KR100952524B1 - Substrate receiving unit - Google Patents

Abstract

This invention relates to providing the board | substrate positioning apparatus which can carry out positioning of a board | substrate by making the space around a board | substrate extremely small in the container which accommodates board | substrates, such as a load lock chamber. The substrate alignment device includes a pair of first positioners 7 for pressing the pair of end surfaces S1 orthogonal to the conveyance direction of the substrate S, and a pair of end surfaces along the conveyance direction of the substrate S. And a pair of second positioners 8 for pressurizing (S2), and the first and second positioners 7 and 8 respectively include the cylinder mechanisms 71 and 81 and the pistons of the cylinder mechanisms 71 and 81, respectively. The pressurizers 70 and 80 pressurize the end faces S1 and S2 by advancing 74 and 84, and the first positioner 7 moves the pressurizer 70 by advancing of the piston 74. A driving force converting mechanism portion 72 is further provided to move between the retracted position for retracting out of the conveyance path of the substrate S and the pressurizable position where the substrate S can be pressed, and to move in the pressing direction from the pressurizable position.

Description

Board accommodating unit {SUBSTRATE RECEIVING UNIT}

TECHNICAL FIELD This invention relates to the board | substrate positioning apparatus which positions this board | substrate, and the board | substrate accommodation unit provided with this board | substrate alignment apparatus, when processing board | substrates, such as a glass substrate for flat panel display devices (FPD).

In the manufacturing process of the FPD, a vacuum processing apparatus for performing processing such as etching, ashing, and film formation in a vacuum state with respect to a glass substrate, wherein a plurality of so-called multichamber-type chambers for performing the processing are arranged. Vacuum processing apparatuses are used.

In such a vacuum processing apparatus, the rod which is a prevacuum vacuum chamber in the vacuum processing chamber through the opening which can be opened and closed by a gate valve so that it does not need to turn the inside of the vacuum processing chamber to normal pressure every time the load / unload of the substrate in the vacuum processing chamber is performed. The lock room is connected. The substrate before the processing is conveyed to the load lock chamber once before the transfer to the vacuum processing chamber by a transfer mechanism such as a transfer pick, and is transferred to the vacuum processing chamber after the load lock chamber is in the same vacuum state as the vacuum processing chamber. For this reason, in the load lock chamber, positioning of the substrate at a predetermined position is performed so that the transfer of the substrate to the processing position in the vacuum processing chamber by the transfer mechanism is performed accurately.

As a positioning device used for positioning of such a substrate, one having a pair of positioners capable of pressing the opposite edge portions of the substrate supported on the buffer in the load lock chamber, respectively, has been proposed (for example, See Patent Document 1). In this technique, each positioner includes a pair of rollers and a support for supporting these rollers, moves in a diagonal direction of the substrate, and presses the substrate in a state where the edges of the substrate are sandwiched by the pair of rollers. In this way, the substrate is aligned. In addition, each positioner can be retracted downward so as not to disturb the conveyance of a board | substrate.

[Patent Document 1] Japanese Unexamined Patent Publication No. 2000-306980

By the way, in recent years, LCD substrates tend to be enlarged, leading to the appearance of huge ones having a length of 2m, and when the chamber, such as a load lock chamber, is made larger as the conventional one, in accordance with the enlargement of the substrate, the device itself becomes remarkably large. It is aimed to minimize the space around the substrate in the chamber and to make the chamber extremely small. However, in the technique of the said patent document 1, since a pair of rollers are supported by the support body and comprised, it must become relatively large itself, Furthermore, since it moves in diagonal direction and up-down direction, that much Since space is required, there is a limit in miniaturization of the load lock chamber.

This invention is made | formed in view of such a situation, and is the board | substrate positioning apparatus which can perform positioning of a board | substrate by making the space around a board | substrate extremely small in the container which accommodates board | substrates, such as a load lock room, and this board | substrate alignment. An object of the present invention is to provide a substrate accommodating unit having a device.

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, this invention is a board | substrate alignment apparatus which conveys in the horizontal direction from the opening provided in the side wall of a container, and positions the rectangular-shaped board | substrate mounted in the board mounting part in the said container on the said board mounting part. WHEREIN: A pair of 1st press mechanism which presses a pair of 1st cross section orthogonal to the conveyance direction of a board | substrate, and a pair of 2nd press mechanism which presses a pair of 2nd cross section along the conveyance direction of a board | substrate. The first pressurizing mechanism and the second pressurizing mechanism each include a pressurizer for pressing the first end face and the second end face by driving of the drive mechanism and the drive mechanism, respectively, and the pair of first pressurization mechanisms. At least one of them is located between a retracted position where the pressurizer is retracted out of the transfer path of the substrate by the drive of the drive mechanism and a pressurizable position capable of pressing the substrate. And moving, and also provide a substrate alignment apparatus according to claim 1, further comprising a driving force conversion mechanism for moving in the pressing can be located in the pressing direction.

