200540905 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於一種受激准分子燈，更具體而言，關於 一種圓筒狀外側管及圓筒狀內側管配置在同軸上的雙重構 造的受激准分子燈。 【先前技術】 Φ 現在，例如在液晶顯示面的玻璃基板的紫外線照射所 致的洗淨工程，或是在光化學反應的紫外線照射工程等， 利用將波長200nm以下的真空紫外光照射在被處理體的方 法，作爲照射真空紫外光的裝置，使用藉由受激准分子放 電形成受激准分子分子，將利用從該受激准分子分子所放 射的光的受激准分子燈具備作爲光源所成者。 例如參照第1圖來說明，有一種受激准分子燈者， 具有，如石英玻璃所成的圓筒狀外側管1 2，及在該外側管 φ 1 2內具有沿著其管軸所配置的比該外側管1 2的內徑還小 的外徑的如石英玻璃所成的圓筒狀內側管1 3，外側管1 2 與內側管1 3在兩端部被熔融接合而在外側管1 2與內側管 1 3之間具備形成有環狀放電空間S成的雙重管構造的放 電容器1 1;例如金屬絲網等的導電性材料所成的網狀的其 中一方的電極1 5密接設於外側管1 2的外周面，而且如鋁 板所成的另一方的電極1 6密接設於內側管1 3的內周面， 在放電空間S內，塡充有藉由如氙氣體等的受激准分子放 電形成受激准分子分子的放電用氣體所構成（參照例如專 -5 - 200540905 (2) 利文獻1及專利文獻2)。 如此受激准分子燈的放電容器，是如下述地可 亦即，如第9圖所示地，準備各該厚度大小大約同 外徑大小不相同的兩支圓筒狀原材料管7〇，71，將 側管的其中一方的原材料管7 1的兩端部朝其徑方 彎曲而形成彎曲部分7 2，從管軸方向外方側藉由適 熱手段進行加熱兩支原材料管7 〇，7 1的兩端部使 φ 而接合構成外側管的另一方原材料管7 0的內周面 構成內側管的其中一方原材料管7 1的彎曲部分7 2 面72A ’由此，得到在外側管的內周面與內側管的 之間具有作成密閉狀態的環狀放電空間的放電容器 ，構成外側管的另一方原料管7 0的厚度大小11， 內側管的其中一方原材料管7 1的厚度大小t2，是 成大約同等大小。 近年來，如使用作爲液晶顯示面板的玻璃基板 φ 裝置的光源的受激准分子燈中，隨著玻璃基板的大 夠得到大面積的光放射領域般地作成較長化，被要 長8 00mm以上者。 在如此較長的受激准分子燈中，從受激准分子 的機械性強度及外側管與內側管的接合強度的觀點 作成外側管厚度較大，內側管厚度比外側管厚度還 成。對於將內側管的厚度大小作成較小的理由具體 說明如下，爲了將受激准分子燈作成具有充分的機 度者，若將外側管及內側管雙方作成厚度較大者時 得到。 等，而 構成內 向外方 當的加 之熔融 70A與 的前端 外周面 。在此 及構成 例如作 的洗淨 型化能 求如全 燈整體 ，必須 小的構 地加以 械性強 ，則作 -6- 200540905 (3) 成內側管僅藉由與外側管的接合部分所支持的構造之故， 因而藉由其自重會降低接合部的強度。 又，並不被限定於此些情形，在外側管的厚度大小與 內側管的厚度大不相同的狀態下作成須構成放電容器的情 形也不少，例如較短者的情形，作成內側管的厚度大小較 大，外側管的厚度大小比內側管厚度較小的構成。該理由 是藉由減小外側管的厚度大小，使得光穿透率變高，可得 g 到高光輸出。 然而，接合厚度大小互相地不相同的外側管與內側管 之際，接合部的加熱部分的外側管與內側管的熱容量大小 不相同之故，因而無法均勻地可加熱兩者，而無法得到充 分的接合強度，或是容易產生變形或歪斜發生在接合部等 的缺點問題，而在搬運或安裝受激准分子燈時，或是點燈 初期’有起因於接合部的構造上的缺點問題而有破損放電 容器的缺點問題。 φ 另一方面，若能在受激准分子燈整體上確保充分的機 械性強度，則將外側管及內側管作成薄厚度較理想。該理 由是可抑制降低電氣性效率。 然後，如上述地，熔融接合外側管與內側管的厚度差 較大時，薄厚度者被過度地熔融之故，因而有很難進行接 合的情形。 如上述的缺點問題，是在構成放電容器的外側管與內 側管中較厚者的厚度大小成爲較薄者的厚度大小的如1 · 5 倍以上的構成的情形等會顯著地產生。 200540905 (4) 專利文獻1 :日本專利第3 2 5 2 6 7 6號公報 專利文獻2 :日本專利第2 9 5 1 1 3 9號公報 【發明內容】 本發明是依據如上事情而創作者，其目的是在提供一 種受激准分子燈，屬於在中央領域部分的厚度互相不相同 的外側管及內側管所致的雙重管構造的受激准分子燈，可 φ 將外側管與內側管的接合部構成作爲具有充分高的可靠性 者，並在搬運或安裝燈時，或是點燈初期時確實地可防止 破損。 本發明的受激准分子燈，屬於具備分別由玻璃所成的 外側管與內側管配置在同軸上，成爲在兩端部被熔融並被 接合的雙重管構造的放電容器，在外側管外表面設有其中 一方的電極，而且在內側管內表面設有另一方的電極，藉 由受激准分子放電形成受激准分子分子的放電用氣體塡充 φ 於形成在該外側管與該內側管之間的放電空間內的受激准 分子燈，其特徵爲： 外側管與內側管是管軸方向的中央領域部分的厚度互 相不相同者，接合部分的外側管的厚度與內側管的厚度大 約同等大小。 本發明的受激准分子燈中，外側管與內側管在兩端部 藉由玻璃所成的接合構件所接合；外側管與接合構件的接 合部分的外側管厚度及接合部分的厚度大約同等大小’且 接合構件與內側管的接合部分的接合構件的厚度與內側管 -8- 200540905 (5) 厚度大約同等大小較理想。 又，本發明的受激准分子燈中，外側管及內側管中較 厚者的中央領域部分的厚度大小’作成較薄者的中央領域 部分的厚度大小的1 . 5倍以上的構成較理想。 又，外側管與內側管中的較薄者的中央領域部分的厚 度大小作爲〇 · 5至1 . 〇 hi m的構成較理想。 依照本發明的受激准分子燈’將外側管與內側管在兩 φ 端部進行加熱熔融而加以接合之際’藉由加熱部分的外側 管與內側管的厚度作成大約同等大小’該加熱部分的外側 管與內側管的熱容量大小成爲大約相等而可均勻地加熱外 側管與內側管之故，因而可確實地抑制發生變形或歪斜而 可得到穩定又牢固的接合狀態，結果可將外側管與內側管 的接合部作成具有充分高可靠性的構成’因此，搬運或安 裝受激准分子燈時，或是點燈初期時，可確實地防止放電 容器破損。 φ 又，依照本發明的受激准分子燈，藉由接合構件接合 外側管與內側管所成的構成者中，外側管與接合構件的接 合部分的外側管與接合構件的厚度作成大約同等大小，同 時藉由接合構件與內側管的接合部分的接合構件與內側管 的厚度作成大約同等大小，使得加熱部分的兩個構件的熱 容量大小大約相等，可均勻地加熱該兩構件之故，因而可 確實地抑制發生變形或歪斜而可得到穩定又牢固的接合狀 態，結果可將外側管與內側管的接合部作成具有充分高可 靠性的構成，因此，搬運或安裝受激准分子燈時，或是點 -9- 200540905 (6) 燈初期時，可確實地防止放電容器破損。 【實施方式】 以下，參照圖式詳述本發明。 (第一實施形態） 第1圖是表示本發明的受激准分子燈的一例的構成的 φ 說明用斷面圖。 該受激准分子燈1 〇是如石英玻璃所構成，具有，在 管軸方向中具有均勻大小厚度的圓筒狀外側管1 2，及在該 外側管1 2內沿著其管軸所配置的具有比該外側管1 2的內 徑還小的外徑而如石英玻璃所成的圓筒狀內側管1 3 ;具備 外側管1 2與內側管1 3在兩端部被熔融接合所成的雙重管 構造的放電容器1 1。 構成放電容器1 1的內側管1 3是具有兩端部朝徑方向 φ 外方擴大延伸般地彎曲所形成的彎曲部分1 3 A者，藉由該 內側管1 3的彎曲部分1 3 A與外側管1 2相接合而由該彎曲 部分1 3 A構成端壁1 4，由此，在外側管1 2的內周面與內 側管1 3的外周面之間，形成有氣密地被封閉的環狀放電 空間S。 在構成放電容器1 1的外側管1 2 ’密接於其外周面， 設有如金屬絲網等的導電性材料所成的網狀的其中一方電 極[以下，稱爲「外部電極」]1 5 ’而在內側管1 3，密接 於其內周面，設有如鋁所構成的管狀或是在斷面局部地具 -10· 200540905 (7) 有缺口的槪略C形狀（槽狀）的另一方電極（以下稱爲「 內部電極」）1 6。又，外部電極1 5及內部電極1 6是被連 接於如高頻電源所成的電源裝置（未圖示）。 在放電空間S內塡充著藉由發生在外部電極15與內 部電極1 6之間的受激准分子放電形成受激准分子分子的 如氣氣體等的放電用氣體。 在該受激准分子燈1 0中，構成可有效地利用從受激 准分子燈1 0所放射的受激准分子光的受激准分子光放射 領域的中央領域部分的外側管1 2的厚度及內側管1 3的厚 度作成互相不相同的大小，較厚者的厚度作成較薄者的厚 度的1 .5倍以上大小。在本實施例中，外側管12的厚度 大小tl，作成比內側管13的厚度t2還大的狀態（tl ^ 1.5 xt2)[參照第2圖]。 又，較薄者的厚度大小（在本實施例中爲內側管13 的厚度大小t2)，是作爲如〇·5至1 .0mm。 又，在以下，除了特別加以說明之外’所謂「厚度」 是指受激准分子燈1 〇的中央領域部分的厚度。 又，外側管1 2與內側管1 3的接合部分的外側管1 2 的厚度與內側管1 3的厚度是作成大約同等大小。具體而 言，參照第2圖加以說明，若將外側管12的端部的厚度 大小作爲11，並將內側管1 3的彎曲部分的端部的厚度大 小作爲13，作成滿足下述式（1)及式（2)的任一方的狀 態。 -11 - 200540905 (8) 式 (1) 1 tl-t3 | ^0.2xtl 式 (2) 1 tl-t3 1 ^ 0.2xt3 上述構成的受激准分子燈10是如下述地能夠加以 造。 亦即，如第2圖所示地，首先，將構成外端朝徑方 外方擴大延伸兩端部地喇叭狀地加：r形成彎曲部分13A φ 內側管13的圓筒狀內側管構成用原材料管2〇，插入在 成具有比該內側管構成用原材料管2 〇的外徑還大內徑 外側管12的圓筒狀外側管構成用原材料管21的內部而 置在同軸上’由管軸方向外方側藉由如燃燒器等加熱手 25進行加熱，焊著外側管構成用原材料管2 1的內周 2 1 A與內側管構成用原材料管2 0的彎曲部分丨3 a的前 面2 0 A，由此，得到管狀放電空間s形成在外側管J 2 內側管13之間的雙重管構造的放電容器Η。在此，內 # 管構成用原材料管20是如中央領域部分的厚度大小爲 ’而連續於該中央領域部分的彎曲部分丨3 A隨著朝外端 厚度變大而接合部分的外端部的厚度大小爲t3。 加熱熔融外側管構成用原材料管2 1及內側管構成 原材料管20之際，從藉由加熱手段25被加熱的加熱部 Η的熱容量大小的均勻化的觀點，加熱部分η的內側管 成用原材料管的長度L，作爲外側管構成用原材料管 的厚度大小tl的1〇〇%以上的大小較理想。由此，在將 側管構成用原材料管2丨與內側管構成用原材料管 製 向 的 構 的 配 段 面 端 與 側 t2 用 分 構 2 1 外 20得到 -12- 200540905 (9) 均勻加熱狀態的狀態下’可施以熔融接合。 又，將適當的放電用氣體封入在如上述所得到的放電 容器1 1的放電空間s內，同時藉由將外部電極1 5及內部 電極1 6配設在所定位置’得到表示於第1圖的受激准分 子燈1 0。 如此，依照上述構成的受激准分子燈1 0，將外側管 1 2與內側管1 3在兩端部進行加熱熔融而加以接合之際， φ 藉由加熱手段2 5所加熱的加熱部分Η的外側管構成用原 材料管21的厚度tl與內側管構成用原材料管20的彎曲 部分1 3 A的厚度大小t3作成大約同等大小，可將該加熱 部分Η的外側管構成用原材料管2 1與內側管構成用原材 料管20的熱容量大小作成大約相等狀態施以均勻地熔融 加熱之故，因而可確實地抑制發生變形或歪斜而可得到穩 定又牢固的接合狀態，結果可將外側管1 2與內側管1 3的 接合部作成具有充分高可靠性的構成，因此搬運或安裝受 Φ 激准分子燈1 〇時，或是點燈初期時，可確實地防止放電 容器1 1破損。 在以上，說明了對於具備外側管的厚度大小比比內側 管的厚度大小還大的構成的放電容器所成者，惟對於具備 內側管的厚度大小比外側管的厚度大小還大的構成的放電 容器所成者也可得到同樣的效果。 尤其是，本發明是在外側管與內側管中的較薄者的厚 度大小爲0.5至1 .0mm，而較厚者的厚度大小爲較薄者的 厚度大小的1 .5倍以上的構成者，例如在受激准分子燈1 〇 -13- 200540905 (10) 全長爲1 0 0 0 m m以上的構成者等，極有用，可將外側管與 內側管的接合部作成具有充分高的可靠性者。 <第2實施形態> 本發明的第2實施形態的受激准分子燈，是外側管 與內側管在兩端部藉由另外接合構件所接合而構成有放電 容器所成者，其他的基本構成是與表示於第1圖者同樣者 •。 具體而言，如第3圖所示地，該第2實施形態的受 激准分子燈的放電容器，是在管軸方向分別具均勻大小厚 度的外側管構成用原材料管3 1及內側管構成用原材料管 3 〇，藉由與如外側管構成用原材料管3 1及內側管構成用 原材料管3 0相同材質如石英玻璃所成的接合構件3 5接合 兩端部所成的雙重管構造者。在該實施例中，外側管構成 用原材料管3 1的厚度大小11作成比內側管構成用原材料 ® 管3 〇的厚度大小12還大的狀態（11 - 1 · 5 X12 )。 接合構件3 5是具有一端部朝徑方向外方擴大延伸般 被彎曲的彎曲部分3 6，及經由該彎曲部分3 6與段部連續 的直管狀部分3 7的大約短圓筒狀者；與外側管構成用原 材料管3 1接合而構成端壁的彎曲部分3 6的端部的厚度大 小t4作成與外側管構成用原材料管3 1的厚度大小t丨大 約同等大小，且與內側管構成用原材料管3〇接合的直管 狀部分3 7的端部的厚度大小15作成與內側管構成用原材 料管3 0的厚度大小t2大約同等大小。 -14- 200540905 (11) 亦即’彎曲部分3 6端部的厚度與外側管構成用原材 料管3 1的厚度的厚度差| t〗_t4 | ，作成外側管構成用原 材料管31的厚度大小t〗或彎曲部分3 6端部的厚度大小 t4的2 0%以下的大小，同時直管狀部分37端部的厚度與 內側管構成用原材料管3 0的厚度的厚度差| 11 -15 | ，作 成內側管構成用原材料管3 0的厚度大小t2或是直管狀部 分3 7端部的厚度大小t 5的2 0 %以下的大小。 φ 如此構成的受激准分子燈，是與製造表示於第1圖者 的情形同樣地’從管軸方向外方側藉由如燃燒器等進行加 熱來焊著直管狀外側管構成用原材料管3 1的內周面3 1 A 與接合構件3 5的彎曲部分3 6的前端面3 6 a，同時從徑方 向內方例藉由如燃燒器等進行加熱來焊著內側管構成用原 材料管30的外端面30A與接合構件35的直管狀部分37 的前端面3 7 A，由此，可得到在外側管與內側管之間形成 有管狀放電空間的雙重管構造的放電容器。 在接口外側管構成用原材料管3 1與接合構件3 5之際 ’從得到加熱部分Η 1的熱容量大小的均勻化的觀點上， 外側管構成用原材料管3 1與接合構件3 5的加熱部分η1 的接合構件的長度L 1，作成外側管構成用原材料管3 1的 厚度大小tl的100%以上的大小較理想。 又’在接合接合構件3 5與內側管構成用原材料管3 〇 之際’從得到加熱部分H2的熱容量大小的均勻化的觀點 上’內側管構成用原材料管3 0與接合構件3 5的加熱部分 H2的接合構件35的長度L2A及加熱部分H2的內側管構 -15- 200540905 (12) 成用原材料管3 0的長度L2B相同大小較理想。加熱部分 H2的接合構件3 5的長度L2 A及加熱部分H2的內側管構 成用原材料管30的長度L2B是並不被特別加以限定者， 例如作爲內側管構成用原材料管3 0的厚度大小t2的 1 0 0 %以上的大小。 由此’在得到均勻加熱狀態的狀態下，可熔融接合外 側管構成用原材料管3 1與接合構件3 5，及接合構件3 5與 φ 內側管構成用原材料管3 0。 如以上’說明了具備外側管的厚度大小比內側管的厚 度大小還大的構成的放電容器所成者，惟針對於外側管的 厚度大小11作成比內側管的厚度大小t2還小的構成的情 形（ti X 1 ·5 S t2)也同樣。亦即，如第4圖所示地，作爲 接合構件45使用著與外側管構成用原材料管4 1接合而構 成端壁的彎曲部分4 6端部的厚度大小t4作成與外側管構 成用原材料管4 1的厚度大小t丨大約同等大小，且與內側 • 管構成用原材料管40接合的直管狀部分47端部的厚度大 小t5作成與內側管構成用原材料管4〇的厚度大小t2大約 同等大小者’焊著外側管構成用原材料管4 1的內周面 4 1 A與接合構件4 5的彎曲部分4 6的前端面4 6 A，同時焊 著內側管構成用原材料管4 0的外端面4 0 A與接合構件4 5 的直管狀部分4 7的前端面4 7 A，由此，得到管狀放電空 間形成於外側管與內側管之間的雙重構造的放電容器。 在接合外側管構成用原材料管41與接合構件4 5之際 ，從得到加熱部分Η 1的熱容量大小的均勻化的觀點上， -16- 200540905 (13) 外側B構成用原材料管4〗與接合構件& 5的加熱部分 的接口構件4 5的長度L 3，作成加熱部分H丨的外側管 成用原材料管41的厚度大小u的1〇〇%以上的大小較 想。 又’在接合接合構件45與內側管構成用原材料管 之際’從得到加熱部分H2的熱容量大小的均勻化的觀 上’內側管構成用原材料管4 〇與接合構件4 5的加熱部 φ H2的接合構件45的長度L4A及加熱部分H2的內側管 成用原材料管4〇的長度L4B相同大小較理想。加熱部 H2的接合構件45的長度L4A及加熱部分H2的內側管 成用原材料管40的長度L4B是並不被特別加以限定者 例如作爲內側管構成用原材料管40的厚度大小t2 1 0 0 %以上的大小。 