KR101055564B1 - 전해 연마 공정에서 금속 리세스를 감소시키기 위한 더미구조들 - Google Patents

전해 연마 공정에서 금속 리세스를 감소시키기 위한 더미구조들 Download PDF

Info

Publication number
KR101055564B1
KR101055564B1 KR1020047002614A KR20047002614A KR101055564B1 KR 101055564 B1 KR101055564 B1 KR 101055564B1 KR 1020047002614 A KR1020047002614 A KR 1020047002614A KR 20047002614 A KR20047002614 A KR 20047002614A KR 101055564 B1 KR101055564 B1 KR 101055564B1
Authority
KR
South Korea
Prior art keywords
dummy structures
metal layer
trenches
regions
dummy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020047002614A
Other languages
English (en)
Korean (ko)
Other versions
KR20040027990A (ko
Inventor
흐이 왕
페이홀 이
Original Assignee
에이씨엠 리서치, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에이씨엠 리서치, 인코포레이티드 filed Critical 에이씨엠 리서치, 인코포레이티드
Publication of KR20040027990A publication Critical patent/KR20040027990A/ko
Application granted granted Critical
Publication of KR101055564B1 publication Critical patent/KR101055564B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C25D5/022—Electroplating of selected surface areas using masking means
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/12—Semiconductors
    • C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/7684—Smoothing; Planarisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/585—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries comprising conductive layers or plates or strips or rods or rings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/528—Layout of the interconnection structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
KR1020047002614A 2001-08-23 2002-08-16 전해 연마 공정에서 금속 리세스를 감소시키기 위한 더미구조들 Expired - Fee Related KR101055564B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US31461701P 2001-08-23 2001-08-23
US60/314,617 2001-08-23
PCT/US2002/026309 WO2003019641A1 (en) 2001-08-23 2002-08-16 Dummy structures to reduce metal recess in electropolishing process

Publications (2)

Publication Number Publication Date
KR20040027990A KR20040027990A (ko) 2004-04-01
KR101055564B1 true KR101055564B1 (ko) 2011-08-08

Family

ID=23220680

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020047002614A Expired - Fee Related KR101055564B1 (ko) 2001-08-23 2002-08-16 전해 연마 공정에서 금속 리세스를 감소시키기 위한 더미구조들

Country Status (8)

Country Link
US (1) US20040253810A1 (enExample)
EP (1) EP1419523A4 (enExample)
JP (1) JP2005501412A (enExample)
KR (1) KR101055564B1 (enExample)
CN (1) CN100524644C (enExample)
CA (1) CA2456301A1 (enExample)
TW (1) TW573324B (enExample)
WO (1) WO2003019641A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1505653A1 (en) * 2003-08-04 2005-02-09 STMicroelectronics S.r.l. Layout method for dummy structures and corresponding integrated circuit
US20050045993A1 (en) * 2003-08-28 2005-03-03 Sanyo Electric Co., Ltd. Semiconductor device with concave patterns in dielectric film and manufacturing method thereof
US7074710B2 (en) * 2004-11-03 2006-07-11 Lsi Logic Corporation Method of wafer patterning for reducing edge exclusion zone
JP5401135B2 (ja) * 2009-03-18 2014-01-29 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画方法、荷電粒子ビーム描画装置及びプログラム
KR101067207B1 (ko) 2009-04-16 2011-09-22 삼성전기주식회사 트렌치 기판 및 그 제조방법
US20130075268A1 (en) * 2011-09-28 2013-03-28 Micron Technology, Inc. Methods of Forming Through-Substrate Vias
CN103692293B (zh) * 2012-09-27 2018-01-16 盛美半导体设备（上海）有限公司 无应力抛光装置及抛光方法
US8627243B1 (en) * 2012-10-12 2014-01-07 Taiwan Semiconductor Manufacturing Company, Ltd. Methods for optimizing conductor patterns for ECP and CMP in semiconductor processing
US9496172B2 (en) 2012-11-27 2016-11-15 Acm Research (Shanghai) Inc. Method for forming interconnection structures
US11328992B2 (en) * 2017-09-27 2022-05-10 Intel Corporation Integrated circuit components with dummy structures
US20230335534A1 (en) * 2022-04-13 2023-10-19 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated Circuit Packages and Methods of Forming the Same
JP2023183338A (ja) * 2022-06-15 2023-12-27 日本メクトロン株式会社 導電パターン形成方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6232231B1 (en) 1998-08-31 2001-05-15 Cypress Semiconductor Corporation Planarized semiconductor interconnect topography and method for polishing a metal layer to form interconnect
US6309956B1 (en) 1997-09-30 2001-10-30 Intel Corporation Fabricating low K dielectric interconnect systems by using dummy structures to enhance process
US20020153097A1 (en) 2001-04-23 2002-10-24 Nutool, Inc. Electroetching process and system