In the substrate positioning apparatus of the present invention, the drive mechanism is preferably provided outside the container. Moreover, the said drive force conversion mechanism part is provided above or below the conveyance path | route of a board | substrate, and is made to retract the pressurizer by the drive of the said drive mechanism in the state parallel to the said conveyance path above or below a conveyance path | route of a board | substrate. It is preferable to move the retracted position and the substrate between the pressurizable pressurizable positions and to move in the pressing direction from the pressurizable positions. Moreover, it is preferable that at least one of the said 1st 1st press mechanism drives the said drive mechanism horizontally and in the direction orthogonal to the conveyance direction of a board | substrate. In this case, at least one of the pair of first pressurizing mechanisms is a cylinder mechanism having a piston that retracts the drive mechanism horizontally and in a direction orthogonal to the conveying direction of the substrate, and the drive force converting mechanism portion includes: When the piston of the cylinder mechanism advances a predetermined stroke, the pressurizer in the retracted position is moved to the pressurizable position, and when the piston of the cylinder mechanism further advances the predetermined stroke, the pressurizer in the pressurizable position is pressurized direction The first end face is pressurized, and when the piston of the cylinder mechanism retracts a predetermined stroke in this state, the first end face is moved to the pressurizable position in the pressurized state, and If the piston is further retracted by the predetermined stroke, the To move the indenter into the retracted position is preferred. In this case, the driving force converting mechanism part includes a guide member fixed in the container, a main slide member which slides in the advancing direction of the piston along with the guide member at the same time as the piston is moved forward and backward. And a driven slide member that slides horizontally and in a direction orthogonal to the direction of movement of the driven slide member according to the guide member in accordance with the slide movement of a predetermined stroke of the driven slide member, and one end of the driven slide member. And a link member which is rotatably installed at the other end, and is rotatably installed at the other end, and rotates to fall and stand around the one end in accordance with the slide movement of a predetermined stroke of the main slide member. The link member falls and By rotating so as to rotate, the pressurizer is moved between the retracted position and the pressurizable position, and the driven slide member slides to move the pressurizer in the pressing direction and pressurization using the pressurizable position as the starting point and the end point. It is preferable to move in the direction opposite to the direction.

In the above-described substrate positioning device according to the present invention, the first pressing mechanism and the second pressing mechanism further include shock absorbing means for alleviating the impact when the pressurizer presses the first end face and the second end face. It is preferable.

Moreover, this invention is a board | substrate provided in the board | substrate provided in the said board | substrate accommodating part, the container which has an opening provided in the side wall, and has a board | substrate accommodating part which accommodates the board | substrate of a rectangular shape conveyed in the horizontal direction from the said opening. A substrate accommodating unit including a substrate mounting unit for mounting a substrate and a substrate alignment device for positioning a substrate mounted on the substrate mounting unit on the substrate mounting unit, wherein the substrate alignment device is orthogonal to the conveying direction of the substrate. A pair of first pressurizing mechanisms for pressing the pair of first end faces, and a pair of second pressurizing mechanisms for pressing the pair of second end faces along the conveying direction of the substrate; Each of the second pressurizing mechanisms includes a drive mechanism and a pressurizer for pressing the first end face and the second end face by driving the drive mechanism, and the pair of first pressurizations. At least one of the mechanisms is moved between the retracted position for retracting the pressurizer out of the transport path of the substrate and the pressurizable position capable of pressing the substrate by the drive of the drive mechanism, and moves in the pressing direction from the pressurizable position. It provides a substrate accommodating unit, characterized in that it further comprises a drive force conversion mechanism portion.

In the board | substrate accommodating unit of this invention, it is preferable that the said board | substrate mounting part has a rotatable spherical rotating body which contacts the back surface of the conveyed board | substrate. Moreover, it is preferable that the said container has the said board | substrate accommodating part two or more steps up and down. Moreover, the said container is provided so that opening and closing are each possible in the side wall which mutually opposes, and each inside communicates with the inside of a vacuum processing chamber which performs a predetermined process to a board | substrate in a vacuum state, and an atmosphere side through each said opening. It is preferable that the inside of the substrate is maintained near the atmospheric pressure when the substrate is exchanged with the atmospheric side and the load lock chamber is maintained in the vacuum state when the substrate is exchanged with the vacuum processing chamber.

According to the present invention, in order to press each end face of the substrate by the pair of first and second pressing mechanisms, the alignment of the substrate can be accurately performed, and the first and second pressing mechanisms are respectively separated. By the drive of the drive mechanism, the pressurizer is configured to press the end face of the substrate, and pressurizes to at least one first pressurizing mechanism that presses the first end face that fits into the conveyance path of the substrate and is orthogonal to the conveyance direction of the substrate. A pressure force mechanism mechanism for moving the ruler between the retracted position for evacuating the substrate out of the conveying path and the pressurizable position capable of pressing the substrate and for moving the substrate in the pressing direction from the pressable position is provided, and the pressurizer avoids movement from the conveying path of the substrate. Since it is supposed to, it avoids movement from the installation space of the member for position alignment in a container, and the conveyance path of a board | substrate. It is possible to reduce significantly the space for groups. Therefore, the space around the substrate in the container can be made extremely small, and the container can be made extremely small.

In particular, when the present invention is applied to a load lock chamber used in a multi-chamber vacuum processing apparatus, the load lock chamber can be extremely miniaturized, and the vacuum processing apparatus itself is remarkably large as the substrate is enlarged. Discarding can be avoided.

According to the present invention, in order to press each end face of the substrate by the pair of first and second pressing mechanisms, the alignment of the substrate can be accurately performed, and the first and second pressing mechanisms are respectively separated. By the drive of the drive mechanism, the pressurizer is configured to press the end face of the substrate, and pressurizes to at least one first pressurizing mechanism that presses the first end face that fits into the conveyance path of the substrate and is orthogonal to the conveyance direction of the substrate. A pressure force mechanism mechanism for moving the ruler between the retracted position for evacuating the substrate out of the conveying path and the pressurizable position capable of pressing the substrate and for moving the substrate in the pressing direction from the pressable position is provided, and the pressurizer avoids movement from the conveying path of the substrate. Since it is supposed to, it avoids movement from the installation space of the member for position alignment in a container, and the conveyance path of a board | substrate. It is possible to reduce significantly the space for groups. Therefore, the space around the substrate in the container can be made extremely small, and the container can be made extremely small.

