CN106773157B - Position correction apparatus and method for correcting position - Google Patents
Position correction apparatus and method for correcting position Download PDFInfo
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- CN106773157B CN106773157B CN201611110051.5A CN201611110051A CN106773157B CN 106773157 B CN106773157 B CN 106773157B CN 201611110051 A CN201611110051 A CN 201611110051A CN 106773157 B CN106773157 B CN 106773157B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
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- Crystallography & Structural Chemistry (AREA)
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of position correction apparatus and method for correcting position, are corrected to designated position for substrate, position correction apparatus includes the first correction group and the second correction group.First correction group includes the first correction unit with the first elastic component, and the second correction group includes the second correction unit with the second elastic component, and the coefficient of elasticity of the second elastic component is less than the coefficient of elasticity of the first elastic component；The first correction group is first driven to be moved to the first precalculated position along first direction when use, then the second correction group is driven to be moved to the second precalculated position in a second direction, second direction and first direction on the contrary, with by substrate clamping between the first correction group and the second correction group.The coefficient of elasticity of the correction group of elder generation's start of the present invention is big, ensures the Stability and veracity of correction, and the coefficient of elasticity of the correction group of rear start is small, ensures that the active force being applied on substrate increases the risk that curve is gentle, and reduction substrate cracks.
Description
Technical field
The present invention relates to a kind of position correction apparatus and method for correcting position, in particular for the placement position to display panel
It sets and is corrected and can prevent display panel in correction course from cracking the even position correction apparatus of fragmentation and position correction
Method.
Background technology
Liquid crystal display device has many merits such as thin fuselage, power saving, radiationless, is widely used.Make liquid
It when crystal device, needs to form electrical micro-structure on the surface of glass substrate, in order to ensure electrical micro-structure is formed in just
On true position, need designated position glass substrate being positioned in operating table surface.In practical operation, glass substrate is positioned over
It is not necessarily accurately placed when in operating table surface in above-mentioned designated position, therefore needs are right after glass substrate is positioned over operating table surface
Its position is corrected.Referring to FIG. 1, Fig. 1 is the partial top view of position correction apparatus in the prior art.As shown in Figure 1, position
It sets means for correcting 1000 ' and includes the first correction group 1100 ' and the second correction group 1200 ', the first correction group 1100 ' and the second school
Positive group 1200 ' exerts a force (force direction is as shown by the arrows in Figure 1) from the opposite sides of substrate 2000 ' respectively, by substrate 2000 '
It clamps and pushes to designated position.In general, the edge of glass substrate is about 100Mpa by the critical value ruptured is hit,
If the first correction group 1100 ' and/or the second correction group 1200 ' are during clamping and pushing substrate 2000 ' to substrate 2000 '
Impact force it is excessive, then substrate 2000 ' may be caused to crack, increase follow-up process during substrate 2000 ' occur fragmentation
Risk.
Therefore, how to substrate carry out position correction during prevent it from cracking, become the side of industry research
One of to.
Invention content
The purpose of the present invention is to provide a kind of position correction apparatus and method for correcting position, can prevent to substrate into
It is cracked during row position correction, to reduce the risk that fragmentation occurs for substrate.
In order to achieve the above object, the present invention proposes a kind of position correction apparatus, for that will be positioned in operating table surface
Substrate is corrected to designated position, which has the first opposite side and the second side, and when which is located at the designated position, this
Side is located at the first precalculated position, which is located at second precalculated position, which includes the first correction group
And second correction group.First correction group is arranged adjacent to first side of the substrate, which includes the first correction unit,
The first correction unit includes the first elastic component, which has first coefficient of elasticity；Second correction group is adjacent to the base
The second side of plate is arranged, which includes the second correction unit, which includes the second elastic component, should
There is second elastic component first coefficient of elasticity, the first coefficient of elasticity to be less than the first coefficient of elasticity；In use, first drive this
One correction group is moved to first precalculated position along first direction, which is the side that the second side is directed toward in first side
To then driving second correction group to be moved to second precalculated position in a second direction, the second direction and the first direction
On the contrary, thus by the substrate clamping between first correction group and second correction group.
