JP2006004666A - Excimer lamp - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an excimer lamp having a double tube structure comprising an outer tube and an inner tube, and capable of providing sufficiently high reliability in the joint part between the outer tube and the inner tube, and of surely preventing breakage of the lamp in transporting and mounting it. <P>SOLUTION: This excimer lamp is provided with a discharge vessel having a double tube structure where the outer tube and the inner tube each formed of glass are arranged, and welded to each other at both ends. The excimer lamp is so structured that one-side electrode is formed on the outside surface of the outer tube; the other-side electrode is formed on the inside surface of the inner tube; a discharging gas for forming excimer molecules by excimer discharge is put in a discharge space formed between the outer tube and the inner tube; the thicknesses of the outer tube and the inner tube in a center area part in the tube axis direction are different from each other; and the thickness of the outer tube and that of the inner tube in the joint part are set nearly equal to each other. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an excimer lamp, and more particularly to an excimer lamp having a double tube structure in which a cylindrical outer tube and a cylindrical inner tube are coaxially arranged.

  At present, for example, in a cleaning process by ultraviolet irradiation of a glass substrate of a liquid crystal display panel or an ultraviolet irradiation process in a photochemical reaction, a method of irradiating a workpiece with vacuum ultraviolet light having a wavelength of 200 nm or less is used. As an apparatus for irradiating ultraviolet light, an apparatus that uses an excimer lamp that forms excimer molecules by excimer discharge and uses light emitted from the excimer molecules as a light source is used.

  A certain type of excimer lamp is described with reference to FIG. 1, for example, and is arranged along the tube axis in a cylindrical outer tube (12) made of, for example, quartz glass and in the outer tube (12). In addition, it has a cylindrical inner tube (13) made of, for example, quartz glass having an outer diameter smaller than the inner diameter of the outer tube (12), and the outer tube (12) and the inner tube (13) are at both ends. A discharge vessel (11) having a double tube structure in which an annular discharge space (S) is formed between an outer tube (12) and an inner tube (13) by fusion bonding is provided. One net-like electrode (15) made of a conductive material is provided in close contact with the outer peripheral surface of the outer tube (12), and the other electrode (16) made of, for example, an aluminum plate is provided in the inner tube (13). Close to the peripheral surface, the discharge space In S), for example by an excimer discharge in xenon gas discharge gas which forms excimer molecules is filled, is constructed (for example, see Patent Documents 1 and 2.).

  A discharge vessel in such an excimer lamp can be obtained, for example, as follows. That is, for example, as shown in FIG. 9, two cylindrical element tubes 70 and 71 having substantially the same thickness and different outer diameters are prepared, and the inner tube is formed. The both ends of the element pipe 71 are bent outward in the radial direction to form a bent portion 72, and both ends of the two element pipes 70 and 71 are heated by appropriate heating means 75 from the outer side in the pipe axis direction. Then, the inner peripheral surface 70A of the other pipe 70 constituting the outer pipe is melted to join the distal end surface 72A of the bent portion 72 of the one pipe 71 constituting the inner pipe. A discharge vessel having an annular discharge space sealed between the inner peripheral surface and the outer peripheral surface of the inner tube is obtained. Here, the thickness t1 of the other pipe 70 constituting the outer pipe and the thickness t2 of the one pipe 71 constituting the inner pipe are, for example, substantially the same size. .

In recent years, for example, in an excimer lamp used as a light source for a glass substrate cleaning device of a liquid crystal display panel, the length of the glass substrate has been increased so that a large light emission region can be obtained. The above is required.
In such a long excimer lamp, from the viewpoint of the mechanical strength of the excimer lamp as a whole and the bonding strength between the outer tube and the inner tube, the thickness of the outer tube is large, and the thickness of the inner tube is larger than that of the outer tube. It is necessary to make the structure smaller than the thickness. The reason why the thickness of the inner tube is made small will be described in detail. In order to make the excimer lamp have sufficient mechanical strength, both the outer tube and the inner tube are made thick. In this case, the inner tube is supported only by the joint portion with the outer tube, and the strength of the joint portion is reduced by its own weight.
In addition, the present invention is not limited to such a case, and it is often necessary to configure the discharge vessel in a state where the thickness of the outer tube is different from the thickness of the inner tube. For example, in the case of a short length, the thickness of the inner tube is large, and the thickness of the outer tube is smaller than the thickness of the inner tube. The reason for this is that by reducing the thickness of the outer tube, the light transmittance is increased and a high light output can be obtained.

  However, when joining the outer tube and the inner tube with different wall thicknesses, the heat capacity of the outer tube and the inner tube in the heating part of the joint is different, so both are heated uniformly. It is not possible to obtain sufficient joint strength, and deformation and distortion are likely to occur at the joint, which can easily cause problems such as when excimer lamps are transported or installed, or at the beginning of lighting. There is a problem that the discharge vessel may be damaged due to structural problems.

