CN201845752U - Substrate aligning device, substrate aligning platform and substrate conveying equipment - Google Patents

Substrate aligning device, substrate aligning platform and substrate conveying equipment Download PDF

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Publication number
CN201845752U
CN201845752U CN2010205921645U CN201020592164U CN201845752U CN 201845752 U CN201845752 U CN 201845752U CN 2010205921645 U CN2010205921645 U CN 2010205921645U CN 201020592164 U CN201020592164 U CN 201020592164U CN 201845752 U CN201845752 U CN 201845752U
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CN
China
Prior art keywords
substrate
contraposition
alignment device
movable part
substrate alignment
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Expired - Lifetime
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CN2010205921645U
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Chinese (zh)
Inventor
吴健
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
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Beijing BOE Optoelectronics Technology Co Ltd
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Priority to CN2010205921645U priority Critical patent/CN201845752U/en
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Abstract

The utility model provides a substrate aligning device, a substrate aligning platform and substrate conveying equipment, wherein the substrate aligning device comprises a support component, an air cylinder main body, two moving pistons, a guide rail, an aligning component and an elastic component; an end part body is arranged at one end part of the support component, one end of each moving piston is arranged in a piston cylinder, the other end of the moving piston is opposite to the end part body; the aligning component comprises an aligning bracket, aligning rollers, a movable piece and a slide block; the aligning rollers are arranged on the aligning bracket, the movable piece is fixedly connected with the lower part of the aligning bracket, penetration holes are formed on the movable piece, and the moving pistons penetrate through the penetration holes; the slide block is arranged at the bottom of the movable piece and connected with the guide rail in a sliding manner; and the elastic component is arranged between the movable piece and the end part body. By adopting the substrate aligning device, the damage ratio of glass substrates in the process of alignment is reduced, and the acceptance rate of products during the alignment of substrates is improved.

