KR100872882B1 - 저전력 어플리케이션을 위한 전기적으로 프로그램 가능한집적 퓨즈 장치 및 그 형성 방법 - Google Patents

저전력 어플리케이션을 위한 전기적으로 프로그램 가능한집적 퓨즈 장치 및 그 형성 방법 Download PDF

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KR100872882B1
KR100872882B1 KR1020070040031A KR20070040031A KR100872882B1 KR 100872882 B1 KR100872882 B1 KR 100872882B1 KR 1020070040031 A KR1020070040031 A KR 1020070040031A KR 20070040031 A KR20070040031 A KR 20070040031A KR 100872882 B1 KR100872882 B1 KR 100872882B1
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doped polysilicon
conductive layer
region
polysilicon region
thickness
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KR20070105871A (ko
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고영건
구자흠
선민철
로버트 바이저
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삼성전자주식회사
인피니언 테크놀로지스 노쓰 아메리카 코포레이션
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/49—Adaptable interconnections, e.g. fuses or antifuses
    • H10W20/493—Fuses, i.e. interconnections changeable from conductive to non-conductive
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W42/00—Arrangements for protection of devices
    • H10W42/80—Arrangements for protection of devices protecting against overcurrent or overload, e.g. fuses or shunts

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  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
KR1020070040031A 2006-04-26 2007-04-24 저전력 어플리케이션을 위한 전기적으로 프로그램 가능한집적 퓨즈 장치 및 그 형성 방법 Active KR100872882B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/411,341 US7576407B2 (en) 2006-04-26 2006-04-26 Devices and methods for constructing electrically programmable integrated fuses for low power applications
US11/411,341 2006-04-26

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KR20070105871A KR20070105871A (ko) 2007-10-31
KR100872882B1 true KR100872882B1 (ko) 2008-12-10

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US (1) US7576407B2 (https=)
JP (1) JP5165272B2 (https=)
KR (1) KR100872882B1 (https=)
CN (1) CN101068015B (https=)
DE (1) DE102007020903A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190095244A (ko) 2016-12-26 2019-08-14 각코우호우징 카나자와 고교다이가쿠 염색된 폴리프로필렌 섬유 구조물 및 이를 이용한 의료품

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070284693A1 (en) * 2006-06-09 2007-12-13 International Business Machines Corporation Electrically programmable fuse with asymmetric structure
JP2008166441A (ja) * 2006-12-27 2008-07-17 Spansion Llc 半導体装置およびその製造方法
US7732898B2 (en) * 2007-02-02 2010-06-08 Infineon Technologies Ag Electrical fuse and associated methods
US7732893B2 (en) * 2007-03-07 2010-06-08 International Business Machines Corporation Electrical fuse structure for higher post-programming resistance
US7851885B2 (en) * 2007-03-07 2010-12-14 International Business Machines Corporation Methods and systems involving electrically programmable fuses
US7888771B1 (en) * 2007-05-02 2011-02-15 Xilinx, Inc. E-fuse with scalable filament link
US7759766B2 (en) * 2007-08-22 2010-07-20 International Business Machines Corporation Electrical fuse having a thin fuselink
US7619295B2 (en) * 2007-10-10 2009-11-17 Fairchild Semiconductor Corporation Pinched poly fuse
KR100967037B1 (ko) * 2007-10-17 2010-06-29 주식회사 하이닉스반도체 퓨즈 박스 및 그 형성 방법
US8791547B2 (en) * 2008-01-21 2014-07-29 Infineon Technologies Ag Avalanche diode having an enhanced defect concentration level and method of making the same
US8829645B2 (en) * 2008-06-12 2014-09-09 International Business Machines Corporation Structure and method to form e-fuse with enhanced current crowding
US9892221B2 (en) 2009-02-20 2018-02-13 Taiwan Semiconductor Manufacturing Company, Ltd. Method and system of generating a layout including a fuse layout pattern
US8519507B2 (en) * 2009-06-29 2013-08-27 International Business Machines Corporation Electrically programmable fuse using anisometric contacts and fabrication method
DE102009055368A1 (de) * 2009-12-29 2012-03-29 Globalfoundries Dresden Module One Limited Liability Company & Co. Kg Siliziumbasiertes Halbleiterbauelement mit E-Sicherungen, die durch eine eingebettete Halbleiterlegierung hergestellt sind
DE102009055439A1 (de) * 2009-12-31 2011-07-07 GLOBALFOUNDRIES Dresden Module One Limited Liability Company & Co. KG, 01109 Halbleiterbauelement mit halbleiterbasierten e-Sicherungen mit besserer Programmiereffizienz durch erhöhte Metallagglomeration und/oder Hohlraumbildung
US8987102B2 (en) * 2011-07-27 2015-03-24 Applied Materials, Inc. Methods of forming a metal silicide region in an integrated circuit
US8981523B2 (en) * 2012-03-14 2015-03-17 International Business Machines Corporation Programmable fuse structure and methods of forming
CN102760720B (zh) * 2012-07-27 2015-05-20 上海华力微电子有限公司 电子可编程熔丝空置有源区添加方法以及电子可编程熔丝
CN102738075A (zh) * 2012-07-27 2012-10-17 上海华力微电子有限公司 电子可编程熔丝空置接触孔添加方法以及电子可编程熔丝
CN103915410B (zh) * 2013-01-08 2017-06-13 中芯国际集成电路制造(上海)有限公司 半导体器件和半导体器件的制作方法
US9305879B2 (en) * 2013-05-09 2016-04-05 Globalfoundries Inc. E-fuse with hybrid metallization
US9171801B2 (en) 2013-05-09 2015-10-27 Globalfoundries U.S. 2 Llc E-fuse with hybrid metallization
US9536830B2 (en) 2013-05-09 2017-01-03 Globalfoundries Inc. High performance refractory metal / copper interconnects to eliminate electromigration
CN105826238A (zh) * 2015-01-06 2016-08-03 中芯国际集成电路制造(上海)有限公司 电可编程熔丝结构及其形成方法
US9754903B2 (en) * 2015-10-29 2017-09-05 Globalfoundries Inc. Semiconductor structure with anti-efuse device
US10811354B2 (en) 2016-06-30 2020-10-20 Intel Corporation Fuse array for integrated circuit
KR102573736B1 (ko) 2016-09-19 2023-09-04 에스케이하이닉스 주식회사 퓨즈 구조체 및 그것의 제조방법
WO2018125223A1 (en) * 2016-12-30 2018-07-05 Intel Corporation Fuse lines and plugs for semiconductor devices
US10615119B2 (en) * 2017-12-12 2020-04-07 International Business Machines Corporation Back end of line electrical fuse structure and method of fabrication
JP2024015652A (ja) * 2022-07-25 2024-02-06 ルネサスエレクトロニクス株式会社 半導体装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5882998A (en) * 1996-12-27 1999-03-16 Vlsi Technology, Inc. Low power programmable fuse structures and methods for making the same
KR19990063840A (ko) * 1995-09-29 1999-07-26 피터 엔. 데트킨 실리사이드 응집 퓨즈 디바이스
KR19990082361A (ko) * 1996-02-09 1999-11-25 피터 토마스 퓨즈 및 안티-퓨즈와 퓨즈 및 안티-퓨즈를 제조 및 활성화하기위한 방법
KR100276097B1 (ko) 1995-09-26 2000-12-15 박세광 필드 프로그램 가능한 상호연결칩 상에 형성되는 앤티퓨즈 장치 및 그 제조방법
JP2004228369A (ja) 2003-01-23 2004-08-12 Sony Corp 半導体装置およびフューズ溶断方法
US20050277232A1 (en) * 2004-03-23 2005-12-15 Shien-Yang Wu Diode junction poly fuse

