JP4479881B2 - Substrate spin processing apparatus and substrate spin processing method - Google Patents

Description

  The present invention relates to a substrate spin processing apparatus and substrate for rotating a thin rectangular substrate, such as a glass substrate, at a high speed in order to perform a predetermined processing or operation in, for example, a liquid crystal panel, a plasma display, or other manufacturing processes. The present invention relates to a spin processing method, and further relates to a liquid crystal panel subjected to spin processing by a substrate spin processing method.

  For example, in manufacturing a liquid crystal panel, various processes and operations are performed on a thin rectangular substrate made of a material such as glass. Among them, the substrate is rotated in a horizontal state. Thus, a spin processing step in which a predetermined process or operation is performed is included. A substrate spin processing apparatus is used for this purpose. In the substrate spin processing apparatus, a substrate support member for supporting a substrate is connected to the tip of a spindle, and the spindle is rotated at high speed by a rotation driving means such as a motor.

  Here, the processing or operation performed by the substrate spin processing apparatus includes drying of the substrate, spin coating that forms a predetermined liquid film on the surface of the substrate, and cleaning of the surface or both sides of the substrate. There is. In spin coating, a processing solution comprising a photoresist film, a developing solution, a stripping solution or the like is applied. In particular, with respect to the application of the treatment liquid to the substrate surface, the uniformity of the film thickness is required. Therefore, among various liquid treatment methods, the spin coating method is highly reliable.

  As described above, in the substrate spin processing apparatus used for performing various processes on the substrate, the substrate support member provided connected to the spindle is provided with support pins in order to minimize the number of contact portions with the substrate. The substrate is placed on the support pins. In the case where the substrate is made of a thin plate, when a process is performed on the substrate, a predetermined number of support pins are arranged almost uniformly in order to ensure the level of the substrate. In addition, by making the tips of these support pins have a substantially spherical shape, the contact area with the substrate is reduced, and the substrate is protected from being damaged when attached or detached. Furthermore, in order to hold the substrate stably without being shaken off when rotated by the substrate support member, positioning pins that contact the four corners of the substrate or the end surfaces constituting the sides are provided.

  The substrate spin processing apparatus is configured as described above, and the substrate is usually transported by a transport conveyor or the like, and various processes are sequentially performed through predetermined processes. A processing stage provided with a substrate spin processing apparatus is included. Accordingly, the substrate is transferred from the transfer conveyor onto the substrate support member connected to the spindle in the spin processing stage, and the spindle is driven to rotate, so that predetermined processing or operation can be performed while the substrate is rotated in a horizontal state. Etc. are performed.

  In order to place the substrate on the substrate support member of the spindle provided on the spin processing stage from the transport conveyor, a robot is conventionally used, and when the substrate is transported to the transfer area set on the transport conveyor, In general, the substrate is stopped and the robot is operated to take out the substrate from the transfer conveyor and place it on the substrate support member. However, in manufacturing a liquid crystal panel or the like, from the viewpoint of efficiency and productivity, a predetermined processing is performed on a large-sized substrate, a so-called mother board, and then cut to a size that becomes a liquid crystal panel. In order to transfer such a large-sized substrate by the robot, a large-sized robot is required. Due to the nature of the substrates that make up the liquid crystal panel, the required processing is performed in the clean room. Therefore, if the transfer robot becomes larger, the volume of the clean room must be increased. There is a point.

In consideration of the above points, a method for performing inline processing is disclosed in Patent Document 1, for example. In this in-line processing, a spindle is arranged in the middle of the conveyor, a substrate support member is mounted at the tip of the spindle so as not to interfere with the conveyor, and the processing liquid is placed on the upper position of the substrate support member. The nozzle for supplying to the substrate is arranged. Then, with the substrate support member positioned below the substrate transfer surface by the transfer conveyor, the substrate is transferred by the transfer conveyor, and when the substrate is transferred to the upper position of the substrate support member, the substrate support member is raised. By doing so, the substrate is placed on the substrate support member and separated from the transfer conveyor. Therefore, the substrate is rotated in a horizontal state by rotationally driving the spindle, and a predetermined processing liquid is supplied from the nozzle to the substrate surface during this time. As a result, the substrate can be transferred from the transfer conveyor to the substrate support member without using a robot, so that the overall configuration of the apparatus can be reduced in size and size, and as a result the volume of the clean room can be reduced. There are excellent advantages such as.
JP 2002-1245 A

