CN203218231U - Substrate aligning component and substrate aligning device - Google Patents
Substrate aligning component and substrate aligning device Download PDFInfo
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- CN203218231U CN203218231U CN 201320026396 CN201320026396U CN203218231U CN 203218231 U CN203218231 U CN 203218231U CN 201320026396 CN201320026396 CN 201320026396 CN 201320026396 U CN201320026396 U CN 201320026396U CN 203218231 U CN203218231 U CN 203218231U
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Abstract
The utility model provides a substrate aligning component and a substrate aligning device, which belongs to the technical field of substrate processing, and can solve the problem that an existing substrate aligning device causes damages on a substrate easily and is limited in application range and poor in alignment precision. The substrate aligning component comprises a connecting part, an aligning part and an elastic mechanism, wherein the connecting part is used for being connected with a driving mechanism; the aligning part is provided with a contact surface used for being contacted with a side surface of the substrate; and the elastic mechanism is arranged between the connecting part and the aligning part. The substrate aligning device comprises the substrate aligning component provided by the utility model. The substrate aligning component and the substrate aligning device can be used for carrying out substrate alignment in the machining process of the substrate. For example, the substrate aligning component and the substrate aligning device are applied to substrates of display devices such as liquid crystal display devices, organic light emitting diode display devices and the like, and particularly applied to glass substrates with smaller thickness.
Description
Technical field
The utility model belongs to the substrate processing technique field, is specifically related to a kind of substrate contraposition part and substrate alignment device.
Background technology
In the manufacture process of liquid crystal indicator (LCD), organic LED display device (OLED) etc., comprise the step of in a large number glass substrate (as array base palte, color membrane substrates etc.) being processed (as photoetching, pad pasting, cutting etc.), for guaranteeing the accuracy of processing, so before the per pass manufacturing procedure begins, all want earlier substrate to be carried out contraposition.
As shown in Figure 1, existing substrate alignment device comprises: a plurality of support bars for supporting substrate 9, a plurality of be used to the substrate contraposition bar that carries out contraposition (substrate contraposition part 1), for the cylinder (driving mechanism) that drives substrate contraposition bar.
Wherein, support bar top has ball, is used for substrate 9 horizontal supports; A plurality of substrate contraposition bars 1 are located at respectively outside four sides 91 of substrate 9, their head has for the cylinder that contacts with substrate side surfaces 91 potential head (cylindrical side contacts with substrate side surfaces 91), for preventing that substrate 9 from tilting, so be provided with at least two substrate contraposition bars 1 outside each side 91 of substrate 9; Cylinder then is used for driving each substrate contraposition bar 1 to substrate 91 central motions, arrives assigned address thereby promote substrate 1.
The inventor finds that there are the following problems at least in the prior art: existing substrate contraposition bar is rigidity, moment in itself and substrate contacts can produce bigger impulsive force to substrate, fragile substrate, especially all the more so for the substrate of thinner thickness (as smaller or equal to 0.5mm), so existing substrate alignment device generally can not be used for the substrate of thinner thickness; Simultaneously, for the substrate contraposition bar of avoiding being oppositely arranged squeezes bad substrate to the substrate application of force simultaneously, existing substrate alignment device also will limit the stroke of substrate contraposition bar, make the amount of redundancy that keeps 1~2mm between the required final position of its stroke end and reality, this must reduce the aligning accuracy of substrate.
The utility model content
Technical problem to be solved in the utility model comprises, easily cause substrate damage, range of application is limited, aligning accuracy is not high problem at existing substrate alignment device, a kind of substrate damage, applied range, substrate contraposition part that aligning accuracy is high of can not causing is provided.
The technical scheme that solution the utility model technical problem adopts is a kind of substrate contraposition part, and it comprises: the connecting portion that is used for connecting driving mechanism; Contraposition part, it has the contact-making surface for the contact substrate side; Be located at the elastic mechanism between described connecting portion and contraposition part.