As optional technical solution, which also includes the first cylinder, first cylinder connect this first
Correction group, first cylinder is for driving first correction group to move.
As optional technical solution, which also includes that first to be connected with first elastic component is kept out
Portion, which, which has, first keeps out cambered surface, and when which is moved to second precalculated position, this first is kept out
Cambered surface abuts first side of the substrate.
As optional technical solution, which includes the first connecting portion being connected and the first abutting part, is somebody's turn to do
The both ends of first connecting portion are separately connected first elastic component and first abutting part, which there is this first to keep out
Cambered surface, the hardness of the first connecting portion are more than the hardness of first abutting part.
As optional technical solution, which also includes that third corrects unit, which also includes
4th correction unit, the first correction unit is opposite with the second correction unit, which corrects unit and the 4th correction is single
It is first opposite.
As optional technical solution, the material of the first connecting portion is polyether-ether-ketone, and the material of first abutting part is
Polytetrafluoroethylene (PTFE).
As optional technical solution, which is single position；Or first precalculated position is one section
Regional extent.
In addition, the present invention also proposes a kind of method for correcting position, for by the substrate being positioned in operating table surface correct to
Designated position, which has the first opposite side and the second side, and when which is located at the designated position, first side is positioned at the
One precalculated position, the second side are located at the second precalculated position, which includes：
Step a：Position correction apparatus is provided, which includes the first correction group and the second correction group.The
One correction group is arranged adjacent to first side of the substrate, which includes the first correction unit, the first correction unit
Including the first elastic component, which has first coefficient of elasticity；Second correction group is set adjacent to the second side of the substrate
It sets, which includes the second correction unit, which includes the second elastic component, which has
First coefficient of elasticity, the first coefficient of elasticity are less than the first coefficient of elasticity；
Step b：Drive first correction group to be moved to first precalculated position along first direction, the first direction be this
It is directed toward the direction of the second side in side；And
Step c：Drive second correction group to be moved to second precalculated position in a second direction, the second direction with this
One direction is on the contrary, thus by the substrate clamping between first correction group and second correction group.
As optional technical solution, it also includes step d to have multiple vacuum absorption holes, this method in the operating table surface：
After correction, multiple vacuum absorption holes adsorb the substrate, which is positioned at the designated position.
As optional technical solution, first correction group is located at the first home position before correcting, the second correction group position
In the second home position, this method also includes step e：After correction, second correction group is first driven to move back to second original
Beginning position, then first correction group is driven to move back to first home position.
The position correction apparatus and method for correcting position of the present invention, in correction course, the bullet of the first correction group of first start
Property coefficient is larger, it is ensured that the coefficient of elasticity of the Stability and veracity of correction, the second correction group of rear start is smaller, it is ensured that
The active force being applied on substrate increases the risk that curve is gentle, and reduction substrate cracks, and reduces substrate and the several of fragmentation occur
Rate.
Below in conjunction with the drawings and specific embodiments, the present invention will be described in detail, but not as a limitation of the invention.
Description of the drawings
Fig. 1 is the partial top view of the position correction apparatus of the prior art；
Fig. 2 is the flow chart of the method for correcting position of the present invention；
Fig. 3 A are partial top view when substrate of the invention is positioned over operating table surface；
Fig. 3 B are partial top view when the first correction group of the invention is moved to the first precalculated position；
Fig. 3 C are partial top view when the second correction group of the invention is moved to the second precalculated position；
Fig. 4 A are the partial elevation view of the first correction unit of the present invention；
Fig. 4 B are the partial top view of the first correction unit of the present invention；
Fig. 4 C are the partial left side view of the first correction unit of the present invention.
Specific implementation mode
The explanation of following embodiment is to refer to additional schema, to illustrate the particular implementation that the present invention can be used to implement
Example.The direction term that the present invention is previously mentioned, such as "upper", "lower", "front", "rear", "left", "right", " side " etc. are only references
The direction of annexed drawings.Therefore, the direction term used is to illustrate and understand the present invention, rather than to limit the present invention.
