1329335 • (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於一種受激準分子燈，更具體 —種圓筒狀外側管及圓筒狀內側管配置在同軸 造的受激準分子燈。 【先前技術】 現在’例如在液晶顯示面的玻璃基板的紫 致的洗淨工程’或是在光化學反應的紫外線照 • 利用將波長200nm以下的真空紫外光照射在被 . 法’作爲照射真空紫外光的裝置，使用藉由受 電形成受激準分子，將利用從該受激準分子所 ' 受激準分子燈具備作爲光源所成者。 例如參照第1圖來說明，有一種受激準 具有，如石英玻璃所成的圓筒狀外側管1 2，及 1 2內具有沿著其管軸所配置的比該外側管1 2 的外徑的如石英玻璃所成的圓筒狀內側管1 3， 與內側管1 3在兩端部被熔融接合而在外側管】 1 3之間具備形成有環狀放電空間S成的雙重 電容器1 1 ;例如金屬絲網等的導電性材料所成 中一方的電極15密接設於外側管12的外周面 板所成的另—方的電極1 6密接設於內側管1 3 在放電空間S內’塡充有藉由如氙氣體等的受 電形成受激準分子的放電用氣體所構成（參照 而言，關於 上的雙重構 外線照射所 射工程等， 處理體的方 激準分子放 放射的光的 分子燈者， 在該外側管 的內徑還小 外側管12 2與內側管 管構造的放 的網狀的其 ，而且如銘 的內周面， 激準分子放 例如專利文 -5- (2) (2)1329335 獻1及專利文獻2)。 如此又激準分子燈的放電容器，是如下述地可得到。 亦即，9圖所示地，準備各該厚度大小大約同等，而 外k大小不相同的兩支圓筒狀原材料管7〇，71，將構成內 側管的其中—方的原材料管71的兩端部朝其徑方向外方 彎曲而形成彎曲部分72’從管軸方向外方側藉由適當的加 熱手段進行加熱兩支原材料管7〇，的兩端部使之熔融 而接合構成外側管的另一方原材料管7〇的內周面7〇 a與 構成內側管的其中一方原材料管71的彎曲部分72的前端 面7 2 A ’由此’得到在外側管的內周面與內側管的外周面 之間具有作成密閉狀態的環狀放電空間的放電容器。在此 ’構成外側管的另一方原料管7〇的厚度大小tl，及構成 內側s的其中一方原材料管71的厚度大小12，是例如作 成大約同等大小。 近年來’如使用作爲液晶顯示面板的玻璃基板的洗淨 裝置的光源的受激準分子燈中，隨著玻璃基板的大型化能 夠得到大面積的光放射領域般地作成較長化，被要求如全 長8 00mm以上者。 在如此較長的受激準分子燈中，從受激準分子燈整體 的機械性強度及外側管與內側管的接合強度的觀點，必須 作成外側管厚度較大，內側管厚度比外側管厚度還小的構 成。對於將內側管的厚度大小作成較小的理由具體地加以 說明如下，爲了將受激準分子燈作成具有充分的機械性強 度者，若將外側管及內側管雙方作成厚度較大者時，則作 -6- (3) (3)1329335 成內側管僅藉由與外側管的接合部分所支持的構造之故， 因而藉由其自重會降低接合部的強度。 又，並不被限定於此些情形，在外側管的厚度大小與 內側管的厚度大不相同的狀態下作成須構成放電容器的情 形也不少，例如較短者的情形，作成內側管的厚度大小較 大，外側管的厚度大小比內側管厚度較小的構成。該理由 是藉由減小外側管的厚度大小，使得光穿透率變高，可得 到高光輸出。 然而，接合厚度大小互相地不相同的外側管與內側管 之際，接合部的加熱部分的外側管與內側管的熱容量大小 不相同之故，因而無法均勻地可加熱兩者，而無法得到充 分的接合強度，或是容易產生變形或歪斜發生在接合部等 的缺點問題，而在搬運或安裝受激準分子燈時，或是點燈 初期，有起因於接合部的構造上的缺點問題而有破損放電 容器的缺點問題。 另一方面，若能在受激準分子燈整體上確保充分的機 械性強度，則將外側管及內側管作成薄厚度較理想。該理 由是可抑制降低電氣性效率。 然後，如上述地，熔融接合外側管與內側管的厚度差 較大時，薄厚度者被過度地熔融之故，因而有很難進行接 合的情形。 如上述的缺點問題，是在構成放電容器的外側管與內 側管中較厚者的厚度大小成爲較薄者的厚度大小的如1.5 倍以上的構成的情形等會顯著地產生。 (4) (4)1329335 專利文獻1 :日本專利第3 2 5 2 6 7 6號公報 專利文獻2:日本專利第2951139號公報 【發明內容】 本發明是依據如上事情而創作者，其目的是在提供一 種受激準分子燈，屬於在中央領域部分的厚度互相不相同 的外側管及內側管所致的雙重管構造的受激準分子燈，可 將外側管與內側管的接合部構成作爲具有充分高的可靠性 者，並在搬運或安裝燈時，或是點燈初期時確實地可防止 破損。 本發明的受激準分子燈，屬於具備分別由玻璃所成的 外側管與內側管配置在同軸上，成爲在兩端部被熔融並被 接合的雙重管構造的放電容器，在外側管外表面設有其中 一方的電極，而且在內側管內表面設有另一方的電極，藉 由受激準分子放電形成受激準分子的放電用氣體塡充於形 成在該外側管與該內側管之間的放電空間內的受激準分子 燈，其特徵爲： 外側管與內側管是管軸方向的中央領域部分的厚度互 相不相同者，接合部分的外側管的厚度與內側管的厚度大 約同等大小。 本發明的受激準分子燈中，外側管與內側管在兩端部 藉由玻璃所成的接合構件所接合；外側管與接合構件的接 合部分的外側管厚度及接合部分的厚度大約同等大小，且 接合構件與內側管的接合部分的接合構件的厚度與內側管 -8- (5) (5)1329335 厚度大約同等大小較理想。 又，本發明的受激準分子燈中，外側管及內側管中較 厚者的中央領域部分的厚度大小，作成較薄者的中央領域 部分的厚度大小的1.5倍以上的構成較理想。 又，外側管與內側管中的較薄者的中央領域部分的厚 度大小作爲0.5至1.0mm的構成較理想。 依照本發明的受激準分子燈，將外側管與內側管在兩 端部進行加熱熔融而加以接合之際，藉由加熱部分的外側 管與內側管的厚度作成大約同等大小，該加熱部分的外側 管與內側管的熱容量大小成爲大約相等而可均勻地加熱外 側管與內側管之故，因而可確實地抑制發生變形或歪斜而 可得到穩定又牢固的接合狀態，結果可將外側管與內側管 的接合部作成具有充分高可靠性的構成，因此，搬運或安 裝受激準分子燈時，或是點燈初期時，可確實地防止放電 容器破損。 又，依照本發明的受激準分子燈，藉由接合構件接合 外側管與內側管所成的構成者中，外側管與接合構件的接 合部分的外側管與接合構件的厚度作成大約同等大小，同 時藉由接合構件與內側管的接合部分的接合構件與內側管 的厚度作成大約同等大小，使得加熱部分的兩個構件的熱 容量大小大約相等，可均勻地加熱該兩構件之故，因而可 確實地抑制發生變形或歪斜而可得到穩定又牢固的接合狀 態，結果可將外側管與內側管的接合部作成具有充分高可 靠性的構成’因此，搬運或安裝受激準分子燈時，或是點 -9- (6) (6)1329335 燈初期時，可確實地防止放電容器破損。 【實施方式】 以下，參照圖式詳述本發明。 (第一實施形態） 第1圖是表示本發明的受激準分子燈的一例的構成的 說明用斷面圖： 該受激準分子燈1 0是如石英玻璃所構成，具有，在 管軸方向中具有均勻大小厚度的圓筒狀外側管12，及在該 外側管1 2內沿著其管軸所配置的具有比該外側管1 2的內 徑還小的外徑而如石英玻璃所成的圓筒狀內側管1 3 ;具備 外側管1 2與內側管1 3在兩端部被熔融接合所成的雙重管 構造的放電容器1 1。 構成放電容器11的內側管13是具有兩端部朝徑方向 外方擴大延伸般地彎曲所形成的彎曲部分13A者，藉由該 內側管〗3的彎曲部分1 3 A與外側管1 2相接合而由該彎曲 部分13A構成端壁14，由此，在外側管12的內周面與內 側管1 3的外周面之間，形成有氣密地被封閉的環狀放電 空間S。 在構成放電容器11的外側管12，密接於其外周面， 設有如金屬絲網等的導電性材料所成的網狀的其中一方電 極[以下’稱爲「外部電極」]1 5，而在內側管1 3，密接 於其內周面’設有如鋁所構成的管狀或是在斷面局部地具 -10- (7) 1329335 有缺口的槪略C形狀（槽狀）的另一方電極 內部電極」）16。又，外部電極15及內部電 接於如高頻電源所成的電源裝置（未圖示） 在放電空間S內塡充著藉由發生在外部 部電極16之間的受激準分子放電形成受激 氣體等的放電用氣體。 在該受激準分子燈10中，構成可有效 準分子燈10所放射的受激準分子光的受激 領域的中央領域部分的外側管1 2的厚度及内 度作成互相不相同的大小，較厚者的厚度作 度的1 · 5倍以上大小》在本實施例中，外側 大小11，作成比內側管1 3的厚度t2還大的） xt2)[參照第2圖]。 又，較薄者的厚度大小（在本實施例中 的厚度大小t2)，是作爲如0.5至1.0mm。 又，在以下，除了特別加以說明之外， 是指受激準分子燈10的中央領域部分的厚度 又，外側管1 2與內側管1 3的接合部女 的厚度與內側管1 3的厚度是作成大約同等 言，參照第2圖加以說明，若將外側管1 2 大小作爲11，並將內側管1 3的彎曲部分的 小作爲t3，作成滿足下述式（1)及式（2) 態。 (以下稱爲「 i極1 6是被連 〇 電極15與內 準分子的如氙 地利用從受激 準分子光放射 丨側管1 3的厚 成較薄者的厚 管12的厚度 伏態（11 2 1 · 5 1爲內側管1 3 所謂「厚度」 〇 h的外側管1 2 大小。具體而 的端部的厚度 端部的厚度大 的任一方的狀 -11 - (8) 1329335 式（1) I tl-t3 I ^ 0.2xtl 式（2) I tl-t3 I ^ 0.2xt3 上述構成的受激準分子燈1 0是如下述地能夠加以製 造。 亦即，如第2圖所示地，首先，將構成外端朝徑方向 外方擴大延伸兩端部地喇叭狀地加工形成彎曲部分丨3 A的 內側管13的圓筒狀內側管構成用原材料管2〇,插入在構 成具有比該內側管構成用原材料管20的外徑還大內徑的 外側管1 2的圓筒狀外側管構成用原材料管2 1的內部而配 置在同軸上’由管軸方向外方側藉由如燃燒器等加熱手段 25進行加熱’焊者外側管構成用原材料管21的內周面 21A與內側管構成用原材料管20的彎曲部分13a的前端 面20A，由此，得到管狀放電空間8形成在外側管〗2與 內側管13之間的雙重管構造的放電容器1 i。在此，內側 管構成用原材料管20是如中央領域部分的厚度大小爲t2 ，而連續於該中央領域部分的彎曲部分13A隨著朝外端， 厚度變大而接合部分的外端部的厚度大小爲t3。 加熱溶融外側管構成用原材料管2 1及內側管構成用 原材料管20之際，從藉由加熱手段25被加熱的加熱部分 Η的熱容量大小的均勻化的觀點，加熱部分H的內側管構 成用原材料管的長度L，作爲外側管構成用原材料管21 的厚度大小tl的100%以上的大小較理想。由此，在將外 側管構成用原材料管2 1與內側管構成用原材料管2〇得到 -12- (9) (9)1329335 均勻加熱狀態的狀態下，可施以熔融接合。 又，將適當的放電用氣體封入在如上述所得到的放電 容器11的放電空間S內，同時藉由將外部電極15及內部 電極16配設在所定位置，得到表示於第1圖的受激準分 子燈1 0» 如此，依照上述構成的受激準分子燈10，將外側管 12與內側管13在兩端部進行加熱熔融而加以接合之際， 藉由加熱手段2 5所加熱的加熱部分Η的外側管構成用原 材料管21的厚度tl與內側管構成用原材料管20的彎曲 部分1 3 A的厚度大小13作成大約同等大小，可將該加熱 部分Η的外側管構成用原材料管21與內側管構成用原材 料管2 0的熱容量大小作成大約相等狀態施以均勻地熔融 加熱之故，因而可確實地抑制發生變形或歪斜而可得到穩 定又牢固的接合狀態，結果可將外側管1 2與內側管1 3的 接合部作成具有充分高可靠性的構成，因此搬運或安裝受 激準分子燈1 〇時，或是點燈初期時，可確實地防止放電 容器1 1破損。 在以上，說明了對於具備外側管的厚度大小比比內側 管的厚度大小還大的構成的放電容器所成者，惟對於具備 內側管的厚度大小比外側管的厚度大小還大的構成的放電 容器所成者也可得到同樣的效果。 尤其是，本發明是在外側管與內側管中的較薄者的厚 度大小爲〇·5至1.0mm，而較厚者的厚度大小爲較薄者的 厚度大小的1 .5倍以上的構成者，例如在受激準分子燈1 〇 -13- (10) (10)1329335 全長爲1000mm以上的構成者等，極有用，可將外側管與 內側管的接合部作成具有充分高的可靠性者。 <第2實施形態> 本發明的第2實施形態的受激準分子燈，是外側管 與內側管在兩端部藉由另外接合構件所接合而構成有放電 容器所成者’其他的基本構成是與表示於第1圖者同樣者 〇 具體而言，如第3圖所示地，該第2實施形態的受 激準分子燈的放電容器’是在管軸方向分別具均勻大小厚 度的外側管構成用原材料管3 1及內側管構成用原材料管 3〇，藉由與如外側管構成用原材料管31及內側管構成用 原材料管3 0相同材質如石英玻璃所成的接合構件3 5接合 兩端部所成的雙重管構造者。在該實施例中，外側管構成 用原材料管3 1的厚度大小11作成比內側管構成用原材料 管30的厚度大小t2還大的狀態（tlgl.5xt2) » 接合構件35是具有一端部朝徑方向外方擴大延伸般 被彎曲的彎曲部分36，及經由該彎曲部分36與段部連續 的直管狀部分37的大約短圓筒狀者；與外側管構成用原 材料管31接合而構成端壁的彎曲部分36的端部的厚度大 小t4作成與外側管構成用原材料管3 1的厚度大小11大 約同等大小，且與內側管構成用原材料管30接合的直管 狀部分37的端部的厚度大小t5作成與內側管構成用原材 料管30的厚度大小t2大約同等大小。 -14- 1329335 - (11) 亦即’彎曲部分3 6端部的厚度與外側管構成用原材 料管3 1的厚度的厚度差| t丨-t4 | ，作成外側管構成用原 材料管31的厚度大小tl或彎曲部分36端部的厚度大小 ί4的20%以下的大小，同時直管狀部分37端部的厚度與 內側管構成用原材料管30的厚度的厚度差| tl-t5| ，作 成內側管構成用原材料管30的厚度大小t2或是直管狀部 分3 7端部的厚度大小15的2 0 %以下的大小。1329335 • (1) IX. INSTRUCTIONS OF THE INVENTION [Technical Field] The present invention relates to an excimer lamp, and more particularly to a cylindrical outer tube and a cylindrical inner tube disposed in a coaxially-made excitation Molecular lamp. [Prior Art] Now, for example, the purple-purifying process of a glass substrate on a liquid crystal display surface or ultraviolet light in a photochemical reaction is irradiated with vacuum ultraviolet light having a wavelength of 200 nm or less. In the ultraviolet light device, an excimer is formed by receiving electricity, and an excimer lamp from the excimer is used as a light source. For example, referring to Fig. 1, there is an excimer having a cylindrical outer tube 12 formed of quartz glass, and a portion having a diameter along the tube axis of the outer tube 1 2 A cylindrical inner tube 13 made of quartz glass having a diameter is integrally joined to the inner tube 13 at both end portions, and a double capacitor 1 formed with an annular discharge space S is formed between the outer tubes 1-3. 