In the substrate contraposition part of the present utility model, has elastic mechanism between connecting portion and contraposition part, because elastic mechanism after contraposition part and substrate contacts can be gradually reduced earlier, when its elastic force to substrate increases to the suffered stiction of substrate when above, substrate is setting in motion, the suffered stiction of substrate becomes less kinetic force of friction (force of rolling friction) afterwards, and elastic mechanism begins again to discharge elongation, and substrate is pushed to desired location; In whole contraposition process, substrate is stressed to gradually change always, does not have impulsive force, so substrate is not fragile, therefore substrate contraposition part of the present utility model can be used for the substrate of thinner thickness; And when substrate contacted with two opposing substrates contraposition parts simultaneously, elastic mechanism also can compressedly be out of shape, thereby guaranteed that substrate is stressed less, can not squeeze bad substrate, so needn't limit the stroke of substrate contraposition part of the present utility model, its aligning accuracy height.
Preferably, described elastic mechanism comprises spring and/or shell fragment.
Wherein, " shell fragment " refers to bend the elastic material sheet (as sheet metal) of forming V-shape, U-shaped, shape such as Z-shaped.
Preferably, described contact-making surface is cancave cambered surface; When described contact-making surface contact substrate side, described contact-making surface is with respect to its substrate side surfaces indent that contacts.Preferably, described contact-making surface extends along first direction; When described contact-making surface contact substrate side, described first direction is parallel to the length direction of its substrate side surfaces that contacts.
Further preferably, described substrate contraposition part also comprises: rotating mechanism, and it can make contraposition part rotate around second direction with respect to connecting portion; When described contact-making surface contact substrate side, described second direction is perpendicular to substrate.
Further preferably, described rotating mechanism comprises the rotation axis that arranges along second direction.
Further preferably, described substrate contraposition part also comprises: microscler guide part, it stretches into the gathering sill that is arranged in described connecting portion, and links to each other with contraposition part by described rotating mechanism.
Further preferably, on first direction, the both sides of described guide part are respectively equipped with the elastic mechanism that is connected between connecting portion and contraposition part.
Further preferably, on first direction, also be provided with the restraint slot that is positioned at the gathering sill both sides in the described connecting portion, described contraposition part is provided with the constraining rod that stretches in the restraint slot, and described elastic mechanism is the spring that is enclosed within outside the constraining rod and is arranged in restraint slot.
Technical problem to be solved in the utility model also comprises, easily cause substrate damage, range of application is limited, aligning accuracy is not high problem at existing substrate alignment device, a kind of substrate damage, applied range, substrate alignment device that aligning accuracy is high of can not causing is provided.
The technical scheme that solution the utility model technical problem adopts is a kind of substrate alignment device, and it comprises above-mentioned substrate contraposition part.
Owing to use above-mentioned substrate contraposition part in the substrate alignment device of the present utility model, so it can not cause substrate damage, applied range, aligning accuracy height.
The utility model is used in and carries out the substrate contraposition in the substrate course of processing, for example is used for the substrate of display unit such as liquid crystal indicator, organic LED display device, is particularly useful for the thinner thickness glass substrate of (as smaller or equal to 0.5mm).
Description of drawings
Fig. 1 is the plan structure schematic diagram (not shown driving mechanism and support bar) of existing substrate alignment device;
Fragmentary top TV structure schematic diagram (not shown driving mechanism and support bar) when Fig. 2 carries out contraposition for the substrate contraposition part of embodiment 2 of the present utility model;
Partial side TV structure schematic diagram (not shown restraint slot, constraining rod, elastic mechanism) when Fig. 3 carries out contraposition for the substrate contraposition part of embodiment 2 of the present utility model;
Fig. 4 is the plan structure schematic diagram of the another kind of substrate contraposition part of embodiment 2 of the present utility model.