EMBODIMENT OF THE INVENTION Hereinafter, the preferred form of this invention is demonstrated, referring an accompanying drawing. Here, the board | substrate position alignment apparatus of this invention is used for the load lock apparatus which comprises the multichamber type plasma processing apparatus for performing plasma processing with respect to the glass substrate for FPD (henceforth "substrate") (S). The example used is demonstrated. Here, examples of the FPD include a liquid crystal monitor (LCD), a light emitting diode (LED) display, an electro luminescence (EL) display, a fluorescent fluorescence display (VFD), a plasma display panel (PDP), and the like. do.

1 is a perspective view schematically showing a plasma processing apparatus in which a substrate positioning apparatus according to an embodiment of the present invention is applied to a load lock chamber, and FIG. 2 is a horizontal sectional view schematically showing the inside thereof.

In this plasma processing apparatus 1, the transfer chamber 20 and the load lock chamber 30 are extended to the center part. Three process chambers 10a, 10b, 10c are disposed around the transfer chamber 20.

An opening communicating between the transfer chamber 20 and each of the process chambers 10a, 10b, 10c, between the transfer chamber 20 and the load lock chamber 30, and the atmospheric atmosphere outside the load lock chamber 30. The gate valves 22 which are hermetically sealed between them and which can be opened and closed are inserted respectively (the transfer chamber 20 between the transfer chamber 20 and each of the process chambers 10a, 10b, and 10c). And only between the load lock chamber 30).

On the outer side of the load lock chamber 30, two cassette indexers 41 are provided, and cassettes 40 each containing the substrate S are mounted thereon. For example, an untreated substrate can be accommodated in one of these cassettes 40, and a processed substrate can be accommodated in the other.

The conveyance mechanism 43 is provided on the support base 44 between these two cassettes 40, and this conveyance mechanism 43 has picks 45 and 45 provided in two upper and lower stages, and these picks 45, A base 47 is provided to support 45) individually and reversibly and integrally to rotate and lift.

The process chambers 10a, 10b, and 10c can maintain their internal space in a predetermined reduced pressure atmosphere, whereby plasma processing, for example, etching or ashing, is performed therein. Since there are three process chambers as described above, for example, two process chambers are configured as an etching processing chamber, and the remaining one process chamber is configured as an ashing processing chamber, or all three process chambers are subjected to the same processing. It can be configured as a processing chamber or an ashing processing chamber. The number of process chambers is not limited to three, but may be four or more.

As in the vacuum processing chamber, the conveyance chamber 20 can be maintained in a predetermined pressure-reduced atmosphere, and a conveyance apparatus 50 is disposed therein as shown in FIG. 2. And by this conveyance apparatus 50, the board | substrate S is conveyed between the load lock chamber 30 and three process chambers 10a, 10b, 10c. The conveyance mechanism 50 is capable of moving forward and backward individually and integrally with the picks 51 and 51 (only the upper end shown in FIG. 2) and the picks 51 and 51 provided in the upper and lower two stages. It has a base 52 for supporting it.

The load lock chamber 30 can be maintained in a predetermined pressure-reduced atmosphere similarly to each of the process chambers 10 and the transfer chamber 20. The load lock chamber 30 is for performing exchange of the substrate S between the cassette 40 in the air atmosphere and the process chambers 10a, 10b, and 10c in the reduced pressure atmosphere. Due to the repeated pressure-reducing atmosphere, the inside volume thereof is extremely small.

In the load lock chamber 30, the board | substrate accommodating part 31 is provided in two upper and lower stages (only the upper end is shown in FIG. 2), and each board | substrate accommodating part 31 mounts and supports the board | substrate S. A buffer (substrate mounting part) 32 is provided. Between these buffers 32, the escape grooves 32a of the picks 45 and 51 when the substrate S is conveyed are formed. In addition, the load lock chamber 30 has first and second positioners (first and second) which perform alignment in the vicinity of opposite edge portions of the rectangular substrate S so as to correspond to each substrate accommodating portion 31. Second press mechanisms 7 and 8 are provided. The load lock chamber 30 and the first and second positioners 7 and 8 will be described later in detail.

Each component part of the plasma processing apparatus 1 is connected to the control part 60, and is controlled by it (not shown in FIG. 1). The outline of the control part 60 is shown in FIG. The control part 60 is provided with the process controller 61 provided with CPU, The process controller 61 has a keyboard which a process manager performs input operation, etc. for managing the plasma processing apparatus 1, plasma The user interface 62 which consists of a display etc. which visualizes and displays the operation state of the processing apparatus 1 is connected.

The control unit 60 also includes a storage unit in which recipes for storing control programs (software), processing condition data, and the like for realizing various processes executed in the plasma processing apparatus 1 under the control of the process controller 61 ( 63 is provided, and this storage unit 63 is connected to the process controller 61.

Then, if necessary, an arbitrary recipe is called from the storage unit 63 by the instruction from the user interface 62 and executed by the process controller 61 to control the plasma processing apparatus (under the control of the process controller 61). The desired treatment in 1) is performed.

Recipes such as the control program and processing condition data are stored in a computer-readable storage medium such as a CD-ROM, a hard disk, a flexible disk, a flash memory, or the like, or from another device, for example, from a dedicated line. It is also possible to use online from time to time via the transmission.

Next, the load lock chamber 30 provided with the board | substrate positioning apparatus which concerns on this embodiment, and a board | substrate positioning apparatus is demonstrated in detail.

4 is a perspective view showing a part of the load lock chamber 30 by cutting away.

