KR100819216B1 - 유기 el 디스플레이 및 그 제조 방법 - Google Patents
유기 el 디스플레이 및 그 제조 방법 Download PDFInfo
- Publication number
- KR100819216B1 KR100819216B1 KR1020020001677A KR20020001677A KR100819216B1 KR 100819216 B1 KR100819216 B1 KR 100819216B1 KR 1020020001677 A KR1020020001677 A KR 1020020001677A KR 20020001677 A KR20020001677 A KR 20020001677A KR 100819216 B1 KR100819216 B1 KR 100819216B1
- Authority
- KR
- South Korea
- Prior art keywords
- film
- organic
- thin film
- anode
- mask support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000010410 layer Substances 0.000 claims abstract description 101
- 239000010408 film Substances 0.000 claims abstract description 84
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 239000010409 thin film Substances 0.000 claims abstract description 51
- 239000002184 metal Substances 0.000 claims abstract description 38
- 239000011229 interlayer Substances 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 13
- 239000011159 matrix material Substances 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 5
- 238000005192 partition Methods 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000005856 abnormality Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000009719 polyimide resin Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001004640A JP2002208484A (ja) | 2001-01-12 | 2001-01-12 | 有機elディスプレイ及びその製造方法 |
| JPJP-P-2001-00004640 | 2001-01-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20020061114A KR20020061114A (ko) | 2002-07-22 |
| KR100819216B1 true KR100819216B1 (ko) | 2008-04-02 |
Family
ID=18872797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020020001677A Expired - Lifetime KR100819216B1 (ko) | 2001-01-12 | 2002-01-11 | 유기 el 디스플레이 및 그 제조 방법 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20020093286A1 (https=) |
| JP (1) | JP2002208484A (https=) |
| KR (1) | KR100819216B1 (https=) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4865165B2 (ja) * | 2001-08-29 | 2012-02-01 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| JP2004071554A (ja) * | 2002-07-25 | 2004-03-04 | Sanyo Electric Co Ltd | 有機elパネルおよびその製造方法 |
| US7592207B2 (en) | 2003-11-14 | 2009-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device and method for manufacturing the same |
| JP2005322564A (ja) * | 2004-05-11 | 2005-11-17 | Sony Corp | 表示装置の製造方法および表示装置 |
| KR100755398B1 (ko) * | 2004-05-21 | 2007-09-04 | 엘지전자 주식회사 | 유기전계발광표시소자 및 그 제조방법 |
| KR20050112456A (ko) * | 2004-05-25 | 2005-11-30 | 삼성에스디아이 주식회사 | 유기전계발광표시장치 및 그의 제조방법 |
| US7753751B2 (en) | 2004-09-29 | 2010-07-13 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating the display device |
| KR100669211B1 (ko) * | 2004-11-25 | 2007-01-16 | 엘지전자 주식회사 | 액티브 매트릭스형 유기 전계 발광 소자 및 이를 제조하는방법 |
| KR100674012B1 (ko) | 2004-11-25 | 2007-01-25 | 엘지전자 주식회사 | 유기 전계 발광 소자 및 이를 제조하는 방법 |
| TWI517378B (zh) * | 2005-10-17 | 2016-01-11 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
| US9092807B1 (en) * | 2006-05-05 | 2015-07-28 | Appnexus Yieldex Llc | Network-based systems and methods for defining and managing multi-dimensional, advertising impression inventory |
| KR100796618B1 (ko) * | 2007-01-04 | 2008-01-22 | 삼성에스디아이 주식회사 | 유기전계발광표시장치 및 그의 제조방법 |