1. One of the conductive materials such as a wire mesh is adhered to the outer peripheral surface of the outer tube 12, and the other electrode 16 is closely attached to the inner tube 13 in the discharge space S. It is composed of a discharge gas that forms an excimer by receiving electricity such as a helium gas (see, for example, the above-mentioned double-reconstructed external line irradiation project, etc., the light emitted by the square excimer of the processed body The molecular lamp holder, the inner diameter of the outer tube is also small, the outer tube 12 2 and the inner tube tube structure are placed in the form of a mesh, and as the inner peripheral surface of the inscription, the excimer is placed, for example, Patent-5-( 2) (2) 1329335 1 and patent document 2). The discharge vessel of the molecular lamp thus obtained is obtained as follows. That is, as shown in Fig. 9, two cylindrical raw material tubes 7, 71 which are equal in thickness and different in outer k size are prepared, and two of the raw material tubes 71 which constitute the inner tube are formed. The end portion is bent outward in the radial direction to form a curved portion 72'. The two raw material tubes 7 are heated from the outer side in the tube axis direction by an appropriate heating means, and both end portions are melted and joined to form the outer tube. The inner peripheral surface 7〇a of the other raw material pipe 7〇 and the front end surface 7 2 A′ of the curved portion 72 of one of the raw material pipes 71 constituting the inner pipe are obtained from the inner circumferential surface of the outer pipe and the outer circumference of the inner pipe. A discharge vessel having an annular discharge space in a sealed state is provided between the faces. Here, the thickness t1 of the other raw material pipe 7〇 constituting the outer pipe and the thickness 12 of one of the raw material pipes 71 constituting the inner side s are, for example, approximately the same size. In recent years, an excimer lamp that uses a light source of a cleaning device for a glass substrate of a liquid crystal display panel is required to be formed in a large-area light radiation field as the size of the glass substrate is increased. Such as the total length of 800 mm or more. In such a long excimer lamp, from the viewpoint of the mechanical strength of the excimer lamp as a whole and the joint strength between the outer tube and the inner tube, it is necessary to make the outer tube thickness larger, and the inner tube thickness is larger than the outer tube thickness. Still small composition. The reason why the thickness of the inner tube is made small is specifically described as follows. In order to make the excimer lamp have sufficient mechanical strength, if both the outer tube and the inner tube are made thicker, -6-(3) (3) 1329335 The inner tube is only supported by the joint portion with the outer tube, so that the strength of the joint is reduced by its own weight. Further, it is not limited to these cases, and in the state where the thickness of the outer tube is different from the thickness of the inner tube, it is also necessary to form a discharge vessel. For example, in the case of a shorter one, the inner tube is formed. The thickness is large, and the thickness of the outer tube is smaller than the thickness of the inner tube. The reason is that by reducing the thickness of the outer tube, the light transmittance is made high, and a high light output can be obtained. However, when the outer tube and the inner tube having different thicknesses are joined to each other, the heat capacity of the outer tube and the inner tube of the heating portion of the joint portion are not the same, so that it is impossible to uniformly heat both of them, and it is not possible to obtain sufficient The joint strength, or the problem that the deformation or the skew is likely to occur at the joint portion, and the like, and when the excimer lamp is transported or mounted, or at the initial stage of lighting, there is a problem due to the structural disadvantage of the joint portion. There are problems with the disadvantages of broken discharge vessels. On the other hand, if sufficient mechanical strength can be ensured as a whole in the excimer lamp, it is preferable to make the outer tube and the inner tube thin. The reason is to suppress the reduction of electrical efficiency. Then, as described above, when the difference in thickness between the outer tube and the inner tube of the fusion bonding is large, the thin thickness is excessively melted, so that it is difficult to perform the bonding. The above-mentioned problem is remarkably caused in the case where the thickness of the thicker outer tube and the inner tube is larger than the thickness of the thinner one, which is 1.5 times or more. (4) (4) 1329335 Patent Document 1: Japanese Patent No. 3 2 5 2 6 7 6 Patent Document 2: Japanese Patent No. 2951139 SUMMARY OF THE INVENTION The present invention is based on the above, and its object is Provided is an excimer lamp which is an excimer lamp which is a double tube structure which is caused by an outer tube and an inner tube having mutually different thicknesses in a central portion, and can constitute a joint portion of the outer tube and the inner tube as It has a sufficiently high reliability and can be surely prevented from being damaged when carrying or installing a lamp or at the beginning of lighting. The excimer lamp of the present invention belongs to a discharge vessel having a double tube structure in which an outer tube and an inner tube each formed of glass are disposed coaxially and are melted and joined at both end portions, and the outer tube outer surface is provided. One of the electrodes is provided, and the other electrode is provided on the inner surface of the inner tube, and the discharge gas for forming the excimer by the excimer discharge is filled between the outer tube and the inner tube. The excimer lamp in the discharge space is characterized in that: the outer tube and the inner tube are different in thickness from each other in the central portion of the tube axis direction, and the thickness of the outer tube of the joint portion is approximately the same as the thickness of the inner tube. . In the excimer lamp of the present invention, the outer tube and the inner tube are joined at the both end portions by a joint member made of glass; the outer tube thickness of the joint portion of the outer tube and the joint member and the thickness of the joint portion are approximately the same size. And the thickness of the joint member of the joint portion of the joint member and the inner tube is approximately the same as the thickness of the inner tube - 8 - (5) (5) 1329335. Further, in the excimer lamp of the present invention, the thickness of the central portion of the outer tube and the inner tube is preferably 1.5 times or more the thickness of the central portion of the thinner portion. Further, the thickness of the central portion of the thinner outer tube and the inner tube is preferably 0.5 to 1.0 mm. According to the excimer lamp of the present invention, when the outer tube and the inner tube are heat-melted and joined at both end portions, the thickness of the outer tube and the inner tube of the heating portion is approximately the same size, and the heating portion is The heat capacity of the outer tube and the inner tube is approximately equal, and the outer tube and the inner tube can be uniformly heated, so that deformation or skew can be surely suppressed to obtain a stable and firm joint state, and as a result, the outer tube and the inner