Each board | substrate accommodating part 31 of the load lock chamber 30 is an opening which can communicate with the conveyance chamber 20 by the gate valve 22 in the side wall which opposes the conveyance direction (Y direction) of the board | substrate S ( 33) and an opening 34 in communication with the outside air atmosphere, and at least at the time of closing of the opening 34, the inside can be depressurized to a predetermined pressure reducing atmosphere, for example, a vacuum state. In each board | substrate accommodating part 31, the board | substrate S conveyed horizontally or substantially horizontally by the conveyance mechanism 43 or 50 is accommodated in each board | substrate accommodating part 31 through the opening 34 or 33, It is comprised so that it may mount on the some buffer 32. As shown in FIG.

Of the plurality of buffers 32, for example, a rotatable spherical shape that comes into contact with the rear surface of the conveyed substrate S to an upper end portion of the buffer 32 provided in the center portion of the horizontal direction (X direction) orthogonal to the conveying direction of the substrate. The whole 35 is provided in multiple numbers at predetermined intervals, for example, the support pin 36 which contacts the back surface of the edge part of the board | substrate S conveyed to the upper end part of the buffer 32 of a X direction outer side is Y-direction both. It is installed at the end. Thereby, the board | substrate mounted on the some buffer 32 can move on the buffer 32 by the rotation of the spherical rotor 35, and the buffer ( It is also possible to stop on 32).

The 1st positioner 7 is for pressing the cross section S1 orthogonal or substantially orthogonal to the Y direction of the board | substrate S accommodated in the board | substrate accommodating part 31, The presser 70 which presses the cross section S1. ), A cylinder mechanism (drive mechanism) 71 for moving the pressurizer 70, and an interposed between the pressurizer 70 and the cylinder mechanism 71 to change direction of the driving force of the cylinder mechanism 71. And a driving force converting mechanism portion 72 to be transmitted to the pressurizer 70. The second positioner 8 is for suppressing the end surface S2 orthogonal or substantially orthogonal to the X direction of the substrate S accommodated in the substrate accommodating part 31, and pressurizer 80 for pressing the end surface S2. ) And a cylinder mechanism (drive mechanism) 81 for moving the pressurizer 80. The 1st positioner 7 and the 2nd positioner 8 are respectively provided in the vicinity of the two opposing edge parts of the board | substrate accommodating part 31, and the edge which differs between the upper and lower board | substrate accommodating parts 31 and 31, respectively. It is installed near the part. The first and second positioners 7, 8 constitute a substrate positioning device, the load lock chamber 30, the buffer 32 installed in the substrate receiving portion 31 in the load lock chamber 30, and the substrate position. The fitting device constitutes a substrate receiving unit.

The cylinder mechanism 71 is provided outside the substrate accommodating part 31 of the load lock chamber 30, More specifically, the load lock so that it may become substantially the same height as the board | substrate S mounted on the buffer 32. In the cylinder body 73 extending in the X direction and provided to protrude out of the load lock chamber 30 from a sidewall orthogonal to the X direction of the chamber 30 or the substrate accommodating portion 31, and to the cylinder body 73. It is comprised by the electric cylinder which has the piston 74 provided removably (refer FIGS. 5-8 and 10-12), and converts electrical energy into dynamic energy by a stepping motor, and the cylinder main body 73 The piston 74 is moved forward and backward by a predetermined amount.

As shown in FIGS. 5-9 (FIG. 5 is an exploded perspective view which shows the drive force conversion mechanism part 72, FIG. 6 is a perspective view for demonstrating the 1st step of operation | movement of the drive force conversion mechanism part 72, FIG. 7 is a perspective view for explaining a second step of the operation of the driving force conversion mechanism unit 72, FIG. 8 is a perspective view for explaining a third step of the operation of the driving force conversion mechanism unit 72, and FIG. 9 is a driving force conversion mechanism unit ( A driving force conversion mechanism portion 72 includes a plate-shaped guide member 75 fixed to a bottom surface of the substrate accommodating portion 31, and a guide member so as to slide in the X direction. A main slide member 76 mounted at 75, a driven slide member 77 mounted at the guide member 75 so as to be slidable in the Y direction, and one end of the driven slide member 77 at the Y direction in the driven slide member 77. As rotatably installed, The other end is provided with a pair of link members 78 and 79 provided with the pressurizer 70 rotatably.

The main slide member 76 has a shape extending in the X direction, and a pair of slide portions 760 are provided at an intermediate portion in the X direction with a gap in the Y direction. The bottom of the slide portion 760 is formed with slide grooves 761 extending in the X direction, respectively (only one side), and the X direction in which the slide grooves 761 extend in the X direction formed on the guide member 75. By slidably fitting to the guide portion 751, the coarse slide member 76 is mounted to the guide member 75 so as to be slidable in the X direction. At least the slide groove 761 is formed of the low friction material so that the slide portion 760 can slide easily along the X direction guide portion 751. On both ends of the X-direction guide portion 751, stopper portions 753 for regulating the slide of the slide portion 760 are respectively provided.

An engagement recess 765 is formed at one end in the X direction of the main slide member 76, and the engagement recess 765 engages with the engagement groove 740 formed at the distal end of the piston 74 in the X direction. The pivot slide member 76 is connected to the piston 74 of the cylinder mechanism 71, whereby the pivot slide member 76 slides in the X direction in accordance with the advancing and retracting operation of the piston 74.

The driven slide member 77 has a shape extending in the X direction, and a pair of slide portions 770 are provided at intervals in the X direction. A slide groove 771 extending in the Y direction is formed on the bottom of the slide portion 770, and the slide groove 771 is formed of the substrate accommodating portion 31 rather than the X direction guide portion 751 of the guide member 75. By slidingly fitting the Y-direction guide portion 752 extending in the Y-direction, formed near the center of the Y-direction of the driven slide member 77, the driven slide member 77 has a It is provided near the center of the Y direction, and is attached to the guide member 75 so that the slide movement to the Y direction is possible. At least the slide groove 771 is formed of a low friction material so that the slide portion 770 can slide along the Y-direction guide portion 752. On both ends of the Y-direction guide portion 752, stopper portions 753 for regulating the slide of the slide portion 770 are provided, respectively.