In the examples below, in various figures, same section is to be given the same reference numerals.
It is the flow chart of the method for correcting position of the present invention to please refer to Fig.2 to Fig. 4 C, Fig. 2；Fig. 3 A are the substrate of the present invention
It is positioned over partial top view when operating table surface；Fig. 3 B are office when the first correction group of the invention is moved to the first precalculated position
Portion's vertical view；Fig. 3 C are partial top view when the second correction group of the invention is moved to the second precalculated position；Fig. 4 A are this hair
The partial elevation view of the first bright correction unit；Fig. 4 B are the partial top view of the first correction unit of the present invention；Fig. 4 C are this
The partial left side view of first correction unit of invention.
The substrate 2000 that the present invention is used to be positioned in operating table surface (not being painted) is corrected to designated position P, to ensure
Electrical micro-structure or other structures can be formed in the correct position on substrate 2000.As shown in Figure 3A, substrate 2000 has phase
To the first side 2100 and the second side 2200.When substrate 2000 is located at designated position P, it is pre- that the first side 2100 will be located at first
A is set in positioning, and the second side 2200 will be located at the second precalculated position B.In other words, the first precalculated position A and the second precalculated position B are true
The position of correction metacoxal plate 2000 is determined.In practical operation, the first precalculated position A can be single position or one section of regional extent
(be usually smaller regional extent, the visual available accuracy demand of size of regional extent and determine).When the first precalculated position A is
When single position, the first side 2100, which is located at the first precalculated position A, means that the first side 2100 is aligned the first precalculated position A；When
When one precalculated position A is one section of regional extent, the first side 2100, which is located at the first precalculated position A, means that the first side 2100 is located at this
In regional extent.Likewise, the second precalculated position B can be single position or one section of regional extent, when the second precalculated position B is
When single position, the second side 2200, which is located at the second precalculated position B, means that the second side 2200 is aligned the second precalculated position B；When
When two precalculated position B are one section of regional extent, the second side 2200, which is located at the second precalculated position B, means that the second side 2200 is located at this
In regional extent.
The method for correcting position of the present invention introduced below, it includes：
Step a (S100)：Position correction apparatus 1000 is provided.As shown in Figure 3A, position correction apparatus 1000 includes first
Correction group 1100 and the second correction group 1200.First side 2100 of 1100 adjacent substrates 2000 of the first correction group is arranged, and first
Correction group 1100 includes the first correction unit 1110, and the first correction unit 1110 includes the first elastic component 1120, first elasticity
Part 1120 has first coefficient of elasticity k1.The second side 2200 of second correction group, 1200 adjacent substrates 2000 is arranged, the second correction
Group 1200 includes the second correction unit 1210, and the second correction unit 1210 includes the second elastic component 1220, the second elastic component 1220
It is less than first coefficient of elasticity k1 with first coefficient of elasticity k2, first coefficient of elasticity k2.
Step b (S200)：As shown in Figure 3B, the first correction group 1100 of driving is moved to the first pre-determined bit along first direction X
A is set, first direction X is the direction that the second side 2200 is directed toward in the first side 2100.In the present embodiment, the first correction group 1100 is moved to
First precalculated position A refers to that the front end of the first correction group 1100 reaches the first precalculated position A.
Step c (S300)：As shown in Figure 3 C, Y is moved to the second pre-determined bit to the second correction group 1200 of driving in a second direction
B, second direction Y and first direction X are set on the contrary, to which substrate 2000 is held on the first correction group 1100 and the second correction group
Between 1200.In the present embodiment, the second correction group 1200 is moved to the second precalculated position B and refers to the second correction group 1200 most
Front end reaches the second precalculated position B.
The method for correcting position and position correction apparatus of the present invention, the first coefficient of elasticity k1 of the first elastic component 1120 are more than
The first coefficient of elasticity k2 of second elastic component 1220, and in correction course, the first correction group with the first elastic component 1120
1100 first starts, start after the second correction group with the second elastic component 1220, that is, coefficient of elasticity is larger in the present invention the
The first start of one correction group 1100, start after the second smaller correction group 1200 of coefficient of elasticity.
