KR100833433B1 - Eximer lamp - Google Patents

Abstract

The double-pipe structure by the outer pipe | tube and the inner pipe | tube, WHEREIN: The present invention provides the excimer lamp which can obtain a sufficiently high reliability at the junction part of an outer side pipe | tube and an inner side pipe | tube, and the damage of a lamp is reliably prevented at the time of conveyance or attachment. The excimer lamp has a discharge vessel having a double tube structure in which the outer tube and the inner tube made of glass are arranged on the same axis, and are welded at both ends, and one electrode is provided on the outer surface of the outer tube. The other electrode is provided in the inner surface, and the discharge gas which forms an excimer molecule by excimer discharge is filled in the discharge space formed between the said outer tube and the said inner tube, and an outer tube and an inner tube, The thickness of the central region portion in the tube axis direction is different from each other, and the thickness of the outer tube and the inner tube with respect to the joint portion are approximately equal in size. That it is characterized.

Description

Excimer lamp {EXIMER LAMP}

BRIEF DESCRIPTION OF THE DRAWINGS Sectional drawing for description which shows the outline of the structure in an example of an excimer lamp of this invention,

2 is an explanatory diagram showing an example of a joining method of an outer tube constitution member and an inner tube constitution member in manufacturing a discharge vessel of an excimer lamp of the present invention;

3 is an explanatory diagram showing another example of a joining method of an outer tube constitution member and an inner tube constitution member in manufacturing a discharge container of an excimer lamp of the present invention;

4 is an explanatory view showing another example of a joining method of an outer tube constitution member and an inner tube constitution member in manufacturing a discharge vessel of an excimer lamp of the present invention;

FIG. 5: is explanatory drawing which shows the other example of the bonding method of the member for outer side pipe structures and the member for inner side pipe structures in manufacturing the discharge container of the excimer lamp of this invention, FIG.

6 is an explanatory diagram showing another example of a joining method of an outer tube constitution member and an inner tube constitution member in manufacturing a discharge container of an excimer lamp of the present invention;

7 is an explanatory diagram showing a joining method of an outer tube constitution member and an inner tube constitution member in manufacturing a discharge container of an excimer lamp according to Comparative Example 1;

8 is an explanatory diagram showing a joining method of an outer tube constitution member and an inner tube constitution member in manufacturing a discharge vessel of an excimer lamp according to Comparative Example 2;

FIG. 9: is explanatory drawing which shows an example of the joining method of the outer side tube structural member and the inner side tube structural member in manufacturing the discharge container of the conventional excimer lamp.

<Description of the symbols for the main parts of the drawings>

10: excimer lamp 11: discharge vessel

12: outer tube 13: inner tube

13A: Bend 14: Single Wall

15: one electrode (outer electrode) 16: other electrode (inner electrode)

20: Small pipe for inner pipe configuration 20A: Tip section

21: element pipe for outer tube configuration 21A: inner peripheral surface

25: heating means H: heating part

201: element pipe for constructing the inner tube 202: bent portion

30: element pipe for inner tube configuration 30A: outer cross section

31: Element pipe for outer pipe configuration 31A: Inner peripheral surface

35 joining member 35A joining member

36: bend portion 36A: tip section

37: Straight pipe shape part 37A: Tip section

38: bend portion H1, H2: heating portion

40: element pipe for inner tube configuration 40A: outer cross section

41: element pipe for outer tube configuration 41A: inner peripheral surface

45: joining member 46: bent portion

46A: End face 47: Straight pipe portion

47A: end face 55: joining member

56: bend portion 57: straight pipe portion

60: partition member 65: joining member

66: small pipe fitting hole for the inner pipe configuration

67: outer peripheral edge portion 68: inner peripheral edge portion

70, 71: jurisdiction 70A: inner circumference

72: bend portion 72A: tip section

75: heating means

The present invention relates to an excimer lamp, and more particularly, to an excimer lamp having a double tube structure in which a cylindrical outer tube and a cylindrical inner tube are disposed on the same axis.

At present, for example, in the cleaning process by ultraviolet irradiation of the glass substrate of a liquid crystal display panel, or the irradiation process of the ultraviolet-ray in a photochemical reaction, the method of irradiating a to-be-processed object with the vacuum ultraviolet light of wavelength 200nm or less is used, As an apparatus for irradiating vacuum ultraviolet light, an excimer molecule is formed by excimer discharge and an excimer lamp using light emitted from the excimer molecule is used as a light source.

One kind of excimer lamp is demonstrated with reference to FIG. 1, for example, and it arrange | positions along the tube axis in the cylindrical outer tube l2 which consists of quartz glass, and this outer tube 12, It has a cylindrical inner tube 13 made of, for example, quartz glass having an outer diameter smaller than the inner diameter of the outer tube 12, and the outer tube 12 and the inner tube 13 are melt-bonded at both ends to form an outer tube. The discharge vessel 11 of the double tube structure in which the annular discharge space S is formed between 12 and the inner side pipe | tube 13 is provided, For example, it is a mesh-like which consists of electroconductive materials, such as a wire mesh, One electrode 15 is provided close to the outer circumferential surface of the outer tube 12, while the other electrode 16 made of, for example, an aluminum plate is provided close to the inner circumferential surface of the inner tube 13, and the discharge space ( In S), for example, by excimer discharge such as xenon gas. Standing excimer is a discharge gas which forms the molecular charge, is configured (for example, see Patent Document 1 and Patent Document 2).