The main slide member 76 extends toward the outside of the substrate accommodating part 31 to the slide part 760 near the center of the Y direction of the substrate accommodating part 31 at an angle of approximately 45 degrees with the X direction and the Y direction. The pressurized blade portion 762 is integrally provided, and the driven slide member 77 is provided with a cylindrical pressurized member 772 extending in the height direction, for example. And when the coarse slide member 76 slides toward the center of a X direction by advancing a predetermined stroke of the piston 74, the pressurizing blade part 762 will contact the to-be-forced member 772, By pressing 772, the driven slide member 77 is comprised so that it may slide toward the center of a Y direction (refer FIG. 7 and FIG. 8 especially).

A tension coil spring 754 is connected to both ends of the driven slide member 77 and the guide member 75 in the X direction, and the driven slide member 77 is provided with a substrate accommodating portion 31 by a tension coil spring 754. The force is pressurized toward the outer side in the Y direction. Thereby, in the driven slide member 77 which slides toward the center near the Y direction of the board | substrate accommodating part 31, the main slide member 76 moves the board | substrate accommodating part 31 by advancing and retreating a predetermined stroke of the piston 74. As shown in FIG. It is comprised so that it may slide to the Y direction outer side of the board | substrate accommodating part 31, when it slides toward the outer side of the X direction of (circle).

The pair of link members 78 and 79 are located closer to the center of the X-direction of the substrate accommodating portion 31 than the pusher 772 of the driven slide member 77 so that the rotational axis of one end thereof is parallel to the X direction. It is provided, and one side is bent toward a V-shape toward the other to form a parallelogram. The link member 78 is provided with a circumferential or cylindrical cam portion 780 extending toward the outer side in the Y direction of the substrate accommodating portion 31, and the cam portion 780 is the other end in the X direction of the main slide member 76. It is inserted into the cam hole 763 formed in the. The cam hole 763 has a shape in which the Y-direction cross section extends up and down, and the pair of link members 78 and 79 have a cam hole 780 when the main slide member 76 slides. 763), it is comprised so that it may rotate and fall the standing and link member 78 to the lower side by displacing up and down (especially FIG. 6 and FIG. 7). Further, the cam hole 763 has a shape in which the Y-direction cross section extends from the upper end toward the X-direction outer side of the substrate accommodating portion 31, and the main slide member 76 and the driven slide member 77 each have an X direction. And the pair of standing link members 78 and 79 can also move in the Y direction together with the driven slide member 77 while the cam portion 780 is inserted into the cam hole 763 when the slide portion is moved in the Y direction. In particular, see FIGS. 7 and 8. Thereby, the pair of link members 78 and 79 can be reliably supported in a standing state.

The cam portion 780 is rotatable by the plurality of ball bearings 781 (see FIG. 9), whereby the cam portion 763 can be relatively displaced smoothly. In addition, the cam part may be provided in the link member 79 instead of the link member 78, or the cam part may be provided in the coarse slide member 76, and the cam hole may be provided in the link member 78 or 79. FIG. The cam portion 780 and the cam hole 763 constitute a cam mechanism, and the pair of link members 78 and 79 rotate so as to stand and fall by the cam mechanism when the main slide member 76 slides. Consists of.

A tension coil spring 755 is connected to the link member 79 and the driven slide member 77, and the pair of link members 78 and 79 are pressed to stand by the tension coil spring 755. As a result, the pair of fallen link members 78 and 79 may slide in the coarse slide member 76 toward the center of the substrate accommodating portion 31 in the X direction due to the advance of the predetermined stroke of the piston 74. At this time, standing is assisted by the tension coil spring 755. In addition, a compression coil spring may be used instead of the tension coil spring 755 to assist the fall of the pair of link members 78 and 79 standing up by the compression coil spring.

The pressurizer 70 is rotated in contact with the end face S1 of the substrate S and pressurizes the end face S1, and the other ends of the link members 78 and 79 are rotatably mounted, respectively. The plate 701 and the connection part 702 extended in the Y direction which connect the press body 700 and the rotation plate 701 are provided. The pressurizer 70 is located at substantially the same height as the substrate S mounted on the buffer 32 (pressable position) at the time of standing of the pair of link members 78 and 79, and the pair of link members It is comprised so that it may be located below (the retreat position) rather than the board | substrate S mounted on the buffer 32, maintaining the state parallel to the board | substrate S at the time of the fall of 78 (79).

The pressurized body 700 is formed of a material which does not cause scratches or damage to the end surface S1 of the substrate S in contact with each other, and is unlikely to generate particulates due to contact with the substrate S. For example, those made of a material such as synthetic resin having a constant elasticity can be used, and fluorine-based resins such as polytetrafluoroethylene can be suitably used. In addition, the pressurizing body 700 is formed in the shape of an arc in order to make point contact with the end surface S1 of the board | substrate S in a horizontal direction from the viewpoint of improving the precision of positioning. In addition, the press main body 700 may be used as, for example, a cylindrical rotor having an axis in the height direction.

The connection part 702 is prevented from being pulled out by inserting the inner cylinder member 704 into the outer cylinder member 703, and the compression coil spring 705 is arrange | positioned in the outer cylinder member 703 and the inner cylinder member 704, and is comprised. That is, the connecting portion 702 is stretchable and pressurized in the stretching direction by the compression coil spring 705, and alleviates the impact when the pressing body 700 presses the end surface S1 of the substrate S. It functions as a shock absorber.