Wherein Reference numeral is: 1, substrate contraposition part; 11, connecting portion; 111, gathering sill; 112, restraint slot; 12, contraposition part; 121, contact-making surface; 122, constraining rod; 13, elastic mechanism; 14, rotating mechanism; 15, guide part; 5, support bar; 51, ball; 6, driving mechanism; 7, connecting rod; 81, first direction; 82, second direction; 9, substrate; 91, substrate side surfaces.
Embodiment
For making those skilled in the art understand the technical solution of the utility model better, below in conjunction with the drawings and specific embodiments the utility model is described in further detail.
Embodiment 1:
Present embodiment provides a kind of substrate contraposition part, and it comprises:
Be used for connecting the connecting portion of driving mechanism.
Contraposition part, it has the contact-making surface for the contact substrate side.
Be located at the elastic mechanism between described connecting portion and contraposition part.
In the substrate contraposition part of present embodiment, has elastic mechanism between connecting portion and contraposition part, because elastic mechanism after contraposition part and substrate contacts can be gradually reduced earlier, when its elastic force to substrate increases to the suffered stiction of substrate when above, substrate is setting in motion, the suffered stiction of substrate becomes less kinetic force of friction (force of rolling friction) afterwards, and elastic mechanism begins again to discharge elongation, and substrate is pushed to desired location; In whole contraposition process, substrate is stressed to gradually change always, does not have impulsive force, so substrate is not fragile, so the substrate contraposition part of present embodiment can be used for the substrate of thinner thickness; And when substrate contacted with two opposing substrates contraposition parts simultaneously, elastic mechanism also can compressedly be out of shape, thereby guaranteed that substrate is stressed less, can not squeeze bad substrate, so needn't limit the stroke of the substrate contraposition part of present embodiment, its aligning accuracy height.
Embodiment 2:
To shown in Figure 4, present embodiment provides a kind of substrate contraposition part 1 as Fig. 2, and it comprises connecting portion 11, contraposition part 12, elastic mechanism 13.
Connecting portion 11 is used for linking to each other with the driving mechanism 6 (as cylinder) of substrate alignment device, and the connection of the two can be undertaken by connecting rod 7.
Preferably, elastic mechanism 13 comprises spring and/or shell fragment.Wherein, shell fragment refers to bend the elastic material sheet (as sheet metal) of forming V-shape, U-shaped, shape such as Z-shaped; When shell fragment was compressed, the angle between its each position diminished and produces strain.
Certainly, elastic mechanism 13 also can be other form, as long as it can make 12 elasticity of connecting portion 11 and contraposition part be connected.
Preferably, as shown in Figure 3, contact-making surface 121 is cancave cambered surface; And when contact-making surface 121 contact substrate sides 91, contact-making surface 121 is with respect to its substrate side surfaces that contacts 91 indents.
That is to say that contact-making surface 121 is preferably the cancave cambered surface with respect to substrate side surfaces 91 indents; Therefore, even the unexpected perk in the edge of substrate 9 in the contraposition process, the thrust that contact-making surface 121 applies is also still along the plane at substrate 9 places, thereby avoids substrate 9 perks aggravation.
Preferably, this contact-making surface 121 extends along first direction 81; When contact-making surface 121 contact substrate sides 91, this first direction 81 is parallel to the length direction of its substrate side surfaces that contacts 91.
That is to say that contact-making surface 121 has necessarily " length " along the direction of substrate side surfaces 91, namely contraposition part 12 is that line contacts (thickness of ignoring substrate 9) with 91 of substrate side surfaces; And existing cylinder is to contact (thickness of ignoring substrate 9) to 9 of potential head and substrates.As seen, the substrate contraposition part of present embodiment 1 is bigger with the contact area of substrate 9, thus substrate 9 stressed evenly and pressure lower, can further avoid substrate 9 because of stressed excessive the damage.
Preferred, substrate contraposition part 1 also comprises rotating mechanism 14, and rotating mechanism 14 can make contraposition part 12 rotate around second direction 82 with respect to connecting portion 11; When contact-making surface 121 contact substrate sides 91, second direction 82 is perpendicular to substrate 9.