On the other hand, if it is possible to ensure sufficient mechanical strength for the entire excimer lamp, it is desirable to make the outer tube and the inner tube thinner. This is because it is possible to suppress a decrease in electrical efficiency.
However, as described above, when a material having a large thickness difference between the outer tube and the inner tube is melt-bonded, the thin-walled material is excessively melted, so that the bonding itself may be difficult. .

The above problem is that the thickness of the outer tube and the inner tube constituting the discharge vessel is thick, for example, 1.5 times or more the thickness of the thin tube. It becomes prominent when it is.
Japanese Patent No. 3252676 Japanese Patent No. 2951139

  The present invention has been made based on the circumstances as described above, and is an excimer lamp having a double tube structure including an outer tube and an inner tube having different thicknesses in the central region, and the outer tube and the inner tube. It is possible to provide an excimer lamp capable of reliably preventing damage at the time of transporting and mounting the lamp, or at the beginning of lighting. Objective.

The excimer lamp of the present invention includes a discharge vessel having a double tube structure in which an outer tube and an inner tube each made of glass are coaxially arranged and melted and joined at both ends, and is provided on the outer surface of the outer tube. One electrode is provided and the other electrode is provided on the inner surface of the inner tube. The discharge space formed between the outer tube and the inner tube is filled with a discharge gas that forms excimer molecules by excimer discharge. In excimer lamps,
The outer tube and the inner tube are different from each other in the thickness of the central region in the tube axis direction, and the thickness of the outer tube and the thickness of the inner tube in the joint portion are approximately the same size. It is characterized by.

In the excimer lamp of the present invention, the outer tube and the inner tube are joined by a joining member made of glass at both ends,
The thickness of the outer tube and the thickness of the bonding member at the joint portion between the outer tube and the bonding member are substantially the same size, and the thickness of the bonding member at the bonding portion between the bonding member and the inner tube. It is preferable that the wall thickness of the inner tube is substantially the same.

Further, in the excimer lamp of the present invention, the thickness of the thicker one of the outer tube and the inner tube in the central region portion is 1. It is preferable that the configuration is 5 times or more.
Moreover, it is preferable that the thickness of the thin portion of the outer tube and the inner tube is 0.5 to 1.0 mm in the central region.

  According to the excimer lamp of the present invention, when the outer tube and the inner tube are joined by heating and melting at both ends, the thickness of the outer tube and the inner tube in the heating part is approximately the same size, Since the heat capacity of the outer tube and the inner tube in the heating part is substantially equal and the outer tube and the inner tube can be heated uniformly, it is possible to reliably suppress the occurrence of deformation and distortion. As a result of being able to obtain a stable and strong joint state, the joint portion between the outer tube and the inner tube can be configured to have sufficiently high reliability, and accordingly, when excimer lamps are transported or installed, or It is possible to reliably prevent the discharge vessel from being damaged at the beginning of lighting.

  Further, according to the excimer lamp of the present invention, in the structure in which the outer tube and the inner tube are joined by the joining member, the thickness of the outer tube and the joining member relating to the joint portion between the outer tube and the joining member is increased. The size of the heat capacity of the two members in the heating portion is approximately the same size and the thickness of the joining member and the inner tube on the joining portion between the joining member and the inner tube is substantially the same size. Are substantially equal and the two members can be heated uniformly, so that deformation and distortion can be reliably suppressed, and a stable and strong bonded state can be obtained. The junction between the tube and the inner tube can be constructed with sufficiently high reliability, so that the discharge vessel will be damaged when excimer lamps are transported or installed, or at the beginning of lighting. It is possible to reliably prevent and.

Hereinafter, the present invention will be described in detail with reference to the drawings.
<First Embodiment>
FIG. 1 is an explanatory sectional view showing an outline of a configuration in an example of an excimer lamp of the present invention.
The excimer lamp 10 is made of, for example, quartz glass, and has a cylindrical outer tube 12 having a uniform thickness in the tube axis direction, and is disposed in the outer tube 12 along the tube axis. A discharge having a double tube structure having a cylindrical inner tube 13 made of, for example, quartz glass having an outer diameter smaller than the inner diameter of the outer tube 12, and the outer tube 12 and the inner tube 13 being melt-bonded at both ends. A container 11 is provided.
The inner tube 13 that constitutes the discharge vessel 11 has a bent portion 13A that is bent so that both end portions expand outward in the radial direction, and the bent portion 13A of the inner tube 13 is the outer tube 12. The end wall 14 is constituted by the bent portion 13A by being joined to each other, and thereby, an annular discharge space S hermetically closed between the inner peripheral surface of the outer tube 12 and the outer peripheral surface of the inner tube 13 is formed. Is formed.