In addition, the driving force converting mechanism part 72 may fix the guide member 75 to the upper surface of the board | substrate accommodation part 31, for example, and may be provided in the up-down direction. In this case, the pressurizer 70 is located at substantially the same height as the substrate S mounted on the buffer 32 at the time of standing of the pair of link members 78 and 79 (pressable position), When the pair of link members 78 and 79 fall down, it is configured to be positioned (retracted position) above the substrate S mounted on the buffer 32 while maintaining a state parallel to the substrate S. do.

As shown in FIGS. 10 to 12, the second positioner 8 is more specifically a buffer 32 in which a cylinder mechanism 81 is provided outside the substrate accommodating portion 31 of the load lock chamber 30. A cylinder body extending in the X direction, protruding out of the load lock chamber 30 from a sidewall orthogonal to the X direction of the load lock chamber 30 or the substrate accommodating portion 31 so as to be approximately the same height as the lower end of the 83, and the electric cylinder mechanism which has the piston 84 provided in this cylinder main body 83 so that advancing and retracting is possible, The presser 80 is provided in the front-end | tip of the piston 84. As shown in FIG.

Further, one of the pair of cylinder mechanisms 71 and one of the pair of cylinder mechanisms 81 may each be another cylinder such as an air cylinder instead of the electric cylinder. As the driving mechanism for moving the pressurizers 70 and 80, in addition to the cylinder mechanisms 71 and 81, it is possible to drive forward and backward in the X direction and stop at an arbitrary X direction position. Regardless of the type, for example, an electromagnet motor, a solenoid, a piezoelectric element, or the like can be used.

The pressurizer 80, like the pressurizing body 700 of the pressurizer 70, does not cause scratches or damage to the end surface S2 of the contacted substrate S, and also provides contact with the substrate S. It is formed of a material which is hard to generate | occur | produce microparticles | fine-particles etc. by this, and the press surface is formed in circular arc shape so that point contact with the end surface S2 of the board | substrate S may be carried out in a horizontal direction. Further, the pressurizer 80 may be, for example, a cylindrical rotating body in which the height direction is called an axis. In addition, the pressurizer 80 and the piston 84 are connected to each other via a shock absorbing means such as the connecting portion 702 so that the pressurizer 80 can alleviate the shock when the end face S2 of the substrate S is pressed. It is preferable to connect.

By this structure, the second positioner 8 moves the pressurizer 80 near the center of the X direction of the board | substrate accommodating part 31 by the piston 84 of the cylinder mechanism 81 advancing, and the cylinder mechanism By retracting the piston 84 of 81, the pressurizer 80 is moved outward in the X direction of the substrate accommodating portion 31.

Next, a description will be given with reference to FIGS. 10 to 12 with respect to the method of positioning the substrate by the substrate positioning apparatus. 10 is a view for explaining a first step of the operation of the substrate alignment device, FIG. 11 is a view for explaining a second step of the operation of the substrate positioning device, and FIG. It is a figure for explaining a 3rd step.

First, the board | substrate S is conveyed in the board | substrate accommodating part 31, with the piston 74, 84 of the cylinder mechanisms 71 and 81 provided in the 1st and 2nd positioners 7 and 8 completely retracted. When mounted on the buffer 32, the pistons 74 and 84 of the cylinder mechanisms 71 and 81 are advanced, respectively (see Fig. 10).

When the piston 74 of the cylinder mechanism 71 advances by a predetermined stroke, the main slide member 76 slides toward the center of the substrate accommodating portion 31 in the X direction. At this time, the cam part 780 raises along the cam hole 763, the tension coil spring 755 also acts, and it rotates so that a pair of link members 78 and 79 may stand up, and pressurizes a retracted position. The ruler 70 raises to a pressurizable position (refer FIG. 11).

When the piston 74 of the cylinder mechanism 71 further advances by a predetermined stroke, the main slide member 76 slides further toward the center of the substrate accommodating portion 31 in the X direction. At this time, the pressurizing blade portion 762 contacts the press member 772 to press the press member 772, and the driven slide member 77 moves the substrate accommodating portion against the pressurization of the tension coil spring 754. By sliding toward 31 near the Y direction center of the 31, the pressurizer 70 of a pressurizable position moves toward the Y direction center of the board | substrate accommodation part 31, and is moved to the cross section S1 of the board | substrate S. As shown in FIG. In contact, the end surface S1 is pressed (refer FIG. 12).

On the other hand, when the piston 84 of the cylinder mechanism 81 advances by a predetermined stroke, the pressurizer 80 moves toward the center of the substrate accommodating portion 31 in the X direction, and the end surface S2 of the substrate S is moved. To press the end surface S2.

In this way, the board | substrate S is located in a predetermined position on the buffer 32 by pressurizing each end surface S1, S2 of the board | substrate S with the 1st and 2nd positioners 7 and 8. As shown in FIG. Is customized. In addition, the forward drive of a pair of cylinder mechanisms 71 and 81 may be performed simultaneously, and after driving one cylinder mechanism 71 and 81 of a pair of cylinder mechanisms 71 and 81 to advance and drive, The cylinder mechanisms 71 and 81 may be driven forward.

When alignment of the board | substrate S is complete | finished, the piston 74, 84 of the cylinder mechanism 71, 81 is retracted, respectively. When the piston 74 is retracted by a predetermined stroke, the coarse slide member 76 slides toward the outer side in the X direction of the substrate accommodating portion 31. At this time, the driven slide member 77 pressurized by the tension coil spring 754 slides toward the outer side in the Y direction of the substrate accommodating portion 31, whereby the pressurizer in contact with the end face S1 of the substrate S ( 70 is moved toward the outer side in the Y direction of the substrate accommodating portion 31, and is spaced apart from the end face S1 to the pressurizable position.