Since the first coefficient of elasticity k1 of the first elastic component 1120 in the first correction group 1100 is larger, if being applied to the first bullet
Active force on property part 1120 is smaller, then it will not be deformed upon, that is, position will not occur for the front end of the first correction group 1100
It moves.So, after the first correction group 1100 is first moved to the first precalculated position A, in follow-up second correction group 1200 along
During two direction Y are moved towards the second precalculated position B, the first school is transferred to by substrate 2000 in the second correction group 1200
The active force of positive group 1100 deforms upon insufficient for the first elastic component 1120, ensure that and is abutted with the first correction group 1100
First side 2100 of substrate 2000 will not be moved away from the first precalculated position A because of the pushing of the second correction group 1200, it is ensured that substrate
The final position of 2000 the first side 2100 is located at the first precalculated position A, to improve the Stability and veracity of correction.
In practical operation, preferably, the first precalculated position A and the second precalculated position B are set as one section of regional extent.
One of reason is：First correction group 1100 need to drive by other driving devices (such as motor) to designated position, drive
At when the first correction group 1100 position depend on driving device kinematic accuracy it is horizontal, the first precalculated position A is set as one
Segment regional extent, can not only reduce the kinematic accuracy requirement of driving device, but also can meet Product Precision requirement.Second is predetermined
The case where position B, is similar with the first precalculated position A, does not repeat separately.
The two of reason are：When the first correction group 1100 is moved to the first precalculated position A, the second correction group 1200 is then driven
During being moved to the second precalculated position B, the second correction group 1200 is by 2000 transmitting forces of substrate to the first correction group
1100, if the first precalculated position A is single position, while displacement has occurred in the first correction group 1100 under above-mentioned active force, then
First side 2100 of substrate 2000 will follow the first correction group 1100 to be also subjected to displacement, and cause finally to be moved away from the first precalculated position A.
If the first precalculated position A is one section of regional extent, even if the second correction group 1200 is transferred to the first correction group by substrate 2000
1100 active force makes the first elastic component 1120 that deformation slightly have occurred, and makes the substrate abutted with the first correction group 1100
Displacement slightly has occurred in 2000 the first side 2100, but since the first precalculated position A is one section of regional extent, therefore still can guarantee base
First side 2100 of plate 2000 is located at the first precalculated position A.
The size of above-mentioned zone range, can require according to actual Product Precision and the precision level of driving device is come really
It is fixed, and suitable first correction group, 1100 and second correction group 1200 of coefficient of elasticity is selected according to this regional extent, to ensure school
Positive Stability and veracity.
In addition, being driven by external force in the second correction group 1200, Y is moved towards the second precalculated position B in a second direction
In the process, the second correction group 1200 comes into contact with the second side 2200 of substrate 2000, due to the elasticity system of the second elastic component 1220
Number k2 it is smaller, therefore its be applied to the active force in the second side 2200 of substrate 2000 increase curve it is more gentle, reduce second
Correction group 1200 reduces the risk that substrate 2000 cracks to the impact force of substrate 2000, reduces substrate 2000 and fragmentation occurs
Probability.
In practical operation, can have multiple vacuum absorption holes (not being painted), position of the invention in operating table surface (not being painted)
Bearing calibration is set also to may include：
Step d：After correction, substrate 2000 is positioned at finger by above-mentioned multiple vacuum absorption holes sorbing substrates 2000
P is set in positioning.Since substrate 2000 is fixed in designated position P so that on substrate 2000 formed electrical structure micro-structure or other
It will not be subjected to displacement during micro-structure, so that it is guaranteed that electrically micro-structure or other micro-structures are formed on substrate 2000 just
True position.Certainly, after correction, also the position of substrate 2000 can be fixed by other means, it is follow-up to ensure
The quality of processing procedure is not limited with above-mentioned vacuum suction.