  By the way, in order to transfer the substrate from the transport conveyor to the substrate support member with certainty, the substrate transported by the transport conveyor must be accurately stopped at a certain position. For this purpose, a mechanism for positioning the substrate is provided at a position where the substrate support member is disposed. When a large substrate such as a mother board is processed, a large inertial force acts on the substrate by transporting the substrate by the transport conveyor. For this reason, since the substrate collides with the positioning mechanism at the time of positioning the substrate, a large impact is applied, and the substrate may be damaged or deformed. In addition, if the substrate is positioned and transferred to the substrate support member while continuing the operation of the transfer conveyor, the back side of the substrate is positioned and then separated from the transfer conveyor by the substrate support member. Since the side is in sliding contact with the conveyor, there is also a problem that the back side of the substrate is damaged. Therefore, it is conceivable to stop the entire transfer conveyor during the period from the positioning of the substrate to the transfer to the substrate support member, but this will affect the pre-process and post-process of this spin processing process. Become.

  The present invention has been made with the above points as an object, and in performing predetermined processing or operation while rotating a substrate by a spindle, the substrate is accurately determined without stopping the conveyor. It is intended to be positioned at a position so that it can be smoothly transferred to the substrate support member of the spindle.

In order to achieve the above-described object, the substrate spin processing apparatus according to the present invention includes a transfer conveyor, and transfers the substrate to a spin processing stage from a transfer path for transferring the substrate in a horizontal state. A substrate spin processing apparatus for performing predetermined processing on the substrate by horizontally rotating it with a spindle disposed on a processing stage, wherein the substrate spin processing device is connected to the tip of the spindle and has a back surface of the substrate at a plurality of locations. A substrate support member having a plurality of support arms mounted with support pins to be supported and positioning pins for positioning end surfaces around the substrate, and transporting the substrate to the position where the substrate support member is disposed in the spin processing stage Therefore, it is at least as long as the transport length between the substrate stop position and the substrate deceleration start position than the total length in the substrate transport direction. An in-stage transport means having a long transport path; a first detection means for detecting that the substrate transported by the in-stage transport means has reached a deceleration start position and decelerating the transport speed of the substrate; The second detection means for detecting that the substrate has reached the stop position and stopping the in-stage transfer means, and the in-stage transfer means are constituted by a roller conveyor having a plurality of rollers mounted on a rotating shaft member. The rotating shaft member is disposed so as to partially intersect the substrate support member at a different position in the height direction, and the substrate support member is attached to an elevating means. When the substrate support member is driven up and down by means, the substrate support member is driven up and down to a position lowered from the transfer surface of the substrate by the roller conveyor and a position raised from the transfer surface. Moni, during descent of the substrate support member are those that characterized in that the structure be arranged in a position between between the rotating shaft member and the conveying surface by the substrate support member the roller conveyor .

  Here, the substrate processing or operation performed in the spin processing stage includes spin drying performed after cleaning the substrate. In this case, the substrate held in a horizontal state is rotationally driven at a high speed, and the liquid existing on the surface of the substrate is removed by the action of centrifugal force. Then, by providing a liquid supply means and supplying a predetermined liquid to the surface of the substrate while the substrate is rotating, the substrate can be subjected to a liquid treatment. In this case, when the liquid is dropped near the rotation center of the substrate by the liquid supply means, the liquid can be applied so as to have a substantially uniform thickness over the entire surface of the substrate by the action of the centrifugal force due to the rotation of the substrate. That is, when applying an etching solution, a developing solution, a stripping solution, etc., the substrate can be uniformly processed by rotating the substrate at a high speed. Further, when the substrate is cleaned, the same configuration is adopted, so that the entire substrate can be cleaned evenly. Further, the liquid supply means may be fixedly provided, or may be configured to reciprocate between an upper position of the substrate and a position separated from the upper position of the substrate by a swing operation or the like.

  As described above, when performing drying or liquid treatment, the liquid is scattered from the edge of the substrate by horizontally rotating the substrate. In order to prevent the scattered liquid from being contaminated in the spin processing stage and its peripheral portion, and to collect the scattered processing liquid, it is desirable to arrange the substrate in the spin cup. However, when the substrate is transported by the in-stage transport means, the spin cup must be prevented from interfering with the substrate being transported. Therefore, an operation position in which the substrate is surrounded by the spin cup, and a cup lifting / lowering means that moves up (or descends) from this position and moves up and down to an open position that allows the substrate to be transported are provided. Can do.

