeegees are arranged in the sliding direction in a position substantially parallel to each other.

According to this structure, the space | interval between squeegee can be set substantially the same and the cleaning property on a preliminary discharge surface can be stabilized.

Moreover, in the said washing | cleaning apparatus, it is preferable to provide the washing | cleaning liquid supply part which has a discharge port which discharges a washing | cleaning liquid toward the front of the said sliding direction of the squeegee.

According to this structure, by diluting the liquid body apply | coated on the preliminary discharge surface with the cleaning liquid, for example, a liquid body can be scraped off easily with the said squeegee, and higher cleaning property can be obtained. Moreover, since it has a structure which discharges a washing | cleaning liquid from a discharge port, the usage-amount of a washing | cleaning liquid can be suppressed.

Moreover, it is more preferable that the said discharge port is formed corresponding to the said other squeegee except the said squeegee located at least in the last end of the said sliding direction among the some squeegee.

According to this structure, when the squeegee of the sliding end is sliding on the preliminary discharge surface, it functions as a final squeegee which scrapes off the remaining liquid by the front squeegee. Therefore, it becomes high washing | cleaning property which prevents it from remaining after scraping off the liquid body on a preliminary discharge surface.

Moreover, in the said washing | cleaning apparatus, it is preferable that the inclination angle with respect to the said preliminary discharge surface of the some squeegee is substantially the same.

According to this structure, the scraping resistance of the liquid body in all the squeegee can be made the same, and the preliminary discharge surface can be wash | cleaned uniformly.

Moreover, it is preferable that the inclination angle of the squeegee located in the head of the sliding direction among the plurality of squeegees is larger than the inclination angle of the other squeegee.

According to this structure, the contact resistance of the squeegee and the preliminary ejection surface which are located in the head of a sliding direction can be increased, and, thereby, the liquid body apply | coated on the preliminary ejection surface can be scraped favorable.

 Moreover, in the said washing | cleaning apparatus, it is preferable to provide the drying mechanism which blows a gas toward the said preliminary discharge surface.

According to this structure, the wet preliminary discharge surface can be reliably dried by a washing process.

Moreover, it is preferable that the said washing | cleaning apparatus is equipped with the suction mechanism which sucks the liquid body which remain | survives in the said preliminary discharge surface.

According to this structure, since the liquid remaining on the preliminary ejection surface can be sucked by the suction mechanism, the washability of the preliminary ejection surface can be further improved.

Moreover, in the said washing | cleaning apparatus, it is equipped with the squeegee head part which supports the said squeegee, and the arm part which supports the squeegee head part, The rocking mechanism which supports the said squeegee head part so that the arm part can be freely rocked is formed. desirable.

According to this configuration, since the squeegee head portion can freely swing, the squeegee can be reliably brought into contact with the preliminary ejection surface, thereby achieving high cleaning performance.

A second aspect of the present invention is a preliminary ejection device provided with the cleaning device.

According to the preliminary ejection apparatus of the second aspect of the present invention, since the preliminary ejection apparatus is provided with a high cleaning ability, the preliminary ejection surface can be reliably cleaned to provide high reliability.

 Moreover, the preliminary discharge apparatus of 2nd aspect of this invention is the preliminary discharge surface to which a liquid body is apply | coated in the preliminary discharge operation | movement in a coating device, and the squeegee which scrapes the said liquid body by sliding on the said preliminary discharge surface, A cleaning device for supporting the longitudinal direction of the contact end with the preliminary ejection surface in an oblique orientation with respect to the sliding direction, and the squeegee sliding outwards laterally in the longitudinal direction of the preliminary ejection surface It is preferable to provide the discharge part which discharges a liquid body.

According to this preliminary ejection apparatus, the liquid body which is scraped off by the squeegee sliding on the preliminary ejection surface, and has flowed out to the side in the longitudinal direction of the preliminary ejection surface along the surface of the squeegee can be reliably ejected from the ejection portion. . Therefore, high detergency can be obtained.

Moreover, in the said preliminary discharge apparatus, it is preferable that the said discharge part has a side groove part which is formed in the side of the said preliminary discharge surface, and extends in the said sliding direction.

According to this structure, the liquid body which flowed out to the side of a preliminary discharge surface can be reliably discharged from a side groove part.

Moreover, the preliminary discharge apparatus of 2nd aspect of this invention is the preliminary discharge surface to which a liquid body is apply | coated in the preliminary discharge operation | movement in a coating device, and the squeegee which scrapes the said liquid body by sliding on the said preliminary discharge surface, A cleaning device for supporting the longitudinal direction of the contact end with the preliminary ejection surface in an oblique orientation with respect to the sliding direction, and a discharge part for discharging the liquid body moved forward of the squeegee by the sliding operation of the squeegee You may be provided.

According to this preliminary ejection apparatus, the liquid body which is scraped off by the squeegee sliding on the preliminary ejection surface and moved to the front of the squeegee can be reliably discharged. Therefore, high detergency can be obtained.

In the two specific preliminary ejection apparatuses of the second aspect, it is preferable that a suction recovery mechanism for sucking the liquid body in each of the discharge portions is provided.

According to this structure, the liquid body accommodated in the discharge part can be satisfactorily discharged by the suction recovery mechanism.

Moreover, in the two specific preliminary discharge apparatuses of the said 2nd aspect, it is preferable that the suction port connected with the said suction collection | recovery mechanism, and the inclined surface which descend | falls toward the said suction port are formed.

According to this configuration, the liquid discharged to the discharge portion can easily flow along the slope to the suction port side, and the liquid can be discharged satisfactorily from the suction port.

Moreover, it is more preferable that the some area | region which has the said suction port and the said slope part corresponding to the said suction port formed in the discharge part formed in the side of the said preliminary discharge surface is arrange | positioned along the said sliding direction.

According to this structure, the liquid discharged | emitted to the discharge part can be favorably guide | induced to a suction collection | recovery mechanism by a some suction port and inclined surface.

Moreover, in the preliminary discharge apparatus of the said 2nd aspect, it is preferable that the standby part which mounts the said washing | cleaning apparatus in the side of the said preliminary discharge surface is formed.

According to this structure, the movement time to the preliminary ejection surface can be shortened at the time of cleaning the preliminary ejection surface, and the travel time can be shortened.

Moreover, it is more preferable that the said standby part is formed in the back of the said sliding direction with respect to the said preliminary discharge surface.

According to this structure, a washing | cleaning apparatus is arrange | positioned at the washing | cleaning start side, and the washing | cleaning operation by a washing | cleaning apparatus can be started quickly.

Moreover, in the said preliminary discharge apparatus, although the said standby part may be formed on the said preliminary discharge surface, and may be formed in the position lower than the preliminary discharge surface, the mounting surface which is formed in the position lower than the preliminary discharge surface and mounts the said washing | cleaning apparatus is provided. It is preferable to have.

According to this configuration, it is possible to prevent interference between the coating device and the cleaning device that are moved onto the preliminary ejection surface during the preliminary ejection operation.

Moreover, in the said preliminary discharge apparatus, it is preferable that the squeegee cleaning mechanism which removes the said liquid body adhered to the said squeegee in the said atmospheric part is formed.

According to this structure, a squeegee can be maintained in a favorable state, and the cleaning quality on a preliminary discharge surface can be stabilized.

Moreover, in the said preliminary discharge apparatus, it is preferable that the said squeegee cleaning mechanism is an uneven structure formed in the said mounting surface.

According to this structure, the liquid adhered to the squeegee can be removed satisfactorily.

According to the apparatus, since the preliminary ejection apparatus having a high cleaning property on the preliminary ejection surface is provided, by applying the preliminary ejection operation satisfactorily, the coating portion can always be kept in a good state, and the liquid body is applied with a uniform film thickness. Can be carried out.

A third aspect of the present invention is a method of cleaning a preliminary ejection surface of a preliminary ejection apparatus used for a preliminary ejection operation in an application device, wherein a squeegee is slid on the preliminary ejection surface to apply the preliminary ejection surface. When scraping off the liquid, the squeegee is characterized in that the longitudinal direction of the contact end with the preliminary ejection surface is slid in an oblique direction to the sliding direction.

According to the washing | cleaning method of this invention, the liquid body scraped off by the squeegee which slides on the preliminary discharge surface can be pushed to the sliding direction side along the surface of the squeegee. Therefore, the liquid scraped off by the squeegee can be prevented from interfering with the sliding of the squeegee, and high cleaning property can be obtained.

Moreover, in the said washing | cleaning method, it is preferable that the crossing angle of the longitudinal direction of the said contact end and the said sliding direction is 85 degrees or less.

According to this structure, a liquid body can be pushed out favorably and a preliminary discharge surface can be wash | cleaned favorably.

Further, it is more preferable to slide the plurality of squeegee on the preliminary ejection surface.

According to this structure, the liquid body on a preliminary discharge surface can be scraped off favorably by a some squeegee, and high cleaning property can be exhibited.

Further, it is more preferable to slide the plurality of squeegees in a state arranged in the sliding direction in a substantially parallel posture.

According to this structure, the space | interval between squeegee can be set substantially the same and the cleaning property on a preliminary discharge surface can be stabilized.

Moreover, in the said washing | cleaning method, it is preferable to discharge a washing | cleaning liquid forward of the said sliding direction of the squeegee.

According to this structure, by diluting the liquid body apply | coated on the preliminary discharge surface with the cleaning liquid, for example, a liquid body can be scraped off easily with the said squeegee, and higher cleaning property can be obtained. Moreover, since it has a structure which discharges a washing | cleaning liquid from a discharge port, the usage-amount of a washing | cleaning liquid can be suppressed.

Moreover, in the said washing | cleaning method, it is preferable to discharge the said washing | cleaning liquid toward the said sliding direction forward of the said other squeegee except the said squeegee located at least in the last end of the said sliding direction among the some squeegee.

According to this structure, when the squeegee of the last sliding direction slides on a preliminary discharge surface, it functions as a final squeegee which scrapes off the liquid body left by the front squeegee. Therefore, it becomes a thing with high washing | cleaning which prevented remaining after scraping the liquid body on a preliminary discharge surface.