The discharge container in such an excimer lamp can be obtained as follows, for example. That is, for example, as shown in Fig. 9, two cylindrical tubular pipes 70 and 71 each having substantially the same thickness and having different outer diameters are prepared to constitute an inner pipe. By bending both ends of one of the small pipes 71 to the outside in the radial direction to form the bent portion 72, by heating the two ends of the two small pipes 70, 71 by the appropriate heating means 75 outside the pipe axis direction The inner circumferential surface 70A of the other elementary pipe 70 constituting the outer tube and the end surface 72A of the bent portion 72 in one elementary pipe 71 constituting the inner tube are joined to each other, A discharge container having an annular discharge space in a sealed state is obtained between the inner circumferential surface of the outer tube and the outer circumferential surface of the inner tube. Here, the magnitude | size t1 of the thickness of the other small pipe | tube 70 which comprises an outer side pipe | tube, and the magnitude | size t2 of the thickness of the one small pipe | tube 71 which comprises an inner side pipe | tube become a substantially equivalent magnitude | size, for example. have.

In recent years, for example, in the excimer lamp used as a light source of the cleaning apparatus of the glass substrate of a liquid crystal display panel, it enlarges so that the light emitting area of a large area may be obtained with the enlargement of a glass substrate, for example, 800 mm or more is required.

In such a long excimer lamp, the thickness of the outer tube is large and the thickness of the inner tube is smaller than the thickness of the outer tube in view of the mechanical strength of the entire excimer lamp and the bonding strength of the outer tube and the inner tube. need. Specifically, the reason why the thickness of the inner tube is made small is that, in order to make the excimer lamp have sufficient mechanical strength, when the thickness of both the outer tube and the inner tube is increased, the inner tube is connected to the outer tube. It is because the strength of a junction part will fall by the weight by itself because it is a structure supported by only the junction part.

Moreover, it is not limited to this case, and it is not necessary to comprise a discharge container in the state in which the magnitude | size of the thickness of an outer side pipe | tube and the magnitude | size of the thickness of an inner side tube differ. For example, in the case of short cutting, the size of the thickness of the inner tube is large, and the size of the thickness of the outer tube is smaller than the thickness of the inner tube. The reason for this is that by reducing the size of the thickness of the outer tube, the light transmittance is increased and a high light output can be obtained.

However, in joining the outer side pipe | tube and the inner side pipe which differ in the magnitude | size of mutual thickness, since the magnitude | size of the heat capacity of the outer side pipe | tube and the inner side pipe | tube in the heating part regarding a joining part differs, both cannot be heated uniformly, Problems such as not being able to obtain sufficient joint strength, deformation or skewing may occur in the joint, and discharge due to structural problems in the joint at the time of conveyance or attachment of the excimer lamp, or at the initial stage of lighting. There is a problem that the container may be broken.

On the other hand, if sufficient mechanical strength can be ensured for the entire excimer lamp, it is preferable to thin the outer tube and the inner tube. The reason is that the electrical efficiency can be suppressed from decreasing.

However, as mentioned above, when melt-bonding a thing with a large thickness difference between an outer side pipe | tube and an inner side pipe | tube, since the thin side melt | dissolves excessively, it may become difficult to bond itself.

The above problem is remarkably caused when the thickness of the thicker side of the outer tube and the inner tube constituting the discharge vessel is, for example, 1.5 times or more of the size of the thinner thickness.

<Patent Document 1> Japanese Patent No. 3252676

<Patent Document 2> Japanese Patent No. 2951139

The present invention has been made on the basis of the above circumstances, and is an excimer lamp having a double-pipe structure with an outer tube and an inner tube having different thicknesses in the central region portion, and the junction between the outer tube and the inner tube is sufficiently high in reliability. It is an object of the present invention to provide an excimer lamp that can be configured to have a structure that can be reliably prevented from being damaged at the time of conveyance, attachment, or initial lighting of the lamp.

The excimer lamp of the present invention is provided with a discharge vessel having a double tube structure in which outer and inner tubes made of glass are coaxially disposed and melted and joined at both ends, and one electrode is disposed on an outer surface of the outer tube. An excimer lamp provided with the other electrode on the inner surface of the inner tube and filled with a gas for discharging to form excimer molecules by excimer discharge in a discharge space formed between the outer tube and the inner tube. To

The outer tube and the inner tube are characterized in that the thicknesses of the central region portions in the tube axis direction are different from each other, and the thickness of the outer tube and the inner tube with respect to the joint portion are approximately equal in size.

In the excimer lamp of this invention, the outer side pipe | tube and the inner side pipe | tube are joined by the joining member which consists of glass at both ends,

The thickness of the outer tube and the thickness of the joining member which are about the joint part of an outer side pipe | tube and a joining member are the magnitude | size which is approximately equal, and the thickness of the joining member and the thickness of an inner side pipe which are about the joint part of a joining member and an inner side pipe are substantially equal. It is preferred to be size.

