1328247 九、發明說明 【發明所屬之技術領域】 本發明是關於一種受激準分子燈，尤其是關於一種介 設介質材料進行放電的受激準分子燈。 【先前技術】 受激準分子燈是具有強烈地放射單一波長的真空紫外 線的特徵，而眾知作爲放電用氣體例如使佣氙氣體的受激 準分子燈中’放射波長l72nm的真空紫外光，而裝載該燈 的光照射裝置是被使用於分解除去附著於液晶面板顯示元 件的面板基板表面的有機物或表面改質面板基板等。 第8圖是表示習知的受激準分子燈50; (a)是表示 管軸方向的斷面圖；（b)是半徑方向的斷面圖。 受激準分子燈5 0是如石英玻璃的介質材料所成的外 側管1 1及內側管1 2被同軸配置的雙重圓筒管構造的放電 容器1 3所構成’上述外側管1 1的端部與內側管1 2的端 部是藉由被焊著形成有側壁部1 4。在此些外側管1 1與內 側管12之間形成有環狀放電空間s，而如氙氣體作爲放 電用氣體被封入在其內部。在外側管11的外表面設有網 狀外側電極1 5，而在內側管1 2的內側，設有管狀或斷面 上在一部分具有缺口的大約C形狀的內側電極16。利用 高頻電壓施加於外側電極1 5與內側電極1 6之間，受激準 分子形成在放電空間S內，而使該受激準分子進行脫離就 可放射氙受激準分子光。 -5- 1328247 然而，近年來，隨著照射對象的液晶面板顯示元件的 基板成爲大面積化，受激準分子燈也成爲長度化，例如被 要求超過全長度800mm的受激準分子燈。 在如此地被長度化的受激準分子燈中，如第8圖所示 的構造，水平地捆紮在捆紮容器內而以軌道等進行搬運時 ，因給予燈的衝擊或振動而會產生放電容器破裂的不方便 之虞。 尤其是，在焊著外側管1 1與內側管1 2的側壁部1 4 會發生損傷或破損。 此些放電容器1 3的破損是僅以放電容器1 3兩端所支 持的內側管1 2，若施加燈輸送時的衝擊等，會使其中央部 彎曲，由此，成爲產生應力集中在內側管1 2兩端的焊著 部分的側壁部1 4的原因。 如第9圖所示地，作爲解決如上述的問題所用的手段 。提案在同軸配置外側管1 1與內側管1 2的雙重圓筒管構 造的放電容器13中，將支持板配置於上述外側管11與內 側管1 2之間的構造（參照專利文獻1 )。依照該構造，藉 由支持板17來支持內側管12，防止該彎曲，而可防止放 電容器1 3的裂縫。 然而，在發光部分配置支持板17，因此有另外產生新 的問題之虞。 亦即，在放電空間s內配置有支持板1 7的部分不會 形成有放電，還有該支持板17會遮住來自未配置支持板 17的發光部分的光線，而不能取出至放電容器13外。由 -6 - 1328247 此，支持板17正下方的被處理物表面的光量會降低，不 但會減少整體光量，還使均勻性成爲不充分。 若，作爲支持板17即使使用光透過性材料，也無法 避免不會發生放電，又，支持板所致的光吸收也無法完全 地排除，因此無法避免支持板正下方的被處理物面的光量 降低及均勻性惡化。 專利文獻1:日本特開2004-139889號 【發明內容】 本發明欲解決的課題，是在於提供一種即使爲了防止 放電容器的裂縫而具備支持板時，也可將支持板正下方的 被處理面的照度降低及均勻性惡化抑制成最小限度的受激 準分子燈。 本發明的受激準分子燈，屬於同軸狀地配置的外側管 與內側管互相地焊著在端部而具有在兩者間形成環狀放電 空間所成的放電容器，及分別配設於上述外側管的外表面 及內側管的內表面的外側電極及內側電極，在上述外側管 與內側管之間配置有支持該內側管的支持板，而在上述放 電空間內塡充著生成受激準分子的放電氣體所成的受激準 分子燈，其特徵爲：上述支持板是在半徑方向的斷面中朝 光取出方向具有缺口。 本發明的受激準分子燈中，在防止放電容器的內側管 的彎曲而防止放電容器的裂縫等損傷所用的支持板，藉由 在其光取出一側設置缺口，而在該部分也形成有放電，不 1328247 會降低該部分的照度降低’又’作爲整體也可使得放電成 爲穩定且均勻化。還有’不會遮斷來自其他發光部分的光 線，具有不會減少光量或惡化均勻性的效果者。 【實施方式】 以下，參照第1圖至第6圖說明本發明的實施例。在 各圖中，或與第8圖與第9圖相同符號是表示相同構件。 (實施例1 ) 在第1圖中，（a)是表示管軸方向斷面圖；（b)是 表示半徑方向斷面圖。 在放電空間S內的外側管1 1與內側管1 2之間設有支 持板2 0成爲嵌合於內側管；如以（b )所示地，在該支持 板20，朝光取出部方向，圖示的情形朝下方形成有缺口 21。該缺口 21是儘量被切除較大成爲將內側管12支持於 外側管1 1不會產生妨礙的程度。 上述支持板20是被嵌插在內側管，而其一部分焊著 或黏接22於該內側管1 2，俾限制內側管1 2的周圍對於旋 轉方向及軸向的移動。 (實施例2 ) 在第2圖的實施例2中，形成有缺口 21的支持板20 ，是在其外周的一部分被焊著或黏接23於外側管11，而 此以外是與上述實施例1相同。 -8- 1328247 如上述實施例1及實施例2所示地，可採用支持板20 是在內周緣被焊著或黏接於內側管12，或是在外周緣被焊 著或黏接於外側管11的任一種，惟考慮裝配放電容器13 的工程時，如實施例1所示地，支持板20是被固定在內 側管1 2較理想。 亦即，裝配放電容器1 3是在將支持板2 0裝設於內側 管12的狀態下插入在外側管11，並藉由在端部接合兩者 所進行，因此支持板2 0是被固定在內側管1 2者，可順利 地進行插入在外側管1 1內。 (實施例3 ) 在第3圖的實施例3中，在支持板20的缺口 21的下 方位置，於外側管1 1形成有凹處24。當該凹處24是以燃 燒器烘烤軟化外側管1 1之後，推壓棒狀體就可形成。這 時候，凹處24是作用成在放電空間s內朝上方，亦即朝 外側管1 1的上部內面方向抬高支持板2 0般地，而朝外側 管1 1推壓支持板20。該凹處24是限制支持板20對於旋 轉方向的動作。 又，在內側管1 2形成有形成在支持板2 0兩側的小突 起2 5，俾限制支持板2 0對於內側管1 2的軸向的動作。該 小突起25是藉由加熱軟化石英玻璃棒而焊著於內側管12 就可形成。 在該實施例3中’利用凹處24使得支持板20抵接於 外側管11之故，因而藉由搬運時等的振動可避免支持板 -9- 1328247 20與外側管1 1在其中間的微小間隙相撞，而可將支持板 20，特別是外周緣的角部損傷防範於未然。 (實施例4) 在表示於第4圖的實施例4中，光取出方向的缺口 26 是形成比實施例1至實施例3者更大地被切除，使得內側 管12的一部分從缺口 26露出。 如上所述地，若光取出方向在下方時，缺口 26是支 持板20覆蓋內側管12的周緣180度以上般地被留下，而 在留下支持內側管12的功能的範圍內作成切除。 (實施例5) 對於以上的實施例1至實施例4，第5圖的實施例5 是光取出方向在上方的例子。該實施例的情形，支持板2 0 是成爲從下方支持內側管1 2的形態，而支持板2 0的缺口 構造是除了上述實施例1至實施例4的構造之外，切除成 在內側管12周圍的180度以下的範圍內支持也可以。由 此，缺口 27是可切除成比實施例1至實施例4的情形更 大，使得在支持板20上方空間的放電與沒有支持板的其 他部分大約同樣地生成，同時也可更減少遮光程度。 又，在此些實施例4及實施例5中，限制支持板20 對於旋轉方向及軸向的動作的手段是當然也可採用與實施 例1至實施例3同樣者。 -10- 1328247 (實施例6 ) 又，作爲設置上述各實施例的支持板20的放電容器 13，並不被限定於表示於第1圖至第5圖的外側管11與 內側管12在兩端被結合者，當然也可適用如第6圖所示 地兩側管11、12僅在一端被連結的形狀的放電容器。 在實施例1至實施例6中，支持板2 0是固定在外側 管1 1、內側管1 2的任一都可以，惟欲確實地固定在外側 管11的中央部附近時採用以下方法較理想。第7圖是表 示在實施例1至實施例6中，說明將支持板20精度優異 地固定在外側管1 1中央部附近的方法所用的圖式。 〈第一工程〉 在將支持板20固定在固定工模31的狀態下插入在會 成爲外側管11的第一管111內，並配置在第一石英玻璃 管111的端部110近旁〔參照第7(a)圖〕。