KR101026551B1 - 압전구동 액적 디스펜싱 헤드 - Google Patents
압전구동 액적 디스펜싱 헤드 Download PDFInfo
- Publication number
- KR101026551B1 KR101026551B1 KR1020080118219A KR20080118219A KR101026551B1 KR 101026551 B1 KR101026551 B1 KR 101026551B1 KR 1020080118219 A KR1020080118219 A KR 1020080118219A KR 20080118219 A KR20080118219 A KR 20080118219A KR 101026551 B1 KR101026551 B1 KR 101026551B1
- Authority
- KR
- South Korea
- Prior art keywords
- diaphragm
- dispensing head
- piezoelectric actuator
- liquid
- piezoelectric
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/02—Ink jet characterised by the jet generation process generating a continuous ink jet
- B41J2/03—Ink jet characterised by the jet generation process generating a continuous ink jet by pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/07—Ink jet characterised by jet control
- B41J2/11—Ink jet characterised by jet control for ink spray
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J23/00—Power drives for actions or mechanisms
- B41J23/20—Fluid-pressure power drives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
- B41J29/393—Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
Claims (4)
- 액체 유입공(110)과 액체 유입공(110)을 통해 유입된 액체가 충진되는 챔버(130) 및 액적이 토출되는 노즐(120)이 구비된 커버(100)와, 상기 커버(100)의 액체 유입공(110)에 연결되는 유입관(200)과, 상기 커버(100)의 상부에 배치되는 다이어프램(300)과, 상기 다이어프램(300)의 상부에 밀착되며 베이스(600)를 통해 지지되게 배치되는 적층형 압전 액추에이터(400)로 구성되는 압전구동 액적 디스펜싱 헤드에 있어서,상기 다이어프램(300)은 상부면에 누름부(310)가 돌출 형성되고,상기 적층형 압전 액추에이터(400)는 상기 다이어프램(300)의 누름부(310)와 나사결합되며,상기 액체 유입공(110)은 커버(100)의 양측에 각각 형성되고,상기 액체 유입공(110)과 상기 챔버(130) 사이에는 굴절형 굴절 유로(140)가 형성되되;상기 다이어프램(300)은 누름부(310)를 통해 전달되는 진동을 고루 분포시키기 위해 상부면이 중앙으로 갈수록 두께가 점차 증대되는 구조인 것을 특징으로 하는 압전구동 액적 디스펜싱 헤드.
- 제 1항에 있어서,상기 다이어프램(300)은 누름부(310)와의 경계부위가 라운딩(R)된 것을 특징으로 하는 압전구동 액적 디스펜싱 헤드.
- 삭제
- 제 2항에 있어서,상기 다이어프램(300)은 내구성이 증대되고 체적변화가 증대되도록 저면에 동심원 형태로 적어도 1개 이상의 주름홈(320)이 형성된 것을 특징으로 하는 압전구동 액적 디스펜싱 헤드.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080118219A KR101026551B1 (ko) | 2008-04-03 | 2008-11-26 | 압전구동 액적 디스펜싱 헤드 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080031288 | 2008-04-03 | ||
KR1020080118219A KR101026551B1 (ko) | 2008-04-03 | 2008-11-26 | 압전구동 액적 디스펜싱 헤드 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20090105793A KR20090105793A (ko) | 2009-10-07 |
KR101026551B1 true KR101026551B1 (ko) | 2011-04-01 |
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Application Number | Title | Priority Date | Filing Date |
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KR1020080118219A KR101026551B1 (ko) | 2008-04-03 | 2008-11-26 | 압전구동 액적 디스펜싱 헤드 |
Country Status (1)
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KR (1) | KR101026551B1 (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10403476B2 (en) * | 2016-11-09 | 2019-09-03 | Lam Research Corporation | Active showerhead |
JP7122102B2 (ja) * | 2017-11-08 | 2022-08-19 | 東京エレクトロン株式会社 | ガス供給システム及びガス供給方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000033694A (ja) * | 1998-07-17 | 2000-02-02 | Max Co Ltd | インクジェットのヘッド機構 |
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- 2008-11-26 KR KR1020080118219A patent/KR101026551B1/ko active IP Right Grant
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000033694A (ja) * | 1998-07-17 | 2000-02-02 | Max Co Ltd | インクジェットのヘッド機構 |
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KR20090105793A (ko) | 2009-10-07 |
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