| JP4884452B2 (ja) * | 2008-12-09 | 2012-02-29 | 三洋電機株式会社 | 有機電界発光パネルの製造方法 |
| JP5818441B2 (ja) * | 2011-01-14 | 2015-11-18 | 三菱重工業株式会社 | 照明用有機el素子の製造方法 |
| JP6302186B2 (ja) | 2012-08-01 | 2018-03-28 | 株式会社半導体エネルギー研究所 | 表示装置 |
| JP6204012B2 (ja) | 2012-10-17 | 2017-09-27 | 株式会社半導体エネルギー研究所 | 発光装置 |
| JP6076683B2 (ja) | 2012-10-17 | 2017-02-08 | 株式会社半導体エネルギー研究所 | 発光装置 |
| JP6155020B2 (ja) | 2012-12-21 | 2017-06-28 | 株式会社半導体エネルギー研究所 | 発光装置及びその製造方法 |
| JP6216125B2 (ja) | 2013-02-12 | 2017-10-18 | 株式会社半導体エネルギー研究所 | 発光装置 |
| JP6104649B2 (ja) | 2013-03-08 | 2017-03-29 | 株式会社半導体エネルギー研究所 | 発光装置 |
| WO2019123655A1 (ja) * | 2017-12-22 | 2019-06-27 | シャープ株式会社 | 表示デバイスの製造方法、および表示デバイスの製造装置 |
| US10943271B2 (en) | 2018-07-17 | 2021-03-09 | Xandr Inc. | Method and apparatus for managing allocations of media content in electronic segments |
| CN110610972B (zh) * | 2019-09-19 | 2022-06-03 | 京东方科技集团股份有限公司 | 一种显示基板及其制备方法、显示装置 |
| CN120826105A (zh) * | 2024-04-11 | 2025-10-21 | 上海和辉光电股份有限公司 | 显示面板及其制备方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5701055A (en) * | 1994-03-13 | 1997-12-23 | Pioneer Electronic Corporation | Organic electoluminescent display panel and method for manufacturing the same |
| KR19980033341A (ko) * | 1996-10-30 | 1998-07-25 | 가네꼬히사시 | 표시 장치 및 그 제조 방법 |
| KR20000023402A (ko) * | 1998-09-25 | 2000-04-25 | 이데이 노부유끼 | 광학적 소자 및 그 제조 방법 |
| KR20000060589A (ko) * | 1999-03-17 | 2000-10-16 | 구자홍 | 풀-컬러 유기 el 디스플레이 패널 및 그 제조방법 |
| KR20000065701A (ko) * | 1999-04-08 | 2000-11-15 | 구본준 | 전기발광소자 제조방법 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5773931A (en) * | 1996-09-06 | 1998-06-30 | Motorola, Inc. | Organic electroluminescent device and method of making same |
| JP3541625B2 (ja) * | 1997-07-02 | 2004-07-14 | セイコーエプソン株式会社 | 表示装置及びアクティブマトリクス基板 |
| CN1155930C (zh) * | 1997-08-21 | 2004-06-30 | 精工爱普生株式会社 | 有源矩阵型显示装置 |
| JP3580092B2 (ja) * | 1997-08-21 | 2004-10-20 | セイコーエプソン株式会社 | アクティブマトリクス型表示装置 |
| EP1096568A3 (en) * | 1999-10-28 | 2007-10-24 | Sony Corporation | Display apparatus and method for fabricating the same |
| TW484238B (en) * | 2000-03-27 | 2002-04-21 | Semiconductor Energy Lab | Light emitting device and a method of manufacturing the same |
| US6596443B2 (en) * | 2001-03-12 | 2003-07-22 | Universal Display Corporation | Mask for patterning devices |
-
2001
- 2001-01-12 JP JP2001004640A patent/JP2002208484A/ja active Pending
-
2002
- 2002-01-10 US US10/041,668 patent/US20020093286A1/en not_active Abandoned
- 2002-01-11 KR KR1020020001677A patent/KR100819216B1/ko not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5701055A (en) * | 1994-03-13 | 1997-12-23 | Pioneer Electronic Corporation | Organic electoluminescent display panel and method for manufacturing the same |
| KR19980033341A (ko) * | 1996-10-30 | 1998-07-25 | 가네꼬히사시 | 표시 장치 및 그 제조 방법 |
| KR20000023402A (ko) * | 1998-09-25 | 2000-04-25 | 이데이 노부유끼 | 광학적 소자 및 그 제조 방법 |
| KR20000060589A (ko) * | 1999-03-17 | 2000-10-16 | 구자홍 | 풀-컬러 유기 el 디스플레이 패널 및 그 제조방법 |
| KR20000065701A (ko) * | 1999-04-08 | 2000-11-15 | 구본준 | 전기발광소자 제조방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20020093286A1 (en) | 2002-07-18 |
| JP2002208484A (ja) | 2002-07-26 |
| KR20020061114A (ko) | 2002-07-22 |
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