side can be obtained. Since the joint portion of the tube is formed to have sufficiently high reliability, it is possible to reliably prevent the discharge vessel from being damaged when the excimer lamp is transported or attached, or when the lamp is initially turned on. Further, in the excimer lamp according to the present invention, in the member in which the outer tube and the inner tube are joined by the joint member, the thickness of the outer tube and the joint member of the joint portion of the outer tube and the joint member is approximately the same size. At the same time, the thickness of the joint member of the joint portion of the joint member and the inner tube is approximately equal to the thickness of the inner tube, so that the heat capacity of the two members of the heating portion is approximately equal, and the two members can be uniformly heated, thereby ensuring The deformation and the skew are suppressed to obtain a stable and firm joint state, and as a result, the joint portion between the outer tube and the inner tube can be formed to have a sufficiently high reliability. Therefore, when the excimer lamp is transported or mounted, Point-9- (6) (6) 1329335 When the lamp is initially installed, the discharge vessel can be reliably prevented from being damaged. [Embodiment] Hereinafter, the present invention will be described in detail with reference to the drawings. (First Embodiment) Fig. 1 is a cross-sectional view showing the configuration of an example of an excimer lamp of the present invention. The excimer lamp 10 is made of quartz glass and has a tube axis. a cylindrical outer tube 12 having a uniform thickness in the direction, and an outer diameter disposed along the tube axis of the outer tube 12 having a smaller inner diameter than the outer tube 12, such as quartz glass The cylindrical inner tube 13 is formed; and the discharge tube 1 1 having a double tube structure in which the outer tube 1 2 and the inner tube 13 are fusion-bonded at both end portions is provided. The inner tube 13 constituting the discharge vessel 11 is a curved portion 13A formed by bending both end portions outwardly in the radial direction, and the curved portion 13 A of the inner tube 3 is connected to the outer tube 1 2 The end wall 14 is formed by the curved portion 13A by joining, whereby an annular discharge space S that is hermetically sealed is formed between the inner circumferential surface of the outer tube 12 and the outer circumferential surface of the inner tube 13 . The outer tube 12 constituting the discharge vessel 11 is in close contact with the outer peripheral surface thereof, and one of the meshes (hereinafter referred to as "external electrode") 15 made of a conductive material such as a wire mesh is provided. The inner tube 13 is intimately attached to the inner peripheral surface thereof. The inside of the other electrode is formed by a tubular shape made of aluminum or a slightly C-shaped (grooved) shape having a gap of -10 (7) 1329335 partially in cross section. Electrode") 16. Further, the external electrode 15 and the internal power source device (not shown) electrically connected to the high-frequency power source are filled in the discharge space S by the excimer discharge generated between the external portion electrodes 16 A gas for discharge such as a gas. In the excimer lamp 10, the thickness and the internal degree of the outer tube 1 2 in the central region of the excited region of the excimer light emitted by the effective excimer lamp 10 are different from each other. In the present embodiment, the outer size 11 is larger than the thickness t2 of the inner tube 13 (xt2) [refer to Fig. 2]. Further, the thickness of the thinner (thickness t2 in the present embodiment) is as, for example, 0.5 to 1.0 mm. Further, in the following, unless otherwise specified, the thickness of the central portion of the excimer lamp 10, the thickness of the joint portion of the outer tube 1 2 and the inner tube 13 and the thickness of the inner tube 13 The description is made with reference to Fig. 2, and the size of the outer tube 1 2 is 11 and the small portion of the curved portion of the inner tube 13 is t3, and the following equations (1) and (2) are satisfied. state. (hereinafter referred to as "i pole 16" is the thickness of the thick tube 12 which is thinner than the thickness of the excimer light-emitting side tube 13 by the tantalum electrode 15 and the inner excimer. (11 2 1 · 5 1 is the size of the outer tube 1 2 of the inner tube 1 3 "thickness" 〇h. The specific thickness of the end portion of the end portion is large -11 - (8) 1329335 (1) I tl-t3 I ^ 0.2xtl (2) I tl-t3 I ^ 0.2xt3 The excimer lamp 10 having the above configuration can be manufactured as follows. That is, as shown in Fig. 2 First, the cylindrical inner tube constituting material tube 2 is formed by forming the inner tube 13 of the curved portion 丨3 A in a flared shape in which the outer end is expanded outward in the radial direction. The cylindrical outer tube 1 of the outer tube 1 2 having a larger inner diameter than the outer diameter of the inner tube forming material tube 20 is disposed on the coaxial side of the outer material tube 2 1 by the outer side of the tube axis direction. The heating means 25 such as a burner heats the inner peripheral surface 21A of the raw material tube 21 for the outer surface of the welder and the raw material for the inner tube. The front end surface 20A of the curved portion 13a of the tube 20, thereby obtaining the discharge tube 1 i of the double tube structure in which the tubular discharge space 8 is formed between the outer tube 2 and the inner tube 13. Here, the inner tube constitutes a raw material tube 20 is such that the thickness of the central portion is t2, and the curved portion 13A continuous to the central portion is increased in thickness toward the outer end, and the thickness of the outer end portion of the joined portion is t3. When the raw material pipe 2 1 and the inner pipe are used as the raw material pipe 20, the length L of the inner pipe constituting raw material pipe of the heating portion H is equalized from the viewpoint of the uniformity of the heat capacity of the heating portion 加热 heated by the heating means 25 It is preferable that the thickness of the outer tube constituting material tube 21 is 100% or more. Therefore, the outer tube constituting material tube 2 1 and the inner tube constituting material tube 2 are obtained -12- (9) (9) 1329335 In a state of uniform heating, fusion bonding may be performed. Further, an appropriate discharge gas is sealed in the discharge space S of the discharge vessel 11 obtained as described above, The external electrode 15 and the internal electrode 16 are disposed at predetermined positions, and the excimer lamp 10 shown in Fig. 1 is obtained. Thus, according to the excimer lamp 10 having the above configuration, the outer tube 12 and the inner tube 13 are placed. When the both end portions are heated and melted and joined, the outer tube of the heating portion 加热 heated by the heating means 25 is formed to have the thickness t1 of the material tube 21 and the curved portion 1 3 A of the inner tube constituting material tube 20 The thickness 13 is approximately the same size, and the outer tube forming material tube 