由此’在得到均句加熱狀態的狀態下，可熔融接合 側管構成用原材料管4 1與接合構件45，及接合構件45 # 內側管構成用原材料管4 0。 如以上，依照外側管與內側管在兩端部藉由另外接 構件所接合而構成有放電容器所成的本發明的受激准分 燈’則與直接地焊著外側管與內側管所成的第一實施形 的受激准分子燈同樣地，藉由外側管構成用原材料管 (41)與接合構件3 5 (4 5 )的加熱部分H1的外側管構成 原材料管31 (4 1)與接合構件3 5 (4 5)的厚度大小作成 約同等大小，同時接合構件3 5 (45 )與內側管構成用原 料管3 0 (40)的加熱部分H2的接合構件3 5 (45 )與內 H1 構 理 40 點 分 構 分 構 的 外 與 合 子 態 3 1 用 大 材 側 -17- 200540905 (14) 管構成用原材料管3 0 (40)的厚度作成大約同等大小，使 得加熱部分Η 1，H2的兩件構件的熱容量大小變成大約相 等而可將該兩件構件均勻地加熱之故，因而可確實地抑制 發生變形或歪斜而可得到穩定又牢固的接合狀態，結果可 將外側管與內側管的接合部作成具有充分高可靠性的構成 ’因此搬運或安裝受激准分子燈1 0時，或是點燈初期時 ’可確實地防止放電容器1 1破損。 φ 以上’說明本發明的實施形態，惟本發明是並不被限 定於上述實施形態者，可施加種種變更。 例如在第一實施形態的受激准分子燈中，作爲外側管 構成用原材料管，其兩端部具有朝徑方向內方延伸地被加 工的彎曲部分者，使用彎曲部分的前端部的厚度與內側管 構成用原材料管的厚度大約同等大小者，作爲內側管構成 用原材料管，使用具有朝管軸方向均勻大小厚度的直管狀 者’而外側管構成用原材料管及內側管構成用原材料管被 φ 熔融接合形成有放電容器的構成者也可以。 又，在第二實施形態的受激准分子燈中，接合構件是 並不定與外側管與內側管的材質相同者，可使用例如具有 合成石英玻璃，熔融石英玻璃，耐紫外線的玻璃材料等所 成者。 又，本發明的受激准分子燈，是在放電容器內的一端 側’從該放電容器的內側管外周面朝徑方向外方突出的隔 間壁朝內側管周方向全周全面延伸般地形成，由此，可作 成形成有在隔間壁與放電容器的端壁之間連通於放電空間 -18- 200540905 (15) 的用以吸附如氧氣、氫氣、一氧化碳或水等不純氣的吸 收容用輔助空間的構成者。 如第5圖所示地，在此種構成者中，隔間壁是如玻 所成的圓板狀的隔間壁構成構件6 0焊著於構成內側管 一部分的接合構件5 5的直管狀部分5 7外周面所形成， 加熱部分的隔間壁構成構件60的厚度大小t6作成與直 狀部分5 7的厚度大小15大約同等大小較理想。亦即， g 合構件55的直管狀部分57的厚度與隔壁構成構件60 厚度的厚度差I t5-t6 | ，作成接合構件55的直管狀部 57的厚度大小t5或是隔間壁構成構件60的厚度大小 的2 0 °/。以下的大小較理想。由此，加熱部分的接合構件 的熱容量與隔間壁構成構件60的熱容量成爲大約同等 小，而在得到均勻加熱狀態的狀態下，可熔融接合接合 件55與隔間壁構成構件60。 又，隔間壁構成構件60的端面位置與接合構件5 5 • 直管狀部分5 7的端面位置之隔離距離的大小d，是如內 管構成用原材料管4 0的厚度大小12的1 〇 〇 %以上大小 理想。由此，焊著接合構件5 5與內側管構成用原材料 50之際，加熱部分的隔壁構成構件60的熱容量大小實 上成爲無關係，在接合構件5 5與內側管構成用原材料 4 〇的接合部可得到穩定的牢固接合狀態。 又與接合構件5 5的外側管構成用原材料管4 1接合 彎曲部分5 6的外端部的厚度大小t4，是作成與外側管 成用原材料管4丨的厚度大小t丨大約同等大小。 氣 璃 的 惟 管 接 的 分 t6 55 大 構 的 側 較 管 質 管 的 構 -19- 200540905 (16) 又’第6圖所示地，第二實施形態的受激准分子燈中 ’作爲接合構件可使用圓板狀者。 具體地加以說明，該接合構件6 5是具有適合於外側 管構成用原材料管4 1內徑的大小的外徑尺寸，而具有適 口方< 內側管構成用原材料管4 〇外徑的大小直徑的內側管 構成用原材料管嵌合用孔66形成於中央部。 故接合構件6 5是與外側管構成用原材料管4 1熔融接 Φ 口的外周緣部分6 7的厚度大小17作成與外側管構成用原 材料管4 1的厚度大小t i大約同等大小，且與內側管構成 用原材料管4 0熔融接合的內周緣部分（內側管構成用原 材料管嵌合用孔的開口緣部分）6 8的厚度大小t 8作成與 內側管構成用原材料管4 0的厚度大小12大約同等大小。 亦即’外側管構成用原材料管4 1的外側管構成用原材料 管41的厚度與外周緣部分67的厚度的厚度差| tl_t7 | ， 作成外側管構成用原材料管4 1的厚度大小11或外周緣部 ^ 分67的厚度大小t7的20%以下的大小，同時內側管構成 用原材料管40的厚度與內周緣部分68的厚度的厚度差| t2-t8 | ，作成內側管構成用原材料管40的厚度大小t2或 內周緣部分6 8的厚度大小t 8的2 0 °/〇以下的大小。 接合構件6 5的外周緣部分6 7的大小（徑方向長度） ’是從得到接合構件6 5與外側管構成用原材料管4 1的接 合部分的熱容量大小的均勻化的觀點上，作成外側管構成 用原材料管4 1的厚度大小11的1 〇 〇 %以上的大小較理想 ’又，接合構件65的內周緣部分68的大小（徑方向長度 •20- 200540905 (17) )’是從得到接合構件65與內側管構成用原材料管40的 接合部分的熱容量大小的均勻化的觀點上，作成內側管構 成用原材料管40的厚度大小t2的100%以上的大小較理 术貝〇 (實施例） 以下’具體地說明本發明的受激准分子燈的實施例， Φ 惟本發明並不被限定於此者。 (實施例1) 如第2圖所示地，準備全長looomm，外徑40mm，厚 度（U) 2.5mm (tl=2.5 Xt2)的石英玻璃所成的外側管構 成用原材料管，及包含彎曲部分的全長丨020mm直管狀部 分的外徑20mm ’直管狀部分的厚度（t2) 1 .Omm，彎曲部 分的端部厚度（13 ) 2 · 2 m m (11 -13 = 0 · 1 2 X t 1 )的石英玻璃所 # 成的內側管構成用原材料管，藉由在兩端部焊著外側管構 成用原材料管與內側管構成用原材料管，來製作外側管的 厚度比內側管的厚度還大的雙重構造的放電容器。該放電 谷益的全長度是1000mm。 接合外側管構成用原材料管與內側管構成用原材料管 之際的加熱處理條件，是作爲加熱手段使用氧氫氣燃燒器 ’將加熱溫度作爲2 0 0 〇 °c，並將加熱時間作爲1 〇分鐘 ，又將加熱部分的內側管構成用原材料管的徑方向長度 (L)作爲 4mm (1.6xtl)。 -21 - 200540905 (18) 又，依照表示於第1圖的構成，藉由配設外部電極及 內部電極，同時將放電用氣體塡充於放電空間內來製造本 發明的受激准分子燈。 外部電極是使用不銹鋼所成的無端狀金屬絲網所構成 的網狀者。 內部電極是使用將鋁板加工成斷面大約C形狀的槽狀 者。 φ 作爲放電用氣體使用氙氣體而以26kpa壓力進行封入 〇 針對於如此地所得到的受激准分子燈，進行靜荷重破 壞試驗，而對於外側管與內側管的接合部的接合強度進行 評價，確認了該受激准分子燈的接合部是具有能耐於3kg • m的最大力矩的接合強度，具有充分高的可靠性者。如 安裝受激准分子燈之際，作用於受激准分子燈的接合部的 力矩大小一般是2kg· m左右。 (實施例2) 作爲外側管構成用原材料管，使用全長2 0 0 m m，外徑 1 5mm，厚度（t) 〇.7mm者，作爲內側管構成用原材料管 ，使用包含彎曲部分的全長210mm，直管狀部分（中央領 域部分）的外徑6mm，直管狀部分的厚度 （t2) l.5mm (t2 = 2.1 x tl)，彎曲部分的端部厚度 （t3)0.8mm(t3-11=0· 14 xtl)者，除了這些以外是與實施例1同樣，製作 外側管的厚度比內側管的厚度還小的雙重管構造的放電容 -22- 200540905 (19) 器，依照表示於第1圖的構成’藉由配設外部電極及 電極，同時將放電用氣體塡充於放電空間內來製造本 的受激准分子燈。該受激准分子燈的放電容器的全長 2 0 0mm ° 針對於所得到的受激准分子燈的外側管與內側管 合部進行與實施例1同樣的評價’確認了該受激准分 的接合部是具有能耐於2 · 5 kg · m的最大力矩的接合 p ，具有充分高的可靠性者。 (實施例3) 如第3圖所示地，準備全長1000mm，外徑40mm 度 （tl) 2.5mm (tl=2.5 X t2)的石英玻璃所成的外側 成用原材料管，及全長900mm，外徑20mm，厚度 1 mm的石英玻璃所成的內側管構成用原材料管，及包 曲部分的全長60mm，直管狀部分的外徑20mm，彎曲 • 的端部厚度 （t4) 2.2mm (tl-t4 = 0.12xtl)，直管狀部 厚度（t5) 1mm (t2 = t5)的石英玻璃所成的短圓筒狀 構件；在兩端部藉由接合構件焊著外側管構成用原材 與內側管構成用原材料管，來製作外側管的厚度比內 的厚度還大的雙重管構造的放電容器，除了此些以外 與實施例1同樣來製造本發明的受激准分子燈，該受 分子燈的放電容器的全長是1〇〇〇 mm ° 焊著外側管構成用原材料管與接合構件之際的加 理條件’是由上述實施例1同樣[將加熱溫度作爲 內部 發明 度是 的接 子燈 強度 ，厚 管構 (t2) 含彎 部分 分的 接合 料管 側管 ，是 激准 熱處 2000 -23- 200540905 (20) °c ’並將加熱時間作爲1 0分鐘，加熱部分的接合構件的 徑方向長度（LI) 4mm (1.6 xtl )]，焊著內側管構成用原 材料管與接合構件之際的加熱處理條件是將加熱溫度作爲 2 0 0 0 °C ’並將加熱時間作爲5分鐘，又將加熱部分的接 合構件的管軸方向長度（L2A)及內側管構成用原材料管 的長度（L2B)作爲3 mm (3xt2) 針對於所得到的外側管與內側管的接合部進行與實施 φ 例1同樣的評價’確認了該受激准分子燈的接合部是具有 能耐於3kg· m的最大力矩的接合強度，具有充分高的可 靠性者。 (實施例4) 作爲外側管構成用原材料管，使用全長2 0 0 m m，外徑 15mm，厚度（tl) 0.7mm者；作爲內側管構成用原材料管 ，使用全長 180mm，外徑 6mm，厚度（t2) 1.5mm (t2 = 2.1 Xtl)者，作爲接合構件，使用包含彎曲部分的全長 1 5mm，直管狀部分的外徑 6mm，彎曲部分端部的厚度 (t4) 0.8mm (t4-tl=0.14 xtl)，直管狀部分的厚度（t5) 1.5mm (t2 = t5)者，除了此些以外，作成與實施例3同樣 ，來製作外側管的厚度比內側管的厚度還小的雙重管構造 的放電容器，依照表示於第1圖的構成，藉由配設外部電 極及內部電極之同時，將放電用氣體塡充於放電空間內來 製造本發明的受激准分子燈。該受激准分子燈的放電容器 的全前是200mm。 -24- 200540905 (21) 針對於所得到的受激准分子燈的外側管與內側管的接 合部進行與實施例1同樣的評價，確認了該受激准分子燈 的接合部是具有能耐於2.5 k g · m的最大力矩的接合強度 ，具有充分高的可靠性者。 (比較例1) 如第7圖所示地，在上述實施例1中，作爲內側管構 φ 成用原材料管（201)，作爲外側管使用彎曲部分（202) 端部的厚度大小(t2) 1mm (tl-t2 = 0.6 xt 1，tl-t2=l .5 x t2) ’厚度大小整體上均勻者，除了此些之外，是與實施例1 同樣而來製造比較用受激准分子燈。 針對於所得到的比較用受激准分子燈的外側管與內側 管的接合部進行與實施例i同樣的評價，確認了該受激准 分子燈的接合部只具能耐於1 . 5 k g · m左右的力矩的接合 強度者。 (比較例2) 如第8圖所示地，在上述實施例3中，作爲接合構件 (35A)使用彎曲部分（38)的厚度大小（t5)imm(tl_ t5 = (K6 X tl，tl-t5 = 1.5 xt2，t2 = t5)，厚度大小整體上均 勻者’除了此些之外，是與實施例3同樣而來製造比較用 受激准分子燈。 針對於所得到的比較用受激准分子燈的外側管與內側 管的接合部進行與實例1同樣的評價，確認了該受激准分 -25- 200540905 (22) 子燈的接合部只具有能耐於1.5kg · m左右的力矩的接合 強度者。 如以上，在本發明的實施例1至實施例4的受激准分 子燈中，確認了放電容器的外側管與內側管的接合部充分 地具有高可靠性，可假想搬運或安裝受激准分子燈時，從 該接合部確實地防止放電容器受破損。 另一方面，在比較例1及比較例2的受激准分子燈中 φ ，確認了在放電容器的外側管與內側管的接合部，無法得 到穩定牢固的接合狀態。 【圖式簡單說明】 第1圖是表示本發明的受激准分子燈的一例的構成的 槪略的說明用斷面圖。 第2圖是表示製造本發明的受激准分子燈的放電容器 之際的外側管構成用構件與內側管構成用構件的接合方法 φ 的一例的說明圖。 第3圖是表示製造本發明的受激准分子燈的放電容器 之際的外側管構成用構件與內側管構成用構件的接合方法 的其他例的說明圖。 第4圖是表示製造本發明的受激准分子燈的放電容器 之際的外側管構成用構件與內側管構成用構件的接合方法 的另一例的說明圖。 第5圖是表示製造本發明的受激准分子燈的放電容器 之際的外側管構成用構件與內側管構成用構件的接合方法 -26- 200540905 (23) 的另一*例的§兌明圖。 第6圖是表示製造本發明的受激准分子燈的放電容器 之際的外側管構成用構件與內側管構成用構件的接合方法 的另一例的說明圖。 第7圖是表示製造比較例1的受激准分子燈的放電容 器之際的外側管構成用構件與內側管構成用構件的接合方 法的說明圖。 | 第8圖是表示製造比較例2的受激准分子燈的放電容 器之際的外側管構成用構件與內側管構成用構件的接合方 法的說明圖。 第9圖是表示製造習知的受激准分子燈的放電容器之 際的外側管構成用構件與內側管構成用構件的接合方法的 一例的說明圖。 【主要元件符號說明】 • 1 〇 :受激准分子燈，1 1 :放電容器，1 2 :外側管，1 3 :內 側管，13A:彎曲部分，14:其中一方的電極（外部電極） ，1 6 ·另一方的電極（內部電極），2 〇 :內側管構成用原材 料管，2〇A:前端面，21:外側管構成用原材料管，2ia:內 周面，2 5 ·加熱手段，Η :加熱部分，2 〇丨：內側管構成用原材 料管，202:彎曲部分，30:內側管構成用原材料管，3〇a:外 端面，31:外側管構成用原材料管，31 A:內周面，35， 35A:接合構件，36:彎曲部分，36A:前端面，”：直管狀部 分，37A:前端面，38:彎曲部分，⑴，H2:加熱部分，4〇: -27- 200540905 (24) 內側管構成用原材_胃 原材料管，4 1 A :內周面 4 0 A :外端面，4 1 :夕 4 5 :接合構件，4 6 46A:前端面 47:直管狀部分，47A:前端面， ，56:彎曲部分，57··直管狀部分，6〇:隔間壁 65:接合構件，6心內側管構成用原材料管嵌入 周緣部分，68:內周緣部分，70’ 7ι·睹伞、丨 •原枓材 面，72:彎曲部分，72Α:前端面，75:加熱手& 、側管構成用 :彎曲部分， 5 5 :接合構件 :構成構件， 用孔，67:外 f ， 70Α:內周200540905 (1) IX. Description of the invention [Technical field to which the invention belongs] The present invention relates to an excimer lamp, and more specifically, to a dual arrangement of a cylindrical outer tube and a cylindrical inner tube coaxially Constructed excimer lamp. [Prior art] Φ At present, for example, a cleaning process caused by ultraviolet irradiation of a glass substrate on a liquid crystal display surface, or an ultraviolet irradiation process of a photochemical reaction, etc., a vacuum ultraviolet light having a wavelength of 200 nm or less is irradiated on a processed object. As a device for irradiating vacuum ultraviolet light, an excimer molecule is formed by excimer discharge, and an excimer lamp using light emitted from the excimer molecule is provided as a light source. Successor. For example, referring to FIG. 1, there is described an excimer lamp having a cylindrical outer tube 12 made of quartz glass, and