Moreover, in the said washing | cleaning method, it is preferable to spray gas to the said preliminary discharge surface after the said squeegee passes.

According to this structure, the wet preliminary discharge surface can be reliably dried by a washing process.

Moreover, in the said washing | cleaning method, it is preferable to suck the said liquid body which remains in the said preliminary discharge surface after the said squeegee passed.

According to this structure, since the liquid remaining on the preliminary ejection surface can be sucked by the suction mechanism, the washability of the preliminary ejection surface can be further improved.

A fourth aspect of the present invention is a preliminary discharging method prior to the coating operation in the coating apparatus.

Applying a liquid to the preliminary ejection surface; and sliding the squeegee on the preliminary ejection surface to scrape off the liquid. In the sliding of the squeegee, the squeegee is formed with the preliminary ejection surface. The longitudinal direction of the contact end is slid in an oblique direction with respect to the sliding direction, so that the liquid body on the preliminary ejection surface is discharged laterally in the longitudinal direction of the preliminary ejection surface.

According to the preliminary ejection method of the fourth aspect of the present invention, the liquid phase scraped out by the squeegee sliding on the preliminary ejection surface is pushed to the side in the longitudinal direction of the preliminary ejection surface, so that the upper ejection surface is washed well. Can be.

In addition, a fifth aspect of the present invention is a preliminary ejection method prior to an application operation in an applicator, comprising: applying a liquid to a preliminary ejection surface, sliding a squeegee on the preliminary ejection surface, and In the step of sliding the squeegee, the step of sliding the squeegee, by sliding the longitudinal direction of the contact end with the preliminary discharge surface in an oblique direction to the sliding direction, by the squeegee The collected liquid is discharged to the front in the sliding direction of the preliminary discharge surface.

According to the preliminary ejection method of the fifth aspect of the present invention, the liquid ejected by the squeegee sliding on the preliminary ejection surface is discharged to the sliding direction forward of the preliminary ejection surface, whereby the preliminary ejection surface can be satisfactorily cleaned.

Further, in the preliminary ejection methods of the fourth and fifth aspects, after the step of sliding the squeegee, the squeegee is moved to a standby position formed on the side of the preliminary ejection surface and attached to the squeegee at the standby position. It is preferable to remove the liquid.

According to this structure, a squeegee can be kept in a favorable state, and the cleaning quality on a preliminary discharge surface can be stabilized. In addition, since the cleaning operation is performed at the standby position formed on the side of the preliminary discharge surface, the movement time of the squeegee can be shortened.

A sixth aspect of the present invention is an apparatus for cleaning a preliminary ejection surface of a preliminary ejection apparatus used for a preliminary ejection operation in a coating apparatus, wherein the liquid body is slid over the preliminary ejection surface coated with a liquid. It is characterized by including a plurality of squeegee to scrape off.

According to the washing | cleaning apparatus of 6th aspect of this invention, the liquid body on the said preliminary ejection surface can be scraped off favorably by the some squeegee which slides on a preliminary ejection surface, and high cleaning property can be exhibited.

Moreover, in the said washing | cleaning apparatus, it is preferable to provide at least 1 discharge port which discharges a washing | cleaning liquid in the said preliminary discharge surface.

According to this structure, by diluting the liquid body apply | coated on the preliminary discharge surface with the cleaning liquid, for example, a liquid body can be scraped off easily with the said squeegee, and higher cleaning property can be obtained. Moreover, since it has a structure which discharges a washing | cleaning liquid from a discharge port, the usage-amount of a washing | cleaning liquid can be suppressed.

Moreover, it is more preferable that the said discharge port is formed corresponding to the said squeegee except the last end of a sliding direction among the said squeegee.

According to this structure, when the squeegee of the sliding end is sliding on the preliminary discharge surface, it functions as a final squeegee which scrapes off the remaining liquid by the front squeegee. Therefore, it becomes a thing with high washing | cleaning which prevented remaining after scraping the liquid body on a preliminary discharge surface.

Moreover, in the said washing | cleaning apparatus, it is preferable that the said discharge port is formed corresponding to each of at least 2 said squeegee.

According to this structure, since the discharge port is formed corresponding to the squeegee, the cleaning property, the dryness, and the scraping-out property of the liquid in the squeegee sliding on the preliminary discharge surface can be further improved.

Moreover, in the said washing | cleaning apparatus, it is preferable that the said squeegee is inclined 15 degrees or more and 50 degrees or less with respect to the said preliminary discharge surface.

When the angle is set at such an angle, the liquid can be satisfactorily scraped off by the squeegee when sliding on the preliminary ejection surface, and high cleaning property can be obtained. Moreover, it is more preferable to set to 45 degrees or less.

Moreover, in the said washing | cleaning apparatus, it is preferable to provide the drying mechanism which blows a gas toward the said preliminary discharge surface.

According to this structure, the wet preliminary discharge surface can be reliably dried by a washing process.

Moreover, in the said washing | cleaning apparatus, it is preferable to provide the suction mechanism which sucks the said liquid body which remains in the said preliminary discharge surface.

According to this structure, since the liquid remaining on the preliminary ejection surface can be sucked by the suction mechanism, the washability of the preliminary ejection surface can be further improved.

Moreover, in the said washing | cleaning apparatus, the control part which controls the discharge amount of the said cleaning liquid discharged | emitted from each said discharge port is formed, and the said control part has the largest amount of the cleaning liquid discharged from the said discharge port of the head side of a sliding direction among the said discharge ports. It is desirable to be able to control the discharge amount of the cleaning liquid so that

By controlling in this way, since the cleaning liquid is most discharged to the leading side in the sliding direction in which a large amount of liquid exists, the liquid can be reliably scraped off by sliding a plurality of squeegee on the preliminary discharge surface. Therefore, what remains after scraping off a liquid body can be suppressed, and high washing | cleaning property can be obtained.

Moreover, in the said washing | cleaning apparatus, the control part which controls the discharge amount of the said cleaning liquid discharged from each said discharge port is formed, and the said control part has the smallest quantity of the cleaning liquid discharged from the said discharge port of the last in a sliding direction among the said discharge ports. It is desirable to be able to control the discharge amount of the cleaning liquid so that

By controlling in this way, since the liquid is scraped off by the front squeegee, the smallest amount of the cleaning liquid is discharged from the discharge port at the end of the sliding direction where the amount of the liquid is small, so that excessive discharge of the cleaning liquid is suppressed. This eliminates waste of the cleaning liquid and prevents the residue of the cleaning liquid from occurring on the preliminary ejection surface.

Moreover, in the said washing | cleaning apparatus, the control part which controls the discharge amount of the said cleaning liquid discharged | emitted from each said discharge port is formed, The said control part discharge amount of the said cleaning liquid from the said discharge port of the sliding side leading side to the last discharge port. It is preferable to control the discharge amount of the cleaning liquid so as to decrease gradually.

According to this configuration, since the discharge amount of the cleaning liquid discharged from the discharge port toward the rear of the sliding direction of the squeegee in which the amount of the liquid decreases gradually decreases, it is possible to prevent the residue of the cleaning liquid from occurring on the preliminary discharge surface.

In the cleaning apparatus, a control unit for controlling the discharge amount of the cleaning liquid discharged from the respective discharge ports is formed, and the control unit controls the amount of the cleaning liquid such that the amount of the cleaning liquid discharged from the respective discharge ports is equal. It is preferable.

According to this structure, adjustment of discharge amount is simplified, work efficiency improves, and high cleaning property can be maintained.

A seventh aspect of the present invention is a method for cleaning a preliminary ejection surface of a preliminary ejection apparatus used for a preliminary ejection operation in an application device, wherein a plurality of squeegees are slid in the arrangement direction on the preliminary ejection surface. It is characterized by scraping off the liquid.

According to the washing | cleaning method of 7th aspect of this invention, the liquid body apply | coated on the said preliminary ejection surface can be scraped favorably by the some squeegee which slides on a preliminary ejection surface, and high washability can be obtained.

Moreover, in the said washing | cleaning method, it is preferable to discharge a washing | cleaning liquid with respect to the said preliminary discharge surface to which the liquid body was apply | coated.

According to this structure, a liquid can be scraped off with a cleaning liquid with the said squeegee, for example, diluting a liquid with a cleaning liquid, and higher cleaning property can be obtained. In addition, since the cleaning liquid is discharged from the discharge port, the amount of the cleaning liquid used can be suppressed.

Moreover, it is more preferable to supply the said washing | cleaning liquid in the sliding direction forward of the said squeegee except the last in the sliding direction among the said squeegee.

According to this configuration, when the squeegee in the sliding direction last slides on the preliminary discharge surface, the cleaning process is finished by scraping off the remaining liquid by the front squeegee, and the remaining liquid after scraping off the liquid It can prevent.

Moreover, in the said washing | cleaning method, it is preferable to supply the said washing | cleaning liquid toward the sliding direction front of each of the at least 2 said squeegee.

According to this structure, since the washing | cleaning liquid is supplied to at least 2 squeegees, the washing | cleaning property, dryness, and scraping-resistant of the liquid body by the squeegee which slides on the preliminary discharge surface can be improved more.

Moreover, in the said washing | cleaning method, it is preferable to provide the drying process which blows a gas toward the said preliminary discharge surface.

According to this structure, the wet preliminary discharge surface can be reliably dried by a washing process.

Moreover, in the said washing | cleaning method, it is preferable to provide the suction process which sucks the said liquid body which remains in the said preliminary discharge surface.

According to this structure, since the liquid remaining on the preliminary ejection surface can be sucked by the suction mechanism, the washability of the preliminary ejection surface can be further improved.

Moreover, in the said washing | cleaning method, it is preferable to make the most amount of the said washing | cleaning liquid supplied with respect to the said squeegee located in the head of a sliding direction among the plurality of the squeegee which the said washing | cleaning liquid is supplied correspondingly, respectively.

According to this configuration, the liquid can be reliably scraped out by a plurality of squeegee sliding on the preliminary ejection surface by discharging the most washing liquid to the leading side in the sliding direction in which a large amount of liquid exists. Therefore, high cleaning property with little residue after scraping off can be obtained.