The outer tube 12 constituting the discharge vessel 11 is provided with one net-like electrode (hereinafter referred to as “external electrode”) 15 made of a conductive material such as a wire net, in close contact with the outer peripheral surface thereof. The inner tube 13 is in close contact with the inner peripheral surface thereof, and is made of, for example, aluminum, the other electrode having a notch in the shape of a pipe or a part having a notch in the cross section (hereinafter referred to as “inner”). Electrode)) 16 is provided. And the external electrode 15 and the internal electrode 16 are connected to the power supply device (not shown) which consists of high frequency power supplies, for example.
The discharge space S is filled with a discharge gas such as xenon gas that forms excimer molecules by excimer discharge generated between the external electrode 15 and the internal electrode 16.

In this excimer lamp 10, the thickness of the outer tube 12 and the thickness of the inner tube 13 in the central region part constituting the excimer light emission region where the excimer light radiated from the excimer lamp 10 can be effectively used. The thicknesses are different from each other, and the thickness of the thicker one is 1.5 times or more the thickness of the thinner one. In this embodiment, the thickness t1 of the outer tube 12 is larger than the thickness t2 of the inner tube 13 (t1 ≧ 1.5 × t2) (see FIG. 2). .
The thickness of the thin wall (in this embodiment, the thickness t2 of the inner tube 13) is, for example, 0.5 to 1.0 mm.
In the following, “thickness” means the thickness in the central region of the excimer lamp 10 unless otherwise specified.

The wall thickness of the outer tube 12 and the wall thickness of the inner tube 13 related to the joint portion between the outer tube 12 and the inner tube 13 are approximately equal. Specifically, with reference to FIG. 2, assuming that the thickness at the end of the outer tube 12 is t1, and the thickness at the end of the bent portion of the inner tube 13 is t3, The state satisfies either one of the formulas (1) and (2).
Formula (1) | t1-t3 | ≦ 0.2 × t1
Formula (2) | t1-t3 | ≦ 0.2 × t3

The excimer lamp 10 having the above configuration can be manufactured, for example, as follows.
That is, as shown in FIG. 2, a cylindrical shape constituting the inner tube 13 in which both end portions are processed into a trumpet shape so that the outer ends extend outward in the radial direction to form a bent portion 13A. The inner tube constituting element tube 20 is inserted into a cylindrical outer tube constituting element tube 21 constituting the outer tube 12 having an inner diameter larger than the outer diameter of the inner tube constituting element tube 20 and is coaxial. It is arranged on the upper side and heated by a heating means 25 such as a burner from the outer side in the axial direction of the tube so that the inner peripheral surface 21A of the outer tube constituting element 21 and the bent portion 13A of the inner tube constituting element 20 are formed. The distal end surface 20A is welded, whereby the discharge vessel 11 having a double tube structure in which a tubular discharge space S is formed between the outer tube 12 and the inner tube 13 is obtained. Here, the inner tube constituting element tube 20 has, for example, a thickness t2 in the central region portion, and becomes thicker as the bent portion 13A following the central region portion goes toward the outer end and becomes a joint portion. The thickness of the outer end portion is t3.
When the outer tube constituting element 21 and the inner tube constituting element 20 are heated and melted, the inner side of the heating part H is made uniform from the viewpoint of uniformizing the heat capacity of the heating part H heated by the heating means 25. It is preferable that the length L of the tube constituting element tube 20 is 100% or more of the thickness t1 of the outer tube constituting element tube 21. Thereby, the outer tube constituting element 21 and the inner tube constituting element 20 can be melt-bonded in a state where a uniform heating state is obtained.

  Then, an appropriate discharge gas is sealed in the discharge space S in the discharge vessel 11 obtained as described above, and the external electrode 15 and the internal electrode 16 are disposed at predetermined positions, so that FIG. The excimer lamp 10 shown is obtained.

  Thus, according to the excimer lamp 10 having the above-described configuration, when the outer tube 12 and the inner tube 13 are joined by heating and melting at both ends, the outer tube constituting element in the heating portion H heated by the heating means 25 is used. Since the thickness t1 of the tube 21 and the thickness t3 of the bent portion 13A of the inner tube constituting raw tube 20 are substantially equal to each other, the outer tube constituting elementary tube 21 in the heated portion H Since the heat capacity of the inner tube constituting element tube 20 is approximately equal and can be uniformly melted and heated, the occurrence of deformation and distortion can be reliably suppressed, and stable and strong bonding can be achieved. As a result of obtaining the state, the joint portion between the outer tube 12 and the inner tube 13 can be configured to have sufficiently high reliability, and accordingly, the excimer lamp 10 is transported or mounted. When, or early during the lighting, the discharge vessel 11 can be reliably prevented from being damaged.

