KR101023869B1 - 평판 표시 장치 마스크용 펠리클 첩부 장치 - Google Patents

평판 표시 장치 마스크용 펠리클 첩부 장치 Download PDF

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Publication number
KR101023869B1
KR101023869B1 KR1020040011262A KR20040011262A KR101023869B1 KR 101023869 B1 KR101023869 B1 KR 101023869B1 KR 1020040011262 A KR1020040011262 A KR 1020040011262A KR 20040011262 A KR20040011262 A KR 20040011262A KR 101023869 B1 KR101023869 B1 KR 101023869B1
Authority
KR
South Korea
Prior art keywords
mask
pellicle
door
stage
pressing plate
Prior art date
Application number
KR1020040011262A
Other languages
English (en)
Korean (ko)
Other versions
KR20050055060A (ko
Inventor
다카하시히데오
Original Assignee
마쓰시타 세이끼 가부시키 가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 마쓰시타 세이끼 가부시키 가이샤 filed Critical 마쓰시타 세이끼 가부시키 가이샤
Publication of KR20050055060A publication Critical patent/KR20050055060A/ko
Application granted granted Critical
Publication of KR101023869B1 publication Critical patent/KR101023869B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/20—Undercarriages with or without wheels
    • F16M11/24—Undercarriages with or without wheels changeable in height or length of legs, also for transport only, e.g. by means of tubes screwed into each other
    • F16M11/26—Undercarriages with or without wheels changeable in height or length of legs, also for transport only, e.g. by means of tubes screwed into each other by telescoping, with or without folding
    • F16M11/28—Undercarriages for supports with one single telescoping pillar
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/10—Adaptations for transmission by electrical cable

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Packaging Frangible Articles (AREA)
KR1020040011262A 2003-12-05 2004-02-20 평판 표시 장치 마스크용 펠리클 첩부 장치 KR101023869B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003406943A JP4354789B2 (ja) 2003-12-05 2003-12-05 Ｆｐｄマスク用ペリクル貼付装置
JPJP-P-2003-00406943 2003-12-05

Publications (2)

Publication Number Publication Date
KR20050055060A KR20050055060A (ko) 2005-06-10
KR101023869B1 true KR101023869B1 (ko) 2011-03-22

Family

ID=34729143

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040011262A KR101023869B1 (ko) 2003-12-05 2004-02-20 평판 표시 장치 마스크용 펠리클 첩부 장치

Country Status (3)

Country Link
JP (1) JP4354789B2 (ja)
KR (1) KR101023869B1 (ja)
TW (1) TWI291075B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4608638B2 (ja) * 2005-06-28 2011-01-12 レーザーテック株式会社 ペリクル装着装置、ペリクル装着方法及びパターン基板の製造方法
WO2009044483A1 (ja) * 2007-10-05 2009-04-09 Asahi Kasei Emd Corporation ペリクル貼付装置のペリクル加圧機構
KR101318147B1 (ko) * 2009-06-02 2013-10-15 마쓰시타 세이끼 가부시키 가이샤 가압체 및 펠리클 첩부 장치
JP2011158585A (ja) 2010-01-29 2011-08-18 Shin-Etsu Chemical Co Ltd ペリクルおよびペリクルの製造方法
JP5586560B2 (ja) * 2011-10-28 2014-09-10 信越化学工業株式会社 ペリクル収容容器
JP5586559B2 (ja) * 2011-10-28 2014-09-10 信越化学工業株式会社 ペリクル収容容器
KR102330182B1 (ko) * 2019-12-10 2021-11-23 (주) 고송이엔지 디스플레이 패널용 노광기의 포토 마스크 교환 구조

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05323583A (ja) * 1992-05-15 1993-12-07 Fujitsu Ltd ペリクル貼り付け装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05323583A (ja) * 1992-05-15 1993-12-07 Fujitsu Ltd ペリクル貼り付け装置

Also Published As

Publication number Publication date
TW200519525A (en) 2005-06-16
TWI291075B (en) 2007-12-11
JP4354789B2 (ja) 2009-10-28
KR20050055060A (ko) 2005-06-10
JP2005165170A (ja) 2005-06-23

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