the outer tube φ 1 2 is arranged along its tube axis. A cylindrical inner tube 1 3 made of quartz glass having an outer diameter smaller than the inner diameter of the outer tube 1 2. The outer tube 1 2 and the inner tube 1 3 are fusion-bonded at both ends to form an outer tube. A discharge vessel 11 having a double tube structure formed by a ring-shaped discharge space S between the inner tube 12 and the inner tube 1 3; one of the electrodes 15 is in close contact with a mesh formed by a conductive material such as a wire mesh. It is provided on the outer peripheral surface of the outer tube 12 and the other electrode 16 formed of an aluminum plate is in close contact with the inner peripheral surface of the inner tube 13. In the discharge space S, krypton is filled with a gas such as xenon gas. The excimer discharge is constituted by a discharge gas that forms excimer molecules (see, for example, Patent-5-200540905 (2) Literary Literature 1 and Patent Literature 2). The discharge vessel of such an excimer lamp is as follows, that is, as shown in FIG. 9, two cylindrical raw material tubes 70, 71 each having a thickness of about the same as that of the outer diameter are prepared. The two raw material tubes 71 of one of the side tubes are bent at both ends toward the radial direction to form a curved portion 72, and the two raw material tubes 7 are heated from the outer side of the tube axis direction by means of suitable heat. The two end portions of 1 are connected to φ to join the other raw material tube 70 constituting the outer tube. The inner peripheral surface of one of the inner material tubes 7 constitutes a curved portion 7 2 of the inner tube. 72A ′ Thus, the inner portion of the outer tube is obtained. A discharge vessel having a closed circular discharge space between the peripheral surface and the inner tube, the thickness of the other raw material tube 70 constituting the outer tube 11 is 11 and the thickness of one of the inner material tubes 71 is t2. Is about the same size. In recent years, in the case of an excimer lamp using a light source of a glass substrate φ device of a liquid crystal display panel, as the glass substrate is large enough to obtain a large area of light emission, it is made longer and has a length of 800 mm. The above. In such a long excimer lamp, the thickness of the outer tube is made larger from the viewpoint of the mechanical strength of the excimer and the bonding strength between the outer tube and the inner tube, and the thickness of the inner tube is greater than the thickness of the outer tube. The reason why the thickness of the inner tube is made smaller is explained in detail as follows. In order to make the excimer lamp sufficiently capable, it is obtained by making both the outer tube and the inner tube thicker. And so on, while forming the inside and outside of the front end and the outer peripheral surface of the melted 70A and. Here, for example, the cleaning type can be made as a whole lamp, and it must be made with a small structure and strong in mechanical properties. -6-200540905 (3) The inner tube is formed only by the joint with the outer tube. Because of the supported structure, the strength of the joint is reduced by its own weight. Moreover, it is not limited to these cases. There are also many cases where the thickness of the outer tube and the thickness of the inner tube are different from each other. For example, in the case of a shorter one, the inner tube is produced. The thickness is large, and the thickness of the outer tube is smaller than the thickness of the inner tube. The reason is that by reducing the thickness of the outer tube, the light transmittance is increased, and a high light output can be obtained. However, when the thickness of the outer tube and the inner tube which are different from each other is different, the heat capacity of the outer tube and the inner tube in the heating portion of the joint is different. Therefore, the two cannot be heated uniformly and cannot be sufficiently obtained. Defective joint strength, or easy to produce defects such as deformation or skew occurs at the joint, and when the excimer lamp is transported or installed, or at the early stage of lighting, there are problems caused by the structural defects of the joint. There are disadvantages of the damaged discharge vessel. φ On the other hand, if sufficient mechanical strength can be secured throughout the excimer lamp, it is desirable to make the outer tube and the inner tube thin. This reason is to suppress a reduction in electrical efficiency. Then, as described above, when the thickness difference between the outer tube and the inner tube by fusion bonding is large, the thinner may be excessively fused, and thus it may be difficult to perform the bonding. The above-mentioned disadvantages are notably the case where the thickness of the thicker of the outer tube and the inner tube constituting the discharge vessel is significantly larger than the thickness of the thinner, such as a configuration of 1.5 times or more. 200540905 (4) Patent Document 1: Japanese Patent No. 3 2 5 2 6 7 6 Patent Document 2: Japanese Patent No. 2 9 5 1 1 3 9 [Summary of the Invention] The present invention was created based on the foregoing, The purpose is to provide an excimer lamp, which belongs to the double-tube structure excimer lamp caused by the outer tube and the inner tube with different thicknesses in the central area. The joint portion is configured to have a sufficiently high reliability, and can reliably prevent damage when the lamp is transported or installed, or at the initial stage of lighting. The excimer lamp according to the present invention belongs to a discharge vessel having a double tube structure in which an outer tube and an inner tube made of glass are arranged coaxially, and are melted and joined at both ends, respectively. One of the electrodes is provided, and the other electrode is provided on the inner surface of the inner tube. A discharge gas φ that forms excimer molecules by excimer discharge is filled in the outer tube and the inner tube. The excimer lamp in the discharge space between the two is characterized in that the thickness of the outer tube and the inner tube in the central area of the tube axis direction are different from each other, and the thickness of the outer tube at the joint portion is approximately the same as the thickness of the inner tube. The same size. In the excimer lamp of the present invention, the outer tube and the inner tube are joined by a bonding member made of glass at both ends; the thickness of the outer tube and the thickness of the joint portion of the joint portion of the outer tube and the joint member are approximately the same size. 