That is to say that rotating mechanism 14 can make the axle that contraposition part 12 can wind perpendicular to substrate 9 rotate; Thus, as shown in Figure 2, if substrate 9 is with respect to contact-making surface 121 run-off the straights, then when contact-making surface 121 with after substrate side surfaces 91 contacts, contact-making surface 121 can rotate and the whole substrate side surfaces 91 that is attached to, be that it can remain line with 91 of substrate side surfaces and contacts, guarantee that thus substrate 9 is stressed evenly, better avoid substrate 9 to damage.
Further preferred, rotating mechanism 14 comprises the rotation axis that arranges along second direction 82.
Certainly, rotating mechanism 14 also can be other forms, as long as it can make contraposition part 12 rotate around second direction 82 with respect to connecting portion 11.
Further preferred, as Fig. 2, shown in Figure 3, also can be provided with gathering sill 111 (can be through-hole form) in the connecting portion 11, and microscler guide part 15 (for example for bar-shaped) stretches in this gathering sill 111, and link to each other with contraposition part 12 by rotating mechanism 14 (as rotation axis).
In said structure, rotating mechanism 14 is located between guide part 15 and the contraposition part 12, thereby contraposition part 12 can be rotated around second direction 82 with respect to connecting portion 11; Simultaneously, guide part 15 can move in gathering sill 111 again, thereby assurance connecting portion 11 can realize that with 12 of contraposition parts elasticity is connected.
Further preferred, on first direction 81, the both sides of guide part 15 are respectively equipped with the elastic mechanism 13 that is connected 12 of connecting portion 11 and contraposition parts.
In said structure, elastic mechanism 13 also limits the rotation of contact-making surface 121 simultaneously, thereby contact-making surface 121 can automatically restore to the precalculated position after guaranteeing each contraposition.
Further preferred, as shown in Figure 2, in the position at above-mentioned elastic mechanism 13 places (being guide part 15 both sides), also be provided with restraint slot 112 in the connecting portion 11, contraposition part 12 is provided with the constraining rod 122 that stretches in the restraint slot 112, and elastic mechanism 13 is the spring that is enclosed within outside the constraining rod 122 and is arranged in restraint slot 112.
In said structure, restraint slot 112 and constraining rod 122 also can play the effect that auxiliary control contact-making surface 121 rotates, and can guarantee that the application of force of spring is in the right direction.
Certainly, the concrete form of aforesaid substrate contraposition part 1 is various; For example, can be shown in Figure 4, rotating mechanism 14 is located at different positions respectively with elastic mechanism 13; Perhaps, can wherein not have rotating mechanism 14 yet, and make contact-making surface 121 realize rotating by the distortion in various degree of a plurality of elastic mechanisms 13; Because rotating mechanism 14 can adopt multiple different concrete form with elastic mechanism 13, so just describe no longer one by one at this.
Embodiment 3:
As shown in Figure 3, present embodiment provides a kind of substrate alignment device, and it comprises above-mentioned substrate contraposition part 1.
Owing to use above-mentioned substrate contraposition part 1 in the substrate alignment device of present embodiment, so it can not cause substrate 9 damages, applied range, aligning accuracy height.
Obviously, can not tilt in order to guarantee substrate 9, so should be provided with at least two substrate contraposition parts 1 outside each side 91 of substrate 9.
Certainly, the known features that also should comprise other in the substrate alignment device of present embodiment, for example be used for supporting substrate 9 support bar 5 (top can have ball 51), be used for driving 1 motion of substrate contraposition part driving mechanism 6 (as cylinder, oil cylinder etc.), be used for connecting rod 7 that substrate contraposition part 1 is connected with driving mechanism 6 etc.