The stage in the transfer means constitutes a separate conveying means has a configuration including a roller conveyor equipped with roller on the rotary shaft and its drive means. The total length of the substrate transport path by the in-stage transport means is the sum of the length of the deceleration region in addition to the total length of the substrate in the transport direction. Accordingly, the in-stage transport means transports the substrate by a length corresponding to at least the distance between the approximate deceleration start position and the stop position from the end of the transport conveyor, and the stop position from the deceleration start position to the substrate. And a main transport unit that transports a length corresponding to the interval up to. The substrate is transported by the transport conveyor, and the leading end thereof moves to the in-stage transport means. At this time, the in-stage transport means transports the substrate at a constant speed on the transport conveyor outside the stage. When the rear end of the substrate moves away from the transfer conveyor and is completely transferred by the in-stage transfer means, it starts to decelerate, gradually lowering the transfer speed, and the tip of the substrate reaches the stop position Then, the operation of the in-stage transport means is stopped. Accordingly, the substrate can be accurately stopped at a predetermined position, and the state is smoothly shifted to a state where the substrate is placed on the substrate support member.

  As described above, even in the case of a large-sized substrate, the position in the front-rear direction in the transport direction can be accurately controlled when the substrate is stopped. Positioning in the direction orthogonal to the substrate transport direction can be performed while the substrate is being transported by the in-stage transport means or after being stopped, but immediately after the transfer from the transport conveyor outside the stage to the in-stage transport means. Positioning members that can be brought into contact with and separated from the left and right side portions of the substrate can be provided to position both sides of the substrate in the transport direction.

While the substrate is being transported by the in-stage transport means, the substrate support member is separated from the back surface of the substrate, and when the substrate is rotationally driven by the spindle, the transport surface of the in-stage transport means and the back surface of the substrate are There must be a gap in between. The lifting means is provided for this purpose, and is arranged at a height position between the rotating shaft constituting the roller conveyor of the substrate support member and the conveying surface by the rollers, and the substrate support member together with the spindle when the substrate rotates. Is raised to support and lift the substrate. For this purpose, a substrate elevating member is provided, and the tip of the support pin provided on the support arm connected to the spindle is driven up and down to a position lower than the transfer surface of the in-stage transfer means and a position higher than that.

Then, from the transport path that is composed of a transport conveyor and transports the substrate in a horizontal state, the substrate is transferred to a spin processing stage having a transport means in a stage composed of a roller conveyor having a plurality of rollers mounted on a rotating shaft member , The invention of a spin processing method for performing predetermined processing on the substrate by horizontally rotating it with a spindle disposed on the spin processing stage is to position a support pin for supporting the back surface of the substrate at a plurality of locations and end surfaces around the substrate. A substrate support member provided by connecting a plurality of support arms to which a positioning pin is attached to a spindle, is below the transfer surface of the roller conveyor in the in-stage transfer means and above the rotary shaft member; arranged so as to partially intersect Chigae position to the rotating shaft member and the height direction, the transportable Conveyor by transitions the substrate is conveyed at a predetermined conveying speed in the stage the conveying means of the spin-processing stage, the substrate after the complete transition to the stage in the transfer means, for reducing the transport speed of the substrate When the substrate reaches a predetermined position in the spin processing stage, the conveyance of the substrate is stopped, and the substrate support member is lifted so that the substrate is lifted from the conveyance surface by the in-stage conveyance means. The substrate is separated and rotated horizontally by the spindle in a state in which an end surface around the substrate is in contact with the positioning pin.

Further, another invention relating to the spin processing method includes an in- stage transfer means including a transfer conveyor, and a transfer path that transfers the substrate in a horizontal state, and includes a roller conveyor having a plurality of rollers mounted on a rotating shaft member. A spin processing method for performing predetermined processing on the substrate by moving to a spin processing stage and horizontally rotating by a spindle disposed on the spin processing stage, and supporting the back surface of the substrate at a plurality of locations A substrate support member provided by connecting a plurality of support arms, which are equipped with pins and positioning pins for positioning end surfaces around the substrate, to the spindle, is rotated below the transfer surface of the roller conveyor in the in-stage transfer means. It is located above the shaft member, and is partially different from the rotating shaft member in the height direction. While disposed so as to intersect, the substrate is conveyed at a predetermined conveying speed by the conveyor is shifted to the stage in the transport means of the spin-processing stage, the substrate is transported by the stage in the transfer means The left and right side portions of the substrate are positioned and guided, and after the substrate has completely transferred to the in-stage transport means, the transport speed of the substrate is reduced. When the position is reached, the substrate is stopped from being transported, and the substrate support member is lifted to separate the substrate from the transport surface by the in-stage transport means, and the end surface around the substrate is The spindle is rotated horizontally by the spindle in contact with the positioning pin, and a predetermined processing liquid is supplied to the substrate during the rotation. It is set to.