'And the thickness of the joint member at the joint portion between the joint member and the inner pipe is preferably approximately the same as the thickness of the inner pipe-2005-40905 (5). Further, in the excimer lamp of the present invention, the thickness of the central region portion of the thicker one of the outer tube and the inner tube is preferably made to be 1.5 times or more the thickness of the central region portion of the thinner one. . The thickness of the central region of the thinner of the outer tube and the inner tube is preferably in the range of 0.5 to 1.0 μm. The excimer lamp according to the present invention 'when the outer tube and the inner tube are heated and melted at both ends of φ to join them,' the thickness of the outer tube and the inner tube of the heating portion is made approximately the same size ', and the heating portion The heat capacity of the outer tube and the inner tube is approximately equal, so that the outer tube and the inner tube can be heated uniformly. Therefore, deformation or skew can be reliably suppressed, and a stable and firm joint state can be obtained. The joint portion of the inner tube has a sufficiently high reliability structure. Therefore, when the excimer lamp is transported or installed, or at the initial stage of lighting, the discharge vessel can be reliably prevented from being damaged. φ In the excimer lamp according to the present invention, the thickness of the outer tube and the joint member in the joint portion of the outer tube and the joint member is made to be approximately the same size among the members formed by joining the outer tube and the inner tube by the joint member. At the same time, the thickness of the joint member and the inner pipe of the joint portion of the joint member and the inner pipe is made approximately the same size, so that the heat capacity of the two members of the heating portion is approximately equal, so that the two members can be uniformly heated, so that Deformation or skew can be reliably suppressed, and a stable and firm joint can be obtained. As a result, the joint between the outer tube and the inner tube can be made with a sufficiently high reliability. Therefore, when the excimer lamp is transported or installed, or Yes point -9- 200540905 (6) In the initial stage of the lamp, the discharge vessel can be reliably prevented from being damaged. [Embodiment] Hereinafter, the present invention will be described in detail with reference to the drawings. (First Embodiment) Fig. 1 is a sectional view for explaining φ showing the structure of an example of an excimer lamp of the present invention. The excimer lamp 10 is made of quartz glass, and has a cylindrical outer tube 12 having a uniform size and thickness in the tube axis direction, and is arranged along the tube axis in the outer tube 12. A cylindrical inner tube 1 3 having an outer diameter smaller than the inner diameter of the outer tube 12 and made of quartz glass; the outer tube 12 and the inner tube 13 are fusion-bonded at both ends The double tube structure of the discharge vessel 1 1. The inner tube 1 3 constituting the discharge vessel 1 1 has a bent portion 1 3 A formed by bending at both ends to expand outward in the radial direction φ. The bent portion 1 3 A of the inner tube 13 and The outer tube 12 is joined to form the end wall 14 by the curved portion 1 3 A. Thereby, an airtight seal is formed between the inner peripheral surface of the outer tube 12 and the outer peripheral surface of the inner tube 13. The annular discharge space S. The outer tube 1 2 constituting the discharge vessel 1 1 is closely adhered to the outer peripheral surface thereof, and one of the electrodes [hereinafter, referred to as an “external electrode”] 1 5 ′ is provided in a mesh shape formed by a conductive material such as a wire mesh. The inner tube 1 3 is in close contact with the inner peripheral surface, and is provided with a tube made of aluminum or partially in a cross section. -10 · 200540905 (7) The other side with a notched C-shape (groove shape) with a notch Electrodes (hereinafter referred to as "internal electrodes") 1 6. The external electrodes 15 and 16 are connected to a power source device (not shown) such as a high-frequency power source. The discharge space S is filled with a discharge gas such as a gas, which generates excimer molecules by an excimer discharge occurring between the external electrode 15 and the internal electrode 16. In this excimer lamp 10, an outer tube 12 constituting a central field portion of the excimer light emission field that can efficiently use the excimer light emitted from the excimer lamp 10 is configured. The thickness and the thickness of the inner tube 13 are made different from each other, and the thickness of the thicker is made 1.5 times or more the thickness of the thinner. In this embodiment, the thickness t1 of the outer tube 12 is made larger than the thickness t2 of the inner tube 13 (tl ^ 1.5 xt2) [see Fig. 2]. The thickness of the thinner (in this embodiment, the thickness t2 of the inner tube 13) is, for example, 0.5 to 1.0 mm. In the following description, unless otherwise specified, the "thickness" refers to the thickness of the central region portion of the excimer lamp 10. In addition, the thickness of the outer tube 1 2 and the thickness of the inner tube 1 3 at the joint portion of the outer tube 12 and the inner tube 13 are made approximately the same size. Specifically, referring to FIG. 2, if the thickness of the end portion of the outer tube 12 is set to 11 and the thickness of the end portion of the bent portion of the inner tube 13 is set to 13, the following formula (1 ) And either of the formulas (2). -11-200540905 (8) Formula (1) 1 tl-t3 | ^ 0.2xtl Formula (2) 1 tl-t3 1 ^ 0.2xt3 The excimer lamp 10 having the above configuration can be manufactured as follows. That is, as shown in FIG. 2, first, the outer end is enlarged in a flared shape to extend both ends toward the outside of the radial direction: r forms a curved portion 13A φ a cylindrical inner tube for the inner tube 13 The raw material tube 20 is inserted coaxially inside the cylindrical outer tube forming raw material tube 21 having an outer diameter larger than the outer diameter of the inner tube forming raw material tube 20, and the outer tube 12 is placed coaxially. The outer side in the axial direction is heated by a heating hand 25 such as a burner, and the inner periphery 2 1 A of the outer tube forming raw material tube 2 and the curved portion of the inner tube forming raw material tube 20 are welded. 3 a 2 0 A, thereby obtaining a discharge vessel Η having a double tube structure in which the tubular discharge space s is formed between the outer tube J 2 and the inner tube 13. Here, the inner tube 20 for forming the raw material tube 20 is a curved portion that is continuous to the central area portion if the thickness of the central area portion is 3 ′. As the thickness toward the outer end becomes larger, the outer end portion of the joint portion becomes larger. The thickness is t3. In the case of heating and melting the raw material tube 21 for forming the outer tube and the raw material tube 20 for forming the inner tube, from the viewpoint of uniformizing the heat capacity of the heating section 加热 heated by the heating means 25, the raw material for forming the inner tube of the heating portion η is heated. The length L of the tube is preferably 100% or more of the thickness t1 of the material tube for forming the outer tube. As a result, at the end of the side of the configuration where the raw material tube 2 for the side tube configuration and the raw material for the inner tube configuration are oriented, and at the side t2 for the split 2 1 and the outer 20, -12- 200540905 (9) uniform heating state is obtained. In the state of 'can be fused. Moreover, an appropriate discharge gas is enclosed in the discharge space s of the discharge vessel 11 obtained as described above, and the external electrodes 15 and the internal electrodes 16 are arranged at predetermined positions. 