又，支持板 20是環狀’如下述地可貫通內側管12，且具有適合於內 側管1 2的外徑的直徑的孔者。 〈第二工程〉 在（a)的狀態中’藉由車床一面旋轉固定工模31及第 一石英玻璃管111 一面以燃燒器烘焙第一石英玻璃管nl 中對應於支持板20的部位’俾將支持板2〇焊著於第一石 央玻璃管111〔參照桌7(b)圖〕。終了該焊著作業之後 ，由固定工模31解放支持板30。 -11 - 1328247 〈第三工程〉 對於第一石英玻璃111的端部no抵接第二石英玻璃 112，藉由車床一面旋轉兩者一面以燃燒器烘焙兩者的抵 接部分，使得第一石英玻璃管111與第二石英玻璃管112 被焊著而構成著外側管11。由此，可將支持板20精度優 異地固定在外側管1 1的中央部附近〔參照第7 ( c )圖〕 〇 又，對於在上述工程所製作的外側管1 1，貫通固定於 外側管1 1內周面的支持板20的孔般地插入內側管1 2之 後，外側管1 1與內側管1 2互相焊著在端部而完成放電容 器13。 又，利用採用上述方法，較長石英玻璃管並不一定筆 直而彎曲之故，因而成爲在複數部位必須進行修正成筆直 的作業’而較短的石英玻璃管是具較筆直之故，因而筆直 地連接複數該石英玻璃管，也具有簡化修正作業本身的優 點。 在上述各實施例中，支持板20是圖示設在一部位的 例子，惟並不被限定於此，當然因應於放電容器1 3的長 度也可作爲設置於數部位的構造。又，在上述各實施例中 ’外側電極1 1與內側電極1 2的構造是並不被限定於此些 者。例如對於外側電極1 1，除了圖示的網狀電極之外；將 大槪半圓筒狀者設在與光取出一側相反方向者也可以，而 對於內側電極1 2，例如線圈狀電極也可以。 -12- 1328247 如上所述地，藉由將缺口 21、2 6、2 7設在防止內側 管12的彎曲的支持板20的光取出方向，在該部分也形成 有在內外側電極間的放電，同時也不會遮斷來自其他的發 光部分的光線，而可防止照度降低或不均勻性者。 【圖式簡單說明】 第1圖是表示本發明的實施例；（a)是表示軸向斷 面圖；（b)是半徑方向斷面圖。 第2圖是表示其他實施例的半徑方向斷面圖。 第3圖是表示其他實施例的圖式；（a)是表示半徑 方向斷面圖；（b)是表示主要部分軸向斷面圖。 第4圖是表示其他實施例的半徑方向斷面圖。 第5圖是表示其他實施例的半徑方向斷面圖。 第6圖是表示其他實施例的軸向斷面圖。 第7(a)圖至第7(d)圖是表示用以說明在實施例1 至實施例6中，將支持板20精度優異地固定於外側管11 中央部附近的方法的圖式。 第8圖是表示習知例的圖式；（a)是表示軸向斷面 圖；（b)是表示半徑方向斷面圖。 第9圖是表示其他習知例的圖式。 【主要元件符號說明】 1 〇 :受激準分子燈 1 1 :外側管 -13- 1328247 1 2 :內側管 13 :放電容器 1 4 :側壁部 1 5 :外側電極 1 6 :內側電極 2 0 :支持板 21、 26 、 27 ：缺口 2 2、2 3 :焊著（黏接）部 24 :凹處 2 5 :小突起 -14-BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to an excimer lamp, and more particularly to an excimer lamp for discharging a dielectric material. [Prior Art] An excimer lamp is characterized by having a vacuum ultraviolet ray which strongly emits a single wavelength, and it is known as a discharge gas, for example, a vacuum ultraviolet light having a wavelength of 122 nm emitted from an excimer lamp of a fierce gas. The light irradiation device that mounts the lamp is an organic material or a surface-modified panel substrate that is used to decompose and remove the surface of the panel substrate that is attached to the liquid crystal panel display element. Fig. 8 is a view showing a conventional excimer lamp 50; (a) is a cross-sectional view showing the tube axis direction; and (b) is a cross-sectional view in the radial direction. The excimer lamp 50 is constituted by a discharge vessel 13 having a double cylindrical tube structure in which the outer tube 1 1 and the inner tube 1 2 made of a dielectric material of quartz glass are disposed. The end portion of the inner portion and the inner tube 12 is formed with a side wall portion 14 by being welded. An annular discharge space s is formed between the outer tube 1 1 and the inner tube 12, and a helium gas is sealed inside the gas as a discharge gas. On the outer surface of the outer tube 11, a mesh outer electrode 15 is provided, and on the inner side of the inner tube 12, an inner electrode 16 of a C shape having a tubular shape or a section having a notch in a portion is provided. The high-frequency voltage is applied between the outer electrode 15 and the inner electrode 16 to form an excimer in the discharge space S, and the excimer can be detached to emit the excimer light. In the recent years, the substrate of the display panel of the liquid crystal panel to be irradiated has become larger in size, and the excimer lamp has also been lengthened. For example, an excimer lamp having a total length of 800 mm is required. In the excimer lamp thus lengthened, when the structure shown in FIG. 8 is horizontally bundled in a bundling container