  As described above, after the substrate transported by the transport conveyor is transferred to the in-stage transport means, the substrate is placed on the substrate support member of the spindle, and the substrate is rotated by driving the substrate by the in-stage transport means. In addition to improving the positioning accuracy of the substrate and maintaining the transport conveyor outside the stage at a constant speed, it is possible to stop at the spin processing stage. It does not affect the pre-process and post-process that are processed or operated.

  An embodiment of the present invention will be described in detail with reference to the drawings. The substrate spin processing apparatus of the present invention is used for processes such as spin coating, spin cleaning, and spin drying on a transparent glass substrate constituting a liquid crystal panel, for example. In order to perform spin coating and spin cleaning, supply means for processing liquid, cleaning liquid and the like are provided, respectively, and in the case of performing spin drying, such liquid supply means is not provided.

  FIG. 1 is a plan view of the substrate spin processing apparatus, and FIG. 2 is a front view of FIG. In these drawings, reference numeral 1 denotes a substrate. The substrate 1 is a glass substrate made of, for example, a rectangular thin plate. The substrate spin processing apparatus has a processing stage 2, and a spindle 3, an in-stage transfer means 4, and a spin cup 5 are installed inside the processing stage 2. The spindle 3 is for holding and rotating the substrate 1 in a horizontal state, and the in-stage transport unit 4 carries the substrate 1 into the processing stage 2 from a non-stage transport unit (not shown), and a predetermined position. It is for positioning. Further, the spin cup 5 receives liquid scattered from the end portion of the substrate 1 by the action of centrifugal force while the substrate 1 is being rotationally driven, and flows out downward to be recovered.

  The spindle 3 has a substrate support member 11 attached to the tip of the rotating shaft 10. The substrate support member 11 includes a plurality of support arms 12 that extend radially from the rotary shaft 10 and a reinforcing ring 13 provided on the outer periphery of each support arm 12. A predetermined number of positioning pins 15 are provided upright. The support pin 14 has a spherical tip and comes into contact with the back surface of the substrate 1, and the positioning pin 15 comes into contact with the end of the substrate 1 to perform positioning.

  As shown in FIG. 3, a rotation transmission member 16 is provided for rotationally driving the rotary shaft 10. The rotary shaft 10 is connected so as to rotate integrally with the rotation transmitting member 16 by spline coupling or the like at an intermediate position in the axial direction. The rotation transmission member 16 is rotatably supported by a bearing 17 on a fixed side member constituting the apparatus. The rotation transmission member 16 includes a transmission pulley 18. A drive pulley 20 is connected to the output shaft of the motor 19. A transmission belt 21 is wound between the drive pulley 20 and the transmission pulley 18. It is provided by turning. Therefore, when the motor 19 is driven, the rotation transmission member 16 rotates, and as a result, the rotating shaft 10 rotates.

  Further, the lower end portion of the rotating shaft 10 is connected to a substrate lifting / lowering means for lifting / lowering the substrate support member 11 that supports the substrate 1. The substrate lifting / lowering means is configured by connecting a connecting member 24 provided at the tip of a lifting / lowering drive member 23 such as a cylinder and a feed screw to a flange portion 22 provided at the lower end portion of the rotary shaft 10. A bearing 25 is interposed between the connecting member 24 and the flange portion 22, so that the rotary shaft 10 can be driven to rotate while the connecting member 24 and the flange portion 22 remain connected. It has become.

  The in-stage transfer unit 4 receives the substrate 1 from the outside transfer unit provided outside the processing stage 2, positions the substrate 1 at a predetermined position, transfers it to the substrate support member 11, and performs a predetermined process on the substrate 1. After being performed, the substrate 1 is unloaded from the processing stage 2. This in-stage transport means 4 is composed of a roller conveyor, and the outside-stage transport means is also composed of a roller conveyor. The reason why the roller conveyor is used is to reduce the contact area to the substrate 1 as much as possible.

  The in-stage transport unit 4 includes a carry-in transport unit 30 for introducing the substrate 1 into the processing stage 2 from the transport device outside the stage, and a main transport unit 31, and further transfers the substrate 1 from the processing stage 2 as necessary. A carry-out side conveyance unit for carrying out is provided. However, the in-stage transport means 4 may be constituted by a single transport means, and in the processing stage 2, when wet processing using liquid is performed on the substrate 1, the liquid is taken out and outside the stage. From the viewpoint of preventing fouling in the conveying means, the robot is configured to be carried out using a robot.