10 of the excimer lights. In this way, when the outer tube 12 and the inner tube 13 are heated and fused at both ends according to the excimer lamp 10 configured as described above, φ is heated by the heating means 25. The thickness t1 of the outer tube forming raw material tube 21 is approximately the same as the thickness t3 of the curved portion 1 3 A of the inner tube forming raw material tube 20. The outer tube forming raw material tube 2 1 and The heat capacity of the inner tube structure raw material tube 20 is approximately equal, and uniform melting and heating are applied. Therefore, deformation or distortion can be reliably suppressed, and a stable and firm joining state can be obtained. As a result, the outer tube 12 and the The joint portion of the inner tube 13 has a sufficiently high reliability structure. Therefore, when the Φ excimer lamp 10 is transported or installed, or at the initial stage of lighting, the discharge vessel 11 can be reliably prevented from being damaged. In the foregoing, it has been described that a discharge vessel having a structure having a thickness greater than the thickness of the inner pipe than an inner pipe is provided, but a discharge vessel having a structure having a greater thickness than the thickness of the outer pipe The same effect can be obtained by those who have completed. In particular, the present invention is a constitution in which the thickness of the thinner of the outer tube and the inner tube is 0.5 to 1.0 mm, and the thickness of the thicker is 1.5 times or more the thickness of the thinner. For example, the excimer lamp 1 〇-13- 200540905 (10) A component with a total length of 100 mm or more is extremely useful, and the joint between the outer tube and the inner tube can be made with sufficiently high reliability. By. < Second Embodiment > An excimer lamp according to a second embodiment of the present invention is formed by a discharge vessel formed by joining an outer tube and an inner tube at both ends with another joining member, and others The basic structure is the same as that shown in Figure 1. Specifically, as shown in FIG. 3, the discharge vessel of the excimer lamp of the second embodiment is composed of a raw material tube 31 for an outer tube structure and an inner tube having uniform thicknesses in the tube axis direction. A raw material tube 30, a double tube structure formed by joining two end portions with a joining member 35 made of the same material as the raw material tube 31 for the outer tube construction and the raw material tube 30 for the inner tube construction, such as quartz glass. . In this embodiment, the thickness 11 of the outer tube configuration raw material tube 31 is made larger than the thickness 12 of the inner tube configuration raw material ® tube 30 (11-1 · 5 X12). The joining member 35 is a substantially short cylindrical shape having a bent portion 36 which is bent so as to extend and extend outward in the radial direction at one end portion, and a straight tubular portion 37 which is continuous with the segment portion through the bent portion 36; and The thickness of the end portion of the curved portion 36 of the outer wall constituting the end portion of the curved portion 36 constituting the outer tube by joining the raw material tube 31 is approximately the same as the thickness of the outer tube constituting raw material tube 31, and is approximately the same as that of the inner tube. The thickness 15 of the end portion of the straight tubular portion 37 to which the raw material tube 30 is joined is made approximately the same as the thickness t2 of the raw material tube 30 for the inner tube configuration. -14- 200540905 (11) That is, the thickness difference between the thickness of the end of the curved portion 3 6 and the thickness of the outer tube constituting raw material tube 31 | t〗 _t4 | to create the thickness t of the outer tube constituting raw material tube 31 〖Or the thickness of the end portion of the curved portion 3 6 is less than 20% of the thickness t4, and the thickness of the end portion of the straight tubular portion 37 is different from the thickness of the raw material tube 30 for the inner tube thickness | 11 -15 | The thickness t2 of the inner tube constituting raw material tube 30 or 20% or less of the thickness t5 of the end portion of the straight tubular portion 37 is t5. φ The excimer lamp configured in this way is the same as in the case shown in Fig. 1 when the straight tube-shaped outer tube is welded from the outer side of the tube axis by heating such as a burner. The inner peripheral surface 3 1 of 3 1 and the front end surface 3 6 a of the curved portion 3 6 of the joint member 3 5 are welded from the inner side of the radial direction by heating such as a burner or the like. The outer end surface 30A of 30 and the front end surface 37A of the straight tubular portion 37 of the joint member 35 can obtain a discharge vessel with a double tube structure in which a tubular discharge space is formed between the outer tube and the inner tube. From the viewpoint of uniformizing the heat capacity of the heating portion Η 1 when the raw material pipe 31 and the joining member 35 are connected to the outer pipe structure, the heating portion of the outer pipe forming raw material pipe 31 and the joining member 35 is obtained. The length L 1 of the joint member η1 is preferably 100% or more of the thickness t1 of the raw tube 31 for the outer tube configuration. Also, 'when joining the joining member 35 and the inner tube constituting raw material tube 3 0', from the viewpoint of obtaining a uniform heat capacity of the heating portion H2, the "inner tube constituting raw material tube 30 and the joining member 35 are heated. The length L2A of the joining member 35 of the portion H2 and the inner tube structure of the heating portion H2 -15-200540905 (12) The length L2B of the raw material tube 30 to be used is preferably the same size. The length L2 A of the joining member 35 of the heating portion H2 and the length L2B of the inner tube forming raw material tube 30 of the heating portion H2 are not particularly limited. For example, as the inner tube forming raw material tube 30, the thickness t2 Over 100% of the size. In this way, in a state where the uniformly heated state is obtained, the raw material tube 31 for the outer tube configuration and the bonding member 35, and the raw material tube 30 for the φ inner tube configuration can be fusion-bonded. As described above, the description has been made of a discharge vessel having a configuration in which the thickness of the outer tube is larger than the thickness of the inner tube. However, the thickness of the outer tube 11 is made smaller than the thickness t2 of the inner tube. The situation is the same (ti X 1 · 5 S t2). That is, as shown in FIG. 4, as the joining member 45, a curved portion 46 that is joined to the end wall to form the end wall is joined to the outer tube forming raw material tube 41, and the thickness t 6 at the end portion is used as the outer tube forming raw material tube. The thickness t1 of 1 is approximately the same size, and the thickness t5 of the end portion of the straight tubular portion 47 joined to the inner tube forming raw material tube 40 is approximately the same as the thickness t2 of the inner tube forming raw material tube 40. The inner peripheral surface 4 1 A of the outer tube forming raw material tube 4 1 and the front end surface 4 6 A of the bent portion 4 6 of the joining member 45 are welded together, and the outer end surface