Be understandable that above execution mode only is the illustrative embodiments that adopts for principle of the present utility model is described, yet the utility model is not limited thereto.For those skilled in the art, under the situation that does not break away from spirit of the present utility model and essence, can make various modification and improvement, these modification and improvement also are considered as protection range of the present utility model.
Claims (10)
1. substrate contraposition part comprises:
Be used for connecting the connecting portion of driving mechanism;
Contraposition part, it has the contact-making surface for the contact substrate side;
Be characterised in that described substrate contraposition part also comprises:
Be located at the elastic mechanism between described connecting portion and contraposition part.
2. substrate contraposition part according to claim 1 is characterized in that,
Described elastic mechanism comprises spring and/or shell fragment.
3. substrate contraposition part according to claim 1 is characterized in that,
Described contact-making surface is cancave cambered surface; When described contact-making surface contact substrate side, described contact-making surface is with respect to its substrate side surfaces indent that contacts.
4. according to any described substrate contraposition part in the claim 1 to 3, it is characterized in that,
Described contact-making surface extends along first direction; When described contact-making surface contact substrate side, described first direction is parallel to the length direction of its substrate side surfaces that contacts.
5. substrate contraposition part according to claim 4 is characterized in that, also comprises:
Rotating mechanism, it can make contraposition part rotate around second direction with respect to connecting portion; When described contact-making surface contact substrate side, described second direction is perpendicular to substrate.
6. substrate contraposition part according to claim 5 is characterized in that,
Described rotating mechanism comprises the rotation axis that arranges along second direction.
7. substrate contraposition part according to claim 5 is characterized in that, also comprises:
Microscler guide part, it stretches into the gathering sill that is arranged in described connecting portion, and links to each other with contraposition part by described rotating mechanism.
8. substrate contraposition part according to claim 7 is characterized in that,
On first direction, the both sides of described guide part are respectively equipped with the elastic mechanism that is connected between connecting portion and contraposition part.
9. substrate contraposition part according to claim 8 is characterized in that,
On first direction, also be provided with the restraint slot that is positioned at the gathering sill both sides in the described connecting portion, described contraposition part is provided with the constraining rod that stretches in the restraint slot, and described elastic mechanism is the spring that is enclosed within outside the constraining rod and is arranged in restraint slot.
10. a substrate alignment device is characterized in that, comprising:
Any described substrate contraposition part in the claim 1 to 9.
Priority Applications (1)
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CN 201320026396 CN203218231U (en) | 2013-01-17 | 2013-01-17 | Substrate aligning component and substrate aligning device |
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CN 201320026396 CN203218231U (en) | 2013-01-17 | 2013-01-17 | Substrate aligning component and substrate aligning device |
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Cited By (13)
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CN105215760A (en) * | 2015-09-23 | 2016-01-06 | 京东方科技集团股份有限公司 | Alignment device, alignment detecting method and alignment system |