  The carry-in side conveyance unit 30 (when the carry-out side conveyance unit is provided, this carry-out side conveyance unit is also similar) includes a plurality of rotation shafts 33 supported at both ends by the support member 32, and the rotation shaft 33. And a plurality of rollers 34 provided at predetermined pitch intervals, and the rotation shaft 33 is rotationally driven by variable speed rotation drive means (not shown) including a motor or the like. Accordingly, one rotary shaft 33 and the other rotary shaft 33 are connected by a transmission belt or a transmission gear. The rotating shaft 33 and the roller 34 have substantially the same configuration as the conveyor that constitutes the out-of-stage conveying means. That is, the pitch interval of the rotating shaft 33 and the diameter of the roller 34 are substantially the same as those of the rotating shaft and the rollers constituting the out-stage transport means. Therefore, when the rotary shaft 33 is rotationally driven, the substrate 1 is sent toward the inside of the processing stage 2. Further, the support member 32 is configured to be movable up and down by lifting means (not shown).

  Further, as shown in FIG. 4, the main transport unit 31 has shaft support members 36R and 36L on both sides, and a plurality of rotating shafts 37 are provided between the shaft support members 36R and 36L. ing. The rotation shaft 37 is disposed at a position below the substrate support member 11 in the spindle 3, and a roller 38 is attached to each rotation shaft 37 at an appropriate position. Here, the roller 38 is disposed at a position where it does not interfere with the support arm 12 and the reinforcing ring 13 in the substrate support member 11, and the rotary shaft 37 is divided at a position where the rotary shaft 10 passes through the spindle 3. Thus, the shaft support members 36R and 36L are connected to each other. The roller 38 has a larger diameter than the roller 34 in the carry-in side conveyance unit 30, and thereby, a predetermined interval is provided in the height direction between the substrate conveyance surface F by the roller 34 and the rotary shaft 10. None, when the substrate support member 11 is lowered, the tips of the support pins 14 and the positioning pins 15 provided on the substrate support member 11 are positioned below the substrate transport surface F.

  Rotation transmission means such as a belt or a gear is provided inside the shaft support members 36R and 36L provided on both sides of the main transport section 31, and one of the shaft support members 36R is connected by these rotation transmission means. A variable speed rotation drive member 39 made up of a motor or the like for rotating the rotation shafts 37 is provided. Accordingly, by operating the variable speed rotation drive member 39 and rotating the rotary shaft 37, the substrate 1 contacting the roller 38 can be conveyed. Further, an L-shaped arm 40 is provided at a position on the carry-in side conveying unit 30 side in the main conveying unit 31, and a plurality of rollers 41 having the same size as the roller 34 are provided at the tip of the L-shaped arm 40. ing. However, this roller 41 is rotatable, but is not driven to rotate. Both the carry-in side conveyance unit 30 and the main conveyance unit 31 can be moved up and down by elevating means (not shown).

  The in-stage transport unit 4 further includes a mechanism for positioning the substrate 1 to be loaded at a predetermined position in the main transport unit 31. In order to regulate the position of both the left and right parts in the conveyance direction of the substrate 1, there are a pair of operation plates 46 provided with a pair of guide rollers 45 on the front and rear, respectively. It is movable. The operation plates 46 attached to these guide rollers 45 are provided at the position of the carry-in transport unit 30, and the left and right guide rollers 45 are kept separated until the substrate 1 is transported to the carry-in transport unit 30. After the leading edge of the substrate 1 passes through the carry-in side conveyance unit 30, the guide roller 45 moves in a direction close to each other and comes into contact with the left and right sides of the substrate 1, thereby Directional positioning is made. Further, in order to position the substrate 1 in the front-rear direction, a deceleration sensor 47 as a first detection unit and a second detection unit disposed at the stop position of the substrate 1 in the conveyance direction of the main conveyance unit 31. A stop sensor 48 is provided. Therefore, when the substrate 1 transported by the in-stage transport means 4 is transported to the position of the deceleration sensor 47, the substrate 1 is decelerated thereafter, and when it reaches the position of the stop sensor 48, the position is reached. Thus, the substrate 1 is stopped. In this way, after the substrate 1 is decelerated by the deceleration sensor 47, the operation of the in-stage transport means 4 is stopped when detected by the stop sensor 48, thereby strictly preventing the substrate 1 from being stopped without providing a stopper or the like. Will be able to do.

  As apparent from FIG. 2, the spin cup 5 is composed of a lid-shaped cylindrical cup body 49 that surrounds the substrate 1, and is held in the raised position while the substrate 1 is transported by the in-stage transport means 4. The substrate 1 is held at a position where it does not interfere. When the substrate 1 is transferred onto the substrate support member 11 of the spindle 3 and rotates, the substrate 1 descends from that position and surrounds the substrate 1. As a result, the liquid splashed by the action of the centrifugal force when the substrate 1 is rotated is received by the cup body 49 and flows downward. Thus, in order to drive the cup body 49 up and down, the cup lifting means 50 such as a cylinder and the guide rod 52 inserted into the bearing 51 are mounted.