In practical operation, as shown in Figure 3A, the first side 2100 of preceding first correction group, 1100 adjacent substrates 2000 is corrected, and
Positioned at the first home position A ', the second side 2200 of 1200 adjacent substrates 2000 of the second correction group, and it is located at the second home position
B ', method for correcting position of the invention also include：
Step e：After correction, the second correction group 1200 is first driven to move back to the second home position B ', then drive first
Correction group 1100 moves back to the first home position A '.
In practical operation, the execution sequence interchangeable of step d and step e, in no particular order, user can be according to reality for the two
The sequence for both needing voluntarily to determine.
The method for correcting position of the present invention, in correction course, first start has the first correction group of larger coefficient of elasticity
1100, then second correction group 1200 of the start with more small coefficient；After correction, first start has more small system
The second several correction groups 1200, then start have the first correction group 1100 of larger coefficient of elasticity.Priority start in correction course
The advantageous effect of sequence is in being set forth above.Illustrate the advantageous effect of start sequence after correcting below.
After correction, it is first moved away from the second correction group 1200, then the first side 2100 of substrate 2000 is resisted against first at this time
Correction group 1100 and be located at the first precalculated position A, if there is uncontrolled external force to act on substrate 2000 at this time, due to the first school
The coefficient of elasticity of positive group 1100 is larger, will not deform upon so that and the first side 2100 of substrate 2000 will not be subjected to displacement, from
And ensure that substrate 2000 can be stably positioned in designated position P, it is ensured that calibration result.When the first precalculated position A is a bit of area
When the range of domain, even if deformation slightly occurs under the effect of external force for the first correction group 1100 so that the first side of substrate 2000
2100 have occurred displacement slightly together, but since the first precalculated position A is a bit of regional extent, therefore still can guarantee substrate 2000
The first side 2100 be located at the first precalculated position A, so that it is guaranteed that substrate 2000 can be stably positioned in designated position P.
If being first moved away from the first correction group 1100 after correction, calibration result can be influenced.The reason is that：It is moved away from the first school
After positive group 1100, the second side 2200 of substrate 2000 is resisted against the second correction group 1200 and is located at the second precalculated position B, if at this time
There is uncontrolled external force to act on substrate 2000, since the coefficient of elasticity of the second correction group 1200 is smaller, is easier to occur
Deformation so that the second side 2200 of substrate 2000 follows the deformation of the second elastic component 1220 and is subjected to displacement, and leads to substrate 2000
It is moved away from designated position P, calibration result is affected.
As shown in Figure 3A, position correction apparatus 1000 also includes the first cylinder 1300, and the first cylinder 1300 connects the first school
Positive group 1100, the first cylinder 1300 is for driving the movement of the first correction group 1100.In practical operation, position correction apparatus 1000 is also
Can also include the second cylinder 1400, the second cylinder 1400 connects the second correction group 1100, and the second cylinder 1400 is for driving second
Correction group 1200 moves.In the present embodiment, the first cylinder 1300 and the second cylinder 1400 are two independent structures, practical operation
On, the first cylinder 1300 and the second cylinder 1400 can be structure as a whole, i.e., drive the first correction group 1100 using same cylinder
And second correction group 1200.Certainly, in practical operation, the first correction group 1100 and the second school can be also driven by other means
The movement of positive group 1200, is not limited with above-mentioned cylinder.
As shown in fig. 4 a and fig. 4b, in the present embodiment, the first elastic component 1120 be spring, and in the present embodiment first elasticity
Part 1120 includes three identical springs, and three springs are arranged in isosceles triangle, can be compared with the first correction group 1100 of determination
It is uniformly applied active force on substrate 2000, and will not occurs the first correction group 1100 during clamping substrate 2000
Crooked phenomenon.In practical operation, can also set the first elastic component 1120 to symmetrical two springs, four springs, five
Spring etc. (preferably greater than or equal to two springs), also or the first elasticity 1120 is a solid rubber column or the hollow rubber band
Deng, ensure the first correction group 1100 can apply uniform force.