 Moreover, in the said washing | cleaning method, it is preferable to make the quantity of the said washing | cleaning liquid supplied with respect to the said squeegee which is located in the rearmost end of a sliding direction among the plurality of the squeegee which the said washing | cleaning liquid is supplied correspondingly, respectively.

According to this configuration, since the liquid is scraped off by the front squeegee, the liquid is discharged the least at the end of the sliding direction where the amount of the liquid is small. Therefore, the excessive discharge of the cleaning liquid is suppressed, thereby eliminating waste of the cleaning liquid and preliminary ejection surface. It is possible to prevent the residue of the cleaning liquid from occurring on the phase.

Moreover, in the said washing | cleaning method, it is preferable to reduce the supply amount of the said washing | cleaning liquid so that the said squeegee located in the rearmost side of a sliding direction with respect to the some squeegee which supplies the said washing | cleaning liquid corresponding to each.

 According to this structure, since the discharge amount of the cleaning liquid discharged from the discharge port toward the rear of the sliding direction of the squeegee in which the amount of the liquid decreases gradually decreases, it is possible to prevent the residue of the cleaning liquid from occurring on the preliminary discharge surface.

Moreover, in the said washing | cleaning method, it is preferable to make the supply amount of the said washing | cleaning liquid the same with respect to the some squeegee which supplies the said washing | cleaning liquid corresponding to each.

According to this configuration, the adjustment of the discharge amount is simplified, the work efficiency is improved, and high cleaning property can be maintained.

An eighth aspect of the present invention is a preliminary ejection device including the cleaning device.

According to the preliminary ejection apparatus of the 8th aspect of this invention, since the washing | cleaning apparatus which has high cleaning property is provided, it becomes the thing of the high reliability which can reliably perform a preliminary ejection operation by washing the preliminary ejection surface favorably.

A ninth aspect of the present invention is a coating apparatus provided with the preliminary ejection apparatus of the eighth aspect.

According to the coating device of the ninth aspect of the present invention, since the preliminary ejection device having a high cleaning property on the preliminary ejection surface is provided, the preliminary ejection operation can be performed satisfactorily so that the applicator can always be kept in a good state and uniform. Application of the liquid body can be carried out at a film thickness.

A tenth aspect of the present invention is an apparatus for cleaning a preliminary ejection surface of a preliminary ejection apparatus used for a preliminary ejection operation in a coating apparatus, comprising: a squeegee for sliding on the preliminary ejection surface coated with a liquid body; It has a washing | cleaning liquid supply part which supplies a washing | cleaning liquid to the surface of the sliding direction side of this squeegee. It is characterized by the above-mentioned.

According to the washing | cleaning apparatus of 10th aspect of this invention, a liquid body can be scraped satisfactorily by the squeegee which slides on a preliminary discharge surface, diluting a liquid body with the washing | cleaning liquid supplied to the surface of the sliding direction side of a squeegee. Further, by selectively supplying the cleaning liquid from the cleaning liquid supply part onto the preliminary ejection surface, the amount of the cleaning liquid used is suppressed.

Moreover, in this washing | cleaning apparatus, it is preferable that the said washing | cleaning liquid supply part has a some discharge port which discharges the said washing | cleaning liquid with respect to the said squeegee.

According to this configuration, the cleaning liquid can be satisfactorily discharged onto the preliminary discharge surface.

More preferably, the plurality of discharge ports are formed such that the cleaning liquids discharged from the adjacent discharge ports and moving along the squeegee surface are integrated with each other at the tip of the squeegee.

According to this configuration, since the cleaning liquid is integrated at the squeegee tip, the cleaning liquid can be supplied over the entire contact end of the squeegee and the preliminary ejection surface.

Moreover, in this washing | cleaning apparatus, it is preferable that each said discharge port is arrange | positioned at equal intervals.

According to this structure, since the washing | cleaning liquid is supplied from the discharge ports arrange | positioned at equal intervals, cleaning liquid can be supplied uniformly on a preliminary discharge surface, for example by making the amount of washing liquid discharged from each discharge port the same.

Moreover, in this washing | cleaning apparatus, it is preferable to provide two or more squeegees.

According to this structure, since a some squeegee slides on a preliminary discharge surface, it is equipped with high washability.

In this case, as for the said washing | cleaning liquid supply part, it is more preferable to supply the said washing | cleaning liquid except at least the said squeegee of the last sliding direction among the plurality of squeegee.

According to this structure, when the squeegee of the sliding end is sliding on the preliminary discharge surface, it functions as a final squeegee which scrapes off the remaining liquid by the front squeegee. Therefore, it becomes a thing with high washing | cleaning which was prevented from remaining after scraping off the liquid body on a preliminary discharge surface.

Moreover, in this washing | cleaning apparatus, a plurality of said discharge openings are formed corresponding to each said squeegee, and the number of the said discharge opening corresponding to the said squeegee of a sliding direction lead is the said discharge opening corresponding to the said squeegee behind a sliding direction. More than the number is preferred.

According to this configuration, the liquid can be reliably scraped out by discharging a large amount of the cleaning liquid to the leading side in the sliding direction in which a large amount of liquid is present and sliding a plurality of squeegees on the preliminary discharge surface. Therefore, what remains after scraping off a liquid body can be suppressed, and high washing | cleaning property can be obtained.

An eleventh aspect of the present invention is a method for cleaning a preliminary ejection surface of a preliminary ejection apparatus used for a preliminary ejection operation in a coating apparatus, wherein a squeegee for sliding the preliminary ejection surface of a substantially flat surface coated with a liquid body is provided. The liquid is scraped off together with the cleaning liquid by the squeegee while supplying the cleaning liquid to the surface on the sliding direction side of the surface.

According to the cleaning method of the eleventh aspect of the present invention, the liquid can be satisfactorily scraped off by the squeegee sliding on the preliminary discharge surface while diluting the liquid with the cleaning liquid supplied to the surface of the squeegee in the sliding direction side. Further, since the cleaning liquid is selectively supplied from the cleaning liquid supply unit onto the preliminary ejection surface, the amount of the cleaning liquid used can be suppressed.

Moreover, it is preferable that the said washing | cleaning method supplies the said washing | cleaning liquid to the several point on the said surface of the squeegee.

According to this structure, a washing | cleaning liquid can be discharged favorably on a preliminary discharge surface, and high cleaning property can be obtained.

At this time, it is more preferable to supply the cleaning liquid so that the cleaning liquid supplied to at least an adjacent position on the surface of the squeegee and moving on the surface reaches the tip of the squeegee and is integrated.

According to this configuration, since the cleaning liquid is integrated at the squeegee tip, the cleaning liquid can be supplied over the entire area of the contacting end of the squeegee and the preliminary ejection surface. Therefore, high detergency can be obtained.

In addition, the cleaning method uses a plurality of the squeegee, and when the plurality of the squeegee is slid in the arrangement direction to clean the preliminary ejection surface, other than the squeegee positioned at the end of the sliding direction at least. It is preferable to supply the cleaning liquid to the squeegee.

According to this structure, the squeegee of the last sliding direction can be functioned as a final squeegee which scrapes off the remaining liquid by another squeegee when sliding on the preliminary discharge surface. Therefore, it becomes a high washing | cleaning property which was prevented from remaining after scraping off the liquid body on a preliminary discharge surface.

In addition, the cleaning method uses a plurality of the squeegee, and when the plurality of the squeegee is slid in the arrangement direction to clean the preliminary ejection surface, the squeegee placed on the head side in the sliding direction is used. It is preferable to make the supply amount of the cleaning liquid more than the supply amount of the cleaning liquid to the other squeegee.

According to this structure, a lot of cleaning liquid is supplied to the squeegee of a sliding direction head side, and all the squeegee slides on a preliminary discharge surface, and it can reliably scrape a liquid body with a cleaning liquid.

A twelfth aspect of the present invention is a preliminary ejection device including the cleaning device.

According to the preliminary ejection apparatus according to the twelfth aspect of the present invention, since the cleaning apparatus having a high cleaning property is provided, the preliminary ejection surface can be cleaned well, thereby achieving a high reliability that can reliably perform the preliminary ejection operation.

A thirteenth aspect of the present invention is a coating device including the preliminary ejection device.

According to the coating device of the thirteenth aspect of the present invention, since the preliminary ejection device having a high cleaning property on the preliminary ejection surface is provided, the preliminary ejection operation can be performed satisfactorily so that the applicator can always be kept in a good state and uniform. Application of the liquid body can be carried out at a film thickness.

According to the present invention, even in the preliminary ejection apparatus that does not use the priming roller during the preliminary ejection operation, high cleaning property can be obtained by satisfactorily scraping off the liquid on the preliminary ejection surface by a squeegee sliding on the preliminary ejection surface. Can be.

1 is a diagram for explaining a schematic configuration of a preliminary ejection mechanism.
2 is a schematic configuration diagram of a preliminary discharge surface cleaning unit.
3 is a simplified diagram showing a state of attachment of a squeegee in the squeegee head.
4 is a schematic view of the front structure of the squeegee head portion.
5 is a view showing a state of a cleaning liquid discharged from a discharge port.
6 is an enlarged view showing the peripheral configuration of the arm portion.
7A is a plan view showing a schematic configuration of a preliminary ejection unit.
7B is a side view illustrating a schematic configuration of the preliminary ejection unit.
It is a figure which shows the structure of a squeegee washing | cleaning mechanism.
9 is a perspective view of the coating apparatus.
10 is a front view of the coating apparatus.
11 is a plan view of the coating apparatus.
12 is a side view of the coating apparatus.
It is a side view which shows schematic structure of the management part.
14 is a plan view showing an operation process of the coating apparatus.
FIG. 15 is a plan view illustrating an operation process following FIG. 14.
16 is a plan view illustrating an operation process following FIG. 15.
17 is a plan view illustrating an operation process following FIG. 16.
18 is a view for explaining the operation of the applicator.
It is a figure for demonstrating the operation | movement of an application part.
It is a figure which shows the modification of a coating device.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described based on drawing. The coating apparatus 1 which concerns on this embodiment is a coating apparatus which apply | coats a resist on the glass substrate used for a liquid crystal panel etc., as shown in FIG. 9, for example, on the preliminary discharge surface which replaces the conventional priming roller. The resist is preliminarily ejected to enable good cleaning of the preliminary ejection surface. The coating device 1 uses the board | substrate conveyance part 2, the application | coating part 3, and the management part 4 as a main component, and floats a board | substrate by the board | substrate conveyance part 2, and conveys an applicator | part ( The resist is apply | coated on the said board | substrate by 3), and the state of the application | coating part 3 is managed by the management part 4.