In the above, a description has been given of a discharge vessel having a structure in which the thickness of the outer tube is larger than the thickness of the inner tube. However, the thickness of the inner tube is the same as the thickness of the outer tube. The same effect can be obtained with a discharge vessel having a structure larger than the above.
In particular, the present invention relates to a thin wall of the outer tube and the inner tube having a thickness of 0.5 to 1.0 mm, and having a thin wall thickness. It is extremely useful in a structure having a thickness of 1.5 times or more of the thickness, for example, a structure in which the total length of the excimer lamp 10 is 1000 mm or more, and the excimer lamp 10 as a whole has a sufficiently high mechanical strength. While securing, the joint part of an outer side pipe and an inner side pipe | tube can be made into a sufficiently high reliability.

Second Embodiment
The excimer lamp according to the second embodiment of the present invention is such that the outer tube and the inner tube are joined at both ends by separate joining members to form a discharge vessel. 1 is the same as that shown in FIG.
Specifically, as shown in FIG. 3, the discharge vessel in the excimer lamp according to the second embodiment includes an outer tube constituting element 31 and an inner tube 31 each having a uniform thickness in the tube axis direction. The tube-forming element tube 30 has a double-tube structure in which both ends are joined by a joining member 35 made of the same material, for example, quartz glass, as the outer tube-constituting element tube 31 and the inner tube-constituting element tube 30, for example. It is. In this embodiment, the thickness t1 of the outer tube constituting element 31 is larger than the thickness t2 of the inner tube constituting element 30 (t1 ≧ 1.5 × t2). Yes.

The joining member 35 has a substantially short cylindrical shape having a bent portion 36 that is bent so that one end portion extends outward in the radial direction and a straight tubular portion 37 that is continuous with the bent portion 36 through a stepped portion. The thickness t4 at the end of the bent portion 36 which is joined to the outer tube constituting element 31 and constitutes the end wall is substantially equal to the thickness t1 of the outer tube constituting element 31. The wall thickness t5 at the end of the straight tubular portion 37 that is equal in size and joined to the inner tube constituting element 30 is substantially equal to the wall thickness t2 of the inner tube constituting element 30. It is the same size.
That is, the thickness difference | t1−t4 | between the thickness at the end of the bent portion 36 and the thickness of the outer tube constituting element tube 31 is the thickness t1 of the outer tube constituting element 31 or the bent portion. The thickness at the end of the portion 36 is 20% or less of the size of the thickness t4, and the thickness at the end of the straight tubular portion 37 and the thickness of the inner tube constituting element tube 30 are The wall thickness difference | t2−t5 | is 20% or less of the wall thickness t2 of the inner tube constituting element tube 30 or the wall thickness t5 at the end of the straight tubular portion 37. ing.

The excimer lamp having such a configuration is similar to the case shown in FIG. 1 in that it is heated from the outer side in the tube axis direction by, for example, a burner, etc. The surface 31A and the distal end surface 36A of the bent portion 36 of the joining member 35 are welded, and the outer end surface 30A of the inner tube constituting element tube 30 and the joining member 35 are heated by, for example, a burner from the radially inner side. A discharge vessel having a double tube structure in which a tubular discharge space is formed between the outer tube and the inner tube is obtained by welding the distal end surface 37A of the straight tubular portion 37.
When joining the outer pipe constituting element 31 and the joining member 35, the heating part H <b> 1 between the outer pipe constituting element 31 and the joining member 35 from the viewpoint of equalizing the heat capacity of the heating part H <b> 1. It is preferable that the length L1 of the joining member is set to 100% or more of the thickness t1 of the outer pipe constituting element pipe 31.
Further, when joining the joining member 35 and the inner tube constituting element 30, the heating of the inner tube constituting element 30 and the joining member 35 is performed from the viewpoint of uniformizing the heat capacity in the heating portion H <b> 2. It is preferable that the length L2A of the joining member 35 in the portion H2 and the length L2B of the inner tube constituting element tube 30 in the heating portion H2 are the same size. The length L2A of the joining member 35 in the heating part H2 and the length L2B of the inner pipe constituting element tube 30 in the heating part H2 are not particularly limited. For example, the thickness of the inner pipe constituting element pipe 30 is large. The size is 100% or more of the length t2.
Thereby, the outer pipe constituting element 31 and the joining member 35 and the joining member 35 and the inner pipe constituting element 30 can be melt-bonded in a state where a uniform heating state is obtained.

  In the above description, the outer tube has a thickness greater than that of the inner tube. However, the outer tube has a thickness t1 of the inner tube. The same applies to the case where the thickness is smaller than t2 (t1 × 1.5 ≦ t2). That is, as shown in FIG. 4, as the joining member 45, the thickness t4 of the bent portion 46 which is joined to the outer pipe constituting raw pipe 41 and constitutes the end wall has a thickness t4 of the outer pipe constituting raw pipe. 41, and the thickness t5 at the end of the straight tubular portion 47 joined to the inner tube constituting element 40 is the inner tube constituting element tube. A thickness approximately equal to the thickness t2 of 40 is used, and the inner peripheral surface 41A of the outer tube constituting element tube 41 and the tip surface 46A of the bent portion 46 of the joining member 45 are welded together. The outer end surface 40A of the inner tube constituting element tube 40 and the distal end surface 47A of the straight tubular portion 47 of the joining member 45 are welded, whereby a tubular discharge space is formed between the outer tube and the inner tube. A discharge vessel having a double tube structure is obtained.