21 and the inner tube forming material tube 20 of the heating portion can be uniformly heated and heated in an approximately equal state, so that it can be surely The deformation or the skew is suppressed to obtain a stable and firm joint state, and as a result, the joint portion between the outer tube 1 2 and the inner tube 13 can be formed to have a sufficiently high reliability, so that the excimer lamp 1 is transported or mounted. In the case of 〇, or at the beginning of lighting, the discharge vessel 1 1 can be reliably prevented from being damaged. In the above, a discharge vessel having a configuration in which the thickness of the outer tube is larger than the thickness of the inner tube is described, but a discharge vessel having a thickness larger than the thickness of the outer tube is provided. The same effect can be obtained by the winner. In particular, in the present invention, the thickness of the thinner one of the outer tube and the inner tube is 〇·5 to 1.0 mm, and the thickness of the thicker one is 1.5 times or more of the thickness of the thinner one. For example, in the case where the excimer lamp 1 〇-13-(10) (10)1329335 has a total length of 1000 mm or more, it is extremely useful, and the joint portion between the outer tube and the inner tube can be sufficiently reliable. By. <Second Embodiment> The excimer lamp according to the second embodiment of the present invention is a case where the outer tube and the inner tube are joined to each other at the both end portions by a separate joining member. The basic configuration is the same as that shown in Fig. 1. Specifically, as shown in Fig. 3, the discharge vessel of the excimer lamp of the second embodiment has a uniform thickness in the tube axis direction. The outer tube constituting material tube 3 1 and the inner tube constituting material tube 3 are formed by the same material as the outer tube forming material tube 31 and the inner tube forming material tube 30, such as quartz glass. 5 joint double pipe structure formed by the two ends. In this embodiment, the thickness 11 of the outer tube constituting material tube 31 is made larger than the thickness t2 of the inner tube constituting material tube 30 (tlgl.5xt2) » the joint member 35 has one end toward the diameter The outer side is expanded to extend the curved portion 36 which is curved, and the short cylindrical portion of the straight tubular portion 37 which is continuous with the segment via the curved portion 36; and the outer tube is formed by the raw material tube 31 to form the end wall. The thickness t4 of the end portion of the curved portion 36 is approximately equal to the thickness 11 of the outer tube forming material tube 31, and the thickness t5 of the end portion of the straight tubular portion 37 joined to the inner tube forming material tube 30 is set to be the thickness t5. The thickness t2 of the raw material tube 30 for inner tube formation is approximately the same size. -14- 1329335 - (11) That is, the thickness difference between the thickness of the end portion of the curved portion 36 and the thickness of the raw material tube 3 1 for the outer tube | t丨-t4 |, the thickness of the raw material tube 31 for the outer tube configuration The size t1 or the thickness of the end portion of the curved portion 36 is less than 20% of the thickness ί4, and the thickness difference between the thickness of the end portion of the straight tubular portion 37 and the thickness of the inner tube forming raw material tube 30 is tl-t5| The thickness t2 of the constituent raw material pipe 30 or the size of the thickness 15 of the end portion of the straight tubular portion 317 is not more than 20%.
如此構成的受激準分子燈，是與製造表示於第1圖者 的情形同樣地’從管軸方向外方側藉由如燃燒器等進行加 ' 熱來焊著直管狀外側管構成用原材料管31的內周面31A • 與接合構件35的彎曲部分36的前端面36A，同時從徑方 * 向內方例藉由如燃燒器等進行加熱來焊著內側管構成用原 材料管30的外端面30A與接合構件35的直管狀部分37 的前端面3 7 A，由此，可得到在外側管與內側管之間形成 有管狀放電空間的雙重管構造的放電容器。 在接合外側管構成用原材料管31與接合構件35之際 ’從得到加熱部分Η 1的熱容量大小的均勻化的觀點上， 外側管構成用原材料管31與接合構件3 5的加熱部分η 1 的接合構件的長度L1’作成外側管構成用原材料管3i的 厚度大小tl的100%以上的大小較理想。 又’在接合接合構件35與內側管構成用原材料管30 之際’從得到加熱部分H2的熱容量大小的均勻化的觀點 上’內側管構成用原材料管30與接合構件35的加熱部分 H2的接合構件35的長度L2A及加熱部分H2的內側管構 -15- (12) (12)1329335 成用原材料管30的長度L2B相同大小較理想。加熱部分 H2的接合構件35的長度l2a及加熱部分H2的內側管構 成用原材料管30的長度L2B是並不被特別加以限定者， 例如作爲內側管構成用原材料管3 0的厚度大小t2的 1 0 0 %以上的大小。 由此’在得到均勻加熱狀態的狀態下，可熔融接合外 側管構成用原材料管3 1與接合構件35，及接合構件3 5與 內側管構成用原材料管3 〇。 如以上，說明了具備外側管的厚度大小比內側管的厚 度大小還大的構成的放電容器所成者，惟針對於外側管的 厚度大小11作成比內側管的厚度大小12還小的構成的情 形（η X 1 · 5客t2)也同樣。亦即，如第4圖所示地，作爲 接σ構件45使用著與外側管構成用原材料管41接合而構 成端壁的彎曲部分4 6端部的厚度大小14作成與外側管構 成用原材料管41的厚度大小tl大約同等大小，且與內側 B構成用原材料管40接合的直管狀部分47端部的厚度大 小t5作成與內側管構成用原材料管4〇的厚度大小t2大約 同等大小者，焊著外側管構成用原材料管41的內周面 與接合構件45的彎曲部分46的前端面46A，同時焊 著內側管構成用原材料管40的外端面4〇a與接合構件45 的直管狀部分47的前端面47A，由此，得到管狀放電空 間形成於外側管與內側管之間的雙重構造的放電容器。 在接合外側管構成用原、材料冑41與接合㈣45之際 ，從得到加熱部分H1㈣容量大小的均句化的觀點上， -16- • (13) 1329335 外側管構成用原材料管4丨與接合構件4 5的加熱部分η i 的接合構件45的長度L3，作成加熱部分hi的外側管構 成用原材料管41的厚度大小11的1 0 0 %以上的大小較理 想。 又’在接合接合構件45與內側管構成用原材料管40 之際’從得到加熱部分H2的熱容量大小的均勻化的觀點 上’內側管構成用原材料管40與接合構件45的加熱部分 H2的接合構件45的長度L4A及加熱部分H2的內側管構 成用原材料管40的長度L4B相同大小較理想。加熱部分 • H2的接合構件45的長度MA及加熱部分H2的內側管構 .· 成用原材料管40的長度L4B是並不被特別加以限定者， 例如作爲內側管構成用原材料管40的厚度大小t2的 1 0 0 %以上的大小。 由此’在得到均勻加熱狀態的狀態下，可熔融接合外 側管構成用原材料管41與接合構件45，及接合構件45與 內側管構成用原材料管40。 如以上’依照外側管與內側管在兩端部藉由另外接合 構件所接合而構成有放電容器所成的本發明的受激準分子 燈’則與直接地焊著外側管與內側管所成的第一實施形態 的受激準分子燈同樣地，藉由外側管構成用原材料管31 (4 1)與接合構件3 5 (4 5 )的加熱部分Η 1的外側管構成用 原材料管31 (41)與接合構件35 (45)的厚度大小作成大 約同等大小’同時接合構件3 5 (4 5 )與內側管構成用原材 料管3 0 (40)的加熱部分Η2的接合構件35 (45)與內側 -17- (14) (14)1329335 管構成用原材料管30 (40)的厚度作成大約同等大小，使 得加熱部分H1，H2的兩件構件的熱容量大小變成大約相 等而可將該兩件構件均勻地加熱之故，因而可確實地抑制 發生變形或歪斜而可得到穩定又牢固的接合狀態，結果可 將外側管與內側管的接合部作成具有充分高可靠性的構成 ’因此搬運或安裝受激準分子燈10時，或是點燈初期時 ’可確實地防止放電容器11破損。 以上’說明本發明的實施形態，惟本發明是並不被限 定於上述實施形態者，可施加種種變更。 例如在第一實施形態的受激準分子燈中，作爲外側管 構成用原材料管，其兩端部具有朝徑方向內方延伸地被加 工的彎曲部分者，使用彎曲部分的前端部的厚度與內側管 構成用原材料管的厚度大約同等大小者，作爲內側管構成 用原材料管，使用具有朝管軸方向均勻大小厚度的直管狀 者’而外側管構成用原材料管及內側管構成用原材料管被 熔融接合形成有放電容器的構成者也可以。 又’在第二實施形態的受激準分子燈中，接合構件是 並不定與外側管與內側管的材質相同者，可使用例如具有 合成石英玻璃，熔融石英玻璃，耐紫外線的玻璃材料等所 成者。 又’本發明的受激準分子燈，是在放電容器內的—端 側’從該放電容器的內側管外周面朝徑方向外方突出的隔 間壁朝內側管周方向全周全面延伸般地形成，由此，可作 成形成有在隔間壁與放電容器的端壁之間連通於放電空間 -18- (15) 1329335 的用以吸附如氧氣、氫氣、一氧化碳或水等不純氣的 收容用輔助空間的構成者。 如第5圖所示地，在此種構成者中，隔間壁是如玻 所成的圓板狀的隔間壁構成構件60焊著於構成內側管 —部分的接合構件55的直管狀部分57外周面所形成， 加熱部分的隔間壁構成構件6 0的厚度大小16作成與直 狀部分5 7的厚度大小t5大約同等大小較理想。亦即， 合構件55的直管狀部分57的厚度與隔壁構成構件60 厚度的厚度差| t5-t6| ，作成接合構件55的直管狀部 57的厚度大小t5或是隔間壁構成構件60的厚度大小 的2 0 %以下的大小較理想◊由此，加熱部分的接合構件 的熱容量與隔間壁構成構件60的熱容量成爲大約同等 小’而在得到均勻加熱狀態的狀態下，可熔融接合接合 件5 5與隔間壁構成構件6 〇。 又’隔間壁構成構件60的端面位置與接合構件55 直管狀部分57的端面位置之隔離距離的大小d，是如內 管構成用原材料管40的厚度大小t2的1〇〇%以上大小 理想。由此，焊著接合構件5 5與內側管構成用原材料 50之際’加熱部分的隔壁構成構件60的熱容量大小實 上成爲無關係’在接合構件55與內側管構成用原材料 4〇的接合部可得到穩定的牢固接合狀態。 又與接合構件55的外側管構成用原材料管41接合 彎曲部分5 6的外端部的厚度大小14 ,是作成與外側管 成用原材料管41的厚度大小tl大約同等大小。 氣 璃 的 惟 管 接 的 分 t6 55 大 雄 稱 的 側 較 管 質 管 的 構 -19- (16) (16)1329335 又’第6圖所示地，第二實施形態的受激準分子燈中 ’作爲接合構件可使用圓板狀者。 具體地加以說明’該接合構件65是具有適合於外側 管構成用原材料管41內徑的大小的外徑尺寸，而具有適 口於內側管構成用原材料管40外徑的大小直徑的內側管 構成用原材料管嵌合用孔66形成於中央部。 該接合構件65是與外側管構成用原材料管41熔融接 口的外周緣部分67的厚度大小t7作成與外側管構成用原 材料曾4 1的厚度大小t!大約同等大小’且與內側管構成 用原材料管40熔融接合的內周緣部分（內側管構成用原 材料管嵌合用孔的開口緣部分）68的厚度大小t8作成與 內側管構成用原材料管4 0的厚度大小12大約同等大小。 亦即’外側管構成用原材料管4 1的外側管構成用原材料 管41的厚度與外周緣部分67的厚度的厚度差丨tl_t7| ， 作成外側管構成用原材料管41的厚度大小11或外周緣部 分67的厚度大小t7的2〇%以下的大小，同時內側管構成 用原材料管40的厚度與內周緣部分68的厚度的厚度差丨 t2_t8 I ’作成內側管構成用原材料管40的厚度大小t2或 內周緣部分68的厚度大小t8的20%以下的大小。 接合構件65的外周緣部分67的大小（徑方向長度） ’是從得到接合構件65與外側管構成用原材料管4 1的接 &部分的熱容量大小的均勻化的觀點上，作成外側管構成 用原材料管4 1的厚度大小t丨的1 〇 〇 %以上的大小較理想 ’又’接合構件65的內周緣部分68的大小（徑方向長度 -20- (17) (17)1329335 )’是從得到接合構件65與內側管構成用原材料管40的 接合部分的熱容量大小的均勻化的觀點上，作成內側管構 成用原材料管40的厚度大小t2的100%以上的大小較理 想。 (實施例） 以下’具體地說明本發明的受激準分子燈的實施例， 惟本發明並不被限定於此者。 (實施例1) 如第2圖所示地，準備全長1000nim，外徑40mm，厚 度（U) 2.5mm (tl=2_5xt2)的石英玻璃所成的外側管構成 用原材料管’及包含彎曲部分的全長1〇2〇mm直管狀部分 的外徑20mm ’直管狀部分的厚度（t2) 1.0mm，彎曲部分 的端部厚度（t3) 2.2mm (tl-t3 = 0.12xtl)的石英玻璃所成 的內側管構成用原材料管，藉由在兩端部焊著外側管構成 用原材料管與內側管構成用原材料管，來製作外側管的厚 度比內側管的厚度還大的雙重構造的放電容器。該放電容 器的全長度是1000mm。 接合外側管構成用原材料管與內側管構成用原材料管 之際的加熱處理條件，是作爲加熱手段使用氧氫氣燃燒器 ，將加熱溫度作爲2 0 0 0 °C，並將加熱時間作爲丨〇分鐘 ，又將加熱部分的內側管構成用原材料管的徑方向長度 (L)作爲 4mm (1.6xtl)。 -21 - (18) (18)1329335 又，依照表示於第1圖的構成，藉由配設外部電極及 內部電極，同時將放電用氣體塡充於放電空間內來製造本 發明的受激準分子燈。 外部電極是使用不銹鋼所成的無端狀金屬絲網所構成 的網狀者。 內部電極是使用將鋁板加工成斷面大約C形狀的槽狀 者。 作爲放電用氣體使用氙氣體而以26kpa壓力進行封入 〇 針對於如此地所得到的受激準分子燈，進行靜荷重破 壞試驗，而對於外側管與內側管的接合部的接合強度進行 評價，確認了該受激準分子燈的接合部是具有能耐於3kg • m的最大力矩的接合強度，具有充分高的可靠性者。如 安裝受激準分子燈之際，作用於受激準分子燈的接合部的 力矩大小一般是2kg· m左右。 (實施例2) 作爲外側管構成用原材料管，使用全長200mm，外徑 15mm，厚度 （0 0.7mm者，作爲內側管構成用原材料管 ’使用包含彎曲部分的全長2l〇mm，直管狀部分（中央領 域部分）的外徑6 mm’直管狀部分的厚度（t2) 1.5mm (t2 = 2.1xtl) ’彎曲部分的端部厚度（t3)0.8mm(t3- 11 = 0.1 4 X11 )者，除了這些以外是與實施例1同樣，製作 外側管的厚度比內側管的厚度還小的雙重管構造的放電容 -22- (19) (19)1329335 器’依照表示於第1圖的構成，藉由配設外部電極及內部 電極’同時將放電用氣體塡充於放電空間內來製造本發明 的受激準分子燈。該受激準分子燈的放電容器的全長度是 2 0 0 m m 〇 針對於所得到的受激準分子燈的外側管與內側管的接 合部進行與實施例1同樣的評價，確認了該受激準分子燈 的接合部是具有能耐於2_5 kg· m的最大力矩的接合強度 ，具有充分高的可靠性者。 (實施例3 ) 如第3圖所示地，準備全長l〇〇〇mm，外徑40mm，厚 度（tl) 2.5mm (tl=2.5xt2)的石英玻璃所成的外側管構成 用原材料管，及全長900mm，外徑20mm，厚度（t2) 1mm 的石英玻璃所成的內側管構成用原材料管，及包含彎曲部 分的全長60mm，直管狀部分的外徑2〇mm，彎曲部分的端 部厚度（t4) 2.2mm (tl-t4 = 〇.12xtl)，直管狀部分的厚度 (t5) 1mm (t2 = t5)的石英玻璃所成的短圓筒狀接合構件； 在兩端部藉由接合構件焊著外側管構成用原材料管與內側 管構成用原材料管’來製作外側管的厚度比內側管的厚度 還大的雙重管構造的放電容器，除了此些以外，是與實施 例1同樣來製造本發明的受激準分子燈，該受激準分子燈 的放電容器的全長是1 000mm。 焊著外側管構成用原材料管與接合構件之際的加熱處 理條件，是由上述實施例1同樣[將加熱溫度作爲2000 -23- (20) (20)1329335 °c，並將加熱時間作爲1 0分鐘，加熱部分的接合構件的 徑方向長度（LI) 4mm (l_6xtl)]，焊著內側管構成用原 材料管與接合構件之際的加熱處理條件是將加熱溫度作爲 2 000 °C，並將加熱時間作爲5分鐘，又將加熱部分的接 合構件的管軸方向長度（L2A)及內側管構成用原材料管 的長度 （L2B)作爲3 mm (3xt2) 針對於所得到的外側管與內側管的接合部進行與實施 例1同樣的評價，確認了該受激準分子燈的接合部是具有 能耐於3kg· m的最大力矩的接合強度，具有充分高的可 靠性者。 (實施例4) 作爲外側管構成用原材料管，使用全長200mm，外徑 15mm ’厚度（tl) 0.7mm者；作爲內側管構成用原材料管 ’使用全長 180mm，外控 6mm，厚度（t2) 1.5mm (t2 = 2.1 xtl)者’作爲接合構件，使用包含彎曲部分的全長15mm ’直管狀部分的外徑6mm，彎曲部分端部的厚度 （t4) 0.8mm (t4-tl=〇.14xtl)，直管狀部分的厚度（t5) 1.5mm (t2 = t 5)者’除了此些以外，作成與實施例3同樣，來製 作外側管的厚度比內側管的厚度還小的雙重管構造的放電 容器，依照表示於第1圖的構成，藉由配設外部電極及內 部電極之同時，將放電用氣體塡充於放電空間內來製造本 發明的受激準分子燈。該受激準分子燈的放電容器的全前 是；200mm。 -24- (21) (21)1329335 針對於所得到的受激準分子燈的外側管與內側管的接 合部進行與實施例1同樣的評價，確認了該受激準分子燈 的接合部是具有能耐於2.5kg ·ηι的最大力矩的接合強度 ，具有充分高的可靠性者》 (比較例1 ) 如第7圖所示地，在上述實施例1中，作爲內側管構 成用原材料管 （201)，作爲外側管使用彎曲部分 （202) 端部的厚度大小（t2) 1mm (tl-t2 = 0.6xtl，tl-t2=1.5xt2) ，厚度大小整體上均勻者，除了此些之外，是與實施例1 同樣而來製造比較用受激準分子燈。 針對於所得到的比較用受激準分子燈的外側管與內側 管的接合部進行與實施例1同樣的評價，確認了該受激準 分子燈的接合部只具能耐於1.5kg· m左右的力矩的接合 強度者。 (比較例2) 如第8圖所示地，在上述實施例3中，作爲接合構件 (35A)使用彎曲部分 （38)的厚度大小 （t5)lmm(tl-t5 = 0.6xtl，tl-t5 = 1.5xt2，t2 = t5)，厚度大小整體上均勻 者，除了此些之外，是與實施例3同樣而來製造比較用受 激準分子燈<* 針對於所得到的比較用受激準分子燈的外側管與內側 管的接合部進行與實例1同樣的評價，確認了該受激準分 -25- (22) (22)1329335 子燈的接合部只具有能耐於1.5kg ·ηι左右的力矩的接合 強度者。 如以上，在本發明的實施例1至實施例4的受激準分 子燈中，確認了放電容器的外側管與內側管的接合部充分 地具有高可靠性，可假想搬運或安裝受激準分子燈時，從 該接合部確實地防止放電容器受破損。 另一方面，在比較例1及比較例2的受激準分子燈中 ，確認了在放電容器的外側管與內側管的接合部，無法得 到穩定牢固的接合狀態。 【圖式簡單說明】 第1圖是表示本發明的受激準分子燈的一例的構成的 槪略的說明用斷面圖。 第2圖是表示製造本發明的受激準分子燈的放電容器 之際的外側管構成用構件與內側管構成用構件的接合方法 的一例的說明圖。 第3圖是表示製造本發明的受激準分子燈的放電容器 之際的外側管構成用構件與內側管構成用構件的接合方法 的其他例的說明圖。 第4圖是表示製造本發明的受激準分子燈的放電容器 之際的外側管構成用構件與內側管構成用構件的接合方法 的另一例的說明圖。 第5圖是表示製造本發明的受激準分子燈的放電容器 之際的外側管構成用構件與內側管構成用構件的接合方法 -26- (23) (23)132-9335 的另一例的說明圖41 第6圖是表示製造本發明的受激準分子燈的放電容器 之際的外側管構成用構件與內側管構成用構件的接合方法 的另一例的說明圖。 第7圖是表示製造比較例1的受激準分子燈的放電容 器之際的外側管構成用構件與內側管構成用構件的接合方 法的說明圖。 第8圖是表示製造比較例2的受激準分子燈的放電容 器之際的外側管構成用構件與內側管構成用構件的接合方 法的說明圖。 第9圖是表示製造習知的受激準分子燈的放電容器之 際的外側管構成用構件與內側管構成用構件的接合方法的 —例的說明圖》 【主要元件符號說明】 1 〇 :受激準分子燈，1 1 :放電容器，1 2 :外側管，1 3 :內 側管，13A:彎曲部分，14:端壁，15:其中一方的電極（外 部電極），16:另一方的電極（內部電極），20:內側管構 成用原材料管，20A:前端面，21:外側管構成用原材料管 ’ 21A:內周面’ 25:加熱手段，H:加熱部分，201:內側管構 成用原材料管，202:彎曲部分，30:內側管構成用原材料管 ’ 3〇A:外端面’ 31:外側管構成用原材料管，31 A:內周面 ’ 35’ 35A:接合構件，36:彎曲部分，3 6A:前端面，37:直 管狀部分’ 37A:前端面，38:彎曲部分，HI，H2:加熱部分 -27- (24) 1329335 ’ 40:內側管構成用原材料管，4〇a:外端面 成用原材料管’ 41 A:內周面，45:接合構件 ’ 46A:前端面’ 47:直管狀部分，47A:前端 件’ 56:彎曲部分，Η·直管狀部分，60:隔疼 65:接合構件’ 6^內側管構成用原材料管嵌 周緣部分’ 68:內周緣部分’ 70，71 面’ 72:彎曲部分，72A:前端面，7 .刀α熱手 ，4 1 :外側管構 ，46:彎曲部分 面，5 5 :接合構 3壁構成構件， 合用孔，6 7 :外 I"管，70Α:內周 段。 -28-In the same manner as in the case of the first embodiment, the excimer lamp is configured to weld the raw material of the straight tubular outer tube by adding heat to the outside of the tube axis direction by a burner or the like. The inner peripheral surface 31A of the tube 31 and the front end surface 36A of the curved portion 36 of the joint member 35 are welded to the inner tube forming raw material tube 30 by heating from a radial direction* inwardly, for example, by a burner or the like. The end surface 30A and the front end surface 37A of the straight tubular portion 37 of the joint member 35, whereby a discharge vessel having a double tube structure in which a tubular discharge space is formed between the outer tube and the inner tube can be obtained. When the outer tube constituting material tube 31 and the joint member 35 are joined, the outer tube constituting material tube 31 and the heating portion η 1 of the joint member 35 are used from the viewpoint of uniformizing the heat capacity of the heating portion Η 1 . The length L1' of the joining member is preferably 100% or more of the thickness t1 of the outer tube forming raw material pipe 3i. In the case of the joining of the joining member 35 and the inner tube constituting material tube 30, the joining of the inner tube constituting material tube 30 and the heating portion H2 of the joining member 35 is performed from the viewpoint of uniformizing the heat capacity of the heating portion H2. The length L2A of the member 35 and the inner tube structure -15-(12)(12)1329335 of the heating portion H2 are preferably the same size as the length L2B of the raw material tube 30. The length l2a of the joining member 35 of the heating portion H2 and the length L2B of the inner tube constituting material tube 30 of the heating portion H2 are not particularly limited, and are, for example, 1 as the thickness t2 of the inner tube constituting material tube 30. 0 0 % or more. Thus, in the state in which the uniform heating state is obtained, the outer tube constituting material tube 3 1 and the joint member 35, and the joint member 35 and the inner tube constituting material tube 3 可 can be melt-bonded. As described above, the discharge vessel having the configuration in which the thickness of the outer tube is larger than the thickness of the inner tube has been described. However, the thickness 11 of the outer tube is made smaller than the thickness 12 of the inner tube. The same is true for the case (η X 1 · 5 passengers t2). In other words, as shown in Fig. 4, the thickness of the end portion of the curved portion 46 which is formed by joining the outer tube forming material tube 41 to the outer tube forming member 45 is formed to be the outer tube forming material tube. The thickness tl of 41 is approximately the same size, and the thickness t5 of the end portion of the straight tubular portion 47 joined to the inner B-constituting material tube 40 is approximately equal to the thickness t2 of the inner tube forming material tube 4〇, and is welded. The inner peripheral surface of the outer tube constituting material tube 41 and the front end surface 46A of the curved portion 46 of