When the piston 74 is further retracted by a predetermined stroke, for example, the pivot slide member 76 further slides toward the outside of the substrate accommodating portion 31 in the X direction. At this time, the cam part 780 descends along the cam hole 763, and rotates so that a pair of link members 78 and 79 may fall, unlike the pressurization of the tension coil spring 755, and a pressurizable position is possible. Presser 70 is lowered to the retracted position.

On the other hand, when the piston 84 of the cylinder mechanism 81 is completely retracted for a predetermined stroke, for example, the pressurizer 80 moves toward the outer side in the X direction of the substrate accommodating portion 31, so that the end face S2 of the substrate S is moved. Spaced apart.

In this way, when the pressurizers 70 and 80 are evacuated on the conveyance path | route of the board | substrate S, the board | substrate S will be conveyed to any one of the process chambers 10a, 10b, and 10c. Since the substrate S positioned by the first and second positioners 7 and 8 is conveyed to a regular processing position in the process chambers 10a, 10b and 10c, a highly precise process in which processing unevenness does not occur. Becomes feasible.

In the present embodiment, the pressurizers 70 and 80 are driven by the advance of the pistons 74 and 84 of the cylinder mechanisms 71 and 81 in which the first and second positioners 7 and 8 are respectively provided. Pressing to the first positioner 7 configured to press the first and second end faces S1 and S2 of (S) and pressurize the first end face S1 in contact with the conveyance path of the substrate S. FIG. A driving force converting mechanism portion 72 is provided to move the ruler 70 between the retracted position and the pressurizable position and to move in the pressurization direction from the pressurizable position, and the pressurizer 70 moves from the conveyance path of the substrate S. FIG. Since the evacuation movement is performed, it is possible to remarkably reduce the installation space of the member for alignment in the substrate accommodating part 31 and the space for evasion movement from the conveyance path of the substrate S. FIG. Therefore, the space around the board | substrate S of the board | substrate accommodation part 31 can be made extremely small, and the load lock chamber 30 can be made extremely small.

In addition, in this embodiment, since the cylinder mechanisms 71 and 81 for moving the pressurizers 70 and 80 are provided outside the board | substrate accommodating part 31 of the load lock chamber 30, the board | substrate accommodating part 31 The mounting space of the member for positioning in () can be made smaller.

In addition, in this embodiment, in the 1st positioner 7, the drive force conversion mechanism part 72 converts the drive force of the X direction by the piston 74 of the cylinder mechanism 71 into the drive force of the Y direction and the height direction, Since the pressurizer 70 is moved between the retracted position and the pressurizable position, and the pressurizable position is moved as the starting point and the end point, the first and second positioners 7, The cylinder mechanisms 71 and 81 constituting the 8) can be provided on the same side wall of the load lock chamber 30, whereby the spaces above and below the load lock chamber 30 can be effectively used. In addition, the driving force converting mechanism portion 72 moves the pressurizer 70 between the retracted position and the pressurizable position by advancing and retracting one stroke of the piston 74, and also moves the pressurizable position to the starting point and the end point. By moving in the direction opposite to the pressing direction and the pressing direction, the alignment operation of the board | substrate S becomes easy.

In addition, the arrangement position of the 1st and 2nd positioners 7 and 8 in the board | substrate accommodation part 31 is not limited to the edge part which mutually opposes. As shown in FIG. 13 (FIG. 13 is a figure which shows the example of a change of the arrangement position of the 1st and 2nd positioner which comprises a board | substrate position alignment apparatus), The 1st positioner 7 of the board | substrate accommodation part 31 is shown. A pair of the second positioner 8 may be disposed near each corner of the substrate accommodating portion 31 so as to face each other in the X direction near the corner portions adjacent to the Y direction and at the same time. good. In this case, for example, the cylinder mechanism 71 of one first positioner 7 is constituted by an air cylinder instead of an electric cylinder, and adjacent to the Y direction on the side where the pair of first positioners 7 are provided. The cylinder mechanism 81 (81a, 81b) of the 2nd positioner 8 can be comprised by an air cylinder instead of an electric cylinder. Thereby, since the number of electric cylinders can be reduced, cost reduction of an apparatus can be aimed at. When positioning the board | substrate S, the piston 74, 84 of the cylinder mechanism 71, 81 comprised by the electric cylinder, after advancing the piston 74, 84 of the cylinder mechanism 71, 81 comprised by the air cylinder, for example. 84) advance.

This invention is not limited to the said embodiment, A various deformation | transformation is possible. The container which accommodates a board | substrate is not limited to the load lock chamber 30, The process chambers 10a, 10b, 10c, the conveyance chamber 20, etc. may be sufficient, and a board | substrate is not limited to the glass substrate for FPD, and a semiconductor Other substrates, such as a wafer, may be sufficient. In addition, you may provide a board | substrate accommodation part 3 or more steps in a container.

1 is a perspective view schematically showing a plasma processing apparatus in which a substrate positioning apparatus according to an embodiment of the present invention is applied to a load lock chamber;

2 is a horizontal sectional view schematically showing the interior of the plasma processing apparatus;

3 is a block diagram showing a schematic configuration of a control unit;

4 is a perspective view showing a part of the load lock chamber cut out;

5 is an exploded perspective view showing a driving force conversion mechanism;

6 is a perspective view for explaining a first step of the operation of the driving force conversion mechanism;

7 is a perspective view for explaining a second step of the operation of the driving force conversion mechanism;

8 is a perspective view for explaining a third step of the operation of the driving force conversion mechanism;

9 is a plan view showing a part of the driving force converting mechanism cut out;

10 is a view for explaining a first step of the operation of the substrate alignment device;

11 is a view for explaining a second step of the operation of the substrate alignment device;

12 is a view for explaining a third step of the operation of the substrate alignment device;

FIG. 13 is a diagram showing a modification of the arrangement positions of the first and second positioners constituting the substrate positioning device. FIG.