and transported by rails or the like, a discharge vessel is generated due to impact or vibration given to the lamp. The inconvenience of rupture. In particular, the side wall portion 14 of the outer tube 1 1 and the inner tube 12 is welded or damaged. The damage of the discharge vessel 13 is only the inner tube 1 2 supported by the both ends of the discharge vessel 1 3, and if the impact is applied during the conveyance of the lamp, the center portion is bent, thereby causing stress to concentrate on the inside. The reason why the side wall portion 14 of the welded portion at both ends of the tube 1 2 is. As shown in Fig. 9, it is used as a means for solving the above problems. In the discharge vessel 13 of the double cylindrical tube structure in which the outer tube 1 1 and the inner tube 1 2 are disposed coaxially, a structure in which the support plate is disposed between the outer tube 11 and the inner tube 1 2 is proposed (see Patent Document 1). According to this configuration, the inner tube 12 is supported by the support plate 17 to prevent the bending, and the crack of the discharge capacitor 13 can be prevented. However, the support plate 17 is disposed in the light-emitting portion, so that a new problem is additionally generated. That is, the portion where the support plate 17 is disposed in the discharge space s is not formed with discharge, and the support plate 17 blocks the light from the light-emitting portion where the support plate 17 is not disposed, and cannot be taken out to the discharge vessel 13 outer. From -6 to 1328247, the amount of light on the surface of the workpiece immediately below the support plate 17 is lowered, which not only reduces the amount of light but also makes the uniformity insufficient. If a light-transmitting material is used as the support plate 17, it is unavoidable that discharge does not occur, and the light absorption by the support plate cannot be completely eliminated, so that the amount of light of the object surface directly under the support plate cannot be avoided. Deterioration and deterioration of uniformity. [Problem to be Solved by the Invention] An object of the present invention is to provide a processed surface directly under the support plate even when a support plate is provided to prevent cracks in the discharge vessel. The illuminance is reduced and the deterioration of uniformity is suppressed to a minimum of excimer lamps. In the excimer lamp of the present invention, the outer tube and the inner tube which are disposed coaxially are welded to each other at the end portion, and have a discharge vessel formed by forming an annular discharge space therebetween, and are disposed in the above-mentioned An outer surface of the outer tube and an outer electrode and an inner electrode of the inner surface of the inner tube are disposed between the outer tube and the inner tube, and a support plate for supporting the inner tube is disposed, and the discharge space is filled and excited. An excimer lamp formed by a molecular discharge gas is characterized in that the support plate has a notch in a light extraction direction in a cross section in a radial direction. In the excimer lamp of the present invention, the support plate for preventing the crack of the inner tube of the discharge vessel from being damaged by the crack of the discharge vessel is formed in the portion by providing a notch on the light extraction