Moreover, in the excimer lamp of this invention, it is preferable that the magnitude | size of the thickness in the center area part of a thick thickness among an outer side pipe | tube and an inner side pipe is 1.5 times or more of the magnitude | size of the thickness in a center area part of a thin thickness. .

Moreover, it is preferable that the magnitude | size of the thickness in the center region part of thin thickness among an outer side pipe | tube and an inner side pipe | tube is 0.5-1.0 mm.

Best Mode for Carrying Out the Invention

Hereinafter, the present invention will be described in detail with reference to the drawings.

<First Embodiment>

BRIEF DESCRIPTION OF THE DRAWINGS It is sectional drawing for description which shows the outline of the structure in an example of the excimer lamp of this invention.

The excimer lamp 10 is made of, for example, quartz glass, and has a cylindrical outer tube 12 having a uniform thickness in the tube axis direction, and is disposed along the tube axis in the outer tube 12. It has a cylindrical inner tube 13, for example made of quartz glass having an outer diameter smaller than the inner diameter of the outer tube 12, the outer tube 12 and the inner tube 13 is melted at both ends The discharge container 11 of the double tube structure joined is provided.

The inner tube 13 constituting the discharge vessel 11 has a curved portion 13A that is bent so that both ends thereof extend outward in the radial direction and extend, and the curved portion 13A of the inner tube 13 has an outer side. The end wall 14 is comprised by the bent part 13A by joining with the pipe 12, and the ring sealed airtightly between the inner peripheral surface of the outer tube 12 and the outer peripheral surface of the inner tube 13 by this. The discharge space S of the shape is formed.

In the outer tube 12 constituting the discharge vessel 11, one mesh-shaped electrode made of a conductive material such as a gold mesh, in close proximity to the outer circumferential surface thereof (hereinafter referred to as an "external electrode") ( 15) is provided, and the inner tube 13 has a roughly C-shaped (groove-shaped) other electrode (hereinafter referred to as a pipe-shaped or cross-section) that is close to the inner circumferential surface thereof, and is made of aluminum, for example. (Called an “internal electrode”) 16 is provided. And the external electrode 15 and the internal electrode 16 are connected to the power supply apparatus (not shown) which consists of a high frequency power supply, for example.

In the discharge space S, a discharge gas such as xenon gas, which forms excimer molecules by excimer discharge generated between the external electrode 15 and the internal electrode 16, is filled.

In this excimer lamp 10, the thickness of the outer tube 12 and the inner tube 13 in the central region portion constituting the excimer light emitting region capable of effectively utilizing the excimer light emitted from the excimer lamp 10. Are of different sizes, and the thicker ones are 1.5 times or more larger than the thinner ones. In this embodiment, the magnitude | size t1 of the thickness of the outer side pipe | tube 12 is larger than the magnitude | size t2 of the thickness of the inner side pipe | tube 13 (t1≥1.5 * t2) (refer FIG. 2).

In addition, the magnitude | size of the thickness of a thin thing (size t2 of the thickness of the inner side pipe | tube 13 in this embodiment) is 0.5-1.0 mm, for example.

In addition, in the following, "thickness" means the thickness in the center area | region part of the excimer lamp 10 except the case where there is particular notice.

And the thickness of the outer side pipe 12 and the thickness of the inner side pipe 13 which are about the junction part of the outer side pipe 12 and the inner side pipe | tube 13 are about the same magnitude | size. Specifically, referring to FIG. 2, when the magnitude of the thickness at the end of the outer tube 12 is t1 and the magnitude of the thickness at the end of the bent portion of the inner tube 13 is t3, the following formula ( It is in the state which satisfy | fills any one of 1) and Formula (2).

T1-t3 ≤ 0.2 x t1 (1)

T1-t3 ≤ 0.2 x t3 (2)

The excimer lamp 10 of the said structure can be manufactured as follows, for example.

That is, as shown in FIG. 2, the cylindrical inner side which comprises the inner side pipe | tube 13 which previously processed both ends into the trumpet shape so that the outer edge may expand and expand radially outward and formed the bent part 13A. Insert the pipe 20 for pipe configuration into the cylindrical outer pipe configuration small pipe 21 which comprises the outer pipe 12 which has an inner diameter larger than the outer diameter of the said inner pipe structure small pipe 20, It arrange | positions on the same axis and heats it by the heating means 25, such as a burner, from the outer side of a tube axis direction, for example, of 21 A of inner peripheral surfaces of the small pipe 21 for outer pipe structures, and the small pipe 20 for inner pipe structures. 20 A of front end surfaces of 13 A of bent parts are welded, and, thereby, the discharge vessel 11 of the double tube structure in which the tubular discharge space S was formed between the outer tube 12 and the inner tube 13. ) Is obtained. Here, the inner tube configuration element pipe 20 is, for example, the size of the thickness in the central region portion is t2, and the thickness increases as the bent portion 13A continuous to the central region portion faces the outer end. The magnitude | size of the thickness of the outer edge part with respect to a junction part is t3.