Description

Substrate alignment device, substrate are to bit platform and apparatus for transporting substrate
Technical field
The utility model relates to the LCD manufacturing technology, and particularly a kind of substrate alignment device, substrate are to bit platform and apparatus for transporting substrate.
Background technology
In the manufacture process of Thin Film Transistor-LCD,, there are a lot of glass substrate contraposition steps in order to realize the normal transmission of glass substrate.Commonly used is the location of carrying out glass substrate by the substrate alignment device at present.
Fig. 1 is the structural representation of prior art substrate alignment device, and as shown in Figure 1, this substrate alignment device can comprise cylinder main body 11, moving piston 12, movable part guide rail 13, moving piston position-detection sensor 14 and contraposition pin 15.Wherein, movable part guide rail 13 is arranged on the below of cylinder main body 11, and moving piston 12 is movably arranged in the cylinder main body 11, can move back and forth along movable part guide rail 13; Contraposition pin 15 is fixedly installed on the end of moving piston 12, can move together along with moving piston 12, and this contraposition pin 15 is provided with the contraposition roller; Moving piston position-detection sensor 14 is used to detect the movement position of moving piston 12.This substrate alignment device is when work, the external drive signal drives electromagnetic valve and opens, feed the compressed air as power in cylinder main body 11, actuation movement piston 12 moves reciprocatingly along movable part guide rail 13, and drives contraposition pin 15 and move together substrate is carried out position correction.Moving piston position-detection sensor 14 can feed back to control system with the positional information of moving piston 12, guarantees that moving piston 12 motions put in place.
But there is following technological deficiency in the substrate alignment device of above-mentioned prior art: moving piston is in the process that drives the contraposition needle movement, and resiliency is relatively poor, makes that easily the hard power in the contraposition process is damaged glass substrate, causes the glass substrate fragmentation.For example particularly bigger for employed thin glass substrate damage in the undersized LCD of manufacturing, cause the occurred frequently of glass substrate fragmentation, reduced the product yield.
The utility model content
The purpose of this utility model provides a kind of substrate alignment device, substrate to bit platform and apparatus for transporting substrate, to solve the problem that substrate crushing easily takes place in the substrate contraposition process, realize reducing the glass substrate damage ratio in the contraposition process, the product yield when improving the substrate contraposition.
The utility model provides a kind of substrate alignment device, comprising: holding components, cylinder main body, piston-cylinder, moving piston, contraposition parts, elastomeric element and guide rail;
Described cylinder main body is fixed on the described holding components, and two described piston-cylinders are arranged in the described cylinder main body, and has the gap between two described piston-cylinders; The end of described holding components is provided with the end body, and an end of described moving piston is arranged in the described piston-cylinder, and the other end is relative with described end body;
Described contraposition parts comprise contraposition support, contraposition roller, movable part and slide block; Described contraposition roller is arranged on the described contraposition support, and described movable part is fixed in the bottom of described contraposition support, and described movable part is provided with perforating, and described moving piston is arranged in the described perforating; Described slide block be arranged on described movable part the bottom and with described holding components on the guide rail that is provided be slidingly connected; One end of described elastomeric element connects described movable part, and the other end connects described end body.
Aforesaid substrate alignment device, described elastomeric element are spring.
Aforesaid substrate alignment device also comprises: regulate parts; Described adjusting parts comprise adjusting rod and fixture; Described adjusting rod is arranged at two gap locations between the described moving piston, and is arranged in described spring; One end of described adjusting rod connects described movable part, and the other end passes described end body and stretches out the back by described fixture locking.
Aforesaid substrate alignment device, described fixture are adjusting nut.
Aforesaid substrate alignment device also comprises: the substrate detection part; Described substrate detection part comprises detection support and detecting sensor; Described detection support is arranged on the end position of the close described contraposition parts of described cylinder main body, and described detecting sensor is arranged on the described detection support.
Aforesaid substrate alignment device, described detection support is fixed on the described cylinder main body.
Aforesaid substrate alignment device, the end position of the close described contraposition parts of described cylinder main body also are provided with movable part location arresting stop, the end that an end of described movable part location arresting stop stretches out described cylinder main body.
Aforesaid substrate alignment device, the quantity of described detecting sensor equates with the quantity of described contraposition roller.
Aforesaid substrate alignment device, described detecting sensor are the light sensation transducer.
The utility model provides a kind of substrate to bit platform, comprises platform support and substrate alignment device described in the utility model, and described substrate alignment device is fixed on the described platform support.
The utility model provides a kind of apparatus for transporting substrate, comprises substrate transmission track and substrate described in the utility model to bit platform, and described substrate is arranged on the described substrate transmission track bit platform.