the joint member 45 are welded to the outer end surface 4A of the inner tube constituting material tube 40 and the straight tubular portion 47 of the joint member 45. The front end surface 47A, thereby obtaining a double-structure discharge vessel in which a tubular discharge space is formed between the outer tube and the inner tube. From the viewpoint of the uniformity of the size of the heating portion H1 (4) when joining the outer tube forming original, the material 胄41 and the joining (four) 45, -16- • (13) 1329335 outer tube constituting raw material tube 4丨 and joining The length L3 of the joining member 45 of the heating portion η i of the member 45 is preferably 100% or more of the thickness 11 of the outer tube forming material tube 41 of the heating portion hi. In the case of the joining of the joining member 45 and the inner tube constituting material tube 40, the joining of the inner tube constituting material tube 40 and the heating portion H2 of the joining member 45 is performed from the viewpoint of uniformizing the heat capacity of the heating portion H2. The length L4A of the member 45 and the length L4B of the inner tube forming material tube 40 for the heating portion H2 are preferably the same size. The length of the joining member 45 of the heating portion H2 and the inner tube structure of the heating portion H2. The length L4B of the raw material tube 40 is not particularly limited, and is, for example, the thickness of the raw material tube 40 for the inner tube. The size of t2 is more than 100%. Thus, in the state in which the uniform heating state is obtained, the outer tube constituting material tube 41 and the joint member 45, and the joint member 45 and the inner tube constituting material tube 40 can be melt-bonded. As described above, "the excimer lamp of the present invention formed by the discharge tube formed by joining the outer tube and the inner tube at the both end portions by the other joining members" is formed by directly welding the outer tube and the inner tube. Similarly, the excimer lamp of the first embodiment is composed of the outer tube constituting material tube 31 (4 1) and the outer tube constituting material tube 31 of the heating portion Η 1 of the joint member 35 (45) ( 41) The joint member 35 (45) of the heating portion Η2 of the raw material pipe 3 0 (40) of the inner tube constituting material tube 3 0 (40) is formed to be approximately the same size as the thickness of the joint member 35 (45) The inner side -17-(14) (14) 1329335 is formed to have approximately the same size as the thickness of the raw material tube 30 (40), so that the heat capacity of the two members of the heating portions H1, H2 becomes approximately equal, and the two members can be made equal Since it is heated uniformly, it is possible to surely suppress the occurrence of deformation or skew and obtain a stable and firm joint state. As a result, the joint portion of the outer tube and the inner tube can be made to have a sufficiently high reliability structure. Excimer At the time of the lamp 10 or at the beginning of the lighting, the discharge vessel 11 can be reliably prevented from being damaged. The embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments, and various modifications can be made. For example, in the excimer lamp of the first embodiment, as the outer tube constituting material tube, both end portions have curved portions that are processed to extend inward in the radial direction, and the thickness of the tip end portion of the curved portion is used. When the thickness of the raw material tube for the inner tube is approximately the same, the material for the inner tube is used as the material tube for the inner tube, and the straight tube for the outer tube is used. A constituent member in which a discharge vessel is formed by fusion bonding may be used. Further, in the excimer lamp of the second embodiment, the bonding member is not necessarily the same as the material of the outer tube and the inner tube, and for example, a synthetic quartz glass, fused silica glass, or a glass material resistant to ultraviolet rays can be used. Adult. Further, in the excimer lamp of the present invention, the partition wall which protrudes outward in the radial direction from the outer peripheral surface of the inner tube of the discharge vessel is extended toward the entire circumference of the inner tube in the circumferential direction. Formed so as to form a container formed between the partition wall and the end wall of the discharge vessel and connected to the discharge space -18-(15) 1329335 for adsorbing impurities such as oxygen, hydrogen, carbon monoxide or water. The constituents of the auxiliary space. As shown in Fig. 5, in such a constitution, the partition wall is a disk-shaped partition wall constituent member 60 made of glass, and is welded to the straight tubular portion of the joint member 55 constituting the inner tube portion. The outer peripheral surface of the heating portion is formed, and the thickness 16 of the partition wall constituting member 60 of the heating portion is preferably equal to the thickness t5 of the straight portion 57. That is, the difference in thickness between the thickness of the straight tubular portion 57 of the engaging member 55 and the thickness of the partition constituting member 60 | t5 - t6 | , the thickness t5 of the straight tubular portion 57 of the engaging member 55 or the partition wall constituting member 60 The size of 20% or less of the thickness is preferably ◊. Therefore, the heat capacity of the joined member of the heating portion is approximately equal to the heat capacity of the partition wall constituent member 60, and the fusion bonded joint can be obtained in a state of uniform heating. The member 5 5 and the partition wall constitute the member 6 〇. Further, the size d of the distance between the end surface position of the partition wall constituting member 60 and the end surface position of the straight tubular portion 57 of the joint member 55 is preferably 1% or more of the thickness t2 of the inner tube constituting material tube 40. . Therefore, when the joint member 5 and the inner tube constituting material 50 are welded, the heat capacity of the partition wall constituting member 60 of the heating portion is substantially irrelevant, and the joint portion 55 and the inner tube constituting material 4 〇 are joined. A stable and firm joint state can be obtained. Further, the outer tube portion of the joining member 55 is joined to the outer tube forming material tube 41. The thickness 14 of the outer end portion of the curved portion 56 is approximately the same as the thickness t1 of the outer tube forming material tube 41. The tube of the gas glass is divided into t6 55. The side of the big male is called the structure of the tube. -19- (16) (16) 1329335. As shown in Fig. 6, the excimer lamp of the second embodiment 'A disc shape can be used as the joint member. Specifically, the joint member 65 has an outer diameter of a size suitable for the inner diameter of the outer tube constituting material tube 41, and has an inner tube structure having a size and a diameter suitable for the outer diameter of the inner tube constituting material tube 40. The raw material pipe fitting hole 66 is formed in the