In heating and melting the element pipe 2l for outer tube constitution and the element pipe 20 for inner tube constitution, the viewpoint which aims at equalizing the magnitude | size of the heat capacity in the heating part H heated by the heating means 25 is carried out. In this case, it is preferable that the length L of the inner pipe constitution small pipe 20 in the heating portion H is 100% or more of the size t1 of the thickness t1 of the outer pipe constitution small pipe 21. Do. Thereby, the outer pipe | tube element 21 for outer side pipe structures and the small pipe 20 for inner side pipe structures can be melt-bonded in the state from which the uniform heating state was obtained.

Then, the appropriate discharge gas is sealed in the discharge space S in the discharge vessel 11 obtained as described above, and the external electrodes 15 and the internal electrodes 16 are disposed at predetermined positions, The excimer lamp 10 shown in FIG. 1 is obtained.

And according to the excimer lamp 10 of the said structure, in the heating part H heated by the heating means 25 in joining by heat-melting and joining the outer side pipe 12 and the inner side pipe 13 at both ends. Since the thickness t1 of the small pipe 21 for outer side pipe constitution and the size t3 of the thickness 13a of the bent part 13A in the small inner pipe 20 for inner pipe constitution are about the same size, the said heating part ( Since the heat capacity of the outer tube constitution element 21 and inner tube constitution element tube 20 in H) becomes substantially the same, and can be melted and heated uniformly, it is assured that deformation and distortion occur. As a result, a stable and firm bonding state can be obtained. As a result, the joint portion of the outer tube 12 and the inner tube 13 can be configured to have sufficiently high reliability, and therefore, the excimer lamp 10 At the time of conveyance or when attaching or initial lighting It is possible to reliably prevent the discharge vessel 11 from being damaged.

In the above, it demonstrated that the discharge container of the structure of which the magnitude | size of the thickness of an outer side tube is larger than the magnitude | size of the thickness of an inner side tube was demonstrated, but the discharge container of the structure whose magnitude | size of the thickness of an inner side tube is larger than the magnitude | size of the thickness of an outer side tube. The same effect is acquired also about what is equipped with.

Particularly, in the present invention, the thickness of the thin ones in the outer and inner tubes is 0.5 to 1.0 mm, and the thickness of the thick ones is 1.5 times or more the size of the thickness of the thin ones, for example, the excimer lamp 10 ) Is very useful in the configuration having a total length of 1000 mm or more, and the junction between the outer tube and the inner tube can be sufficiently high while ensuring a sufficiently high mechanical strength of the entire excimer lamp 10.

<2nd embodiment>

In the excimer lamp according to the second embodiment of the present invention, the outer tube and the inner tube are joined by separate joining members at both ends to constitute a discharge container, and the other basic configuration is the same as that shown in FIG.

Specifically, as shown in FIG. 3, the discharge container in the excimer lamp which concerns on this 2nd Embodiment is the outer tube constitution small pipe 31 and inner tube which are thickness of the magnitude | size uniformly in a tube axis direction, respectively. The element pipe 30 for constitution is joined at both ends by the joining member 35 which consists of the same material, for example, quartz glass, with the element pipe 31 for an outer side pipe structure, and the element pipe 30 for an inner side pipe structure, for example. It is a double tube structure. In this embodiment, the size t1 of the thickness of the outer tube configuration small pipe 31 is larger than the size t2 of the thickness of the inner pipe configuration small pipe 30 (t1 ≧ 1.5 × t2). .

The joining member 35 has a substantially short cylindrical shape having a bent portion 36 curved so that one end thereof is extended outward in the radial direction and a straight tubular portion 37 continuous through the bent portion 36 and the end portion. The size t4 of the thickness at the end of the bent portion 36 that is joined to the outer tube configuration small pipe 31 and constitutes the end wall is approximately equal to the size t1 of the thickness of the outer pipe configuration small pipe 31. The size t5 of the thickness at the end of the straight pipe-shaped portion 37 to be the same size and to be joined to the inner pipe configuration small pipe 30 is equal to the size t2 of the thickness of the inner pipe configuration small pipe 30. It is about the same size as.

That is, the thickness difference | t1-t4 | between the thickness at the end of the bent portion 36 and the thickness of the outer pipe configuration element pipe 31 is equal to the magnitude t1 or the thickness of the outer tube configuration element pipe 31. The thickness difference of 20% or less of the size t4 of the thickness at the end of the portion 36, and the thickness difference between the thickness at the end of the straight pipe portion 37 and the thickness of the inner tube configuration element pipe 30. T2-t5 is 20% or less of the size t2 of the thickness of the element pipe 30 for inner tube configuration or the size t5 of the thickness at the end of the straight pipe portion 37.

The excimer lamp having such a configuration is joined with the inner circumferential surface 31A of the element pipe 31 for straight pipe configuration by heating with, for example, a burner on the outer side in the tube axis direction, similarly to the case of manufacturing the one shown in FIG. While welding the tip end surface 36A of the bent portion 36 of the member 35 and heating it, for example, with a burner or the like on the radially inner side, it joins with the outer end surface 30A of the element pipe 30 for inner pipe configuration. 37 A of front end surfaces of the straight tubular part 37 in the member 35 are welded, and the discharge container of the double pipe structure by which the tubular discharge space was formed between the outer tube and the inner tube is obtained. Lose.