Substrate alignment device of the present utility model, substrate are to bit platform and apparatus for transporting substrate, by buffer structures such as elastomeric element are set, solved the problem that substrate crushing easily takes place in the substrate contraposition process, reduced the glass substrate damage ratio in the contraposition process, the product yield when having improved the substrate contraposition.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do one to the accompanying drawing of required use in embodiment or the description of the Prior Art below introduces simply, apparently, accompanying drawing in describing below is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of prior art substrate alignment device;
Fig. 2 is the vertical view of the utility model substrate alignment device embodiment;
Fig. 3 is the end view of the utility model substrate alignment device embodiment;
Fig. 4 is the application schematic diagram of the utility model substrate alignment device embodiment.
Description of reference numerals:
The 11-cylinder main body; The 12-moving piston; 13-movable part guide rail;
14-moving piston position-detection sensor; 15-contraposition pin; The 16-elastomeric element;
17-end body; The 18-gap; 19-contraposition support;
20-contraposition roller; The 21-movable part; The 22-slide block;
The 23-adjusting rod; The 24-fixture; 25-detects support;
The 26-detecting sensor; 27-substrate alignment device; The 28-substrate;
The 29-holding components; The 30-piston-cylinder; 31-cylinder guide rail;
The 32-air inlet/outlet; 33-movable part location arresting stop.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with the accompanying drawing among the utility model embodiment, technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, the every other embodiment that those of ordinary skills are obtained under the prerequisite of not making creative work belongs to the scope that the utility model is protected.
Main technical schemes of the present utility model is, on the architecture basics of present substrate alignment device, set up elastomeric element etc., make this alignment device can realize pooling feature, to avoid the hard power in the contraposition process that substrate is caused damage, improve the yield of product.
Below by the drawings and specific embodiments, the technical solution of the utility model is described in further detail.
Fig. 2 is the vertical view of the utility model substrate alignment device embodiment, Fig. 3 is the end view of the utility model substrate alignment device embodiment, as shown in Figures 2 and 3, the substrate alignment device of present embodiment can comprise holding components 29, cylinder main body 11, two piston-cylinders 30, moving piston 12, movable part guide rail 13, contraposition parts and elastomeric elements 16.
Wherein, movable part guide rail 13 is arranged on the bottom of cylinder main body 11, and moving piston 12 1 ends are arranged in the cylinder main body 11, and the other end stretches out outside the cylinder main body 11.The bottom of cylinder main body 11 can be provided with cylinder guide rail 31, and the bottom of moving piston 12 and cylinder guide rail 31 formations are slidingly connected, and it can be under the promotion of the compressed-air power that air inlet/outlet 32 feeds, along 31 reciprocating motions of cylinder guide rail.The end of holding components 29 also is provided with end body 17, and moving piston 12 1 ends are arranged in the piston-cylinder 30, and the other end is relative with end body 17.In addition, there is gap 18 between two piston-cylinders 30, promptly has gap 18 between two moving pistons 12.
The contraposition parts comprise contraposition support 19, contraposition roller 20, movable part 21 and slide block 22.Wherein, contraposition roller 20 is arranged on the contraposition support 19, for example can comprise two contraposition rollers 20 in the present embodiment, is separately positioned on the two ends of contraposition support 19; It is installed number and can determine according to actual needs.This contraposition roller 20 is the cylinder devices that can freely rotate on the direct of travel of glass substrate, and its effect is under cylinder main body 11 tightens up the situation of contraposition glass substrate to be carried out position correction.
Movable part 21 is fixed in the bottom of contraposition support 19, and movable part 21 is provided with perforating, and moving piston 12 is by passing in this perforating.The bottom of movable part 21 is provided with slide block 22, and this slide block 22 is slidingly connected with movable part guide rail 13 formations.Said structure makes contraposition parts and moving piston for designing with track, and the direction of motion of moving piston 12 and movable part 21 point-blank in the time of can effectively ensureing the cylinder main body contraction.
Elastomeric element 16 is arranged between the end body 17 of movable part 21 and moving piston 12, and the one end connects movable part 21, and the other end connects end body 17.For example, this elastomeric element 16 can be spring.Tighten up in the process that the location makes that moving piston 12 direction to cylinder main body 11 in moves at cylinder main body 11, the end body 17 of moving piston 12 ends can be passed to tightening force connected elastomeric element 16, relies on the elasticity of elastomeric element 16 that tightening force is passed to the contraposition parts again.Cushioning Design in the above-mentioned contraposition process can effectively reduce the damage of hard power to glass substrate.
Above-mentionedly be set to along the guide rail slidingtype, and increased elastomeric element, make and in the contraposition process of substrate, played cushioning effect, reduced the substrate damage incidence in the contraposition process, improved the product yield by the contraposition parts.
Further, the substrate alignment device of present embodiment can also comprise the adjusting parts.These adjusting parts comprise adjusting rod 23 and fixture 24.Wherein, adjusting rod 23 is arranged at the position in two gaps 18 between the moving piston 12, and the one end connects the movable part 21 in the contraposition parts, and the end body 17 that the other end passes moving piston 12 stretches out, and by fixture 24 this adjusting rod 23 is locked again.