center portion. The thickness of the outer peripheral edge portion 67 of the joint member 65 which is in the molten connection with the outer tube forming material tube 41 is made to be the same as the thickness of the outer tube forming material 41; The thickness t8 of the inner peripheral portion (the opening edge portion of the inner tube constituting material tube fitting hole) 68 to which the tube 40 is fused is approximately the same as the thickness 12 of the inner tube constituting material tube 40. In other words, the thickness difference 丨tl_t7| between the thickness of the outer tube constituting material tube 41 and the thickness of the outer peripheral portion 67 of the outer tube constituting material tube 4 1 is made to be the thickness 11 or the outer circumference of the outer tube constituting material tube 41. The thickness of the portion 67 is not less than 2% by weight of the thickness t7, and the thickness difference t2 of the inner tube forming material tube 40 is made by the thickness difference 丨t2_t8 I ' between the thickness of the inner tube forming material tube 40 and the thickness of the inner peripheral portion 68. Or the size of the thickness of the inner peripheral portion 68 of 20% or less. The size (diameter in the radial direction) of the outer peripheral edge portion 67 of the joint member 65 is formed by the outer tube from the viewpoint of uniformizing the heat capacity of the joint portion of the joint member 65 and the outer tube forming material tube 4 1 . The size of the inner peripheral edge portion 68 of the joint member 65 (the length in the radial direction -20-(17) (17) 1329335 )' of the thickness of the raw material pipe 4 1 is more than 1% by weight. From the viewpoint of the uniformity of the heat capacity of the joint portion between the joining member 65 and the inner tube constituting material tube 40, it is preferable to form a size of 100% or more of the thickness t2 of the inner tube constituting material tube 40. (Embodiment) Hereinafter, an embodiment of the excimer lamp of the present invention will be specifically described, but the present invention is not limited thereto. (Example 1) As shown in Fig. 2, a raw material tube 'for outer tube structure made of quartz glass having a total length of 1000 nm, an outer diameter of 40 mm, and a thickness (U) of 2.5 mm (t=2_5xt2) and a curved portion were prepared. The outer diameter of the straight tubular portion of the full length of 1〇2〇mm is 20mm. The thickness of the straight tubular portion (t2) is 1.0mm, and the thickness of the end portion of the curved portion (t3) is 2.2mm (tl-t3 = 0.12xtl). In the inner tube constituting material tube, the outer tube constituting material tube and the inner tube constituting material tube are welded to both end portions, and a double-stage discharge tube having a thickness of the outer tube larger than the thickness of the inner tube is produced. The full length of the discharge capacitor is 1000mm. The heat treatment conditions for joining the outer tube constituting raw material tube and the inner tube constituting raw material tube are as follows: an oxygen oxyhydrogen burner is used as the heating means, and the heating temperature is taken as 200 ° C, and the heating time is taken as 丨〇 minute. Further, the length direction (L) of the raw material tube for the inner tube of the heating portion was set to 4 mm (1.6 x T1). -21 - (18) (18) 1329335 Further, according to the configuration shown in Fig. 1, the external electrode and the internal electrode are disposed, and the discharge gas is filled in the discharge space to manufacture the excitation of the present invention. Molecular lamp. The external electrode is a mesh formed of an endless wire mesh made of stainless steel. The internal electrode is formed by processing an aluminum plate into a groove having a cross-sectional shape of about C. The gas for discharge was sealed with a helium gas at a pressure of 26 kPa. The electrostatic excitation test was performed on the excimer lamp thus obtained, and the joint strength of the joint between the outer tube and the inner tube was evaluated. The joint portion of the excimer lamp has a joint strength capable of withstanding a maximum torque of 3 kg m, and has sufficiently high reliability. When the excimer lamp is mounted, the torque applied to the joint of the excimer lamp is generally about 2 kg·m. (Example 2) As a raw material pipe for the outer tube structure, a full length of 200 mm and an outer diameter of 15 mm were used, and the thickness (0 0.7 mm, as the inner tube constituting material tube), the entire length of the curved portion including 2 l mm, straight tubular portion ( The central portion of the outer diameter of the 6 mm' straight tubular portion (t2) 1.5 mm (t2 = 2.1xtl) 'the thickness of the end portion of the curved portion (t3) 0.8mm (t3- 11 = 0.1 4 X11), except In the same manner as in the first embodiment, the discharge capacity of the double tube structure in which the thickness of the outer tube is smaller than the thickness of the inner tube is produced. -22-(19) (19) 1329335 "According to the configuration shown in Fig. 1, The excimer lamp of the present invention is fabricated by disposing an external electrode and an internal electrode ' while discharging a discharge gas into the discharge space. The full length of the discharge vessel of the excimer lamp is 200 mm. The joint of the outer tube and the inner tube of the obtained excimer lamp was evaluated in the same manner as in the first embodiment, and it was confirmed that the joint portion of the excimer lamp was able to withstand the maximum torque of 2_5 kg·m. Bonding strength with high reliability (Example 3) As shown in Fig. 3, a raw material for outer tube formation made of quartz glass having a total length of 10 mm, an outer diameter of 40 mm, and a thickness (tl) of 2.5 mm (tl = 2.5 x t2) was prepared. Tube, and the inner tube formed of quartz glass with a total length of 900 mm, an outer diameter of 20 mm, a thickness of (t2) of 1 mm, and a full length of 60 mm including a curved portion, and an outer diameter of the straight tubular portion of 2 mm, the end of the curved portion Thickness of the part (t4) 2.2mm (tl-t4 = 〇.12xtl), thickness of the straight tubular part (t5) 1mm (t2 = t5) of the short cylindrical joint member made of quartz glass; at both ends The joint member is welded to the outer tube constituting material tube and the inner tube constituting material tube ' to produce a double tube structure having a thickness larger than the thickness of the inner tube, and the same as in the first embodiment. The excimer lamp of the present invention is manufactured, and the total length of the discharge vessel of the excimer lamp is 1 000 mm. The heat treatment conditions for welding the outer tube forming raw material tube and the joint member are as in the above-described first embodiment. Same [will use the heating temperature as 2000 -23- (20) (20) 1329 335 °c, and the heating time is 10 minutes, the length of the joint member in the heating portion (LI) 4 mm (l_6xtl)], and the heat treatment conditions for welding the raw material tube and the joint member for the inner tube are The heating temperature is 2 000 ° C, and the heating time is taken as 5 minutes, and the