In joining the outer pipe constitution small pipe 31 and the joining member 35, the outer pipe constitution small pipe 31 and the joining member (from the viewpoint of achieving a uniform size of the heat capacity in the heating portion H1). It is preferable that the length L1 of the joining member in the heating part H1 with 35 is set to 100% or more of the magnitude | size t1 of the thickness of the element pipe 31 for outer side pipe constitutions.

In addition, in joining the joining member 35 and the element pipe 30 for inner tube structures, it joins with the element pipe 30 for inner tube structures from a viewpoint of making uniform the magnitude | size of the heat capacity in the heating part H2. The length L2A of the joining member 35 in the heating part H2 with the member 35 and the length L2B of the inner pipe | tube 30 for internal pipe structure in the heating part H2 are the same size. desirable. The length L2A of the joining member 35 in the heating portion H2 and the length L2B of the inner tube 30 for forming the inner tube in the heating portion H2 are not particularly limited. It is set to 100% or more of the size t2 of the thickness of the pipe 30 for pipe configuration.

Thereby, the small pipe 31 for outer side pipe structures, the joining member 35, and the joining member 35 and the small pipe 30 for inner pipe structures can be fusion-bonded in the state in which the uniform heating state was obtained.

In the above, it demonstrated that the discharge container of the structure of the magnitude | size of the thickness of an outer side pipe is larger than the magnitude | size of the thickness of an inner side tube, The magnitude | size (t1) of the thickness of an outer side pipe is the magnitude | size (t2) of the thickness of an inner side pipe. The same applies to the case where the configuration is smaller (t1 x 1.5? T2). That is, as shown in FIG. 4, as the joining member 45, the magnitude | size t4 of the thickness in the edge part of the bending part 46 which joins with the outer pipe constitution small pipe 41, and comprises a short wall is an outer pipe. The size t5 of the thickness of the constituent element pipe 41 becomes approximately the same as the size t1, and the size t5 of the thickness at the end of the straight pipe portion 47 joined to the inner tube element element pipe 40 is One having a size substantially equal to the size t2 of the thickness of the inner pipe configuration element pipe 40 is used, and the bent portion 46 of the inner circumferential surface 41A of the outer pipe structure element pipe 41 and the joining member 45 is provided. While welding the tip end surface 46A of the tube, and welding the outer end surface 40A of the inner tube configuration element pipe 40 and the tip end surface 47A of the straight pipe portion 47 in the joining member 45, As a result, a discharge vessel having a double tube structure in which a tubular discharge space is formed between the outer tube and the inner tube is obtained.

In joining the outer pipe constitution small pipe 41 and the joining member 45, the outer pipe constitution small pipe 41 and the joining member are designed from the viewpoint of uniformizing the magnitude of the heat capacity in the heating portion H1. The length L3 of the joining member 45 in the heating part H1 with 45 is 100% or more of the magnitude | size t1 of the thickness of the element pipe 41 for outer side pipe constitutions in the heating part H1. It is desirable to have a size.

In addition, in joining the joining member 45 and the inner pipe | tube element for internal pipe structure 40, from the viewpoint of achieving the uniformity of the magnitude | size of the heat capacity in the heating part H2, The length L4A of the joining member 45 in the heating part H2 with the joining member 45, and the length L4B of the small pipe | tube 40 for the inner side pipe structure in the heating part H2 are the same size. It is preferable. Although the length L4A of the joining member 45 in the heating part H2, and the length L4B of the small pipe | tube 40 for the inner side pipe structure in the heating part H2 are not restrict | limited, For example It is made into the size of 100% or more of the size t2 of the thickness of the element pipe 40 for inner pipe formation.

Thereby, the small pipe 41 for outer side pipe structures, the joining member 45, and the joining member 45 and the small pipe 40 for inner pipe structures can be fusion-bonded in the state from which the uniform heating state was obtained.

As described above, according to the excimer lamp of the present invention in which the outer tube and the inner tube are joined by separate joining members at both ends to form a discharge container, the first embodiment in which the outer tube and the inner tube are directly welded. Similar to the excimer lamp according to the above, the outer tube constitution small pipe 31 (41) and the joining member in the heating portion H1 of the outer tube constitution small pipe 31 (41) and the joining member 35 (45). The size of the thickness of (35 (45)) becomes approximately the same size, and the joining member in the heating part H2 of the joining member 35 (45) and the small pipe 30 (40) for inner pipe construction ( Since the thicknesses of the 35 (45) and the inner tube 30 (40) for the inner tube configuration are approximately the same size, the heat capacity of the two members in the heating portions H1 and H2 becomes approximately the same. Since the two members can be heated uniformly, deformation or distortion occurs Can be reliably suppressed, and a stable and firm bonding state can be obtained. As a result, the joint portion of the outer tube and the inner tube can be configured to have a sufficiently high reliability, and therefore, when the excimer lamp 10 is conveyed. Alternatively, the discharge vessel 11 can be reliably prevented from being damaged at the time of attachment or at the initial stage of lighting.

As mentioned above, although embodiment of this invention was described, this invention is not limited to said embodiment, A various change can be added.