side. Discharge, not 1328247 will reduce the illuminance reduction of this part 'again' as a whole can also make the discharge stable and uniform. Further, the light from the other light-emitting portions is not blocked, and there is an effect that the amount of light is not reduced or the uniformity of deterioration is deteriorated. [Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to Figs. 1 to 6 . In the respective drawings, or the same reference numerals as in Figs. 8 and 9 denote the same members. (Embodiment 1) In Fig. 1, (a) is a cross-sectional view in the tube axis direction, and (b) is a cross-sectional view in the radial direction. A support plate 20 is provided between the outer tube 1 1 and the inner tube 1 2 in the discharge space S to be fitted to the inner tube; as shown in (b), in the direction of the support plate 20 toward the light extraction portion In the illustrated case, a notch 21 is formed downward. The notch 21 is cut as much as possible so that the inner tube 12 is supported by the outer tube 1 1 without hindering it. The support plate 20 is inserted into the inner tube, and a portion thereof is welded or bonded to the inner tube 12, and the movement of the periphery of the inner tube 12 for the rotation direction and the axial direction is restricted. (Embodiment 2) In Embodiment 2 of Fig. 2, the support plate 20 in which the notch 21 is formed is a part of the outer periphery thereof which is welded or bonded to the outer tube 11, and is the same as the above embodiment. 1 is the same. -8- 1328247 As shown in the above Embodiment 1 and Embodiment 2, the support plate 20 may be welded or bonded to the inner tube 12 at the inner periphery, or welded or bonded to the outer tube at the outer periphery. In any of the eleven types, it is preferable to fix the support plate 20 to the inner tube 12 as shown in the first embodiment, in consideration of the work of assembling the discharge vessel 13. That is, the mounting discharge vessel 13 is inserted into the outer tube 11 in a state where the support plate 20 is attached to the inner tube 12, and is joined by joining the ends, so that the support plate 20 is fixed. In the inner tube 12, the insertion into the outer tube 1 1 can be smoothly performed. (Embodiment 3) In Embodiment 3 of Fig. 3, a recess 24 is formed in the outer tube 1 1 at a position below the notch 21 of the support plate 20. After the recess 24 is baked by the burner to soften the outer tube 1 1 , the push rod is formed. At this time, the recess 24 acts to raise the support plate 20 toward the upper side in the discharge space s, i.e., toward the upper inner surface of the outer tube 1 1 , and pushes the support plate 20 toward the outer tube 1 1 . This recess 24 is an action that restricts the support plate 20 from the rotation direction. Further, a small protrusion 25 formed on both sides of the support plate 20 is formed in the inner tube 12, and the movement of the support plate 20 in the axial direction of the inner tube 12 is restricted. The small projections 25 are formed by welding the inner glass tube 12 by heating and softening the quartz glass rod. In the third embodiment, the recess 24 is used to abut the support plate 20 against the outer tube 11, so that the support plate-9-1328247 20 and the outer tube 1 1 can be prevented from being interposed therebetween by vibration during transportation or the like. The small gaps