In the present embodiment, the coefficient of elasticity of the first elastic component 1220 is 0.25N/mm~0.4N/mm, the second elastic component 1320
Coefficient of elasticity be 0.15N/mm~0.25N/mm.In practical operation, user can select according to actual needs, not more than
It states and is limited.
As shown in Fig. 4 A, Fig. 4 B and Fig. 4 C, the first correction unit 1110 also includes to be connected with the first elastic component 1120
First blocking part 1130, the first blocking part 1130 have first to keep out cambered surface 1101, the first correction group 1100 and the second correction group
When 1200 clamping substrate 2000, first keeps out the first side 2100 that cambered surface 1101 abuts substrate 2000.Second correction unit 1210
Compared with the first correction unit 1110, other than the coefficient of elasticity difference of elastic component, remaining structure is similar, therefore does not go to live in the household of one's in-laws on getting married separately
It states.
In the present invention, first keep out cambered surface 1101 curvature it is smaller, it is such to set such as between 100mm~200mm
Meter, may make first keep out cambered surface 1101 abut substrate 2000 when both contact area it is larger, to substrate 2000 by
When an equal amount of thrust, since first keeps out cambered surface 1101 and the contact area of substrate 2000 is larger in the present invention, to subtract
The small pressure of unit area, reduce 2000 part of substrate leads to the risk cracked by strong impact force.
In the present invention, one end due to the first cylinder 1300 prior to the first elastic component 1120 connects, then by the first elasticity
The other end of part 1120 is connect with the first blocking part 1130.That is, the first cylinder 1300 is by between the first elastic component 1120 flexible
It connects and is connect with the first blocking part 1130.So, during clamping substrate 2000, the effect of the first cylinder 1300 application
Power does not directly act on instead of on the first blocking part 1130, is buffered by the deformation of the first elastic component 1120 so that first supports
Stopper 1130 receives the active force gradually increased, and the active force that this is gradually increased is applied to the effect on substrate 2000
Power, so, during on 1130 clamping substrate 2000 of the first blocking part, what substrate 2000 received is not moment compared with
Big impact force, but the active force gradually increased, to reduce the risk that substrate 2000 cracks.In practical operation,
The maximum value of the active force can adjust decrement and the coefficient of elasticity of the first elastic component 1120 by actual needs to adjust, with suitable
Answer the substrate 2000 of varying strength.
As shown in fig. 4 a and fig. 4b, the first blocking part 1130 includes the first connecting portion 1140 being connected and the first abutting part
1150, the both ends of first connecting portion 1140 are separately connected the first elastic component 1120 and the first abutting part 1150, the first abutting part
1150 have above-mentioned first to keep out cambered surface 1101, and the hardness of first connecting portion 1140 is more than the hardness of the first abutting part 1150.By
It is higher in the hardness of first connecting portion 1140, it is wear-resistant, it is connected with the first elastic component 1120, it can be ensured that the first correction group
1100 service life and stability.When the first correction group 1100 and the second 1200 clamping substrate 2000 of correction group, due to
The hardness of one abutting part 1150 is relatively low, i.e., the part being in contact with substrate 2000 in correction course is softer, can clamp
Buffering is generated by the self-deformation of the first abutting part 1150 in journey, substrate 2000 in correction course is thus prevented to be pinched.
In the present embodiment, the material of first connecting portion 1140 is polyether-ether-ketone (PEEK), and the material of the first abutting part 1150 is polytetrafluoro
Ethylene (PTFE is commonly called as Teflon).In practical operation, the 1150 preferred lower material of friction coefficient of the first abutting part, to make
The first abutting part 1150 be not easy with 2000 adhesion of substrate, due to the when can avoid being moved away from the first correction group 1100 after correction
The adhesion of one abutting part 1150 and substrate 2000 and make being moved away from and be subjected to displacement with the first abutting part 1150 of substrate 2000, really
Protect calibration result.In practical operation, user is by voluntarily selection first connecting portion 1140 and first abuts according to actual needs
The material in portion 1150 is not limited with above-mentioned.