of the inner tube forming raw material tube 40 is welded at the same time. 4 0 A and the front end surface 4 7 A of the straight tubular portion 47 of the bonding member 4 5, thereby obtaining a double-structure discharge vessel having a tubular discharge space formed between the outer tube and the inner tube. When joining the outer tube constituting raw material tube 41 and the joining member 45, from the viewpoint of obtaining a uniform heat capacity of the heating portion Η 1, -16-200540905 (13) The outer B constituting raw material tube 4 and the joint The length L 3 of the interface member 45 of the heating portion of the component & 5 is preferably 100% or more of the thickness u of the outer tube forming raw material tube 41 of the heating portion H1. Also, "when joining the joining member 45 and the raw material tube for the inner tube configuration", from the viewpoint of obtaining a uniform heat capacity of the heating portion H2, the raw material tube 40 for the inner tube configuration and the heating portion φ H2 of the joining member 45 The length L4A of the joining member 45 and the length L4B of the inner tube forming raw material tube 40 of the heating portion H2 are preferably the same size. The length L4A of the joining member 45 of the heating portion H2 and the length L4B of the inner tube forming raw material tube 40 of the heating portion H2 are not particularly limited. For example, as the thickness of the inner tube forming raw material tube 40, t2 1 0 0% Above the size. As a result, in a state where the uniform heating state is obtained, the raw material tube 41 for the side tube configuration and the bonding member 45, and the raw material tube 40 for the inner tube configuration 40 can be fusion-bonded. As described above, according to the present invention, the stimulated quasi-separated lamp formed by the discharge tube and the discharge tube formed by joining the outer tube and the inner tube at both ends by additional connection members is formed by directly welding the outer tube and the inner tube. Similarly to the excimer lamp of the first embodiment, the raw material tube 31 (4 1) and the outer tube of the heating portion H1 of the joining member 3 5 (4 5) are constituted by the outer tube constituting the raw material tube 41 and the outer tube constituting the raw material tube 31 (4 1) and The thickness of the joining member 3 5 (4 5) is approximately the same, and the joining member 3 5 (45) and the heating pipe H 2 of the inner tube forming material pipe 3 0 (40) are joined with the joining member 3 5 (45) and the inner side. The outer and zygotic states of the 40-point structured structure of the H1 structure 3 1 are made of the material side -17- 200540905 (14) The thickness of the raw material tube 3 0 (40) is about the same size, so that the heating part Η 1, The heat capacity of the two members of H2 becomes approximately equal, so that the two members can be evenly heated. Therefore, deformation or skew can be reliably suppressed, and a stable and firm joint can be obtained. As a result, the outer tube and the inner can be connected. The joint of the tube is made to have a sufficiently high By constitutive 'can therefore be handled by or 10:00, or excimer lamp lighting initial installation' can be reliably prevented from breakage of the discharge vessel 11. φ or more 'describes the embodiment of the present invention, but the present invention is not limited to the above embodiment, and various changes can be applied. For example, in the excimer lamp of the first embodiment, as a raw material tube for outer tube construction, both ends of which have curved portions that are processed to extend inward in the radial direction, the thickness of the tip portion of the curved portion and The thickness of the raw material tube for the inner tube is approximately the same. As the raw material tube for the inner tube configuration, a straight tube having a uniform thickness in the direction of the tube axis is used. The raw material tube for the outer tube configuration and the raw material tube for the inner tube configuration are used. A constitution in which a discharge vessel is formed by φ fusion bonding may be used. Further, in the excimer lamp of the second embodiment, the bonding member is not necessarily the same as the material of the outer tube and the inner tube, and for example, synthetic quartz glass, fused silica glass, and ultraviolet-resistant glass materials can be used. Successor. In addition, the excimer lamp of the present invention has a compartment wall that protrudes outward in the radial direction from the outer peripheral surface of the inner tube of the discharge vessel at one end side in the discharge vessel so as to extend fully across the entire circumference of the inner tube circumference. Formed, and thus, an absorption capacity for adsorbing impure gas such as oxygen, hydrogen, carbon monoxide, or water, which is connected to the discharge space between the partition wall and the end wall of the discharge vessel can be formed. Constructor with auxiliary space. As shown in FIG. 5, in such a structure, the partition wall is a disk-shaped partition wall constituting member 60 formed of glass, and the straight tube is welded to the joining member 55 forming a part of the inner pipe. The thickness t6 of the partition wall constituting member 60 of the heating portion is formed on the outer peripheral surface of the portion 57. The thickness t6 is preferably approximately the same as the thickness 15 of the straight portion 57. That is, the thickness difference between the thickness of the straight tubular portion 57 of the g-joint member 55 and the thickness of the partition wall constituting member 60 is I t5-t6 |. The thickness size of 20 ° /. The following sizes are ideal. As a result, the heat capacity of the joining member in the heating portion becomes approximately the same as that of the partition wall constituting member 60, and the joining member 55 and the partition wall constituting member 60 can be fusion-bonded in a state in which a uniform heating state is obtained. In addition, the magnitude d of the separation distance between the end face position of the partition wall constituent member 60 and the end face position of the straight member 5 7 is, for example, the thickness 12 of the inner tube constituting raw material tube 40, which is 1 to 100. More than% ideal size. As a result, when the joining member 55 is welded to the inner tube constituting material 50, the heat capacity of the partition wall constituting member 60 in the heating portion is substantially irrelevant, and the joining member 55 and the inner tube constituting material 40 are joined. The part can obtain a stable and firmly joined state. The thickness t4 of the outer end portion of the bent portion 56 is joined to the outer tube forming raw material tube 41 of the joining member 55, which is approximately equal to the thickness t 丨 of the outer tube forming raw material tube 4 丨. The structure of the gas-tipped tube t6 55 is larger than that of the tube-like tube. 19- 200540905 (16) Also, as shown in FIG. 6, the excimer lamp of the second embodiment is used as a joint. As the component, a disc-shaped one can be used. Specifically, the joining member 65 is an outer diameter having a size suitable for the inner diameter of the raw material tube 41 for the outer tube configuration, and has a palatable side. < Inner tube