For example, in the excimer lamp which concerns on 1st Embodiment, it is a small pipe for outer tube structure, Comprising: It has the curved part processed so that the both ends may extend in radial direction inside, The thickness at the front-end | tip part of a curved part is an inner pipe structure As an element for the inner tube configuration, a tube having a thickness having a uniform size in the tube axis direction is used as the element for the inner tube configuration, and the element for the outer tube configuration and the element for the inner tube configuration are melted. The structure may be joined together and the discharge container was formed.

In addition, in the excimer lamp which concerns on 2nd Embodiment, the joining member does not need to be the same as the material of an outer side pipe | tube and an inner side pipe | tube, For example, synthetic quartz glass, fused quartz glass, glass material which has ultraviolet resistance, etc. It can be used that consists of.

Further, the excimer lamp according to the present invention is formed such that, at one end in the discharge vessel, a partition wall protruding radially outward from the outer circumferential surface of the inner tube of the discharge vessel extends over the entire circumference of the inner tube. Therefore, it can be set as the structure in which the getter accommodation auxiliary space for adsorbing impurity gas, such as oxygen, hydrogen, carbon monoxide, water, etc. which communicates with a discharge space between a partition and the end wall of a discharge container is formed.

In such a configuration, as shown in FIG. 5, the partition wall is a straight pipe portion 57 of the joining member 55 in which a disk-shaped partition wall member 60 made of glass, for example, constitutes a part of the inner tube. It is formed by welding to the outer circumferential surface of), and the size t6 of the thickness of the partition structural member 60 in the heating portion is equal to the size t5 of the thickness in the straight pipe portion 57 of the joining member 55. It is desirable to have approximately the same size. In other words, the thickness difference | t5-t6 | between the thickness in the straight pipe portion 57 of the joining member 55 and the thickness of the partition structural member 60 is the straight pipe portion 57 of the joining member 55. It is preferable that the size t5 of the thickness or the size t6 of the thickness of the partition structural member 60 be 20% or less. Thereby, the heat capacity of the joining member 55 and the heat capacity of the partition structural member 60 in a heating part become substantially the same magnitude | size, and the joining member 55 and the partition structural member 60 are heated uniformly. Can be melt-bonded in the obtained state.

In addition, the magnitude | size d of the separation distance between the cross-sectional position of the partition structural member 60 and the cross-sectional position of the straight tubular part 57 in the joining member 55 is the small pipe | tube 40 for inner-pipe configuration, for example. It is preferable that the size is 100% or more of the size t2 of the thickness. Thereby, in welding the joining member 55 and the element pipe 50 for inner pipe | tube structure, the magnitude | size of the heat capacity of the partition structure member 60 in a heating part becomes substantially irrelevant, and the joining member 55 is carried out. And a stable joint at the joint of the small pipe 40 for inner tube configuration can be obtained.

In addition, the magnitude | size t4 of the thickness of the outer end part of the bent part 56 joined with the outer pipe constitution small pipe 41 in the joining member 55 is the thickness of the outer pipe constitution small pipe 41 The size is approximately equal to the size t1.

In addition, in the excimer lamp which concerns on 2nd Embodiment, as shown in FIG. 6, a disk-shaped thing can be used as a joining member.

Specifically, this joining member 65 has an outer diameter dimension of a size suitable for the inner diameter of the outer tube configuration small pipe 41, and has an inner diameter having a size suitable for the outer diameter of the inner pipe configuration small pipe 40. The small pipe fitting hole 66 for a pipe structure is formed in the center part.

The joining member 65 has a size t7 of the thickness of the outer circumferential edge portion 67 that is melt-bonded with the outer tube configuration small pipe 41 and a size t1 of the thickness of the outer pipe configuration small pipe 41. The size (t8) of the thickness of the inner peripheral edge part (opening edge part of the small pipe fitting hole for inner pipe structure) 68 which becomes about the same size, and is fusion-bonded with the small pipe 40 for inner pipe structure is an inner pipe. The size is approximately equal to the size t2 of the thickness of the element pipe 40 for construction. That is, the thickness difference | t1-t7 | between the thickness of the outer pipe constitution 41 and the thickness of the outer circumferential edge portion 67 is equal to the size t1 or the outer circumferential edge of the thickness of the outer pipe constitution 41. 20% or less of the size t7 of the thickness 67, and the thickness difference | t2-t8 | between the thickness of the inner tube configuration element pipe 40 and the thickness of the inner circumferential edge portion 68 is the inner side. 20% or less of the size t2 of the thickness of the pipe | tube element 40 for tubular construction, or the size t8 of the thickness of the inner peripheral part 68 is made.

The magnitude | size (diameter direction length) of the outer peripheral edge part 67 in the joining member 65 equalizes the magnitude | size of the heat capacity in the joining part of the joining member 65 and the small pipe 41 for outer pipe constructions. From the viewpoint of designing, it is preferable that the size is 100% or more of the size t1 of the thickness t1 of the outer tube constituting element pipe 41, and the inner peripheral edge portion 68 of the joining member 65 is formed. The size (diameter length) of the small pipe 40 for inner pipe configuration is obtained from the viewpoint of uniformizing the size of the heat capacity in the joint portion between the joining member 65 and the small pipe 40 for inner pipe configuration. It is preferable that it is 100% or more of the magnitude | size t2 of thickness.