When joining the outer pipe constituting element 41 and the joining member 45, from the viewpoint of making the heat capacity of the heating part H1 uniform, the heated part H1 between the outer pipe constituting element 41 and the joining member 45 is used. It is preferable that the length L3 of the joining member 45 is set to 100% or more of the thickness t1 of the outer pipe constituting element pipe 41 in the heating portion H1.
Further, when joining the joining member 45 and the inner tube constituting element tube 40, the inner tube constituting element tube 40 and the joining member 45 are heated from the viewpoint of making the heat capacity of the heating portion H2 uniform. It is preferable that the length L4A of the joining member 45 in the portion H2 and the length L4B of the inner tube constituting element tube 40 in the heating portion H2 are the same size. The length L4A of the joining member 45 in the heating portion H2 and the length L4B of the inner tube constituting element tube 40 in the heating portion H2 are not particularly limited, but for example, the thickness of the inner tube constituting element tube 40 is large. The size is 100% or more of the length t2.
Thereby, the outer pipe constituting element 41 and the joining member 45 and the joining member 45 and the inner pipe constituting element 40 can be melt-bonded in a state where a uniform heating state is obtained.

  As described above, according to the excimer lamp of the present invention in which the outer tube and the inner tube are joined at both ends by separate joining members to form the discharge vessel, the outer tube and the inner tube are welded directly. In the same manner as the excimer lamp according to the first embodiment, the outer tube constituting element 31 (41) and the outer member constituting element 31 (41) in the heating portion H1 between the outer member constituting element 31 (41) and the joining member 35 (45) are joined. The thickness of the member 35 (45) is substantially equal, and the joining member 35 (45) in the heating portion H2 between the joining member 35 (45) and the inner tube constituting element tube 30 (40). And the inner tube constituting element tube 30 (40) have substantially the same thickness, the heat capacities of the two members in the heating portions H1 and H2 are substantially equal, and the two members are Can be heated evenly As a result of being able to reliably suppress the occurrence of deformation and distortion and to obtain a stable and strong joined state, the joint portion between the outer tube and the inner tube is configured to have sufficiently high reliability. Accordingly, it is possible to reliably prevent the discharge vessel 11 from being damaged when the excimer lamp 10 is transported or attached, or at the beginning of lighting.

As mentioned above, although embodiment of this invention was described, this invention is not limited to said embodiment, A various change can be added.
For example, in the excimer lamp according to the first embodiment, the outer tube constituting element tube has a bent portion that is processed so that both ends thereof extend radially inward, and at the tip portion of the bent portion. Use a tube whose thickness is approximately the same as the wall thickness of the inner tube constituting element, and use a straight tube having a uniform thickness in the tube axis direction as the inner tube constituting element. The outer tube constituting element tube and the inner tube constituting element tube may be melt-bonded to form a discharge vessel.
Further, in the excimer lamp according to the second embodiment, the joining member does not have to be the same as the material of the outer tube and the inner tube. For example, synthetic quartz glass, fused silica glass, UV-resistant glass material, etc. What consists of can be used.

Furthermore, the excimer lamp according to the present invention is formed on one end side in the discharge vessel so that a partition wall protruding radially outward from the outer peripheral surface of the inner tube of the discharge vessel extends over the entire circumference of the inner tube. Thus, a configuration is formed in which an auxiliary space for accommodating a getter for adsorbing an impure gas such as oxygen, hydrogen, carbon monoxide, and water is formed between the partition wall and the end wall of the discharge vessel and communicates with the discharge space. Can be.
In such a configuration, as shown in FIG. 5, the partition wall is an outer periphery of a straight tubular portion 57 of a joining member 55 in which a disk-shaped partition wall component member 60 made of, for example, glass forms a part of the inner tube. The thickness t6 of the partition wall constituting member 60 in the heating portion is substantially equal to the thickness t5 in the straight tubular portion 57 of the joining member 55. Preferably it is. That is, the difference in thickness | t5−t6 | between the thickness of the straight tubular portion 57 of the joining member 55 and the thickness of the partition wall constituting member 60 is the thickness t5 or the partition wall of the straight tubular portion 57 of the joining member 55. The thickness of the constituent member 60 is preferably 20% or less of the thickness t6. As a result, the heat capacity of the joining member 55 and the heat capacity of the partition wall constituting member 60 in the heated portion are approximately equal to each other, and the joining member 55 and the partition wall constituting member 60 are melted in a state where a uniform heating state is obtained. Can be joined.
Further, the distance d between the end surface position of the partition member 60 and the end surface position of the straight tubular portion 57 of the joining member 55 is, for example, 100% or more of the thickness t2 of the inner tube forming element tube 40. It is preferable that it is the magnitude | size of. Thereby, when welding the joining member 55 and the inner tube constituting element 50, the size of the heat capacity of the partition member 60 in the heating portion becomes substantially irrelevant, and the joining member 55 and the inner tube constituting element 40 are obtained. A stable and strong bonded state can be obtained at the bonded portion.
In addition, the thickness t4 of the outer end portion of the bent portion 56 to be joined to the outer pipe constituting element 41 in the joining member 55 is substantially equal to the thickness t1 of the outer pipe constituting element 41. It is the same size.