  Further, the processing stage 2 is provided with a liquid supply means 53. The liquid supply means 53 includes an ejection unit 53a that ejects a desired liquid toward the substrate 1, an arm unit 54, and a rotary shaft 55 that is connected to the arm unit 54 and swings the ejection unit 53a in the horizontal direction. Composed. In the stage before the substrate 1 is transported into the processing stage 2, the ejection unit 53 a is disposed at the side position of the processing stage 2, and when the substrate 1 is transferred to the substrate support member 11 and lifted, The arm portion 54 rotates about the rotation shaft 55, and the ejection unit 53 a moves to a position including the rotation center of the substrate 1. In this state, the cup body 49 of the spin cup 5 is lowered, but the cup body 49 is formed with a recess or the like for preventing interference with the arm portion 54.

  The substrate spin processing apparatus is configured as described above. Next, a method for performing a predetermined process on the substrate 1 using the substrate spin processing apparatus will be described. In addition, as the board | substrate 1, it is a glass substrate which comprises a liquid crystal panel, and the process liquid applied is the peeling liquid etc. after an etching.

  First, as shown in FIG. 5, the substrate 1 is transported to the processing stage 2 from the previous process by the off-stage transport means. At this time, the substrate support member 11 provided at the tip of the rotary shaft 10 in the spindle 3 is lowered, and the transport surface of the in-stage transport unit 4 is set at the same height as the transport surface of the transport device outside the stage. Further, the cup body 49 of the spin cup 4 is kept in the raised position. Moreover, the guide rollers 45 for positioning the left and right side portions of the substrate 1 are held at positions that are separated from each other. And the conveyance speed in the in-stage conveyance means 4 is made to correspond with the conveyance speed by the conveyance means outside a stage. Here, since the roller 34 of the carry-in side conveyance unit 30 has a small diameter and the diameter of the roller 38 in the main conveyance unit 31 is large, the rotation speed of the rotation shaft 33 to which the roller 34 is attached is the rotation axis to which the roller 38 is attached. It becomes faster than the rotational speed of 37. By setting the roller 34 of the carry-in side conveyance unit 30 to have the same diameter as the roller of the conveyance device outside the stage, the rotation speed of the rotation shaft 33 is rotated at the same speed as the rotation shaft to which the roller of the conveyance device outside the stage is attached. Become.

  The substrate 1 is carried into the carry-in side conveyance unit 30 in the in-stage conveyance unit 4 from the outside-stage conveyance unit, and is further conveyed by the main conveyance unit 31. While the substrate 1 is being transported by the in-stage transport means 4, the support pins 14 and the positioning pins 15 of the substrate support member 11 are positioned lower than the transport surface F by the in-stage transport means 4. 14 and 15 are kept out of contact with the back surface of the substrate 1. Then, after the substrate 1 starts to be transferred by the in-stage transfer means 4, when it reaches a position immediately before or after reaching the main transfer portion 31, the operation plates 46 and 46 are brought close to each other and the guide rollers 45 and 45 are moved to the substrate. 1, the roller 45 rolls with respect to the side end surface of the substrate 1. After the rear end portion of the substrate 1 is detached from the outside-stage transfer means and completely transferred to the in-stage transfer means 4 side, the front end portion enters the position where the deceleration sensor 47 is disposed. .

  In this way, when the leading end of the substrate 1 is detected by the deceleration sensor 47, the rotational speeds of the variable speed rotation driving member 39 in the carry-in side transport section 30 and the variable speed rotation driving member 39 in the main transport section 31 are continuously set. Reduce. Then, when the substrate 1 is transported by the in-stage transport means 4 and its tip reaches the position of the stop sensor 48, the operations of both variable speed rotation drive members are stopped as shown in FIGS. Let Immediately before this stop, the substrate 1 is transported at a very low speed, so even if the substrate 1 is large, the inertial force does not cause a position shift, and the stop sensor 48 is arranged accurately. Stops at the set position. Moreover, since the right and left side portions are accurately positioned by the action of the guide roller 45 when guided into the in-stage transport means 4, the substrate 1 stops at a predetermined position.