This adjusting rod 23 is arranged in elastomeric element 16 for example in the spring, and its effect is the compression degree that can adjust spring by its variation that is arranged in the length of spring, promptly adjusts the elastic force of spring; Fixture 24 for example can be adjusting nut, after the length of stretching out end body 17 of adjusting adjusting rod 23, can lock with this fixture 24.Regulate the adjusting rod 23 that parts can be by wherein and the compression degree of fixture 24 regulating springs, in reality is implemented, can be by the buffering dynamics that require regulating spring of said method according to contraposition strength.
In the present embodiment, end position at the close contraposition parts of cylinder main body 11, can also be provided with movable part location arresting stop 33, the end that an end of this movable part location arresting stop 33 stretches out cylinder main body 11 can be replaced the location to movable part 21 and make its stop motion.
Further, the substrate alignment device of present embodiment can also comprise the substrate detection part, and this substrate detection part can comprise detection support 25 and detecting sensor 26.Wherein, detection support 25 is arranged on the correction position of substrate, for example, can be fixed on the end position of the close contraposition parts of cylinder main body 11, tightens up along substrate bit position edge is provided with.Detecting sensor 26 is arranged on and detects on the support 25.The quantity that contraposition roller 20 in quantity and the contraposition parts is set of the detecting sensor 26 in the present embodiment equates, also is two, and is arranged at the two ends of detecting support 25 respectively.
This detecting sensor 26 can adopt the light sensation transducer; can carry out current location to substrate by this light sensation transducer detects and damaged detection; detect substrate and whether reached correction position; and can in time detect the broken situation of substrate; reduce the equipment downtime in the subsequent handling, improve the production capacity of whole production line.In reality is implemented, can preestablish according to actual needs detecting sensor 26 number, the position is set and detects parameter such as threshold values.For example, when substrate size is big, need a plurality of contraposition rollers carry out position correction, at this moment, detecting sensor 26 is installed in the correct and corresponding bottom of contraposition roller after the correction by detecting support 25.Detecting sensor 26 is tested by receiving self radiative reverberation, therefore the reflective light intensity detection threshold of its reception can be set, can carry out substrate crushing and detect,, adjust so that when one of them roller causes contraposition breakage or contraposition unusual, can in time find.
Fig. 4 is the application schematic diagram of the utility model substrate alignment device embodiment, as shown in Figure 4, external control system can send the drive electromagnetic valve and open, and the cylinder main body in the substrate alignment device 27 is fed compressed air, promotes moving piston along guide rail movement.For example, when cylinder main body tightened up contraposition, moving piston was to the cylinder main body internal motion, and the end body is movement therewith also, and by elastomeric element tightening force is passed to the contraposition parts, by the contraposition parts substrate 28 is carried out position correction.Wherein, above-mentioned in the contraposition trimming process of substrate 28, because the cushioning effect of flexible parts can effectively reduce the damage of hard power to substrate 28, improved the product yield.
In addition, the detection part that is arranged on substrate correction position place can detect the current location of substrate 28 in real time, guarantees that substrate 28 contrapositions are accurate.And; can this detection part all be set at each contraposition roller place; in time to detect the damaged situation of substrate 28; if there have substrate 28 to take place to be broken; can in time detect by detected parts, avoided substrate access arrangement cavity after the equipment entrance breakage to cause the pollution of equipment cavity, it is long to handle the equipment downtime that needing pressurizes, lowers the temperature handles and cause; reduce the equipment downtime that is caused because of the substrate breakage in the subsequent handling, improved the production capacity of whole production line.
The substrate alignment device of present embodiment by buffer structure such as elastomeric element is set, has solved the problem that substrate crushing easily takes place in the substrate contraposition process, has reduced the glass substrate damage ratio in the contraposition process, the product yield when having improved the substrate contraposition; And, by substrate position and damaged detection architecture such as detection part are set, can in time detect the damaged situation of substrate, reduced the equipment downtime that is caused because of the substrate breakage in the subsequent handling, improved productivity ratio.
The utility model also provides a kind of substrate to bit platform, and this platform comprises platform support and the described substrate alignment device of the utility model any embodiment, and described substrate alignment device is fixed on the described platform support.
The utility model also provides a kind of apparatus for transporting substrate, this equipment comprises that substrate that substrate transmission track and the utility model embodiment provided is to bit platform, described substrate is arranged on the described substrate transmission track bit platform, can move on the substrate transmission track.
It should be noted that at last: above embodiment only in order to the explanation the technical solution of the utility model, is not intended to limit; Although the utility model is had been described in detail with reference to previous embodiment, those of ordinary skill in the art is to be understood that: it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution break away from the spirit and scope of each embodiment technical scheme of the utility model.