(Management)

First, the structure of the management part 4 is demonstrated with reference to FIGS. 9-13.

The management part 4 is a site | part which manages the nozzle 32 so that the discharge amount of the resist (liquid body) discharged to the board | substrate S may become constant, and it applies to the board | substrate conveyance part 2 so that it may overlap in plan view, It is provided in the -X direction side (upstream side of a board | substrate conveyance direction) with respect to 3). The management unit 4 includes a preliminary ejection mechanism (preliminary ejection device) 42, a dip tank 41, a nozzle cleaning device 43, an accommodating portion 44 for accommodating them, and the accommodating portion 44. It has the holding member 45 which hold | maintains. The holding member 45 is connected to the moving mechanism 45a. By the said movement mechanism 45a, the accommodating part 44 is able to move to a X direction.

The preliminary discharge mechanism 42, the dip tank 41, and the nozzle cleaning device 43 are arranged in this order on the -X direction side. Each dimension of the preliminary discharge mechanism 42, the dip tank 41, and the nozzle cleaning apparatus 43 in the Y direction is smaller than the distance between the strut members 31a of the door frame 31, and the door type. The frame 31 is made accessible over each site (see FIG. 14).

The dip tank 41 is a liquid tank in which solvent, such as thinner, was stored inside. The nozzle cleaning device 43 is a device for rinsing and cleaning the peripheral region of the opening part 32a of the nozzle 32.

Hereinafter, the structure of the preliminary discharge mechanism 42 is demonstrated in detail, referring drawings. 1 is a diagram for explaining a schematic configuration of the preliminary ejection mechanism 42.

As shown in Fig. 1, the preliminary ejection mechanism 42 is used for the preliminary ejection operation of the nozzle 32 (the coating section 3), and has a preliminary ejection surface 81 for conducting the preliminary ejection of the resist. The preliminary ejection unit 103 and the preliminary ejection surface cleaning unit (cleaning apparatus) 100 which wash this preliminary ejection surface 81 are provided.

The preliminary ejection unit 103 is provided with a plate-shaped preliminary ejection plate 80 composed of SUS, stone, glass, or the like, for example, and one surface of the preliminary ejection plate 80 is the preliminary ejection. The surface 81 is comprised. The longitudinal direction of the preliminary discharge plate 80 coincides with the longitudinal direction of the nozzle.

The preliminary ejection surface cleaning unit 100 performs a cleaning process by moving on the preliminary ejection surface 81 coated with the resist R, thereby sliding the resist R on the preliminary ejection surface 81 to scrape the resist R. I have a squeegee 110.

(Spare discharge surface cleaning unit)

The schematic structure of the preliminary discharge surface cleaning unit 100 is demonstrated, referring drawings. 2 shows a schematic view of the preliminary ejection surface cleaning unit 100. 2 shows a state where the preliminary ejection surface cleaning unit 100 is disposed on the preliminary ejection surface 81.

As shown in FIG. 2, the preliminary ejection surface cleaning unit 100 supports the squeegee head portion 105 and the squeegee head portion 105, and supports the squeegee head portion 105 as the preliminary ejection surface 81. ) Remaining on the arm portion 101, the drying portion (drying mechanism) 120 for blowing air (gas) toward the preliminary ejection surface 81, and the preliminary ejection surface 81 A suction part (suction mechanism) 130 for sucking the liquid body is provided.

The squeegee head portion 105 includes at least one discharge port 102 for discharging the cleaning liquid to the preliminary discharge surface 81 and three pieces of sliding cleaning the cleaning liquid by sliding on the preliminary discharge surface 81 coated with a resist. The squeegee 110 and the control part 140 which control the discharge amount of the washing | cleaning liquid discharged from each said discharge port 102 are comprised.

In order to make the following description easy to understand, the said squeegee 110 is called the 1st squeegee 110a, the 2nd squeegee 110b, and the last squeegee 110c in order from the sliding direction side.

These squeegee 110 (110a, 110b, 110c) is comprised by the plate-shaped member of the rectangular shape in planar view, If it can scrape the resist apply | coated on the preliminary discharge surface 81 with the constituent material, Although the thing of the thing can be employ | adopted, for example, polyester is used in this embodiment. The length of the squeegee 110 is set to be equal to or larger than the width of the preliminary ejection surface 81, whereby the squeegee 110 can scrape off the resist applied on the preliminary ejection surface 81.

In addition, the squeegee 110 is preferably attached to the squeegee head portion 105 in a state of inclining 15 degrees or more and 50 degrees or less with respect to the preliminary ejection surface 81 (more preferably in an inclined state of 45 degrees). By setting it to the same angle range, high washability is obtained by the squeegee 110 which slides on the preliminary discharge surface 81. Specifically, in the present embodiment, the inclination angle was 45 °. That is, the squeegee 110 is arrange | positioned in the sliding direction in the posture which is substantially parallel with each other.

As shown in FIG. 1, the preliminary ejection surface cleaning unit 100 can move on the preliminary ejection surface 81, and the squeegee 110 held by the squeegee head portion 105 is on the preliminary ejection surface 81. It is supposed to slide. 3 shows the attachment state of the squeegee 110 in the squeegee head portion 105. The squeegee 110 shown in the figure is a contact end with respect to the preliminary discharge surface 81.

As shown in FIG. 3, the squeegee 110 supports the squeegee head portion 105 in a posture in which the longitudinal direction of the contact end with the preliminary ejection surface 81 is obliquely directed with respect to the sliding direction of the squeegee 110. do. Specifically, the intersection angle between the longitudinal direction of the contact end and the sliding direction of the squeegee 110 is preferably 85 ° or less (in this embodiment, set to 80 °).

Therefore, each squeegee 110 is arrange | positioned in the sliding direction in the posture which is substantially parallel with each other.

As shown in FIG. 2, in the squeegee head portion 105, a gap 107 is formed between the first squeegee 110a and the second squeegee 110b. Moreover, the squeegee head part 105 is provided with the washing | cleaning liquid supply pipe 106a which communicates with the said space | gap 107. As shown in FIG.

As shown in FIG. 4, the said washing | cleaning liquid supply pipe 106a is formed along the longitudinal direction of the squeegee head part 105, In this embodiment, the washing | cleaning liquid is supplied to ten space | gap 107, for example. . These voids 107 are arranged at equal intervals, respectively. In addition, the number of the said space | gap 107 is not limited to this, It can change suitably. Moreover, the washing | cleaning liquid supply means 106 connected to the said washing | cleaning liquid supply pipe 106a is provided in the side part (right side in the figure) of the squeegee head part 105. As shown in FIG. This washing | cleaning liquid supply means 106 is comprised by the pump etc. which draw a washing | cleaning liquid from the washing | cleaning liquid tank (not shown) filled with washing liquid, such as a thinner, and supply a washing | cleaning liquid to the said washing | cleaning liquid supply pipe 106a, for example.

The control part 140 which controls the discharge amount of the washing | cleaning liquid discharged | emitted from each discharge port 102 is electrically connected to the said washing | cleaning liquid supply means 106. FIG. And the cleaning liquid supply means 106 is adjusted based on the electric signal from the control part 140, and the discharge amount of the cleaning liquid discharged from each discharge port 102 via the cleaning liquid supply pipe 106a can be adjusted. In this embodiment, the said control part 140 adjusts the said washing | cleaning liquid supply means 106 so that the quantity of the washing | cleaning liquid discharged from the 1st discharge port 102a and the 2nd discharge port 102b may become equal.

Therefore, the discharge port 102 (cleaning liquid supply part) through which the cleaning liquid is discharged by flowing the cleaning liquid sucked by the cleaning liquid supply means 106 into the air gap 107 from the cleaning liquid supply pipe 106a is constituted. The cleaning liquid discharged from the discharge port 102 is delivered (discharged) to the preliminary discharge surface 81 by transmitting the surface on the side of the sliding direction of the squeegee 110.

The squeegee head portion 105 according to the present embodiment corresponds to the first squeegee 110a and the second squeegee 110b except for the sliding direction end (final squeegee 110c) among the squeegee 110. Ten discharge ports 102a and ten second discharge ports 102b are formed, respectively. In addition, the number of the discharge ports 102 is not limited to this, It can change suitably.

The discharge port 102 corresponding to the squeegee means that the discharge port 102 is formed near the squeegee 110 to discharge (supply) the cleaning liquid onto the preliminary discharge surface 81 on the sliding direction side of the squeegee 110.

In this embodiment, the first? The second discharge ports 102a and 102b are arranged at equal intervals, respectively, so that the cleaning liquid can be uniformly disposed on the surface of the squeegee 110 in the sliding direction side. In addition, the discharge ports 102a and 102b are discharged from the adjacent discharge ports 102 as shown in FIG. 5, and the air gaps 107 so that the cleaning liquids moving on the squeegee 110 surface are integrated with each other at the tip of the squeegee 110. ) Is formed in the squeegee head portion 105.

Next, the structure of the arm part 101 which supports the squeegee head part 105 is demonstrated. 6 is an enlarged view showing the peripheral structure of the arm portion 101.

The arm part 101 mainly consists of metal plates, such as SUS, and the cross roller bearing (swing mechanism) 150 which supports the said squeegee head part 105 is provided, as shown in FIG. The cross roller bearing 150 is arranged so that the rollers are orthogonal to each other between the inner ring and the outer ring, and can support the squeegee head 105 so as to be able to swing freely. The swing mechanism is not limited to the cross roller bearing 150. For example, the swing mechanism is a bearing mechanism that allows the squeegee head portion 105 to swing in a predetermined direction (the longitudinal direction of the squeegee 110). Can be used.