  Therefore, as shown in FIG. 8, the positioning pin 15 is mounted on the substrate 4 as indicated by the arrow L along with the rotary shaft 10 and the substrate support member 11 provided at the tip of the rotary shaft 10 by the lifting drive means 23 constituting the substrate lifting means. The support pins 14 are brought into contact with the back surface of the substrate 1 and the substrate 1 is raised to a predetermined height position so as to be separated from the roller 38 in the main transport unit 31. . At the same time, the conveyor lifting member 30 lowers the carry-in transport unit 30 and the main transport unit 31 by a predetermined amount as indicated by the arrow D. Here, the carry-in side conveyance unit 30 and the main conveyance unit 31 are lowered because the cup body 49 is moved to the carry-in side conveyance unit 30 and the main conveyance unit when the spin cup 5 is lowered later to surround the substrate 1. In order not to interfere with the motor 31, if the rising stroke of the substrate support member 11 is increased, these may be held stationary. Further, the carry-in side conveyance unit 30 and the main conveyance unit 31 can be lowered without raising the substrate support member 11. As described above, when the substrate 1 is separated from the main transport unit 31 and supported by the substrate support member 11, the substrate 1 is held in a substantially horizontal state by a large number of support pins 14, and each side is respectively It is positioned by the positioning pins 15 provided at two places and is stably held.

  In this state, as shown in FIG. 9, the rotation shaft 55 is rotated to rotate the ejection portion 53 a constituting the liquid supply means 53 to a position including the rotation center in the substrate 1. Further, the cup lifting means 50 constituting the spin cup 5 is operated to lower the cup body 49 so that the substrate 1 supported by the substrate support member 11 is surrounded by the cup body 49.

  Accordingly, the motor 19 is operated to rotationally drive the rotating shaft 10 in the direction of the arrow R, thereby rotating the substrate 1 supported by the substrate support member 11 and the processing liquid from the injection portion 53a of the liquid supply means 53. Is supplied to the surface of the substrate 1. The processing solution supplied in this manner is uniformly diffused over the entire substrate 1 by the action of centrifugal force, and the entire substrate 1 is uniformly processed with high accuracy without being subjected to liquid processing, for example, resist stripping with a stripping solution. Will be done. Then, the processing liquid that has traveled to the end of the substrate 1 scatters from this end, and this splatter is received by the cup body 49 constituting the spin cup 5 and collected so as to flow downward. . In addition, it is necessary to make the shape so that the processing liquid scattered toward the cup body 49 does not rebound and adhere to the substrate 1 again.

  When the liquid treatment on the substrate 1 is completed as described above, the cup body 49 of the spin cup 5 is raised, and the liquid supply means 53 is retracted from the upper portion of the substrate 1. In this state, by raising the main conveyance unit 31 (and the carry-in side conveyance unit 30) constituting the in-stage conveyance unit 4 and lowering the rotating shaft 10, the substrate support member 11 provided at the front end of the substrate support member 11 is main conveyance. The substrate 1 is transferred again to the main transport unit 31 by being lowered to a position lower than the transport surface of the unit 31.

It is a top view of the spin processing apparatus which shows one Example of this invention. It is a front view of FIG. It is a structure explanatory drawing containing the rotation drive mechanism of a board | substrate, and the mechanism for moving it up and down. It is the figure seen from the arrow direction of FIG. It is a top view similar to FIG. 1 which shows the state which is carrying in the board | substrate to the process stage. FIG. 2 is a plan view similar to FIG. 1 in a state where a substrate is positioned. It is a front view in the state of FIG. It is operation | movement explanatory drawing when a board | substrate is made into the state which can be rotated. It is a top view similar to FIG. 1 which shows the state which supplies a process liquid to a board | substrate and rotationally drives this board | substrate.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate 2 Processing stage 3 Spindle 4 In-stage conveyance means 5 Spin cup 10 Rotating shaft 11 Substrate support member 14 Support pin 15 Positioning pin 23 Lifting drive means 30 Carry-in side conveyance path 31 Main conveyance path 34, 38, 41 Roller 39 Variable speed Rotation drive member 45 Guide roller 47 Deceleration sensor 48 Stop sensor 49 Cup body 50 Cup elevating means 53 Liquid supply means 54 Arm 55 Rotating shaft

Claims (8)

