KR101128930B1 - 피세정물의 세정방법 및 그 장치 - Google Patents

피세정물의 세정방법 및 그 장치 Download PDF

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Publication number
KR101128930B1
KR101128930B1 KR1020067023153A KR20067023153A KR101128930B1 KR 101128930 B1 KR101128930 B1 KR 101128930B1 KR 1020067023153 A KR1020067023153 A KR 1020067023153A KR 20067023153 A KR20067023153 A KR 20067023153A KR 101128930 B1 KR101128930 B1 KR 101128930B1
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KR
South Korea
Prior art keywords
cleaning
cleaned
liquid
housing
cleaning liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020067023153A
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English (en)
Korean (ko)
Other versions
KR20070007181A (ko
Inventor
마사히데 우치노
Original Assignee
쟈판휘루도가부시키가이샤
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Publication date
Application filed by 쟈판휘루도가부시키가이샤 filed Critical 쟈판휘루도가부시키가이샤
Publication of KR20070007181A publication Critical patent/KR20070007181A/ko
Application granted granted Critical
Publication of KR101128930B1 publication Critical patent/KR101128930B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/045—Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
KR1020067023153A 2004-05-11 2005-04-27 피세정물의 세정방법 및 그 장치 Expired - Fee Related KR101128930B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00141562 2004-05-11
JP2004141562 2004-05-11
JP2004252505A JP4040037B2 (ja) 2004-05-11 2004-08-31 被洗浄物の洗浄方法及びその装置
JPJP-P-2004-00252505 2004-08-31
PCT/JP2005/008011 WO2005107968A1 (ja) 2004-05-11 2005-04-27 被洗浄物の洗浄方法及びその装置

Publications (2)

Publication Number Publication Date
KR20070007181A KR20070007181A (ko) 2007-01-12
KR101128930B1 true KR101128930B1 (ko) 2012-03-27

Family

ID=35320092

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067023153A Expired - Fee Related KR101128930B1 (ko) 2004-05-11 2005-04-27 피세정물의 세정방법 및 그 장치

Country Status (5)

Country Link
US (1) US20070215177A1 (enExample)
JP (1) JP4040037B2 (enExample)
KR (1) KR101128930B1 (enExample)
CN (1) CN1950158B (enExample)
WO (1) WO2005107968A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080107217A (ko) * 2007-06-05 2008-12-10 삼성전자주식회사 잉크젯 프린터의 노즐칩 세척장치 및 그것을 구비한 잉크젯프린터
DE102011075172A1 (de) * 2011-05-03 2012-11-08 Krones Aktiengesellschaft Sperrwassersystem
KR101311323B1 (ko) * 2012-02-24 2013-09-25 (주)범용테크놀러지 트레이와 다이 세정장치
CN104485306B (zh) * 2014-12-26 2018-04-27 合肥彩虹蓝光科技有限公司 一种led清洗篮垫块
CN105887105B (zh) * 2016-04-08 2018-10-09 北方夜视技术股份有限公司 一种用于扫描条纹管的超薄金属栅网片的清洁方法
JP2017202469A (ja) * 2016-05-13 2017-11-16 ジャパン・フィールド株式会社 被洗浄物の洗浄方法及びその装置
JP6351195B1 (ja) * 2017-10-30 2018-07-04 ジャパン・フィールド株式会社 被洗浄物の洗浄装置
KR102046973B1 (ko) * 2018-04-10 2019-12-02 세메스 주식회사 기판의 세정방법 및 세정장치
WO2020150029A1 (en) * 2019-01-20 2020-07-23 Applied Materials, Inc. Sonic cleaning system and method of sonic cleaning a workpiece
JP7049298B2 (ja) * 2019-09-27 2022-04-06 株式会社桜川ポンプ製作所 被洗浄物の洗浄装置及びこれを用いた被洗浄物の洗浄方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4763392A (en) * 1987-04-10 1988-08-16 International Marketing Inc. Method of manufacturing a totally coated tire rim
US20020135730A1 (en) * 2000-07-06 2002-09-26 Yoichi Ono Cleaning method and method for manufacturing liquid crystal device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3041212A (en) * 1958-10-27 1962-06-26 Welded Products Company Egg washing apparatus and method
US3497445A (en) * 1967-07-28 1970-02-24 Economics Lab Apparatus for cleaning and detarnishing silverware
JP2784157B2 (ja) * 1995-06-13 1998-08-06 ジャパン・フィールド株式会社 洗浄装置
US6616774B2 (en) * 1997-12-26 2003-09-09 Spc Electronics Wafer cleaning device and tray for use in wafer cleaning device
JP2001246335A (ja) * 2000-03-08 2001-09-11 Japan Field Kk 洗浄装置
JP4027072B2 (ja) * 2001-10-18 2007-12-26 松下電器産業株式会社 減圧プラズマ処理装置及びその方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4763392A (en) * 1987-04-10 1988-08-16 International Marketing Inc. Method of manufacturing a totally coated tire rim
US20020135730A1 (en) * 2000-07-06 2002-09-26 Yoichi Ono Cleaning method and method for manufacturing liquid crystal device

Also Published As

Publication number Publication date
US20070215177A1 (en) 2007-09-20
CN1950158B (zh) 2010-05-05
WO2005107968A1 (ja) 2005-11-17
JP2005349380A (ja) 2005-12-22
JP4040037B2 (ja) 2008-01-30
KR20070007181A (ko) 2007-01-12
CN1950158A (zh) 2007-04-18

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