In addition, an opening portion 108 is formed in the arm portion 101, and the cross roller bearing 150 is inserted into the opening portion 108 so that the cross roller bearing 150 faces the lower surface of the arm portion 101 (surface facing the preliminary ejection surface 81). The state has passed from the) side to the upper surface side.

The cross roller bearing 150 is supported by the shaft portion 152 fixedly arranged on the upper surface side of the arm portion 101. Therefore, the cross roller bearing 150 is rotatable along the shaft portion 152 and can swing freely with respect to the arm portion 101.

The mounting plate 151 for attachment of the squeegee head portion 105 is formed in the cross roller bearing 150. The squeegee head portion 105 is fixed to the attachment plate 151 disposed on the lower surface side of the arm portion 101 by a bolt B2. Therefore, the squeegee head portion 105 is formed so as to be able to swing freely by the cross roller bearing 150.

By this structure, the squeegee 110 can be reliably brought into contact with the preliminary ejection surface 81 by rotating (swinging) the squeegee head portion 105, so that it can slide satisfactorily.

The drying part 120 is formed in the opposite side to the sliding direction with respect to the squeegee head part 105 as shown in FIG. 2, and uses a flange from the outside and thinly flats the air in the sliding direction of the squeegee 110 (for example, For example, the drying process of the preliminary discharge surface 81 is performed by blowing by air knife type).

The suction part 130 is provided in the side opposite to the sliding direction of the squeegee 110 with respect to the said drying part 120, and is formed. The suction part 130 is connected to the suction part 130, for example through a flange, and can adjust a suction pressure by controlling this suction pump. The suction part 130 sucks the resist remaining on the preliminary discharge surface 81. In addition, the suction unit 130 is capable of sucking not only the resist remaining on the preliminary ejection surface, but also the waste water mixed with the cleaning liquid and the cleaning liquid and the resist, and the cleaning property in the preliminary ejection surface cleaning unit 100. Is improving.

By thus providing the suction part 130 and the drying part 120 together, by sucking the atmosphere near the preliminary discharge surface 81 while drying the preliminary discharge surface 81 by the air blown out from the drying unit 120. It is possible to prevent foreign matter (garbage, etc.) from scattering on the preliminary ejection surface 81 by air injection (ejection).

* (Spare discharge unit)

Next, the structure of the said preliminary discharge unit 103 is demonstrated. 7A and 7B show a schematic configuration of the preliminary discharge unit 103, FIG. 7A is a plan view, and FIG. 7B is a side view.

As shown in FIGS. 7A and 7B, the preliminary ejection unit 103 includes a preliminary ejection plate having a preliminary ejection surface 81 to which a resist is applied by a preliminary ejection operation of the nozzle 32 (the coating section 3). The preliminary ejection plate 80 is held such that the preliminary ejection surface 81 is horizontal. Then, the squeegee 110 of the preliminary ejection surface cleaning unit 100 slides on the preliminary ejection surface 81.

In the present embodiment, as described above, the preliminary ejection surface cleaning unit 100 holds the squeegee 110 in a posture inclined obliquely with respect to the sliding direction in the longitudinal direction of the contact end with the preliminary ejection surface 81. (See Figure 3). For this reason, when the squeegee 110 slides on the preliminary ejection surface 81 to which the resist is applied, the resist scraped off by the squeegee 110 is rearward in the sliding direction in the longitudinal direction of the squeegee 110 (FIG. 7A). Most of the time. The preliminary discharge unit 103 according to the present embodiment includes a side discharge part 93 for discharging the resist which flows out to the side end side of the squeegee 110 by the sliding operation of the squeegee 110.

The side discharge part 93 may be integrally formed in the preliminary discharge plate 80 which has the preliminary discharge surface 81, and may be comprised by the other member. In this embodiment, the slit-shaped side groove part 93a extended in the sliding direction of the squeegee 110 was formed in the side of the preliminary discharge plate 80, and the side discharge part 93 was formed integrally.

As shown in FIG. 7B, a suction recovery mechanism 95 for sucking a resist is formed in the side discharge part 93. As this suction collection | recovery mechanism 95, a suction pump is used, for example. The side groove portion 93a has four suction zones 95a connected to the suction recovery mechanism 95 and four inclined surfaces 93b descending toward the suction port 95a. It is comprised by being arranged along a sliding direction. By this structure, the side discharge part 93 makes it easy to flow the resist discharged | emitted to the side groove part 93a to the suction port 95a side along the inclined surface 93b, and to receive the resist from the suction port 95a. It can be discharged well.

By the way, as mentioned above, the resist scraped off by the squeegee 110 is moved to the side (side discharge part 93) of the preliminary discharge surface 81, and some resist is moved forward of the squeegee 110 in the sliding direction. Move.

Therefore, the preliminary discharge unit 103 according to the present embodiment is a front discharge part for discharging the resist moved in the sliding direction forward of the squeegee 110 by the sliding operation of the squeegee 110 as shown in FIGS. 7A and 7B. 92 is provided. The front discharge part 92 has a suction recovery mechanism 95 for sucking the resist. In addition, although not shown, in the same manner as the side discharge part 93, the side groove part having the inclined surface 93b connected to the suction recovery mechanism 95 and descending toward the suction port 95a is formed in the front discharge part 92. You may also In addition, the side groove portion as described above may be formed in at least one of the side discharge portion 93 and the front discharge portion 92.

In addition, the preliminary discharge unit 103 is provided with the standby part 91 which mounts the preliminary discharge surface cleaning unit 100 in the side of the preliminary discharge surface 81. The standby part 91 is a member which makes the preliminary discharge surface cleaning unit 100 hold | maintain, while the resist is preliminarily discharged from the nozzle 32 on the preliminary discharge surface 81. Specifically, in this embodiment, the standby part 91 is formed in the sliding direction back of the squeegee 110, and the preliminary discharge unit 103 is spared from the standby part 91 at the time of the washing | cleaning of the preliminary discharge surface 81. FIG. The discharge surface 81 can be moved in a short time.

The standby part 91 has the mounting surface 91a which mounts the said preliminary discharge surface washing unit 100 (refer FIG. 1). The mounting surface 91a is made to hold the preliminary ejection surface cleaning unit 100 at a position equal to or lower than the preliminary ejection surface 81, for example. In particular, the preliminary ejection cleaning unit 100 is held at a position where the mounting surface 91a is lower than the preliminary ejection surface 81, so that the nozzle 32 and the preliminary ejection moved onto the preliminary ejection surface 81 during the preliminary ejection operation. Interference of the surface cleaning unit 100 can be prevented.

As shown in FIG. 8, the mounting surface 91a has a concave-convex structure when viewed in cross section, and this concave-convex structure constitutes the squeegee cleaning mechanism 94. The squeegee cleaning mechanism 94 has a removal function by washing of the resist attached to the squeegee 110 by the above-mentioned concave-convex structure after cleaning of the preliminary ejection surface 81.

(Application device)

Next, the coating device 1 which concerns on this embodiment is demonstrated with reference to drawings. The coating device 1 according to the present embodiment includes the preliminary ejection mechanism (preliminary ejection device) 42 described above. 9 is a perspective view of the coating device 1, FIG. 10 is a front view of the coating device 1, FIG. 11 is a plan view of the coating device 1, and FIG. 12 is a side view of the coating device 1.

As shown in FIGS. 9-12, the coating device 1 makes the board | substrate conveyance part 2, the application | coating part 3, and the said management part 4 into a main component, and by the board | substrate conveyance part 2 The resist is apply | coated on the said board | substrate by the application | coating part 3, floating a board | substrate, and the state of the application | coating part 3 is managed by the said management part 4.

(Substrate conveying part)

First, the structure of the board | substrate conveyance part 2 is demonstrated.

The board | substrate conveyance part 2 has the board | substrate loading area | region 20, the coating process area | region 21, the board | substrate carrying out area | region 22, the conveyance mechanism 23, and the frame part 24 which supports these. . In this board | substrate conveyance part 2, the board | substrate S is conveyed by the conveyance mechanism 23 in order of the board | substrate carrying-in area | region 20, the coating process area | region 21, and the board | substrate carrying out area | region 22. FIG. The board | substrate loading area | region 20, the coating process area | region 21, and the board | substrate carrying out area | region 22 are arrange | positioned in this order from the upstream side to the downstream side of a board | substrate conveyance direction. The conveyance mechanism 23 is formed in one side of each said part so that it may apply to each part of the board | substrate loading area | region 20, the coating process area | region 21, and the board | substrate carrying out area | region 22. As shown in FIG.

Hereinafter, in describing the structure of the coating device 1, the directions in the drawings will be described using the XYZ coordinate system to simplify the notation. As a longitudinal direction of the board | substrate conveyance part 2, the conveyance direction of a board | substrate is described in the X direction. In a plan view, the direction orthogonal to the X direction (substrate conveyance direction) is described as the Y direction. The direction perpendicular to the plane including the X direction axis and the Y direction axis is referred to as the Z direction. In addition, in the X direction, the Y direction, and the Z direction, it is assumed that the direction of the arrow in the figure is the + direction and the direction opposite to the direction of the arrow is the-direction.

The board | substrate loading area 20 is a site | part which carries in the board | substrate S conveyed from the exterior of the apparatus, and has the carry-in side stage 25 and the lift mechanism 26. As shown in FIG.

The carrying-in side stage 25 is formed in the upper part of the frame part 24, and is a rectangular plate-shaped member in planar view which consists of SUS etc., for example. As for the carry-in side stage 25, X direction is length. In the carry-in side stage 25, the air blowing hole 25a and the lifting pin gushing hole 25b are respectively formed in multiple numbers. These air blowing holes 25a and the lifting pin projection holes 25b are formed to penetrate the carrying-in side stage 25.

The air blowing hole 25a is a hole which blows out air on the stage surface 25c of the carry-in stage 25, for example in plan view to the area | region through which the board | substrate S passes in the carry-in side stage 25, for example. They are arranged in matrix. An air supply source (not shown) is connected to this air blowing hole 25a. In this carry-in side stage 25, the board | substrate S can be made to float to + Z direction by the air blown out from the air blowing hole 25a.