Claims (11)

1. a substrate alignment device is characterized in that, comprising: holding components, cylinder main body, piston-cylinder, moving piston, contraposition parts and elastomeric element;
Described cylinder main body is fixed on the described holding components, and two described piston-cylinders are arranged in the described cylinder main body, and has the gap between two described piston-cylinders; The end of described holding components is provided with the end body, and an end of described moving piston is arranged in the described piston-cylinder, and the other end is relative with described end body;
Described contraposition parts comprise contraposition support, contraposition roller, movable part and slide block; Described contraposition roller is arranged on the described contraposition support, and described movable part is fixed in the bottom of described contraposition support, and described movable part is provided with perforating, and described moving piston is arranged in the described perforating; Described slide block be arranged on described movable part the bottom and with described holding components on the movable part guide rail that is provided be slidingly connected; One end of described elastomeric element connects described movable part, and the other end connects described end body.
2. substrate alignment device according to claim 1 is characterized in that, described elastomeric element is a spring.
3. substrate alignment device according to claim 2 is characterized in that, also comprises: regulate parts; Described adjusting parts comprise adjusting rod and fixture;
Described adjusting rod is arranged at two gap locations between the described moving piston, and is arranged in described spring; One end of described adjusting rod connects described movable part, and the other end passes described end body and stretches out the back by described fixture locking.
4. substrate alignment device according to claim 3 is characterized in that, described fixture is an adjusting nut.
5. substrate alignment device according to claim 1 is characterized in that, also comprises: the substrate detection part; Described substrate detection part comprises detection support and detecting sensor; Described detection support is arranged on the end position of the close described contraposition parts of described cylinder main body, and described detecting sensor is arranged on the described detection support.
6. substrate alignment device according to claim 5 is characterized in that, described detection support is fixed on the described cylinder main body.
7. substrate alignment device according to claim 5, it is characterized in that, the end position of the close described contraposition parts of described cylinder main body also is provided with movable part location arresting stop, the end that an end of described movable part location arresting stop stretches out described cylinder main body.
8. according to the arbitrary described substrate alignment device of claim 5-7, it is characterized in that the quantity of described detecting sensor equates with the quantity of described contraposition roller.
9. according to the arbitrary described substrate alignment device of claim 5-7, it is characterized in that described detecting sensor is the light sensation transducer.
10. a substrate is characterized in that bit platform, comprises the arbitrary described substrate alignment device of platform support and claim 1~9, and described substrate alignment device is fixed on the described platform support.
11. an apparatus for transporting substrate is characterized in that, comprises the described substrate of substrate transmission track and claim 10 to bit platform, described substrate is arranged on the described substrate transmission track bit platform.
CN2010205921645U 2010-10-29 2010-10-29 Substrate aligning device, substrate aligning platform and substrate conveying equipment Expired - Lifetime CN201845752U (en)

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Application Number Priority Date Filing Date Title
CN2010205921645U CN201845752U (en) 2010-10-29 2010-10-29 Substrate aligning device, substrate aligning platform and substrate conveying equipment

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104016117A (en) * 2014-05-28 2014-09-03 京东方科技集团股份有限公司 Forked plate capable of automatically adjusting position of base plate and adjustment method
CN106249449A (en) * 2016-08-29 2016-12-21 武汉华星光电技术有限公司 Prevent being caught broken substrate alignment apparatus
CN106773157A (en) * 2016-12-06 2017-05-31 友达光电(昆山)有限公司 Position correction apparatus and method for correcting position
CN106770364A (en) * 2017-01-26 2017-05-31 江苏东旭亿泰智能装备有限公司 Substrate positioning mechanism, macro inspection apparatus and macro inspection method
CN109928212A (en) * 2019-04-09 2019-06-25 深圳市华星光电半导体显示技术有限公司 Display panel positioning device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104016117A (en) * 2014-05-28 2014-09-03 京东方科技集团股份有限公司 Forked plate capable of automatically adjusting position of base plate and adjustment method
US9358651B2 (en) 2014-05-28 2016-06-07 Boe Technology Group Co., Ltd. System and method for automatically adjusting a position of a panel on a chuck
CN104016117B (en) * 2014-05-28 2017-01-18 京东方科技集团股份有限公司 Forked plate capable of automatically adjusting position of base plate and adjustment method
CN106249449A (en) * 2016-08-29 2016-12-21 武汉华星光电技术有限公司 Prevent being caught broken substrate alignment apparatus
CN106773157A (en) * 2016-12-06 2017-05-31 友达光电(昆山)有限公司 Position correction apparatus and method for correcting position
CN106773157B (en) * 2016-12-06 2018-08-31 友达光电(昆山)有限公司 Position correction apparatus and method for correcting position
CN106770364A (en) * 2017-01-26 2017-05-31 江苏东旭亿泰智能装备有限公司 Substrate positioning mechanism, macro inspection apparatus and macro inspection method
CN109928212A (en) * 2019-04-09 2019-06-25 深圳市华星光电半导体显示技术有限公司 Display panel positioning device

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GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD

Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD.

Effective date: 20150713

Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY

Effective date: 20150713

C41 Transfer of patent application or patent right or utility model
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Effective date of registration: 20150713

Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No.

Patentee after: BOE Technology Group Co., Ltd.

Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd.

Address before: 100176 Beijing economic and Technological Development Zone, West Central Road, No. 8

Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd.

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20110525