collide, and the corners of the support plate 20, particularly the outer periphery, can be prevented. (Embodiment 4) In Embodiment 4 shown in Fig. 4, the notch 26 in the light extraction direction is formed to be larger than that of the first to third embodiments, so that a part of the inner tube 12 is exposed from the notch 26. As described above, when the light extraction direction is downward, the notch 26 is left as long as the support plate 20 covers the circumference of the inner tube 12 by 180 degrees or more, and is cut in a range in which the function of supporting the inner tube 12 is left. (Embodiment 5) With respect to the above-described Embodiments 1 to 4, the fifth embodiment of Fig. 5 is an example in which the light extraction direction is above. In the case of this embodiment, the support plate 20 is in a form to support the inner tube 12 from below, and the notch structure of the support plate 20 is cut out to the inner tube in addition to the configurations of the above-described first to fourth embodiments. It is also possible to support within the range of less than 180 degrees around 12. Thereby, the notch 27 is cuttable to be larger than in the case of Embodiments 1 to 4, so that the discharge in the space above the support plate 20 is generated approximately the same as the other portions without the support plate, and the degree of shading can be further reduced. . Further, in the fourth embodiment and the fifth embodiment, the means for restricting the movement of the support plate 20 in the rotational direction and the axial direction may of course be the same as those of the first to third embodiments. -10- 1328247 (Embodiment 6) Further, the discharge vessel 13 as the support plate 20 of each of the above embodiments is not limited to the outer tube 11 and the inner tube 12 shown in Figs. 1 to 5; As the end-coupled person, it is of course also possible to apply a discharge vessel of a shape in which the both side tubes 11, 12 are connected at one end as shown in Fig. 6. In the first to sixth embodiments, the support plate 20 may be fixed to either the outer tube 1 1 or the inner tube 12, and the following method may be used to securely fix the vicinity of the central portion of the outer tube 11. ideal. Fig. 7 is a view showing a method for fixing the support plate 20 to the vicinity of the center portion of the outer tube 1 1 with excellent precision in the first to sixth embodiments. <First Engineering> The support plate 20 is inserted into the first tube 111 which will become the outer tube 11 in a state where the support plate 20 is fixed to the fixed mold 31, and is disposed in the vicinity of the end portion 110 of the first quartz glass tube 111. 7(a) Figure]. Further, the support plate 20 is a ring-shaped hole that penetrates the inner tube 12 as follows and has a diameter suitable for the outer diameter of the inner tube 1 2 . <Second Project> In the state of (a), one side of the first quartz glass tube n1 corresponding to the support plate 20 is baked with a burner by rotating the fixed mold 31 and the first quartz glass tube 111 on one side of the lathe. The support plate 2 is welded to the first stone central glass tube 111 (refer to the table 7 (b)). After the welding work is finished, the support plate 30 is liberated by the fixed mold 31. -11 - 1328247 <Third Project> The second quartz glass 112 is abutted against the end portion