The lifting pin projection holes 25b are formed in a region into which the substrate S is carried in the carry-in side stage 25. The lifting pin projection hole 25b has a configuration in which air supplied to the stage surface 25c does not leak.

The alignment apparatus 25d is formed in the both ends of the Y direction among this carry-in stage 25 one by one. The alignment device 25d is a device for aligning the position of the substrate S carried in the carry-in side stage 25. Each alignment device 25d has a long hole and a positioning member (not shown) formed in the long hole, and mechanically sandwiches the substrate carried in the loading stage 25 from both sides.

The lift mechanism 26 is formed in the position corresponding to a board | substrate carrying in position on the back surface side of the carrying-in side stage 25. As shown in FIG. The lift mechanism 26 has a lifting member 26a and a plurality of lifting pins 26b. The lifting member 26a is connected to a drive mechanism (not shown), and the lifting member 26a moves in the Z direction by the drive of the drive mechanism. The plurality of lifting pins 26b are provided so as to face the carrying-in side stage 25 from the upper surface of the lifting member 26a. Each elevating pin 26b is arrange | positioned in the position which overlaps with the said elevating pin recessed hole 25b by planar view, respectively.

As the elevating member 26a moves in the Z direction, each elevating pin 26b is projected from the elevating pin recess 25b on the stage surface 25c. The edge part of the + Z direction of each lifting pin 26b is formed so that the position on a Z direction may respectively correspond, and the board | substrate S conveyed from the exterior of an apparatus can be maintained in a horizontal state.

In the application | coating process area | region 21, the process stage 27 which floats and supports the board | substrate S as a site | part to which a resist is apply | coated is formed.

The processing stage 27 is a rectangular plate-like member in a plan view in which the stage surface 27c is covered with, for example, light absorbing material mainly composed of hard alumite, and is formed in the + X direction with respect to the carry-in stage 25. have. In the part covered with the light absorbing material in the processing stage 27, light reflection such as laser light is suppressed. In the processing stage 27, the Y direction is a length. The dimension of the Y direction of the processing stage 27 is made substantially the same as the dimension of the Y direction of the carry-in side stage 25. The process stage 27 is provided with the some air blowing hole 27a which blows off air on the stage surface 27c, and the some air suction hole 27b which sucks air on the stage surface 27c. . These air blowing holes 27a and air suction holes 27b are formed to penetrate through the processing stage 27.

In the processing stage 27, the pitch of the air jet holes 27a is narrower than the pitch of the air jet holes 25a formed in the carry-in stage 25, and the air jet holes 27a are smaller than the carry-in stage 25. It is densely formed. For this reason, in this processing stage 27, the floating amount of a board | substrate can be adjusted with high precision compared with the other stage, and it can control so that the floating amount of a board | substrate may be 100 micrometers or less, for example, 50 micrometers or less preferably. It is supposed to be.

The board | substrate carrying out area | region 22 is a site | part which carries out the board | substrate S to which the resist was apply | coated to the exterior of the apparatus, and has the carrying-out stage 28 and the lift mechanism 29. As shown in FIG. This carrying-out stage 28 is formed in the + X direction side with respect to the process stage 27, and is comprised by the material and dimension substantially the same as the carrying-in side stage 25 formed in the board | substrate carrying-in area 20. FIG. In the carrying out side stage 28, the air blowing hole 28a and the lifting pin inlet hole 28b are formed similarly to the carrying in side stage 25. As shown in FIG. The lift mechanism 29 is formed in the position corresponding to a board | substrate carrying out position in the back surface side of the carrying-out stage 28. As shown in FIG. The elevating member 29a and the elevating pin 29b of the lift mechanism 29 have the same configuration as each part of the lift mechanism 26 formed in the substrate loading area 20. This lift mechanism 29 can lift the board | substrate S by the lifting pin 29b for the movement of the board | substrate S, when carrying out the board | substrate S on the carrying-out stage 28 to an external apparatus. It is supposed to be.

The conveyance mechanism 23 has the conveyer 23a, the vacuum pad 23b, and the rail 23c. The conveyer 23a has a structure in which a linear motor is formed, for example, and the conveyer 23a can move on the rail 23c by driving the linear motor.

This conveyer 23a is arrange | positioned so that the predetermined part 23d may overlap with the edge part of the board | substrate S at the -Y direction in plan view. The part 23d which overlaps with this board | substrate S is formed in the position lower than the height position of the back surface of the board | substrate at the time of making the board | substrate S float.

The vacuum pad 23b is arranged in multiple numbers in the part 23d which overlaps with the said board | substrate S among the conveyers 23a. This vacuum pad 23b has the adsorption surface which vacuum-adsorbs the board | substrate S, and is arrange | positioned so that the said adsorption surface may face upward. The vacuum pad 23b can hold | maintain the said board | substrate S by the adsorption surface attracting the back surface edge part of the board | substrate S. As shown in FIG. Each vacuum pad 23b can adjust the height position from the upper surface of the conveyer 23a, for example, can raise and lower the height position of the vacuum pad 23b according to the floating amount of the board | substrate S. For example, as shown in FIG. It is supposed to be. The rail 23c extends over each stage to the side of the carry-in stage 25, the processing stage 27, and the carry-out stage 28, and the conveyer 23a is made by sliding the said rail 23c. It is possible to move along each said stage.

(Application department)

Next, the structure of the application part 3 is demonstrated.

The application part 3 has a door-type frame 31 and a nozzle 32 as a part which apply | coats a resist on the board | substrate S. As shown in FIG.

The door frame 31 has a strut member 31a and a crosslinking member 31b, and is formed to span the processing stage 27 in the Y direction. Each strut member 31a is formed in the Y direction side of the processing stage 27, and each strut member 31a is supported by the both side surfaces of the frame part 24 on the Y direction side, respectively. Each strut member 31a is formed so that the height position of an upper end part may correspond. The bridge | crosslinking member 31b is bridge | crosslinked between the upper end parts of each support member 31a, and is able to raise / lower the said support member 31a.

The door frame 31 is connected to the moving mechanism 31c, and can move in the X direction. The door-type frame 31 can move between the management parts 4 by this moving mechanism 31c. That is, the nozzle 32 formed in the door frame 31 can move between the management parts 4.

One direction is comprised in the elongate shape of length, and the nozzle 32 is formed in the -Z direction side surface of the bridge | crosslinking member 31b of the door frame 31. As shown in FIG. The slit-shaped opening part 32a is formed in the front-end | tip of the -Z direction among this nozzle 32 along the longitudinal direction, and the resist is discharged from the said opening part 32a. The nozzle 32 is arrange | positioned so that the longitudinal direction of the opening part 32a may be parallel to a Y direction, and the said opening part 32a opposes the processing stage 27. As shown in FIG. The dimension of the longitudinal direction of the opening part 32a becomes smaller than the dimension of the Y direction of the board | substrate S conveyed, and the resist is not apply | coated to the peripheral area of the board | substrate S. FIG. A flow passage (not shown) is formed in the nozzle 32 to distribute the resist through the opening 32a, and a resist supply source (not shown) is connected to the flow passage. This resist supply source has a pump not shown, for example, and resist is discharged from the opening part 32a by pushing a resist into the opening part 32a with the said pump. A moving mechanism (not shown) is formed in the supporting member 31a, and the nozzle 32 held by the crosslinking member 31b can move in the Z direction by the moving mechanism. On the lower surface of the bridge member 31b of the door-shaped frame 31, the distance in the Z direction between the opening 32a of the nozzle 32, that is, the front end of the nozzle 32 and the opposing surface opposite to the front end of the nozzle 32 is determined. The sensor 33 to measure is attached.

(Operation of Coating Device)

Next, operation | movement of the coating device 1 comprised as mentioned above is demonstrated.

14-17 is a top view which shows the operation process of the coating device 1. With reference to each drawing, the operation | movement which applies a resist to the board | substrate S is demonstrated. In this operation, the board | substrate S is carried in the board | substrate carrying-in area | region 20, the resist is apply | coated in the coating process area | region 21, floating and conveying the said board | substrate S, and the board | substrate S which apply | coated this resist was applied. Is carried out from the substrate carrying-out area 22. 14-17, only the outline of the door frame 31 was shown by the broken line, and it was easy to distinguish the structure of the nozzle 32 and the processing stage 27. As shown in FIG. The detailed operation in each part is described below.

The coating apparatus 1 is standby before carrying in a board | substrate to the board | substrate carrying-in area 20. FIG. Specifically, the conveyer 23a is arranged on the −Y direction side of the substrate loading position of the carry-in side stage 25, and the carry position is aligned with the floating height position of the substrate while the height position of the vacuum pad 23b is aligned. Air is blown out from the air blowing hole 25a of the side stage 25, the air blowing hole 27a of the processing stage 27, the air suction hole 27b, and the air blowing hole 28a of the carrying out stage 28, respectively. The air is blown out or sucked, and air is supplied to such an extent that the substrate floats on the surface of each stage.

In this state, when the board | substrate S is conveyed to the board | substrate carrying-in position shown in FIG. 14 from the exterior by the conveyance arm etc. which are not shown, for example, the lifting member 26a shown in FIG. 10 is moved to + Z direction, and the lifting pin ( 26b) protrudes from the lifting pin recess 25b to the stage surface 25c. And the board | substrate S is lifted up by the lifting pin 26b, and the said board | substrate S is received. Moreover, the positioning member protrudes to the stage surface 25c from the long hole of the alignment apparatus 25d.

After receiving the substrate S, the lifting member 26a is lowered to accommodate the lifting pins 26b in the lifting pin recesses 25b. At this time, since the air layer is formed in the stage surface 25c, the board | substrate S is hold | maintained in the state which floated with respect to the stage surface 25c by the said air. When the substrate S reaches the surface of the air layer, the substrate S is aligned by the alignment member of the alignment device 25d, and the conveying machine (positioned on the -Y direction side of the substrate loading position) The vacuum pad 23b of 23a) is vacuum-suctioned to the edge part at the side of -Y direction of the board | substrate S. FIG. The state to which the edge part at the side of -Y direction of the board | substrate S was adsorb | sucked is shown in FIG. After the -Y direction side edge part of the board | substrate S is attracted by the vacuum pad 23b, the conveyer 23a is moved along the rail 23c. Since the board | substrate S is in the floating state, even if the drive force of the conveyer 23a is made relatively small, the board | substrate S will move smoothly along the rail 23c.