<Description of the symbols for the main parts of the drawings>

7: first positioner (first pressure mechanism)

8: second positioner (second pressure mechanism)

30: load lock chamber (container) 31: substrate receiving portion

32: buffer (substrate mounting part) 33, 34: opening

35: spherical rotating body 70, 80: pressurizer

71, 81: cylinder mechanism (drive mechanism) 72: drive force conversion mechanism portion

74, 84: piston 75: guide member

76: main slide member 77: driven slide member

78, 79: link member S: substrate

S1: first cross section S2: second cross section

Claims (10)

An opening is provided in the side wall, and the container provided with the board | substrate with two or more steps of the said board | substrate accommodating the board | substrate of the rectangular shape conveyed in the horizontal direction from the said opening, and the said board | substrate accommodating part, A substrate accommodating unit comprising a substrate mounting portion for mounting a substrate accommodated in a substrate and a substrate positioning device for positioning the substrate mounted on the substrate mounting portion on the substrate mounting portion. The said board | substrate alignment apparatus is provided in each of the said several board | substrate accommodating part, The pair of 1st press mechanism which presses a pair of 1st cross section orthogonal to the conveyance direction of a board | substrate, and the board | substrate along the conveyance direction A pair of second pressurizing mechanisms for pressing the pair of second end faces, wherein the first pressurizing mechanism and the second pressurizing mechanism are each horizontally disposed at a sidewall portion orthogonal to the sidewall provided with the opening of the respective substrate receiving portions; And a pressurizer configured to press the first end face and the second end face by the drive mechanism arranged and the drive mechanism, wherein at least one of the pair of first press mechanisms is driven by the drive mechanism. The pressurizer is moved between a retracted position for retracting out of the transport path of the substrate and a pressurizable position capable of moving the substrate, and further moved in the pressing direction from the pressurizable position. Key is further provided with a driving force conversion mechanism, The drive mechanism is provided outside the substrate accommodating portion of the container, and the drive direction of the drive mechanism is horizontal and perpendicular to the substrate conveyance direction. Substrate receiving unit. delete The method of claim 1, The said drive force conversion mechanism part is provided above or below the conveyance path | route of a board | substrate, and is retracted position which retracts the said pressurizer in the state parallel to the said conveyance path | route up or down the conveyance path | route of a board | substrate by the drive of the said drive mechanism. And the substrate are moved between the pressurizable pressurizable positions and further moved in the pressing direction from the pressurizable positions. Substrate receiving unit. The method of claim 1, At least one of the pair of first pressing mechanisms drives the drive mechanism horizontally and in a direction orthogonal to the conveying direction of the substrate. Substrate receiving unit. The method of claim 4, wherein At least one of the pair of first pressurizing mechanisms is a cylinder mechanism having a piston that the drive mechanism retreats horizontally and in a direction orthogonal to the conveying direction of the substrate, The driving force converting mechanism portion moves the pressurizer in the retracted position to the pressurizable position when the piston of the cylinder mechanism advances a predetermined stroke, and the pressurizable position when the piston of the cylinder mechanism further advances the predetermined stroke. The pressurizer in a state in which the pressurizer in the state of pressing the first end surface is pressed when the piston of the cylinder mechanism is retracted a predetermined stroke by moving the pressurizer of the cylinder mechanism in the pressurizing direction to pressurize the first end face. To move the pressurizer in the pressurizable position to the retracted position when the piston of the cylinder mechanism is further retracted by a predetermined stroke. Substrate receiving unit. The method of claim 5, The driving force conversion mechanism portion, A guide member fixed to the substrate receiving portion; A main slide member which slides in the advancing direction of the piston along the guide member at the same time as the piston of the cylinder mechanism moves forward and backward; A driven slide member which slides along the guide member horizontally and in a direction orthogonal to the direction of movement of the driven slide member in accordance with the slide movement of a predetermined stroke of the driven slide member; One end is rotatably provided at the driven slide member, and the pressurizer is rotatably provided at the other end, and falls and stands about the one end in accordance with a slide movement of a predetermined stroke of the main slide member. Having a link member that rotates so that By rotating the link member to fall and stand, the presser is moved between the retracted position and the pressurizable position, and the driven slide member slides to move the pressurizer to the pressurizable position at the starting point and the end point. Characterized in that the movement in the direction opposite to the pressing direction and the pressing direction Substrate receiving unit. The method of claim 1, The first pressing mechanism and the second pressing mechanism each further include shock absorbing means for alleviating the impact when the pressurizer presses the first end face and the second end face. Substrate receiving unit. The method of claim 1, The substrate mounting portion has a rotatable spherical rotor in contact with the back surface of the conveyed substrate. Substrate receiving unit. The method of claim 1, The container is provided to be opened and closed on sidewalls in which the openings face each other, and the inside of the container can communicate with the inside of the vacuum processing chamber for performing a predetermined process on the substrate in the vacuum state and through the respective openings. And a load lock chamber in which the interior is maintained near atmospheric pressure when the substrate is exchanged with the atmosphere, and the interior is maintained in a vacuum state when the substrate is exchanged with the vacuum processing chamber. Substrate receiving unit. The method of claim 1, Each of the plurality of substrate accommodating parts can be configured to have an atmosphere and a reduced pressure atmosphere therein. Substrate receiving unit.

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