configuration raw material tube 40. The inside diameter of the inner tube configuration raw material tube fitting hole 66 is formed in the central portion. Therefore, the joining member 65 is fused to the outer tube portion raw material tube 41, and the thickness 17 of the outer peripheral edge portion 6 7 of the Φ mouth is made approximately the same size as the thickness of the outer tube portion raw material tube 41, and is the same as the inner side. The inner peripheral part of the tube forming raw material tube 40 for the fusion welding (the opening edge part of the inner tube forming raw material tube fitting hole) 6 8 has a thickness of t 8 and the thickness of the inner tube forming raw material tube 40 is approximately 12 The same size. That is, the thickness difference between the thickness of the outer tube constituting raw material tube 41 and the thickness of the outer peripheral portion 67 of the outer tube constituting raw material tube 41 is tl_t7 |, and the thickness of the outer tube constituting raw material tube 41 is 11 or the outer circumference. The thickness of the edge portion 67 is less than 20% of the thickness t7, and the thickness difference between the thickness of the inner tube forming raw material tube 40 and the thickness of the inner peripheral portion 68 | t2-t8 | The thickness t2 or the thickness t 8 of the inner peripheral portion 6 8 is less than or equal to 20 ° / 〇. The size (radial direction length) of the outer peripheral edge portion 67 of the joining member 65 is formed from the viewpoint of uniformizing the heat capacity of the joining portion of the joining member 65 and the outer tube constituting raw material tube 41, and the outer tube is formed. The size of the thickness 11 of the raw material tube 41 for the construction is more than 100% of the thickness 11, and the size of the inner peripheral portion 68 of the joining member 65 (the length in the radial direction • 20-200540905 (17)) is obtained from the joining. From the viewpoint of uniformizing the heat capacity of the joint portion of the member 65 and the inner tube forming raw material tube 40, a size of 100% or more of the thickness t2 of the inner tube forming raw material tube 40 is made smaller than that of the physical operation (Example) Hereinafter, an embodiment of the excimer lamp of the present invention will be specifically described, but the present invention is not limited to this. (Example 1) As shown in FIG. 2, a raw material tube for forming an outer tube made of quartz glass having a full length looomm, an outer diameter of 40mm, and a thickness (U) of 2.5mm (tl = 2.5 Xt2) was prepared, and a bent portion was included. The full length of the 020mm straight tube part has an outer diameter of 20mm. The thickness of the straight tube part (t2) 1.0 mm, the thickness of the end of the curved part (13) 2 · 2 mm (11 -13 = 0 · 1 2 X t 1) The raw material tube for the inner tube structure made of quartz glass # is manufactured by welding the raw material tube for the outer tube structure and the raw material tube for the inner tube welding at both ends, so that the thickness of the outer tube is larger than the thickness of the inner tube. Double structured discharge vessel. The full length of this discharge Gu Yi is 1000mm. The heat treatment conditions when joining the raw material tube for the outer tube construction and the raw material tube for the inner tube construction are performed using an oxygen-hydrogen burner as a heating means, the heating temperature is 2000 ° C, and the heating time is 10 minutes. The length in the radial direction (L) of the raw material tube for the inner tube constituting the heating portion is 4 mm (1.6 × tl). -21-200540905 (18) In accordance with the configuration shown in Fig. 1, an excimer lamp of the present invention is manufactured by disposing external electrodes and internal electrodes and simultaneously filling a discharge gas into a discharge space. The external electrode is a mesh made of an endless wire mesh made of stainless steel. The internal electrode is a groove formed by processing an aluminum plate into a C-shaped cross section. φ Sealed at 26 kpa using xenon gas as the discharge gas. For the excimer lamp obtained in this way, a static load failure test was performed, and the joint strength of the joint between the outer tube and the inner tube was evaluated. It was confirmed that the joint portion of this excimer lamp has a joint strength capable of withstanding a maximum torque of 3 kg • m and has sufficiently high reliability. When an excimer lamp is installed, the moment acting on the junction of the excimer lamp is generally about 2 kg · m. (Example 2) As a raw material tube for the outer tube configuration, a total length of 200 mm, an outer diameter of 15 mm, and a thickness (t) of 0.7 mm was used. As a raw material tube for the inner tube configuration, a total length of 210 mm including a bent portion was used. The outer diameter of the straight tubular part (central area part) is 6mm, the thickness of the straight tubular part (t2) 1.5mm (t2 = 2.1 x tl), and the thickness of the end of the bent part (t3) 0.8mm (t3-11 = 0 · 14 xtl), except for these, it is the same as in Example 1, and a double-tube structure discharge vessel -22- 200540905 (19) having a thickness smaller than that of the inner tube is produced in accordance with the figure 1 Configuration 'The present excimer lamp is manufactured by disposing external electrodes and electrodes, and simultaneously filling a discharge gas with a discharge space. The total length of the discharge vessel of the excimer lamp was 200 mm. The same evaluation as in Example 1 was performed on the outer tube and inner tube junction of the obtained excimer lamp. The joint is a joint p having a maximum torque of 2 · 5 kg · m, and has a sufficiently high reliability. (Example 3) As shown in FIG. 3, an outer tube for forming raw materials made of quartz glass having a total length of 1,000 mm and an outer diameter of 40 mm (tl) and 2.5 mm (tl = 2.5 X t2) was prepared, and a total length of 900 mm, 20mm diameter, 1mm thickness quartz glass made of raw material tube for inner tube construction, and the full length of the curved part 60mm, the outer diameter of the straight tubular part 20mm, curved end thickness (t4) 2.2mm (tl-t4 = 0.12xtl), a short cylindrical member made of quartz glass with a straight tube thickness (t5) of 1mm (t2 = t5); the outer tube and the inner tube are formed by welding the outer tube and the inner tube with joint members at both ends. A discharge tube with a double tube structure having a larger outer tube thickness than an inner tube was manufactured using a raw material tube. Except for these, an excimer lamp of the present invention was produced in the same manner as in Example 1. The discharge of the excimer lamp was performed. The full length of the container is 1,000 mm. The processing conditions when the raw material tube for outer tube construction and the joining member are welded are the same as those of the first embodiment [the heating temperature is the intensity of the relay lamp, Thick pipe structure (t2) spliced pipe with bent part The side tube is a quasi-heat place 2000 -23- 200540905 (20) ° c ', and the heating time is 10 minutes. The radial length of the joint member of the heating part (LI) 4mm (1.6 xtl)] is welded on the inside The heat treatment conditions for the raw material tube for the tube construction and