Further, in the excimer lamp according to the second embodiment, as shown in FIG. 6, a disc-shaped joining member can be used.
More specifically, the joining member 65 has an outer diameter dimension that fits the inner diameter of the outer tube constituting element pipe 41 and has a size that fits the outer diameter of the inner pipe constituting element tube 40. An inner tube forming hole 66 having a diameter is formed in the central portion.
In this joining member 65, the thickness t7 of the outer peripheral edge portion 67 to be melt-joined with the outer tube constituting element 41 is substantially equal to the thickness t1 of the outer tube constituting element 41. The thickness t8 of the inner peripheral edge portion (opening edge portion of the inner tube constituting element fitting hole) 68 that is melt-bonded to the inner tube constituting element pipe 40 is the inner tube constituting element tube 40. The thickness is approximately equal to the thickness t2. That is, the thickness difference | t1-t7 | between the thickness of the outer pipe constituting element 41 and the outer peripheral edge 67 is the thickness t1 of the outer pipe constituting element 41 or the outer peripheral edge. The thickness difference | t2−t8 | between the thickness of the inner tube constituting base tube 40 and the thickness of the inner peripheral edge portion 68 is 20% or less of the thickness t7 of 67. It is set to 20% or less of the thickness t2 of the inner tube constituting element tube 40 or the thickness t8 of the inner peripheral edge portion 68.
The size of the outer peripheral edge portion 67 (the length in the radial direction) of the joining member 65 is determined from the viewpoint of uniformizing the heat capacity at the joining portion between the joining member 65 and the outer tube constituting element pipe 41. The thickness of the inner tube 41 is preferably 100% or more of the wall thickness t 1, and the inner peripheral edge portion 68 of the bonding member 65 has a size (length in the radial direction) that is the same as that of the bonding member 65. From the viewpoint of uniformizing the heat capacity at the joint portion with the inner tube constituting element tube 40, the inner tube constituting element tube 40 may be 100% or more of the wall thickness t2. preferable.

  Examples of the excimer lamp of the present invention will be specifically described below, but the present invention is not limited thereto.

[Example 1]
As shown in FIG. 2, the outer tube constituting element tube made of quartz glass having a total length of 1000 mm, an outer diameter of 40 mm, and a wall thickness (t1) of 2.5 mm (t1 = 2.5 × t2) The total length including the bent portion is 1020 mm, the outer diameter of the straight tubular portion is 20 mm, the thickness (t2) of the straight tubular portion is 1.0 mm, and the thickness (t3) at the end of the bent portion is 2.2 mm (t1). -T3 = 0.12 × t1), which is an inner tube-constituting tube made of quartz glass, and by welding the outer tube-constituting tube and the inner tube-constituting tube at both ends, A discharge vessel having a double tube structure having a wall thickness larger than that of the inner tube was produced. The total length of this discharge vessel is 1000 mm.
The heat treatment conditions for joining the outer tube constituting element tube and the inner tube constituting element tube are as follows. The heating means uses an oxyhydrogen burner, the heating temperature is 2000 ° C., the heating time is 10 minutes, and the heating part The length (L) in the radial direction of the inner pipe constituting element tube was set to 4 mm (1.6 × t1).
Then, according to the configuration shown in FIG. 1, the excimer lamp according to the present invention was manufactured by disposing the external electrode and the internal electrode and filling the discharge space with the discharge gas.
As the external electrode, a net-like one made of an endless wire net made of stainless steel was used.
The internal electrode used was an aluminum plate processed into a bowl shape with a substantially C-shaped cross section.
As the discharge gas, xenon gas was used and sealed at a pressure of 26 kPa.

  The excimer lamp thus obtained was subjected to a static load fracture test and evaluated for the joint strength of the joint portion between the outer tube and the inner tube. The joint portion in this excimer lamp was 3 kg · m at maximum. It was confirmed that it has a bonding strength that can withstand this moment and has sufficiently high reliability. For example, when an excimer lamp is attached, the magnitude of the moment acting on the joint of the excimer lamp is usually about 2 kg · m.