of the first quartz glass 111, and the first quartz is baked by the burner while rotating both sides of the lathe. The glass tube 111 and the second quartz glass tube 112 are welded to constitute the outer tube 11. Thereby, the support plate 20 can be fixed to the vicinity of the center portion of the outer tube 1 1 with high precision (see Fig. 7 (c)). Further, the outer tube 1 1 manufactured in the above-mentioned project is penetrated and fixed to the outer tube. After the inner circumferential tube 12 is inserted into the inner peripheral surface of the inner peripheral surface of the support plate 20, the outer tube 1 1 and the inner tube 12 are welded to each other at the ends to complete the discharge vessel 13. Moreover, by using the above method, the longer quartz glass tube is not necessarily straight and curved, so that it must be corrected to be straight in a plurality of parts. The shorter quartz glass tube is straight and straight. Connecting the plurality of quartz glass tubes to the ground also has the advantage of simplifying the correction operation itself. In the above embodiments, the support plate 20 is exemplified as a portion, but is not limited thereto. Of course, the length of the discharge vessel 13 can be set as a structure provided in a plurality of places. Further, in the above embodiments, the configurations of the outer electrode 1 1 and the inner electrode 1 2 are not limited thereto. For example, the outer electrode 1 1 may be provided in addition to the mesh electrode shown in the figure; the large semi-cylindrical shape may be provided in the opposite direction to the light extraction side, and the inner electrode 12 may be, for example, a coil electrode. . -12- 1328247 As described above, by providing the notches 21, 26, and 27 in the light extraction direction of the support plate 20 for preventing the bending of the inner tube 12, a discharge between the inner and outer electrodes is also formed in this portion. At the same time, it will not block the light from other light-emitting parts, and it can prevent the illuminance from decreasing or uneven. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing an embodiment of the present invention; (a) is an axial sectional view; and (b) is a radial sectional view. Fig. 2 is a cross-sectional view showing the radial direction of another embodiment. Fig. 3 is a view showing another embodiment; (a) is a cross-sectional view in the radial direction; and (b) is an axial sectional view showing a main portion. Fig. 4 is a cross-sectional view showing the radial direction of another embodiment. Fig. 5 is a cross-sectional view showing the radial direction of another embodiment. Fig. 6 is an axial sectional view showing another embodiment. 7(a) to 7(d) are views for explaining a method of fixing the support plate 20 to the vicinity of the center portion of the outer tube 11 with excellent precision in the first to sixth embodiments. Fig. 8 is a view showing a conventional example; (a) is an axial sectional view; and (b) is a radial sectional view. Fig. 9 is a diagram showing other conventional examples. [Explanation of main component symbols] 1 〇: excimer lamp 1 1 : outer tube-13 - 1328247 1 2 : inner tube 13 : discharge vessel 1 4 : side wall portion 1 5 : outer electrode 1 6 : inner electrode 2 0 : Support plates 21, 26, 27: notch 2 2, 2 3: welded (bonded) portion 24: recess 2 5: small protrusion - 14-