the joining member are set to a heating temperature of 2000 ° C 'and a heating time of 5 minutes, and the length of the pipe axis direction of the joining member (L2A) and The length (L2B) of the raw tube for the inner tube configuration was 3 mm (3xt2). The obtained joint between the outer tube and the inner tube was evaluated in the same manner as in Example φ. The connection of the excimer lamp was confirmed. The part has a joint strength capable of withstanding a maximum torque of 3 kg · m and has sufficiently high reliability. (Example 4) As a raw material tube for the outer tube configuration, a length of 200 mm, an outer diameter of 15 mm, and a thickness (tl) of 0.7 mm was used. As a raw material tube for the inner tube configuration, a total length of 180 mm, an outer diameter of 6 mm, and a thickness ( t2) For 1.5mm (t2 = 2.1 Xtl), as the joining member, use a total length of 15mm including the bent portion, an outer diameter of the straight tubular portion of 6mm, and the thickness of the end of the bent portion (t4) 0.8mm (t4-tl = 0.14) xtl), the thickness of the straight tubular portion (t5) 1.5mm (t2 = t5), other than these, the same as in Example 3 was made to produce a double tube structure with a thickness of the outer tube smaller than the thickness of the inner tube The discharge vessel has the structure shown in FIG. 1, and is equipped with an external electrode and an internal electrode, and a discharge gas is charged into the discharge space to manufacture the excimer lamp of the present invention. The full front of the discharge vessel of this excimer lamp is 200 mm. -24- 200540905 (21) The joint of the outer tube and the inner tube of the obtained excimer lamp was evaluated in the same manner as in Example 1, and it was confirmed that the joint portion of the excimer lamp was resistant to A joint with a maximum torque of 2.5 kg · m has a sufficiently high reliability. (Comparative Example 1) As shown in FIG. 7, in the above-mentioned Example 1, as the inner pipe structure φ forming raw material pipe (201), and as the outer pipe, the thickness (t2) of the end portion of the bent portion (202) was used. 1mm (tl-t2 = 0.6 xt 1, tl-t2 = 1.5 x t2) 'The thickness is uniform as a whole. Except for these, the excimer lamp for comparison is manufactured in the same manner as in Example 1. . The joint of the outer tube and the inner tube of the obtained comparative excimer lamp was evaluated in the same manner as in Example i, and it was confirmed that the joint portion of the excimer lamp was only capable of withstanding 1.5 kg. A joint strength of a moment of about m. (Comparative Example 2) As shown in FIG. 8, in the above-mentioned Example 3, the thickness (t5) imm (tl_ t5 = (K6 X tl, tl- t5) of the bent portion (38) was used as the joining member (35A). t5 = 1.5 x t2, t2 = t5), except that the thickness is uniform as a whole. Except for these, the excimer lamp for comparison was manufactured in the same manner as in Example 3. The obtained excimer for comparison was obtained. The joint portion of the outer tube and the inner tube of the molecular lamp was evaluated in the same manner as in Example 1. It was confirmed that the stimulated quasi-min 25-25200540905 (22) The joint portion of the sub-lamp only has a torque resistance of about 1.5 kg · m. As described above, in the excimer lamps of Examples 1 to 4 of the present invention, it was confirmed that the joint portion between the outer tube and the inner tube of the discharge vessel has sufficiently high reliability, and can be assumed to be transported or When the excimer lamp is mounted, damage to the discharge vessel is surely prevented from this joint. On the other hand, in the excimer lamp of Comparative Examples 1 and 2, φ confirmed that the outer tube of the discharge vessel and the The joint portion of the inner tube cannot obtain a stable and firm joint state. [Brief Description of the Drawings] Fig. 1 is a schematic cross-sectional view showing the structure of an example of an excimer lamp of the present invention. Fig. 2 is a diagram showing a discharge vessel for manufacturing the excimer lamp of the present invention. An explanatory diagram of an example of the joining method φ of the outer tube constituting member and the inner tube constituting member at the time. Fig. 3 shows the outer tube constituting member and the outer tube constituting member when the discharge vessel of the excimer lamp of the present invention is manufactured. FIG. 4 is a diagram illustrating another example of a method of joining the inner tube constituting member. FIG. 4 is a diagram showing a method of joining the outer tube constituting member and the inner tube constituting member when the discharge vessel of the excimer lamp of the present invention is manufactured. Fig. 5 is another illustration of a method for joining an outer tube constituting member and an inner tube constituting member when manufacturing a discharge vessel of an excimer lamp of the present invention. 26-200540905 (23) Illustrated by § of Fig. 6. Fig. 6 is a diagram showing another example of a method of joining an outer tube constituting member and an inner tube constituting member when a discharge vessel of an excimer lamp of the present invention is manufactured. Fig. 7 is an explanatory diagram showing a method for joining the outer tube constituting member and the inner tube constituting member when the discharge vessel of the excimer lamp of Comparative Example 1 is manufactured. | Fig. 8 is a comparative example of manufacturing 2 is an explanatory diagram of a method for joining the outer tube constituting member and the inner tube constituting member in the case of the discharge vessel of the excimer lamp. Fig. 9 shows a case where the conventional discharge vessel of the excimer lamp is manufactured. An explanatory diagram of an example of a method of joining the outer tube constituting member and the inner tube constituting member. [Description of main component symbols] • 1 0: Excimer lamp, 1 1: Discharge capacitor, 1 2: Outer tube, 1 3: inner tube, 13A: curved portion, 14: one of the electrodes (external electrode), 16 · the other electrode (internal electrode), 20: raw material tube for inner tube configuration, 20A: front end surface, 21: Raw material tube for outer tube configuration, 2ia: Inner peripheral surface, 2 5 · Heating means, Η: Heating section, 2 0 丨: Raw material tube for inner tube configuration, 202: Bending part, 30: Raw material tube for inner tube configuration , 30a: Outer end face, 31: Raw material tube for side pipe construction, 31 A: inner peripheral surface, 35, 35A: joining member, 36: curved portion, 36A: front end surface, ": straight tubular portion, 37A: front end surface, 38: curved portion, ⑴, H2 : Heating section, 4〇: -27- 200540905 (24) Raw material for inner tube construction_Stomach raw material tube, 4 1 A: Inner peripheral surface 4 0 A: Outer end surface, 4 1: Evening 4 5: Joint member, 4 6 46A: Front end surface 47: Straight tubular portion, 47A: Front end surface, 56: Curved portion, 57 ·· Straight tubular portion, 60: Partition wall 65: Joining member, 6-core inner tube constituting raw material tube embedded in peripheral edge Part, 68: Inner peripheral part, 70 '7ι · Umbrella, 丨 • Material surface, 72: Curved part, 72Α: Front end surface, 75: Heating hand & Side tube configuration: Bent part, 5 5: Joining member: constituting member, hole, 67: outer f, 70A: inner periphery
-28、-28,