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2222491A (en) * 1939-08-05 1940-11-19 Timken Roller Bearing Co Sliding bearing
JPH04147648A (ja) * 1990-10-11 1992-05-21 Nec Ic Microcomput Syst Ltd 半導体装置
US5783467A (en) * 1995-12-29 1998-07-21 Vlsi Technology, Inc. Method of making antifuse structures using implantation of both neutral and dopant species
US5899707A (en) * 1996-08-20 1999-05-04 Vlsi Technology, Inc. Method for making doped antifuse structures
US5899736A (en) * 1997-09-19 1999-05-04 Siemens Aktiengesellschaft Techniques for forming electrically blowable fuses on an integrated circuit
JPH11187843A (ja) 1997-12-25 1999-07-13 Lotte Co Ltd 肥満改善用の飲食組成物およびこれを含有する飲食物
US6323535B1 (en) * 2000-06-16 2001-11-27 Infineon Technologies North America Corp. Electrical fuses employing reverse biasing to enhance programming
US6570207B2 (en) 2000-12-13 2003-05-27 International Business Machines Corporation Structure and method for creating vertical capacitor and anti-fuse in DRAM process employing vertical array device cell complex
US6707129B2 (en) * 2001-12-18 2004-03-16 United Microelectronics Corp. Fuse structure integrated wire bonding on the low k interconnect and method for making the same
US6815797B1 (en) * 2002-01-08 2004-11-09 National Semiconductor Corporation Silicide bridged anti-fuse
US6798684B2 (en) * 2002-04-04 2004-09-28 Broadcom Corporation Methods and systems for programmable memory using silicided poly-silicon fuses
US6580156B1 (en) 2002-04-04 2003-06-17 Broadcom Corporation Integrated fuse with regions of different doping within the fuse neck
JP2004335608A (ja) * 2003-05-02 2004-11-25 Sony Corp 半導体装置
US6806107B1 (en) * 2003-05-08 2004-10-19 Taiwan Semiconductor Manufacturing Company, Ltd. Electrical fuse element test structure and method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100276097B1 (ko) 1995-09-26 2000-12-15 박세광 필드 프로그램 가능한 상호연결칩 상에 형성되는 앤티퓨즈 장치 및 그 제조방법
KR19990063840A (ko) * 1995-09-29 1999-07-26 피터 엔. 데트킨 실리사이드 응집 퓨즈 디바이스
KR19990082361A (ko) * 1996-02-09 1999-11-25 피터 토마스 퓨즈 및 안티-퓨즈와 퓨즈 및 안티-퓨즈를 제조 및 활성화하기위한 방법
US5882998A (en) * 1996-12-27 1999-03-16 Vlsi Technology, Inc. Low power programmable fuse structures and methods for making the same
JP2004228369A (ja) 2003-01-23 2004-08-12 Sony Corp 半導体装置およびフューズ溶断方法
US20050277232A1 (en) * 2004-03-23 2005-12-15 Shien-Yang Wu Diode junction poly fuse

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190095244A (ko) 2016-12-26 2019-08-14 각코우호우징 카나자와 고교다이가쿠 염색된 폴리프로필렌 섬유 구조물 및 이를 이용한 의료품

Also Published As

Publication number Publication date
KR20070105871A (ko) 2007-10-31
CN101068015B (zh) 2012-07-18
DE102007020903A1 (de) 2007-10-31
JP2007294961A (ja) 2007-11-08
US7576407B2 (en) 2009-08-18
US20070252237A1 (en) 2007-11-01
JP5165272B2 (ja) 2013-03-21
CN101068015A (zh) 2007-11-07

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