CN105668234A (en) * | 2016-03-15 | 2016-06-15 | 武汉华星光电技术有限公司 | Substrate clamping and aligning device and substrate processing system |
CN105807459A (en) * | 2016-05-23 | 2016-07-27 | 京东方科技集团股份有限公司 | Substrate alignment device and alignment method |
WO2016145806A1 (en) * | 2015-03-17 | 2016-09-22 | 京东方科技集团股份有限公司 | Substrate support pin, substrate support device and substrate picking and placing system |
CN104090390B (en) * | 2014-06-26 | 2017-01-04 | 京东方科技集团股份有限公司 | glass substrate containing device |
CN106405897A (en) * | 2016-11-29 | 2017-02-15 | 京东方科技集团股份有限公司 | Alignment device and array substrate maintenance equipment |
CN106773157A (en) * | 2016-12-06 | 2017-05-31 | 友达光电(昆山)有限公司 | Position correction apparatus and method for correcting position |
CN107367857A (en) * | 2017-07-13 | 2017-11-21 | 武汉华星光电技术有限公司 | Alignment device |
CN107475679A (en) * | 2017-08-18 | 2017-12-15 | 武汉华星光电半导体显示技术有限公司 | Holding-and-aligning device and method |
CN108153008A (en) * | 2018-01-18 | 2018-06-12 | 武汉华星光电技术有限公司 | Substrate clamping alignment device |
CN109215512A (en) * | 2018-11-01 | 2019-01-15 | 信利(惠州)智能显示有限公司 | Manufacturing equipment, thimble and localization method |
CN112622064A (en) * | 2020-12-25 | 2021-04-09 | 苏州科韵激光科技有限公司 | Self-adaptive accurate alignment mechanism and alignment device |
CN110696408B (en) * | 2019-08-29 | 2021-07-13 | 晟光科技股份有限公司 | Industrial control LCD display panel's compression fittings |
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Cited By (20)
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CN104090390B (en) * | 2014-06-26 | 2017-01-04 | 京东方科技集团股份有限公司 | glass substrate containing device |
WO2016145806A1 (en) * | 2015-03-17 | 2016-09-22 | 京东方科技集团股份有限公司 | Substrate support pin, substrate support device and substrate picking and placing system |
CN105215760A (en) * | 2015-09-23 | 2016-01-06 | 京东方科技集团股份有限公司 | Alignment device, alignment detecting method and alignment system |
US9939248B2 (en) | 2015-09-23 | 2018-04-10 | Boe Technology Group Co., Ltd. | Alignment apparatus and alignment detection method |
CN105668234A (en) * | 2016-03-15 | 2016-06-15 | 武汉华星光电技术有限公司 | Substrate clamping and aligning device and substrate processing system |
CN105807459A (en) * | 2016-05-23 | 2016-07-27 | 京东方科技集团股份有限公司 | Substrate alignment device and alignment method |
CN106405897A (en) * | 2016-11-29 | 2017-02-15 | 京东方科技集团股份有限公司 | Alignment device and array substrate maintenance equipment |
CN106405897B (en) * | 2016-11-29 | 2019-03-15 | 京东方科技集团股份有限公司 | A kind of alignment device and array substrate maintenance equipment |
CN106773157B (en) * | 2016-12-06 | 2018-08-31 | 友达光电(昆山)有限公司 | Position correction apparatus and method for correcting position |
CN106773157A (en) * | 2016-12-06 | 2017-05-31 | 友达光电(昆山)有限公司 | Position correction apparatus and method for correcting position |
CN107367857B (en) * | 2017-07-13 | 2020-07-28 | 武汉华星光电技术有限公司 | Aligning device |
CN107367857A (en) * | 2017-07-13 | 2017-11-21 | 武汉华星光电技术有限公司 | Alignment device |
CN107475679A (en) * | 2017-08-18 | 2017-12-15 | 武汉华星光电半导体显示技术有限公司 | Holding-and-aligning device and method |
CN107475679B (en) * | 2017-08-18 | 2019-11-26 | 武汉华星光电半导体显示技术有限公司 | Holding-and-aligning device and method |
CN108153008A (en) * | 2018-01-18 | 2018-06-12 | 武汉华星光电技术有限公司 | Substrate clamping alignment device |
CN108153008B (en) * | 2018-01-18 | 2021-03-02 | 武汉华星光电技术有限公司 | Substrate clamping and aligning device |
CN109215512A (en) * | 2018-11-01 | 2019-01-15 | 信利(惠州)智能显示有限公司 | Manufacturing equipment, thimble and localization method |
CN109215512B (en) * | 2018-11-01 | 2021-02-26 | 信利(惠州)智能显示有限公司 | Manufacturing equipment, ejector pin and positioning method |
CN110696408B (en) * | 2019-08-29 | 2021-07-13 | 晟光科技股份有限公司 | Industrial control LCD display panel's compression fittings |
CN112622064A (en) * | 2020-12-25 | 2021-04-09 | 苏州科韵激光科技有限公司 | Self-adaptive accurate alignment mechanism and alignment device |
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