As shown in Fig. 3 A, Fig. 3 B and Fig. 3 C, the first correction group 1100 also includes that third corrects unit 1160, the second correction group
1200 also include the 4th correction unit 1260, and the first correction unit 1110 and second corrects unit 1210 relatively, and third correction is single
Member 1160 and the 4th correction unit 1260 are opposite.Such setting may make in clamping process that four corners of substrate 2000 can
By more uniform active force, be conducive to the correction of substrate 2000 to designated position P.The quantity of correction group can be according to practical need
Depending on it is required that, preferably, correction group is arranged in pairs.
The position correction apparatus and method for correcting position of the present invention, in correction course, the bullet of the first correction group of first start
Property coefficient is larger, it is ensured that the coefficient of elasticity of the Stability and veracity of correction, the second correction group of rear start is smaller, it is ensured that
The active force being applied on substrate increases the risk that curve is gentle, and reduction substrate cracks, and reduces substrate and the several of fragmentation occur
Rate.
By the above detailed description of preferred embodiments, it is intended to more clearly describe the feature of the present invention and spirit,
And not protection scope of the present invention is limited with above-mentioned disclosed preferred embodiment.On the contrary, its purpose
It is intended to cover various changes and has being arranged in the scope of the claims of the invention to be applied of equality.Cause
This, the apllied scope of the claims of the present invention should illustrate the most wide explanation of work according to above-mentioned, to cause it
Cover all possible change and the arrangement of tool equality.
Claims (10)
1. a kind of position correction apparatus, for correcting the substrate being positioned in operating table surface to designated position, which has
The first opposite side and the second side, when which is located at the designated position, which is located at the first precalculated position, the second side
Positioned at the second precalculated position, it is characterised in that the position correction apparatus includes：
First side of first correction group, the neighbouring substrate is arranged, which includes the first correction unit, first school
Positive unit includes the first elastic component, which has first coefficient of elasticity；And
The second side of second correction group, the neighbouring substrate is arranged, which includes the second correction unit, second school
Positive unit includes the second elastic component, which there is first coefficient of elasticity, the first coefficient of elasticity to be less than first bullet
Property coefficient；
In use, first correction group is first driven to be moved to first precalculated position along first direction, the first direction be this
The direction of the second side is directed toward in side, and second correction group is then driven to be moved to second precalculated position in a second direction, should
Second direction and the first direction are on the contrary, thus by the substrate clamping between first correction group and second correction group.
2. position correction apparatus according to claim 1, it is characterised in that：The position correction apparatus also includes the first gas
Cylinder, first cylinder connect first correction group, and first cylinder is for driving first correction group to move.
3. position correction apparatus according to claim 1, it is characterised in that：This first correction unit also include with this first
The first blocking part that elastic component is connected, which, which has, first keeps out cambered surface, second correction group be moved to this
When two precalculated positions, this first keeps out first side that cambered surface abuts the substrate.
4. position correction apparatus according to claim 3, it is characterised in that：First blocking part includes first to be connected
The both ends of interconnecting piece and the first abutting part, the first connecting portion are separately connected first elastic component and first abutting part, this
There is one abutting part this first to keep out cambered surface, and the hardness of the first connecting portion is more than the hardness of first abutting part.
5. position correction apparatus according to claim 4, it is characterised in that：The material of the first connecting portion is polyethers ether
The material of ketone, first abutting part is polytetrafluoroethylene (PTFE).
6. position correction apparatus according to claim 1, it is characterised in that：First correction group also includes that third correction is single
Member, second correction group also include the 4th correction unit, and the first correction unit is opposite with the second correction unit, the third school
Positive unit is opposite with the 4th correction unit.
7. position correction apparatus according to claim 1, it is characterised in that：First precalculated position is single position or one
Section regional extent.
