KR101127656B1 - 낮은 히스테리시스를 제공하도록 장력이 가해진 상태의 비교적 두꺼운 평면 다이어프램을 갖는 전기 용량식 압력계 - Google Patents

낮은 히스테리시스를 제공하도록 장력이 가해진 상태의 비교적 두꺼운 평면 다이어프램을 갖는 전기 용량식 압력계 Download PDF

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KR101127656B1
KR101127656B1 KR1020057017770A KR20057017770A KR101127656B1 KR 101127656 B1 KR101127656 B1 KR 101127656B1 KR 1020057017770 A KR1020057017770 A KR 1020057017770A KR 20057017770 A KR20057017770 A KR 20057017770A KR 101127656 B1 KR101127656 B1 KR 101127656B1
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South Korea
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diaphragm
front surface
body structure
electrode
seam
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Korean (ko)
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KR20050113661A (ko
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로버트 제이 페란
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호리바 스텍, 인크.
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
KR1020057017770A 2003-03-22 2004-03-17 낮은 히스테리시스를 제공하도록 장력이 가해진 상태의 비교적 두꺼운 평면 다이어프램을 갖는 전기 용량식 압력계 Expired - Fee Related KR101127656B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US45697503P 2003-03-22 2003-03-22
US60/456,975 2003-03-22
US10/249,238 US6837112B2 (en) 2003-03-22 2003-03-25 Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US10/249,238 2003-03-25
PCT/US2004/008351 WO2004086457A2 (en) 2003-03-22 2004-03-17 Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis

Publications (2)

Publication Number Publication Date
KR20050113661A KR20050113661A (ko) 2005-12-02
KR101127656B1 true KR101127656B1 (ko) 2012-03-23

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KR1020057017770A Expired - Fee Related KR101127656B1 (ko) 2003-03-22 2004-03-17 낮은 히스테리시스를 제공하도록 장력이 가해진 상태의 비교적 두꺼운 평면 다이어프램을 갖는 전기 용량식 압력계

Country Status (6)

Country Link
US (1) US6837112B2 (enExample)
EP (1) EP1606601A4 (enExample)
JP (2) JP5179752B2 (enExample)
KR (1) KR101127656B1 (enExample)
TW (1) TWI341386B (enExample)
WO (1) WO2004086457A2 (enExample)

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US7438030B1 (en) 2005-08-26 2008-10-21 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Actuator operated microvalves
US7706995B2 (en) * 2007-04-16 2010-04-27 Mks Instr Inc Capacitance manometers and methods relating to auto-drift correction
JP5260155B2 (ja) * 2008-06-16 2013-08-14 株式会社堀場エステック 静電容量型圧力センサ及びその製造方法
WO2011033396A2 (en) † 2009-09-18 2011-03-24 Minilogic Device Corporation Ltd. Electronic smoke
US10420374B2 (en) 2009-09-18 2019-09-24 Altria Client Services Llc Electronic smoke apparatus
US8997576B2 (en) 2013-01-18 2015-04-07 Reno Technologies, Inc. Method and system for monitoring gas pressure for reference cavity of capacitance diaphragm gauge
US8997548B2 (en) 2013-01-29 2015-04-07 Reno Technologies, Inc. Apparatus and method for automatic detection of diaphragm coating or surface contamination for capacitance diaphragm gauges
US8862420B2 (en) 2013-02-05 2014-10-14 Reno Sub-Sustems Canada Incorporated Multi-axis tilt sensor for correcting gravitational effects on the measurement of pressure by a capacitance diaphragm gauge
US8965725B2 (en) 2013-02-05 2015-02-24 Reno Technologies, Inc. Automatic calibration adjustment of capacitance diaphragm gauges to compensate for errors due to changes in atmospheric pressure
US8997575B2 (en) 2013-02-13 2015-04-07 Reno Technologies, Inc. Method and apparatus for damping diaphragm vibration in capacitance diaphragm gauges
US9562820B2 (en) 2013-02-28 2017-02-07 Mks Instruments, Inc. Pressure sensor with real time health monitoring and compensation
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6059641B2 (ja) * 2013-11-25 2017-01-11 株式会社堀場エステック 静電容量型圧力センサ
US9897503B2 (en) 2013-11-25 2018-02-20 Horiba Stec, Co., Ltd. Capacitive pressure sensor
JP6059642B2 (ja) * 2013-11-25 2017-01-11 株式会社堀場エステック 静電容量型圧力センサ
WO2015076414A1 (ja) * 2013-11-25 2015-05-28 株式会社堀場エステック 静電容量型圧力センサ
DE102014012918B4 (de) 2014-09-05 2019-01-03 Heinz Plöchinger Dual-Kapazitäts-Manometer mit kleinem Messvolumen
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
KR102749090B1 (ko) 2021-11-24 2025-01-06 주식회사 성창오토텍 다층 여재 및 다층 구조의 케미컬 복합 필터
DE102022102437A1 (de) 2022-02-02 2023-08-03 Heinz Plöchinger Korrekturverfahren für Dual-Kapazitäts-Manometer
US11467051B1 (en) 2022-04-11 2022-10-11 Heinz Plöchinger Method for correcting a dual capacitance pressure sensor
CN115060410B (zh) * 2022-06-09 2023-09-26 浙江大学 一种液力平滑的微压平膜压力传感阵列及制备工艺

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US5656780A (en) 1996-03-28 1997-08-12 Kavlico Corporation Capacitive pressure transducer with an integrally formed front housing and flexible diaphragm
US6517438B2 (en) 1997-01-30 2003-02-11 Kabushiki Kaisha Sega Enterprises Input device, game device, and method and recording medium for same

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US4542435A (en) 1984-03-29 1985-09-17 General Signal Corporation Pressure transducer and mounting
US5656780A (en) 1996-03-28 1997-08-12 Kavlico Corporation Capacitive pressure transducer with an integrally formed front housing and flexible diaphragm
US6517438B2 (en) 1997-01-30 2003-02-11 Kabushiki Kaisha Sega Enterprises Input device, game device, and method and recording medium for same

Also Published As

Publication number Publication date
JP5457404B2 (ja) 2014-04-02
EP1606601A4 (en) 2007-08-08
WO2004086457A3 (en) 2005-03-24
JP5179752B2 (ja) 2013-04-10
KR20050113661A (ko) 2005-12-02
US6837112B2 (en) 2005-01-04
WO2004086457A2 (en) 2004-10-07
TW200508582A (en) 2005-03-01
TWI341386B (en) 2011-05-01
JP2011237448A (ja) 2011-11-24
US20040187589A1 (en) 2004-09-30
EP1606601A2 (en) 2005-12-21
JP2006521553A (ja) 2006-09-21

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