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59182541A (ja) * 1983-04-01 1984-10-17 Hitachi Ltd 半導体装置の製造方法
US5677244A (en) * 1996-05-20 1997-10-14 Motorola, Inc. Method of alloying an interconnect structure with copper
US5885856A (en) * 1996-08-21 1999-03-23 Motorola, Inc. Integrated circuit having a dummy structure and method of making
US6017437A (en) * 1997-08-22 2000-01-25 Cutek Research, Inc. Process chamber and method for depositing and/or removing material on a substrate
US6052375A (en) * 1997-11-26 2000-04-18 International Business Machines Corporation High speed internetworking traffic scaler and shaper
TW396524B (en) * 1998-06-26 2000-07-01 United Microelectronics Corp A method for fabricating dual damascene
US6395152B1 (en) * 1998-07-09 2002-05-28 Acm Research, Inc. Methods and apparatus for electropolishing metal interconnections on semiconductor devices
US6709565B2 (en) * 1998-10-26 2004-03-23 Novellus Systems, Inc. Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation
CN1264162A (zh) * 1999-02-13 2000-08-23 国际商业机器公司 用于铝化学抛光的虚拟图形
US6259115B1 (en) * 1999-03-04 2001-07-10 Advanced Micro Devices, Inc. Dummy patterning for semiconductor manufacturing processes
US6239023B1 (en) * 1999-05-27 2001-05-29 Taiwan Semiconductor Manufacturing Company Method to reduce the damages of copper lines
US6459156B1 (en) * 1999-12-22 2002-10-01 Motorola, Inc. Semiconductor device, a process for a semiconductor device, and a process for making a masking database
JP2002158278A (ja) * 2000-11-20 2002-05-31 Hitachi Ltd 半導体装置およびその製造方法ならびに設計方法
US6486066B2 (en) * 2001-02-02 2002-11-26 Matrix Semiconductor, Inc. Method of generating integrated circuit feature layout for improved chemical mechanical polishing

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6309956B1 (en) 1997-09-30 2001-10-30 Intel Corporation Fabricating low K dielectric interconnect systems by using dummy structures to enhance process
US6232231B1 (en) 1998-08-31 2001-05-15 Cypress Semiconductor Corporation Planarized semiconductor interconnect topography and method for polishing a metal layer to form interconnect
US20020153097A1 (en) 2001-04-23 2002-10-24 Nutool, Inc. Electroetching process and system

Also Published As

Publication number Publication date
JP2005501412A (ja) 2005-01-13
TW573324B (en) 2004-01-21
WO2003019641A1 (en) 2003-03-06
KR20040027990A (ko) 2004-04-01
CA2456301A1 (en) 2003-03-06
EP1419523A1 (en) 2004-05-19
CN1547763A (zh) 2004-11-17
EP1419523A4 (en) 2007-12-19
CN100524644C (zh) 2009-08-05
US20040253810A1 (en) 2004-12-16

Similar Documents

Publication Publication Date Title
US6946066B2 (en) Multi step electrodeposition process for reducing defects and minimizing film thickness
US6867136B2 (en) Method for electrochemically processing a workpiece
US6653229B2 (en) Integrated circuit with a recessed conductive layer
US6815354B2 (en) Method and structure for thru-mask contact electrodeposition
US20040087148A1 (en) Copper interconnect by immersion/electroless plating in dual damascene process
US7208404B2 (en) Method to reduce Rs pattern dependence effect
US6489683B1 (en) Variable grain size in conductors for semiconductor vias and trenches
EP2100319B1 (en) Formation of vertical devices by electroplating
KR101055564B1 (ko) 전해 연마 공정에서 금속 리세스를 감소시키기 위한 더미구조들
US6534865B1 (en) Method of enhanced fill of vias and trenches
US6297157B1 (en) Time ramped method for plating of high aspect ratio semiconductor vias and channels
US6541379B2 (en) Wiring forming method for semiconductor device
US6368965B1 (en) Method for low stress plating of semiconductor vias and channels
US6288448B1 (en) Semiconductor interconnect barrier of boron silicon nitride and manufacturing method therefor
US7101471B2 (en) Method for planar material removal technique using multi-phase process environment
US6797144B2 (en) Method for reducing surface defects in an electrodeposition process
TWI576960B (zh) 無電鍍形成的半導體裝置的接觸元件及用減少的剪力移除過多的材料
US20040217013A1 (en) Apparatus and method for electropolishing a metal wiring layer on a semiconductor device
KR20050077860A (ko) 반도체 장치의 구리 배선 형성 방법
KR20050045271A (ko) 선택적 도금 공정을 이용한 금속패턴 형성방법
KR20050001188A (ko) 다마신을 이용한 반도체소자의 금속배선 형성방법

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

R15-X000 Change to inventor requested

St.27 status event code: A-3-3-R10-R15-oth-X000

R16-X000 Change to inventor recorded

St.27 status event code: A-3-3-R10-R16-oth-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20140803

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20140803

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000