[Example 2]
The outer tube constituting element tube has a total length of 200 mm, an outer diameter of 15 mm, and a wall thickness (t1) of 0.7 mm. The outer diameter of the tubular portion (center region portion) is 6 mm, the thickness (t2) of the straight tubular portion is 1.5 mm (t2 = 2.1 × t1), and the thickness (t3) at the end of the bent portion is 0. A discharge vessel having a double-tube structure in which the thickness of the outer tube is smaller than the thickness of the inner tube, except that a tube of 8 mm (t3−t1 = 0.14 × t1) is used. The excimer lamp according to the present invention was manufactured by arranging the external electrode and the internal electrode and filling the discharge space with the discharge gas according to the configuration shown in FIG. The total length of the discharge vessel in this excimer lamp is 200 mm.

  When the joint between the outer tube and the inner tube in the obtained excimer lamp was evaluated in the same manner as in Example 1, the joint in this excimer lamp had a bonding strength that could withstand a moment of 2.5 kg · m at the maximum. It was confirmed that it has sufficient reliability.

Example 3
As shown in FIG. 3, the outer tube constituting element tube made of quartz glass having a total length of 1000 mm, an outer diameter of 40 mm, and a wall thickness (t1) of 2.5 mm (t1 = 2.5 × t2) The inner tube constituting element tube made of quartz glass having a total length of 900 mm, an outer diameter of 20 mm, and a wall thickness (t2) of 1 mm, a total length including a bent portion of 60 mm, a straight tubular portion having an outer diameter of 20 mm, bent A short cylinder made of quartz glass having a thickness (t4) at the end of the portion of 2.2 mm (t1-t4 = 0.12 × t1) and a thickness (t5) of the straight tubular portion of 1 mm (t2 = t5) A double-pipe structure in which the thickness of the outer tube is larger than the thickness of the inner tube by welding the outer tube constituting element tube and the inner tube element tube at both ends with the bonding member Except that the discharge vessel was prepared, the same procedure as in Example 1 was performed. An excimer lamp according to the invention was manufactured. The total length of the discharge vessel in this excimer lamp is 1000 mm.
The heat treatment conditions for welding the outer tube constituting element tube and the joining member are the same as in Example 1 above (the heating temperature is 2000 ° C., the heating time is 10 minutes, the length in the radial direction of the joining member in the heated portion) (L1) is 4 mm (1.6 × t1)), and the heat treatment conditions for welding the inner tube constituting element tube and the joining member are as follows: the heating temperature is 2000 ° C., the heating time is 5 minutes, The length (L2A) of the joining member in the tube axis direction in the portion and the length (L2B) of the inner tube constituting element tube were 3 mm (3 × t2).

  When the joint between the outer tube and the inner tube in the obtained excimer lamp was evaluated in the same manner as in Example 1, the joint in this excimer lamp has a bonding strength that can withstand a moment of 3 kg · m at the maximum. It was confirmed that it has sufficiently high reliability.

Example 4
The outer tube constituting element tube has a total length of 200 mm, an outer diameter of 15 mm, and a wall thickness (t1) of 0.7 mm. The inner tube constituting element tube has a total length of 180 mm, an outer diameter of 6 mm, A member having a thickness (t2) of 1.5 mm (t2 = 2.1 × t1) is used. As a joining member, the total length including the bent portion is 15 mm, the outer diameter of the straight tubular portion is 6 mm, and the end portion of the bent portion Except that the thickness (t4) at 0.8 mm is 0.8 mm (t4−t1 = 0.14 × t1) and the thickness (t5) of the straight tubular portion is 1.5 mm (t2 = t5). In the same manner as in Example 3, a discharge vessel having a double tube structure in which the thickness of the outer tube is smaller than the thickness of the inner tube is prepared, and according to the configuration shown in FIG. Excimaran according to the present invention by filling the space with a discharge gas Manufactured. The total length of the discharge vessel in this excimer lamp is 200 mm.

  When the joint between the outer tube and the inner tube in the obtained excimer lamp was evaluated in the same manner as in Example 1, the joint in this excimer lamp had a bonding strength that could withstand a moment of 2.5 kg · m at the maximum. It was confirmed that it has sufficient reliability.

[Comparative Example 1]
In the first embodiment, as shown in FIG. 7, the inner tube constituting element tube (201) has a thickness (t2) of 1 mm (t1-t2) at the end of the bent portion (202). = 0.6 × t1, t1−t2 = 1.5 × t2), and a comparative example was used in the same manner as in Example 1 except that a material having a uniform wall thickness was used. An excimer lamp was manufactured.
When the joint portion of the outer tube and the inner tube in the obtained excimer lamp for comparison was evaluated in the same manner as in Example 1, the joint portion in this excimer lamp can withstand a moment of up to about 1.5 kg · m. It was confirmed that it had only bonding strength.