length in the tube axis direction (L2A) of the joined member of the heating portion and the length (L2B) of the raw material tube for the inner tube are set as 3 mm (3xt2). The joint portion of the obtained outer tube and the inner tube was evaluated in the same manner as in the first embodiment, and it was confirmed that the joint portion of the excimer lamp has a joint strength capable of withstanding a maximum moment of 3 kg·m, and is sufficiently high. Reliability. (Example 4) As a material pipe for the outer tube structure, a total length of 200 mm and an outer diameter of 15 mm 'thickness (t1) of 0.7 mm were used; and the inner tube constituting material pipe 'used to have a total length of 180 mm, an external control of 6 mm, and a thickness (t2) of 1.5. For mm (t2 = 2.1 xtl), as the joint member, the outer diameter of the full-length 15 mm 'straight tubular portion including the curved portion is 6 mm, and the thickness of the end portion of the curved portion (t4) is 0.8 mm (t4-tl=〇.14xtl). In the same manner as in the third embodiment, the thickness (t5) of the straight tubular portion was 1.5 mm (t2 = t 5 ), and a double tube structure discharge vessel having a thickness smaller than that of the inner tube was produced. According to the configuration shown in Fig. 1, the excimer lamp of the present invention is produced by interposing a discharge gas in a discharge space while disposing an external electrode and an internal electrode. The front of the discharge vessel of the excimer lamp is 200 mm. -24- (21) (21) 1329335 The joint of the outer tube and the inner tube of the obtained excimer lamp was evaluated in the same manner as in the first embodiment, and it was confirmed that the joint portion of the excimer lamp was Having a joint strength capable of withstanding a maximum torque of 2.5 kg·ηι, and having a sufficiently high reliability (Comparative Example 1) As shown in Fig. 7, in the above-described first embodiment, a raw material tube for inner tube formation is used ( 201), as the outer tube, the thickness (t2) of the end portion of the curved portion (202) is 1 mm (tl-t2 = 0.6x1, t1 - t2 = 1.5 x t2), and the thickness is as uniform as a whole, except for A comparative excimer lamp was produced in the same manner as in the first embodiment. The same evaluation as in the first embodiment was carried out for the joint portion of the outer tube and the inner tube of the obtained excimer lamp for comparison, and it was confirmed that the joint portion of the excimer lamp was resistant to about 1.5 kg·m. The strength of the joint of the moment. (Comparative Example 2) As shown in Fig. 8, in the above-described Embodiment 3, the thickness (t5) lmm (t1 - t5 = 0.6x1, tl - t5) of the curved portion (38) is used as the joint member (35A). = 1.5xt2, t2 = t5), the thickness of the whole is uniform, except for the above, the comparative excimer lamp is manufactured in the same manner as in the third embodiment. The joint between the outer tube and the inner tube of the excimer lamp was evaluated in the same manner as in Example 1. It was confirmed that the joint of the excimer--25-(22) (22) 1329335 sub-lamp has only a resistance of 1.5 kg · ηι. The joint strength of the right and left moments. As described above, in the excimer lamp of the first to fourth embodiments of the present invention, it was confirmed that the joint portion between the outer tube and the inner tube of the discharge vessel has sufficiently high reliability, and it can be assumed that the conveyance or mounting is excited. In the case of a molecular lamp, the discharge vessel is reliably prevented from being damaged from the joint portion. On the other hand, in the excimer lamps of Comparative Example 1 and Comparative Example 2, it was confirmed that the joint portion between the outer tube and the inner tube of the discharge vessel could not be stably joined. [Brief Description of the Drawings] Fig. 1 is a cross-sectional view showing a schematic configuration of an example of an excimer lamp of the present invention. Fig. 2 is an explanatory view showing an example of a method of joining the outer tube constituting member and the inner tube constituting member when the discharge vessel of the excimer lamp of the present invention is produced. Fig. 3 is an explanatory view showing another example of a method of joining the outer tube constituting member and the inner tube constituting member when the discharge vessel of the excimer lamp of the present invention is produced. Fig. 4 is an explanatory view showing another example of a method of joining the outer tube constituting member and the inner tube constituting member when the discharge vessel of the excimer lamp of the present invention is produced. Fig. 5 is a view showing another example of the method of joining the outer tube constituting member and the inner tube constituting member when producing the discharge vessel of the excimer lamp of the present invention. -26-(23) (23) 132-9335 [Fig. 41] Fig. 6 is an explanatory view showing another example of a method of joining the outer tube constituting member and the inner tube constituting member when the discharge vessel of the excimer lamp of the present invention is produced. Fig. 7 is an explanatory view showing a method of joining the outer tube constituting member and the inner tube constituting member when the discharge capacitor of the excimer lamp of Comparative Example 1 is manufactured. Fig. 8 is an explanatory view showing a method of joining the outer tube constituting member and the inner tube constituting member when the discharge capacitor of the excimer lamp of the second embodiment is manufactured. FIG. 9 is an explanatory view showing an example of a method of joining the outer tube constituting member and the inner tube constituting member when the discharge vessel of the conventional excimer lamp is manufactured. [Explanation of main component symbols] 1 〇: Excimer lamp, 1 1 : discharge vessel, 1 2 : outer tube, 13 3 : inner tube, 13A: curved part, 14: end wall, 15: one of the electrodes (external electrode), 16: the other side Electrode (internal electrode), 20: raw material tube for inner tube formation, 20A: front end surface, 21: raw material tube for outer tube formation '21A: inner peripheral surface' 25: heating means, H: heating part, 201: inner tube formation Raw material tube, 202: curved part, 30: inner tube forming raw material tube '3〇A: outer end surface' 31: outer tube forming raw material tube, 31 A: inner peripheral surface '35' 35A: joint member, 36: Curved part, 3 6A: front end face, 37: straight tubular part '37A: front end face, 38: curved part, HI, H2: heating part -27- (24) 1329335 ' 40: inner tube for raw material tube, 4〇 a: Raw material tube for outer end surface ' 41 A: inner peripheral surface, 45: joint member '46A: front end surface' 4 7: Straight tubular portion, 47A: front end piece '56: curved portion, Η·straight tubular portion, 60: pain barrier 65: joint member' 6^ inner tube constituting raw material tube embedded peripheral portion '68: inner peripheral portion' 70 , 71 face ' 72: curved part, 72A: front end face, 7. knife α hot hand, 4 1 : outer tube structure, 46: curved part face, 5 5 : joint structure 3 wall forming member, joint hole, 6 7 : Outside I" tube, 70Α: inner week. -28-