When the conveyance direction front end of the board | substrate S reaches the position of the opening part 32a of the nozzle 32, as shown in FIG. 15, a resist is discharged toward the board | substrate S from the opening part 32a of the nozzle 32. As shown in FIG. do. Discharge of a resist is performed, fixing the position of the nozzle 32, and conveying the board | substrate S by the conveyer 23a. With the movement of the board | substrate S, the resist film R is apply | coated on the board | substrate S as shown in FIG.

The resist film R is formed in the predetermined area | region of the board | substrate S by the board | substrate S passing under the opening part 32a which discharges a resist.

The board | substrate S in which the resist film R was formed is conveyed to the carrying out side stage 28 by the conveyer 23a. In the carrying out side stage 28, the board | substrate S is conveyed to the board | substrate carrying out position shown in FIG. 17 in the state floated with respect to the stage surface 28c.

When the board | substrate S reaches | attains the board | substrate carrying out position, suction of the vacuum pad 23b is canceled | released and the lifting member 29a of the lift mechanism 29 is moved to + Z direction. Then, the lifting pin 29b protrudes from the lifting pin projection hole 28b to the back surface of the substrate S, and the substrate S is lifted by the lifting pin 29b. In this state, the external conveyance arm formed in the + X direction side of the carrying out stage 28, for example, is accessed by the carrying out stage 28, and receives the board | substrate S. FIG. After passing the board | substrate S to a conveyance arm, the conveyer 23a is returned to the board | substrate carrying-in position of the loading side stage 25 again, and it waits until the next board | substrate S is conveyed.

While the next board | substrate S is conveyed, the application part 3 manages the nozzle 32 state in the management part 4. As shown in FIG. 18, after moving the door frame 31 to the position of the management part 4, the position of the door frame 31 is adjusted (moved and dropped), and the nozzle 32 is nozzle-cleaning apparatus 43 ), And the nozzle 32 is cleaned by the nozzle cleaning device 43 (see FIG. 13). As a frequency which wash | cleans the nozzle 32, it sets suitably by a user, you may wash | clean for every board | substrate S, and you may make it wash | clean at several ratios in several sheets.

In addition, when resist coating is not performed for a long time, the nozzle 32 is dried by arranging the nozzle 32 in the dip tank 41 and exposing it to the vapor atmosphere of the solvent (thinner) stored in this dip tank 41. To prevent them.

After the cleaning of the nozzle 32, the application part 3 is accessed by the preliminary ejection mechanism 42 to perform a preliminary ejection process for maintaining the ejection state of the nozzle 32. This preliminary ejection process is performed by using the preliminary ejection mechanism (preliminary ejection apparatus) 42. In the preliminary ejection mechanism 42, when preliminary ejection of the resist is performed on the preliminary ejection surface 81, the preliminary ejection surface cleaning unit 100 performs the cleaning process of the preliminary ejection surface 81.

(Preliminary Discharge Operation)

Hereinafter, the operation method of the preliminary ejection mechanism 42 will be described, and the operation effects obtained by the preliminary ejection mechanism 42, the preliminary ejection surface cleaning unit (cleaning apparatus) 100, and the cleaning method will be referred to the drawings. To describe.

After applying a resist on the preliminary ejection surface 81, the squeegee 110 of the preliminary ejection surface cleaning unit 100 mounted on the standby portion 91 is disposed at the height of the preliminary ejection surface 81. For this reason, the preliminary discharge surface cleaning unit 100 is arrange | positioned at the washing | cleaning start position on the preliminary discharge surface 81 (refer FIG. 1).

Subsequently, by moving the preliminary ejection surface cleaning unit 100 through the arm part 101, a plurality of squeegees 110 are slid onto the preliminary ejection surface 81, and a resist applied onto the preliminary ejection surface 81. Scrape off (R).

At this time, the preliminary discharge surface cleaning unit 100 discharges the cleaning liquid from the discharge port 102 to the surface on the sliding direction side of the squeegee 110. This cleaning liquid (thinner) can dilute the resist R applied on the preliminary ejection surface 81, and can improve the removability of the resist R from the preliminary ejection surface 81. In this way, the resist R can be satisfactorily scraped from the preliminary ejection surface 81 by the squeegee 110 sliding on the preliminary ejection surface 81 supplied with the cleaning liquid.

Specifically, the preliminary ejection surface cleaning unit 100 supplies the cleaning liquid from the first ejection opening 102a on the preliminary ejection surface 81 on the front side in the sliding direction of the first squeegee 110a, thereby diluting the resist ( R) is scraped off by the first squeegee 110a.

Therefore, the rough cleaning process of the preliminary discharge surface 81 can be performed with the 1st squeegee 110a.

The preliminary ejection surface cleaning unit 100 supplies the cleaning liquid from the second ejection opening 102b toward the front of the sliding direction of the second squeegee 110b on the preliminary ejection surface 81 through which the first squeegee 110a has passed. The diluted resist R is scraped off by the second squeegee 110b. Therefore, this washing | cleaning process of the preliminary discharge surface 81 can be performed with the 2nd squeegee 110b.

In addition, in this embodiment, the control part 140 adjusts the washing | cleaning liquid supply means 106 so that the same quantity of washing | cleaning liquid may be discharged from the said 1st discharge port 102a and the 2nd discharge port 102b.

The preliminary ejection surface cleaning unit 100 slides the final squeegee 110c on the preliminary ejection surface 81 through which the second squeegee 110b has passed. For this reason, the residue (washing liquid and resist R) of the washing | cleaning process in the 1st squeegee 110a and the 2nd squeegee 110b can be scraped off, and high cleaning property can be obtained.

These squeegee 110 (110a, 110b, 110c), as shown in Fig. 3, the squeegee head in a direction in which the longitudinal direction of the contact end with the preliminary discharge surface 81 is oriented obliquely with respect to the sliding direction of the squeegee 110. It is supported by the part 105. Therefore, as shown in FIG. 7A, the resist R scraped off by the squeegee 110 is accommodated in the side discharge part 93 pushed back to the sliding direction back in the longitudinal direction of the squeegee 110, and the side discharge is carried out. The resist can be satisfactorily discharged by the suction recovery mechanism 95 formed in the section 93.

The preliminary ejection surface cleaning unit 100 passes the drying part 120 on the preliminary ejection surface 81 through which the final squeegee 110c has passed. The drying unit 120 performs a drying process on the preliminary ejection surface 81 by ejecting thin flat air on the preliminary ejection surface 81. For this reason, the washing | cleaning liquid on the preliminary discharge surface 81 can be dried.

The preliminary ejection surface cleaning unit 100 passes the suction part 130 on the preliminary ejection surface 81 following the drying unit 120. The suction unit 130 can suck the resist R remaining on the preliminary discharge surface 81. In addition, the suction part 130 can suck not only the resist R which remains, but also the foreign material (dust etc.) which generate | occur | produced on the board | substrate by the drying process by the said drying part 120.

Therefore, the preliminary ejection surface cleaning unit 100 can satisfactorily remove the resist R applied on the preliminary ejection surface 81.

The resist R which is not accommodated in the side discharge part 93 and moved to the cleaning end position of the preliminary discharge surface 81 by the squeegee 110 is accommodated in the front discharge part 92, and the front discharge part It is discharged satisfactorily by the suction recovery mechanism 95 formed in the 92.

When the preliminary ejection surface cleaning unit 100 reaches the front ejection section 92, the cleaning process of the preliminary ejection surface 81 ends (see FIG. 1).

After completion of the cleaning process, the preliminary ejection mechanism 42 mounts the preliminary ejection surface cleaning unit 100 on the standby part 91. By the above flow, the washing | cleaning process of the preliminary discharge surface 81 in the preliminary discharge surface cleaning unit 100 is complete | finished. In addition, you may perform the washing process of the squeegee 110 by using the said squeegee cleaning mechanism 91 with respect to the preliminary discharge surface washing unit 100 mounted in the mounting part 91a as needed. For this reason, a squeegee can be kept in a favorable state, and the cleaning quality on a preliminary discharge surface can be stabilized.

By the way, the squeegee 110 slides on the preliminary ejection surface 81, and abrasion occurs over time. As for the preliminary discharge surface cleaning unit 100 which concerns on this embodiment, as shown in FIG. 6, the squeegee head part 105 which hold | maintains the squeegee 110 is a longitudinal direction of the squeegee 110 by the cross roller bearing 150. As shown in FIG. You can swing freely about.

For this reason, since the squeegee 110 moves along the preliminary ejection surface 81 even when abrasion occurs in the squeegee 110, the squeegee 110 can be satisfactorily slid with respect to the preliminary ejection surface 81. In this way, since the squeegee 110 is always in contact with the preliminary ejection surface 81 in a constant state, the preliminary ejection surface cleaning unit 100 can provide stable cleaning property.

Thus, after the cleaning process of the preliminary discharge surface 81 by the preliminary discharge surface cleaning unit 100 is complete | finished, when the next board | substrate S is conveyed, the nozzle 32 will be moved by a moving mechanism as shown in FIG. Move to a predetermined position. Thus, by repeating the application | coating operation | movement which apply | coats the resist R to the board | substrate S, and preliminary discharge operation | movement, the high quality resist R is formed in the board | substrate S. FIG.

As described above, according to the above embodiment, even when the preliminary ejection surface 81 is cleaned, a plurality of squeegees 110 are provided on the preliminary ejection surface 81 while supplying the cleaning liquid to the sliding front of the squeegee 110. By sliding, the preliminary discharge surface 81 can be cleaned satisfactorily. That is, in the preliminary ejection apparatus used for the preliminary ejection operation in the coating device, even in the configuration using the preliminary ejection surface 81 instead of the conventional priming roller, good cleaning can be performed.

The technical scope of this invention is not limited to the said embodiment, It can change suitably in the range which does not deviate from the meaning of this invention.