[Comparative Example 2]
In the third embodiment, as shown in FIG. 8, the thickness (t5) of the bent portion (38) is 1 mm (t1−t5 = 0.6 × t1, as the joining member (35A)). t1-t5 = 1.5 × t2, t2 = t5), and an excimer lamp for comparison was prepared in the same manner as in Example 3 except that a wall having a uniform thickness was used. Manufactured.
When the joint portion of the outer tube and the inner tube in the obtained excimer lamp for comparison was evaluated in the same manner as in Example 1, the joint portion in this excimer lamp can withstand a moment of up to about 1.5 kg · m. It was confirmed that it had only bonding strength.

As described above, in the excimer lamps of Examples 1 to 4 according to the present invention, it has been confirmed that the junction between the outer tube and the inner tube in the discharge vessel has sufficiently high reliability, and the excimer lamp It is assumed that the discharge vessel is reliably prevented from being damaged from the joint portion during transport or attachment.
On the other hand, in the excimer lamps of Comparative Example 1 and Comparative Example 2, it was confirmed that a stable and strong joint state could not be obtained at the joint portion between the outer tube and the inner tube in the discharge vessel.

It is sectional drawing for description which shows the outline of a structure in an example of the excimer lamp of this invention. It is explanatory drawing which shows an example of the joining method of the outer tube | pipe structure member and the inner tube | pipe structure member at the time of manufacturing the discharge vessel in the excimer lamp of this invention. It is explanatory drawing which shows the other example of the joining method of the outer tube | pipe structure member and the inner tube | pipe structure member at the time of manufacturing the discharge vessel in the excimer lamp of this invention. It is explanatory drawing which shows the further another example of the joining method of the outer tube | pipe structure member and the inner tube | pipe structure member at the time of manufacturing the discharge vessel in the excimer lamp of this invention. It is explanatory drawing which shows the further another example of the joining method of the outer tube | pipe structure member and the inner tube | pipe structure member at the time of manufacturing the discharge vessel in the excimer lamp of this invention. It is explanatory drawing which shows the further another example of the joining method of the outer tube | pipe structure member and the inner tube | pipe structure member at the time of manufacturing the discharge vessel in the excimer lamp of this invention. It is explanatory drawing which shows the joining method of the outer tube | pipe structure member and the inner tube | pipe structure member at the time of manufacturing the discharge vessel in the excimer lamp which concerns on the comparative example 1. FIG. It is explanatory drawing which shows the joining method of the outer tube | pipe structure member and the inner tube | pipe structure member at the time of manufacturing the discharge vessel in the excimer lamp which concerns on the comparative example 2. FIG. It is explanatory drawing which shows an example of the joining method of the outer tube | pipe structure member and the inner tube | pipe structure member at the time of manufacturing the discharge vessel in the conventional excimer lamp.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Excimer lamp 11 Discharge vessel 12 Outer tube 13 Inner tube 13A Bending part 14 End wall 15 One electrode (external electrode)
16 The other electrode (internal electrode)
DESCRIPTION OF SYMBOLS 20 Inner tube constituent element tube 20A Front end surface 21 Outer tube element element tube 21A Inner peripheral surface 25 Heating means H Heating portion 201 Inner tube component element tube 202 Bent portion 30 Inner tube component element tube 30A Outer end surface 31 Outer tube Construction element pipe 31A Inner peripheral surface 35 Joining member 35A Joining member 36 Bent part 36A Tip face 37 Straight tubular part 37A Tip face 38 Bent part H1, H2 Heating part 40 Inner pipe constituting element pipe 40A Outer end face 41 For outer pipe construction Elemental pipe 41A Inner peripheral surface 45 Joining member 46 Bent part 46A Tip end face 47 Straight tubular part 47A Tip end face 55 Joining member 56 Bent part 57 Straight tubular part 60 Bulkhead constituent member 65 Joining member 66 Inner pipe constituent element pipe fitting hole 67 Outer peripheral edge portion 68 Inner peripheral edge portion 70, 71 Elementary tube 70A Inner peripheral surface 72 Bent portion 72A Front end surface 75 Heating means

Claims (2)

Each includes a discharge vessel having a double tube structure in which an outer tube and an inner tube made of glass are coaxially arranged and melted and joined at both ends, and one electrode is provided on the outer surface of the outer tube. And an excimer lamp in which the other electrode is provided on the inner surface of the inner tube, and a discharge gas that forms excimer molecules by excimer discharge is filled in a discharge space formed between the outer tube and the inner tube. ,
The outer tube and the inner tube are different from each other in the thickness of the central region in the tube axis direction, and the thickness of the outer tube and the thickness of the inner tube in the joint portion are approximately the same size. Excimer lamp characterized by   The outer tube and the inner tube are joined at both ends by a joining member made of glass, and the thickness of the outer tube and the thickness of the joining member at the joint portion between the outer tube and the joining member are approximately the same size. 2. The excimer lamp according to claim 1, wherein the thickness of the joining member related to the joining portion between the joining member and the inner tube is substantially equal to the thickness of the inner tube.