<Example>

Hereinafter, an embodiment of the excimer lamp of the present invention will be described in detail, but the present invention is not limited thereto.

EXAMPLE 1

As shown in FIG. 2, the outer tube constituting element pipe which consists of quartz glass whose total length is 1000 mm, an outer diameter is 40 mm, and thickness t1 is 2.5 mm (t1 = 2.5 * t2), and the curved part were included. The total length is 1020 mm, the outer diameter of the straight tubular portion is 20 mm, the thickness t2 of the straight tubular portion is 1.0 mm, and the thickness t3 at the end of the bent portion is 2.2 mm (t1-t3 = 0.12 x t1). The inner tube constitution small pipe made of quartz glass was prepared, and the outer tube constitution small pipe and the inner tube small pipe were welded at both ends to produce a discharge vessel having a double pipe structure in which the outer tube had a thickness larger than that of the inner pipe. The total length of this discharge vessel is 1000 mm.

The heat treatment conditions in joining the outer pipe constitution element pipe and the inner pipe constitution element pipe use a oxyhydrogen burner as a heating means, and make heating temperature 2000 degreeC, heating time for 10 minutes, and also in the heating part. The radial length L of the element pipe for inner pipe constitution was 4 mm (1.6 x t1).

And according to the structure shown in FIG. 1, the excimer lamp which concerns on this invention was manufactured by disposing an external electrode and an internal electrode, and simultaneously filling gas for discharge in a discharge space.

As the external electrode, a mesh-shaped one made of an endless gold mesh made of stainless steel was used.

The internal electrode used what processed the aluminum plate to the groove shape of C shape cross section substantially.

As the discharge gas, xenon gas was used and sealed at a pressure of 26 kPa.

The excimer lamp obtained in this way was subjected to a static load breaking test, and the joint strength of the joint between the outer tube and the inner tube was evaluated. As a result, the joint in the excimer lamp has a maximum weight of 3 kg · m. It was confirmed that it had the joint strength which can endure a moment, and had sufficiently high reliability. For example, when attaching an excimer lamp, the magnitude | size of the moment acting on the junction part of an excimer lamp is about 2 kg * m normally.

EXAMPLE 2

As the small pipe for outer pipe structure, the total length is 200 mm, the outer diameter is 15 mm, and the thickness t1 is 0.7 mm. The outer diameter of the center region portion is 6 mm, the thickness t2 of the straight tubular portion is 1.5 mm (t2 = 2.1 x t1), and the thickness t3 at the end of the bent portion is 0.8 mm (t3-t1 = 0.14 x Except having used t1), it carried out similarly to Example 1, and produced the discharge container of the double tube structure whose thickness of an outer side tube is smaller than the thickness of an inner side tube, and according to the structure shown in FIG. An excimer lamp according to the present invention was produced by disposing an internal electrode and filling a gas for discharge into a discharge space. The total length of the discharge vessel in this excimer lamp is 200 mm.

The same evaluation as in Example 1 was performed with respect to the junction of the outer tube and the inner tube in the obtained excimer lamp, and the junction in this excimer lamp had a joint strength capable of withstanding a moment of 2.5 kg · m at most. , It was confirmed that it had a sufficiently high reliability.

EXAMPLE 3

As shown in FIG. 3, the element pipe for outer tube constitution which consists of quartz glass whose total length is 1000 mm, outer diameter is 40 mm, and thickness t1 is 2.5 mm (t1 = 2.5 * t2), and 900 mm in total length At the end of the bent portion, the inner tube constituting element pipe made of quartz glass having an outer diameter of 20 mm and a thickness t2 of 1 mm, the total length including the bent portion is 60 mm, the outer diameter of the straight tubular portion is 20 mm A short cylindrical joining member made of quartz glass having a thickness t4 of 2.2 mm (t1-t4 = 0.12 x t1) and a thickness t5 of the straight tubular portion of 1 mm (t2 = t5) By welding the pipes for pipe constitution and the inner pipe small pipes by the joining members at both ends, the discharge tube having a double pipe structure having a thickness of the outer pipe larger than the thickness of the inner pipe was produced in the same manner as in Example 1. An excimer lamp according to the invention was produced. The total length of the discharge vessel in this excimer lamp is 1000 mm.

The heat treatment conditions in welding the outer pipe constitution element and the joining member are the same as those of Example 1 (the heating length is 2000 ° C., and the heating time is 10 minutes in the radial length of the joining member in the heating part ( L1) is 4 mm (1.6 x t1), and the heat treatment conditions for welding the inner tube constitution element and the joining member are set at a heating temperature of 2000 ° C. and a heating time of 5 minutes. The length L2A in the tube axis direction of the joining member and the length L2B of the element pipe for inner tube configuration were 3 mm (3 x t2).

The same evaluation as in Example 1 was conducted with respect to the junction of the outer tube and the inner tube in the obtained excimer lamp, and the junction in this excimer lamp had a joint strength capable of withstanding a moment of 3 kgm at most, and was sufficient. It was confirmed to have high reliability.