The substrate is transferred to a spin processing stage from a transfer path for transferring the substrate in a horizontal state, and a predetermined process for the substrate is performed by horizontally rotating the spindle disposed on the spin processing stage. In a substrate spin processing apparatus for performing
A substrate support member that is provided in connection with the tip of the spindle, and that has a plurality of support arms mounted with support pins that support the back surface of the substrate at a plurality of locations and positioning pins that position the peripheral surface of the substrate;
In order to transport the substrate within the spin processing stage to the position where the substrate support member is disposed, the substrate is at least longer than the total length in the substrate transport direction by the transport length between the substrate stop position and the substrate deceleration start position. In-stage transport means having a transport path;
First detection means for detecting that the substrate transported by the in-stage transport means has reached a deceleration start position and decelerating the transport speed of the substrate;
Second detection means for detecting that the substrate has reached a stop position and stopping the in-stage transport means;
The in-stage transport means comprises a roller conveyor having a plurality of rollers mounted on a rotating shaft member ,
The rotating shaft member is disposed so as to partially intersect the substrate support member at different positions in the height direction,
The substrate support member is mounted on the lifting / lowering means, and the substrate support member is driven up and down by the lifting / lowering means, and the substrate support member is lowered from the transport surface of the substrate by the roller conveyor and lifted from the transport surface. The substrate support member is disposed at a position sandwiched between the transport surface by the roller conveyor and the rotary shaft member when the substrate support member is lowered. A substrate spin processing apparatus. 2. The substrate spin processing apparatus according to claim 1, wherein the spin processing stage is provided with a liquid supply means for supplying a predetermined liquid to the surface of the substrate while the substrate is rotating. A spin cup for restricting the liquid adhering to the substrate from splashing when being rotated by the spindle, an operating position in which the substrate is surrounded by the spin cup, and transporting means in the stage. 3. The substrate spin processing apparatus according to claim 1, further comprising a cup lifting / lowering means that moves up and down so as to be in an open position that enables conveyance. 2. The substrate spin processing apparatus according to claim 1, wherein the rotating shaft member constituting the roller conveyor of the in-stage transport means is driven by a variable speed motor. 2. The in-stage transport means is provided with positioning members that are positioned upstream of the substrate in the transport direction and can be contacted and separated on both right and left sides in the transport direction of the substrate. Substrate spin processing equipment. 3. The substrate spin processing apparatus according to claim 2, wherein the liquid supply means is configured to reciprocate between an upper position of the substrate and a position separated from the upper position of the substrate. This substrate is made up of a conveyor, and the substrate is transferred from a conveyance path for conveying the substrate in a horizontal state to a spin processing stage having an in-stage conveyance means composed of a roller conveyor having a plurality of rollers mounted on a rotating shaft member. A spin processing method for performing predetermined processing on the substrate by horizontally rotating with a spindle disposed on a processing stage,
A substrate support member provided by connecting a plurality of support arms to which a support pin for supporting the back surface of the substrate at a plurality of locations and a positioning pin for positioning an end surface around the substrate to a spindle is provided in the in- stage transfer means. Located below the conveying surface of the roller conveyor, above the rotating shaft member, and arranged so as to partially intersect this rotating shaft member at a different position in the height direction ,
Is shifted to the stage in the transport means of the spin-processing stage the substrate is conveyed at a predetermined conveying speed by the conveyor,
After the substrate is completely transferred to the in-stage transfer means, the transfer speed of the substrate is reduced.
When the substrate reaches a predetermined position in the spin processing stage, the conveyance of the substrate is stopped,
The substrate support member is lifted so that the substrate is separated from the transfer surface by the in-stage transfer means, and the spindle is rotated horizontally by the spindle while the end surface around the substrate is in contact with the positioning pin. A substrate spin processing method. This substrate is made up of a conveyor, and the substrate is transferred from a conveyance path for conveying the substrate in a horizontal state to a spin processing stage having an in-stage conveyance means composed of a roller conveyor having a plurality of rollers mounted on a rotating shaft member. A spin processing method for performing predetermined processing on the substrate by horizontally rotating with a spindle disposed on a processing stage,
A substrate support member provided by connecting a plurality of support arms to which a support pin for supporting the back surface of the substrate at a plurality of locations and a positioning pin for positioning an end surface around the substrate to a spindle is provided in the in- stage transfer means. Located below the conveying surface of the roller conveyor, above the rotating shaft member, and arranged so as to partially intersect this rotating shaft member at a different position in the height direction ,
Is shifted to the stage in the transport means of the spin-processing stage the substrate is conveyed at a predetermined conveying speed by the conveyor,
While the substrate is being transported by the in-stage transport means, the left and right side portions of the substrate are positioned and guided,
After the substrate is completely transferred to the in-stage transfer means, the transfer speed of the substrate is reduced.
When the substrate reaches a predetermined position in the spin processing stage, the conveyance of the substrate is stopped,
By raising the substrate support member, the substrate is separated from the transfer surface by the in-stage transfer means, and the end surface around the substrate is in contact with the positioning pin, and is rotated horizontally by the spindle.
A substrate spin processing method, wherein a predetermined processing liquid is supplied to the substrate during the rotation.

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