8. a kind of method for correcting position, for correcting the substrate being positioned in operating table surface to designated position, which has
The first opposite side and the second side, when which is located at the designated position, which is located at the first precalculated position, the second side
Positioned at the second precalculated position, it is characterised in that the method for correcting position includes：
Step a：Position correction apparatus is provided, which includes：
First side of first correction group, the neighbouring substrate is arranged, which includes the first correction unit, first school
Positive unit includes the first elastic component, which has first coefficient of elasticity；And
The second side of second correction group, the neighbouring substrate is arranged, which includes the second correction unit, second school
Positive unit includes the second elastic component, which there is first coefficient of elasticity, the first coefficient of elasticity to be less than first bullet
Property coefficient；
Step b：First correction group is driven to be moved to first precalculated position along first direction, which is first side
It is directed toward the direction of the second side；And
Step c：Second correction group is driven to be moved to second precalculated position, the second direction and the first party in a second direction
To on the contrary, thus by the substrate clamping between first correction group and second correction group.
9. method for correcting position according to claim 8, it is characterised in that：There are multiple vacuum suctions in the operating table surface
Hole, this method also include：
Step d：After correction, multiple vacuum absorption holes adsorb the substrate, which is positioned at the designated position.
10. method for correcting position according to claim 8 or claim 9, it is characterised in that：First correction group is located at the before correction
One home position, second correction group are located at the second home position, and this method also includes：
Step e：After correction, second correction group is first driven to move back to second home position, then drives first correction
Group moves back to first home position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611110051.5A CN106773157B (en) | 2016-12-06 | 2016-12-06 | Position correction apparatus and method for correcting position |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611110051.5A CN106773157B (en) | 2016-12-06 | 2016-12-06 | Position correction apparatus and method for correcting position |
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| CN106773157A CN106773157A (en) | 2017-05-31 |
| CN106773157B true CN106773157B (en) | 2018-08-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201611110051.5A Active CN106773157B (en) | 2016-12-06 | 2016-12-06 | Position correction apparatus and method for correcting position |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109283708B (en) * | 2017-07-20 | 2021-12-21 | 合肥欣奕华智能机器有限公司 | Reference corrector, detection device and coordinate conversion method of detection device |
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| JPH0558515A (en) * | 1991-08-30 | 1993-03-09 | Toppan Printing Co Ltd | Positioning device for board |
| US5471279A (en) * | 1992-02-10 | 1995-11-28 | Canon Kabushiki Kaisha | Apparatus and method for supporting a substrate |
| JP2005116878A (en) * | 2003-10-09 | 2005-04-28 | Toshiba Corp | Method and device for supporting substrate |
| CN2829982Y (en) * | 2005-04-01 | 2006-10-25 | 阳程科技股份有限公司 | Aligning device |
| CN1929109A (en) * | 2005-09-05 | 2007-03-14 | 东京毅力科创株式会社 | Substrate positioning device and storing unit |
| CN201845752U (en) * | 2010-10-29 | 2011-05-25 | 北京京东方光电科技有限公司 | Substrate aligning device, substrate aligning platform and substrate conveying equipment |
| CN203218231U (en) * | 2013-01-17 | 2013-09-25 | 京东方科技集团股份有限公司 | Substrate aligning component and substrate aligning device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0558515A (en) * | 1991-08-30 | 1993-03-09 | Toppan Printing Co Ltd | Positioning device for board |
| US5471279A (en) * | 1992-02-10 | 1995-11-28 | Canon Kabushiki Kaisha | Apparatus and method for supporting a substrate |
| JP2005116878A (en) * | 2003-10-09 | 2005-04-28 | Toshiba Corp | Method and device for supporting substrate |
| CN2829982Y (en) * | 2005-04-01 | 2006-10-25 | 阳程科技股份有限公司 | Aligning device |
| CN1929109A (en) * | 2005-09-05 | 2007-03-14 | 东京毅力科创株式会社 | Substrate positioning device and storing unit |
| CN201845752U (en) * | 2010-10-29 | 2011-05-25 | 北京京东方光电科技有限公司 | Substrate aligning device, substrate aligning platform and substrate conveying equipment |
| CN203218231U (en) * | 2013-01-17 | 2013-09-25 | 京东方科技集团股份有限公司 | Substrate aligning component and substrate aligning device |
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| CN106773157A (en) | 2017-05-31 |
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