EXAMPLE 4

As the elemental pipe for outer tube configuration, the total length is 200 mm, the outer diameter is 15 mm, and the thickness t1 is 0.7 mm. As the elemental pipe for the inner tube configuration, the total length is 180 mm, the outer diameter is 6 mm, and the thickness ( As the joining member, the total length including the bent portion is 15 mm, the outer diameter of the straight tubular portion is 6 mm, and the thickness t4 at the end of the bent portion, using t2) of 1.5 mm (t2 = 2.1 x t1). Is the same as in Example 3 except that 0.8 mm (t4-t1 = 0.14 x t1) and the thickness t5 of the straight tubular portion is 1.5 mm (t2 = t5), and the thickness of the outer tube is the inner side. The excimer lamp according to the present invention is produced by manufacturing a discharge vessel having a double tube structure smaller than the thickness of the tube, and disposing the external electrode and the internal electrode and filling the discharge gas into the discharge space according to the configuration shown in FIG. did. The total length of the discharge vessel in this excimer lamp is 200 mm.

The same evaluation as in Example 1 was conducted for the junction between the outer tube and the inner tube in the obtained excimer lamp, and the junction in this excimer lamp had a joint strength capable of withstanding a moment of 2.5 kg · m at most. It was confirmed to have sufficiently high reliability.

[Comparative Example 1]

In the said Example 1, as shown in FIG. 7, the size t2 of the thickness in the edge part of the bending part 202 is 1 mm (t1-t2 = 0.6 *) as the element pipe 201 for an inner side pipe structure. A comparative excimer lamp was produced in the same manner as in Example 1 except that t1, t1-t2 = 1.5 x t2), and the thickness was generally uniform.

The same evaluation as in Example 1 was performed for the junction between the outer tube and the inner tube in the obtained excimer lamp for comparison, and the junction in this excimer lamp was able to withstand moments up to about 1.5 kg · m. It was confirmed that it had only strength.

Comparative Example 2

In the third embodiment, as shown in FIG. 8, as the joining member 35A, the size t5 of the thickness of the bent portion 38 is 1 mm (t1-t5 = 0.6 × t1, t1-t5 =). A excimer lamp for comparison was produced in the same manner as in Example 3, except that 1.5 x t2 and t2 = t5) and the thickness was generally uniform.

The same evaluation as in Example 1 was performed for the junction between the outer tube and the inner tube in the obtained excimer lamp for comparison, and the junction in this excimer lamp was able to withstand moments up to about 1.5 kg · m. It was confirmed that it had only strength.

As described above, in the excimer lamps of Examples 1 to 4 according to the present invention, it was confirmed that the joint portion of the outer tube and the inner tube in the discharge vessel had sufficiently high reliability, and the excimer lamp was conveyed or attached. It is assumed that the discharge vessel is reliably prevented from being damaged at the junction portion.

On the other hand, in the excimer lamp of Comparative Example 1 and Comparative Example 2, it was confirmed that a stable and firm bonding state cannot be obtained at the junction of the outer tube and the inner tube in the discharge vessel.

According to the excimer lamp of the present invention, when the outer tube and the inner tube are heated and melted at both ends to be joined, the thickness of the outer tube and the inner tube in the heated portion is approximately the same size, so that the outer side in the heated portion is Since the heat capacity of the tube and the inner tube is approximately the same, the outer tube and the inner tube can be uniformly heated, so that deformation and skew can be reliably suppressed, thereby obtaining a stable and firm bonding state. As a result, the junction part of an outer side pipe | tube and an inner side pipe | tube can be comprised as having a sufficiently high reliability, and therefore it reliably prevents a discharge container from being damaged at the time of conveyance or attachment of an excimer lamp, or a lighting initial stage. can do.

Moreover, according to the excimer lamp of this invention, in the structure by which an outer side pipe | tube and an inner side pipe | tube are joined by the joining member, the thickness of the outer side pipe | tube and the joining member about the junction part of an outer side pipe | tube and a joining member is a magnitude | size which is substantially equal. At the same time, the thickness of the joining member and the inner tube about the joining portion of the joining member and the inner tube is approximately equal in size, so that the heat capacity of the two members in the heated portion is approximately the same. Since the two members can be heated uniformly, it is possible to reliably suppress the occurrence of deformation and skew, and to obtain a stable and firm bonding state. As a result, the joint between the outer tube and the inner tube has sufficiently high reliability. The discharge vessel may be damaged during conveyance or attachment of the excimer lamp, or upon initial lighting. The can be reliably prevented.

Claims (2)

Each of the outer tube and the inner tube made of glass is disposed on the same axis, and has a discharge vessel forming a double tube structure that is melted and joined at both ends, and one electrode is provided on the outer surface of the outer tube, An excimer lamp in which an other electrode is provided on an inner surface, and a discharge gas for forming excimer molecules is filled by an excimer discharge in a discharge space formed between the outer tube and the inner tube. The outer tube and the inner tube are different in thickness of the central region portion in the tube axis direction, and the excimer lamp according to claim 1, wherein the outer tube and the inner tube have an equal thickness. The outer side pipe | tube and the inner side pipe | tube are joined by the joining member which consists of glass in both ends, The thickness of the outer tube and the thickness of the joining member related to the joint portion of the outer tube and the joining member are equal in size, and the thickness of the joining member and the thickness of the inner tube related to the joining portion of the joining member and the inner tube are equal in size. Excimer lamp, characterized in that.

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