In the above embodiment, the discharge amount of the cleaning liquid is controlled by the controller 140 to discharge the same amount of the cleaning liquid from the first discharge port 102a and the second discharge port 102b. However, the present invention is not limited to this.

For example, the amount of the cleaning liquid discharged from the discharge port 102 on the front side of the squeegee 110 of the squeegee 110, that is, the first discharge port 102a by the controller 140 is the largest. The amount of discharge of the cleaning liquid may be controlled so as to improve the cleaning performance of the preliminary ejection surface 81 at the leading side of the sliding direction in which a large number of resists are adhered, so that the cleaning process can be performed satisfactorily. .

Alternatively, the control unit 140 may control the discharge amount of the cleaning liquid so that the amount of the cleaning liquid discharged from the discharge port 102 in the sliding direction last end, that is, the second discharge port 102b is the smallest among the discharge ports 102. In this way, the cleaning liquid is not wasted by suppressing the amount of the cleaning liquid discharged from the rearmost side in the sliding direction where the amount of the resist is deposited, so that the amount of the cleaning liquid used can be suppressed.

 In addition, in the said embodiment, although the structure which provided three squeegee 110 was provided, the number of the squeegee 110 is not limited to this, You may be provided with two or four or more squeegee 110.

In particular, when four or more squeegees 110 are provided, the discharge holes 102 are formed corresponding to the squeegee 110 except for the rear end of the sliding direction. The discharge amount of the cleaning liquid may be controlled by the control unit 140 so that the discharge amount of the cleaning liquid gradually decreases from the 102 through the discharging port 102. In this way, since the discharge amount of the cleaning liquid can be suppressed toward the rear of the sliding direction of the squeegee 110 where the amount of the resist decreases, excessive discharge of the cleaning liquid can be prevented, and the amount of the cleaning liquid used can be suppressed. In addition, even when four or more squeegees 110 are provided, as described above, control is performed so that the amount of cleaning liquid discharged from the discharge port 102 at the end of the sliding direction is minimized, or the discharge port 102 at the head side of the sliding direction is performed. Control may be performed in which the amount of the washing liquid discharged from the greatest amount is increased.

In addition, in the said embodiment, although ten 1st discharge port 102a and the 2nd discharge port 102b were formed, respectively, this invention is not limited to this. For example, even if the number of the first discharge ports 102a corresponding to the first squeegee 110a at the head of the sliding direction is larger than the number of the second discharge ports 102b corresponding to the second squeegee 110b at the rear of the sliding direction. In this way, the amount of the cleaning liquid used can be suppressed by suppressing the amount of the cleaning liquid discharged from the rear side of the sliding direction in which the amount of the resist is small while improving the cleaning property at the leading side in the sliding direction in which a large amount of resist is attached.

In addition, in the said embodiment, although the three squeegee 110 was attached to the squeegee head part 105 in the state which inclined 45 degrees with respect to the preliminary discharge surface 81, three squeegee 110a, 110b, 110c The angles of attachment in) may be different in the range of 15 ° or more and 50 ° or less, respectively.

For example, the final squeegee which finishes the finishing process by setting the attachment angle of the 1st squeegee 110a of the sliding side leading side which needs high cleaning property to near 45 degrees by which the contact resistance with respect to the preliminary discharge surface 81 becomes large. The attachment angle of the 110c may be set near 20 ° at which the contact resistance with respect to the preliminary ejection surface 81 becomes small.

 In addition, in the said embodiment, although the air knife system was employ | adopted as a structure of the drying part 120, this invention is not limited to this, What is necessary is just a drying means for drying the preliminary discharge surface 81, for example, an upper surface You may use the downflow system which injects air from the inside. In addition, although the thing which consists of a suction pump as the suction part 130 was employ | adopted in the said embodiment, this invention is not limited to this, If it has a mechanism which can suck the resist which remains on the preliminary discharge surface 81, Can be used.

In addition, in the said embodiment, although the preliminary discharge surface 81 is comprised by one surface of the preliminary discharge plate 80, as a member which comprises the preliminary discharge surface 81, it is not limited to a plate-shaped member, At least one part is preliminary discharge. Various members can be used as long as the member has a plane functioning as the surface 81.

In the above embodiment, the preliminary ejection surface cleaning unit 100 is configured to slide the squeegee 110 on the preliminary ejection surface 81 by moving on the preliminary ejection plate 80, but the present invention is not limited thereto. For example, the squeegee 110 may be slid on the preliminary ejection surface 81 by moving the preliminary ejection plate 80 with respect to the preliminary ejection surface cleaning unit 100. That is, as long as the squeegee 110 can be relatively moved with respect to the preliminary discharge surface 81, various things can be employ | adopted.

In the said embodiment, although the conveyance mechanism 23 was arrange | positioned in the -Y direction side of each stage about the whole structure of the coating device 1, it is not limited to this. For example, the structure which arrange | positions the conveyance mechanism 23 to the + Y direction side of each stage may be sufficient. Moreover, as shown in FIG. 20, the said conveyance mechanism 23 (transfer machine 23a, the vacuum pad 23b, the rail 23c) is arrange | positioned at the -Y direction side of each stage, and the said conveyance mechanism at the + Y direction side. The conveyance mechanism 53 (conveyor 53a, the vacuum pad 53b, the rail 53c) of the same structure as 23 is arrange | positioned, and the board | substrate different from the conveyance mechanism 23 and the conveyance mechanism 53 is conveyed. You may configure so that it is possible. For example, as shown to the same figure, the conveyance mechanism 23 is made to convey the board | substrate S1, and the conveyance mechanism 53 is made to convey the board | substrate S2.

In this case, since the board | substrate can be conveyed alternately by the conveyance mechanism 23 and the conveyance mechanism 53, throughput will improve. In addition, when conveying the board | substrate which has about half the area of the said board | substrates S, S1, S2, the conveyance mechanism 23 is hold | maintained by the conveyance mechanism 23 and the conveyance mechanism 53, respectively one by one. The two substrates can be simultaneously transported by translating the transport mechanism 53 in the + X direction. Such a configuration can improve the throughput.

R: resist
1: coating device
42: preliminary ejection mechanism (preliminary ejection apparatus)
81: spare discharge surface
100: preliminary discharge surface cleaning unit (cleaning device)
102: discharge port
102a: first discharge port (discharge port)
102b: second discharge port (discharge port)
110: squeegee
110a: first squeegee (squeegee)
110b: second squeegee (squeegee)
110c: Final Squeegee (Squeegee)
120: drying unit (drying mechanism)
130: suction unit (suction mechanism)
140: control unit

Claims (17)

A preliminary ejection surface to which a liquid body is applied in a preliminary ejection operation in the coating device,
A squeegee for scraping the liquid body by sliding on the preliminary ejection surface, and a cleaning device for supporting the longitudinal direction of the contact end with the preliminary ejection surface at an angle toward the sliding direction;
And a discharge unit for discharging the liquid body spilled out to the side in the longitudinal direction of the preliminary discharge surface by sliding the squeegee. The method of claim 1,
And the discharge portion has a side groove portion formed on the side of the preliminary discharge surface and extending in the sliding direction. A preliminary ejection surface to which a liquid body is applied in a preliminary ejection operation in the coating device,
A squeegee for scraping the liquid body by sliding on the preliminary ejection surface, and a cleaning device for supporting the longitudinal direction of the contact end with the preliminary ejection surface at an angle toward the sliding direction;
And a discharge unit for discharging the liquid body moved to the front of the squeegee by the sliding operation of the squeegee. The method of claim 1,
And a suction recovery mechanism for suctioning the liquid body to the discharge part. The method of claim 4, wherein
And a suction port connected to the suction recovery mechanism, and an inclined surface that descends toward the suction port. The method of claim 5, wherein
And a plurality of regions having the suction port and the slope portion corresponding to the suction port formed in the discharge part formed on the side of the preliminary discharge surface, arranged along the sliding direction. The method of claim 1,
The preliminary ejection apparatus characterized by the above-mentioned. The method of claim 7, wherein
The preliminary ejection apparatus according to claim 1, wherein the atmospheric portion is formed behind the preliminary ejection surface in the sliding direction. The method of claim 7, wherein
And the standby portion is formed at a position lower than the preliminary ejection surface and has a mounting surface for mounting the cleaning device. The method of claim 7, wherein
And a squeegee cleaning mechanism for removing the liquid body attached to the squeegee in the atmospheric portion. 11. The method of claim 10,
And the squeegee cleaning mechanism is a concave-convex structure formed on the mounting surface. The preliminary discharge apparatus in any one of Claims 1-11 is provided, The coating apparatus characterized by the above-mentioned. As a preliminary ejection method prior to the application | coating operation | movement in a coating device,
Applying a liquid to the preliminary discharge surface;
Sliding the plurality of squeegee on the preliminary ejection surface to scrape the liquid body,
In the step of sliding the squeegee, the squeegee is slid in a longitudinal direction of the contact end with the preliminary ejection surface obliquely with respect to the sliding direction, so that the liquid body on the preliminary ejection surface is the preliminary ejection surface. The preliminary ejection method characterized by discharging to the side in the longitudinal direction of the. As a preliminary ejection method prior to the application | coating operation | movement in a coating device,
Applying a liquid to the preliminary discharge surface;
Sliding the plurality of squeegee on the preliminary ejection surface to scrape the liquid body,
In the step of sliding the squeegee, the squeegee is slid in a posture in which the longitudinal direction of the contact end with the preliminary ejection surface is inclined with respect to the sliding direction, and the preliminary ejection of the liquid body recovered by the squeegee is performed. And discharging to the front in the sliding direction of the surface. The method according to claim 13 or 14,
And sliding the squeegee to a standby position formed on the side of the preliminary discharge surface, and removing the liquid body attached to the squeegee at the standby position. The preliminary ejection apparatus according to claim 1, further comprising a cleaning liquid supply unit having a discharge port for discharging the cleaning liquid toward the front of the sliding direction of the squeegee. 17. The method of claim 16,
A preliminary ejection apparatus, characterized in that the ejection opening is formed in correspondence with the other squeegee except for the squeegee located at least in the rear end of the plurality of squeegee.

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