KR100764919B1 - Soi 프로세스를 사용한 고속 래터럴 바이폴라 디바이스 - Google Patents
Soi 프로세스를 사용한 고속 래터럴 바이폴라 디바이스 Download PDFInfo
- Publication number
- KR100764919B1 KR100764919B1 KR1020027003997A KR20027003997A KR100764919B1 KR 100764919 B1 KR100764919 B1 KR 100764919B1 KR 1020027003997 A KR1020027003997 A KR 1020027003997A KR 20027003997 A KR20027003997 A KR 20027003997A KR 100764919 B1 KR100764919 B1 KR 100764919B1
- Authority
- KR
- South Korea
- Prior art keywords
- region
- base
- transistor
- insulating
- semiconductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D10/00—Bipolar junction transistors [BJT]
- H10D10/01—Manufacture or treatment
- H10D10/041—Manufacture or treatment of thin-film BJTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D10/00—Bipolar junction transistors [BJT]
- H10D10/311—Thin-film BJTs
Landscapes
- Bipolar Transistors (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/406,451 | 1999-09-27 | ||
| US09/406,451 US6376880B1 (en) | 1999-09-27 | 1999-09-27 | High-speed lateral bipolar device in SOI process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20020064291A KR20020064291A (ko) | 2002-08-07 |
| KR100764919B1 true KR100764919B1 (ko) | 2007-10-09 |
Family
ID=23608053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020027003997A Expired - Fee Related KR100764919B1 (ko) | 1999-09-27 | 2000-08-01 | Soi 프로세스를 사용한 고속 래터럴 바이폴라 디바이스 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6376880B1 (enExample) |
| EP (1) | EP1218943A1 (enExample) |
| JP (1) | JP2003510849A (enExample) |
| KR (1) | KR100764919B1 (enExample) |
| TW (1) | TW552709B (enExample) |
| WO (1) | WO2001024273A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6376880B1 (en) * | 1999-09-27 | 2002-04-23 | Advanced Micro Devices, Inc. | High-speed lateral bipolar device in SOI process |
| US6534834B1 (en) * | 2001-12-19 | 2003-03-18 | Agere Systems, Inc. | Polysilicon bounded snapback device |
| US6768180B2 (en) * | 2002-04-04 | 2004-07-27 | C. Andre T. Salama | Superjunction LDMOST using an insulator substrate for power integrated circuits |
| US7800143B2 (en) * | 2006-07-13 | 2010-09-21 | Globalfoundries Inc. | Dynamic random access memory with an amplified capacitor |
| US7679955B2 (en) * | 2006-08-02 | 2010-03-16 | Advanced Micro Devices, Inc. | Semiconductor switching device |
| CN101964359B (zh) * | 2009-07-24 | 2013-06-19 | 中芯国际集成电路制造(上海)有限公司 | 双极晶体管及其形成方法、虚拟接地电路 |
| US20110018608A1 (en) | 2009-07-24 | 2011-01-27 | Semiconductor Manufacturing International (Shanghai) Corporation | Bipolar Transistor, Band-Gap Reference Circuit and Virtual Ground Reference Circuit |
| US9281022B2 (en) | 2013-07-10 | 2016-03-08 | Zeno Semiconductor, Inc. | Systems and methods for reducing standby power in floating body memory devices |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH023238A (ja) * | 1988-06-20 | 1990-01-08 | Nissan Motor Co Ltd | 薄膜バイポーラトランジスタの製造方法 |
| JPH04116935A (ja) * | 1990-09-07 | 1992-04-17 | Fujitsu Ltd | 半導体装置の製造方法 |
| EP0616370A2 (en) * | 1993-03-16 | 1994-09-21 | Canon Kabushiki Kaisha | Semiconductor bipolar device including SiGe and method for manufacturing the same |
| JP2003510849A (ja) * | 1999-09-27 | 2003-03-18 | アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド | Soiプロセスにおける高速ラテラルバイポーラデバイス |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0628264B2 (ja) * | 1985-10-07 | 1994-04-13 | 富士通株式会社 | 半導体装置の製造方法 |
| JP2503460B2 (ja) | 1986-12-01 | 1996-06-05 | 三菱電機株式会社 | バイポ−ラトランジスタおよびその製造方法 |
| US4922315A (en) | 1987-11-13 | 1990-05-01 | Kopin Corporation | Control gate lateral silicon-on-insulator bipolar transistor |
| JP3163092B2 (ja) * | 1990-08-09 | 2001-05-08 | 株式会社東芝 | 半導体装置の製造方法 |
| US5185280A (en) | 1991-01-29 | 1993-02-09 | Texas Instruments Incorporated | Method of fabricating a soi transistor with pocket implant and body-to-source (bts) contact |
| FR2672733B1 (fr) * | 1991-02-13 | 1997-08-22 | France Telecom | Perfectionnement au collecteur d'un transistor bipolaire compatible avec la technologie mos. |
| JPH04317336A (ja) * | 1991-04-16 | 1992-11-09 | Toshiba Corp | 半導体装置およびその製造方法 |
| US5420055A (en) | 1992-01-22 | 1995-05-30 | Kopin Corporation | Reduction of parasitic effects in floating body MOSFETs |
| US5315144A (en) | 1992-09-18 | 1994-05-24 | Harris Corporation | Reduction of bipolar gain and improvement in snap-back sustaining voltage in SOI field effect transistor |
| DE4418206C2 (de) | 1994-05-25 | 1999-01-14 | Siemens Ag | CMOS-kompatibler Bipolartransistor und Herstellungsverfahren desselben |
| DE19515797C1 (de) | 1995-04-28 | 1996-09-19 | Siemens Ag | SOI-BiCMOS-Verfahren |
| JP3545583B2 (ja) * | 1996-12-26 | 2004-07-21 | 株式会社ルネサステクノロジ | 半導体装置およびその製造方法 |
| KR20000045305A (ko) * | 1998-12-30 | 2000-07-15 | 김영환 | 완전 공핍형 에스·오·아이 소자 및 그 제조방법 |
-
1999
- 1999-09-27 US US09/406,451 patent/US6376880B1/en not_active Expired - Lifetime
-
2000
- 2000-08-01 KR KR1020027003997A patent/KR100764919B1/ko not_active Expired - Fee Related
- 2000-08-01 WO PCT/US2000/020958 patent/WO2001024273A1/en not_active Ceased
- 2000-08-01 JP JP2001527363A patent/JP2003510849A/ja active Pending
- 2000-08-01 EP EP00953778A patent/EP1218943A1/en not_active Withdrawn
- 2000-09-27 TW TW089119916A patent/TW552709B/zh not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH023238A (ja) * | 1988-06-20 | 1990-01-08 | Nissan Motor Co Ltd | 薄膜バイポーラトランジスタの製造方法 |
| JPH04116935A (ja) * | 1990-09-07 | 1992-04-17 | Fujitsu Ltd | 半導体装置の製造方法 |
| EP0616370A2 (en) * | 1993-03-16 | 1994-09-21 | Canon Kabushiki Kaisha | Semiconductor bipolar device including SiGe and method for manufacturing the same |
| JP2003510849A (ja) * | 1999-09-27 | 2003-03-18 | アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド | Soiプロセスにおける高速ラテラルバイポーラデバイス |
Non-Patent Citations (1)
| Title |
|---|
| 1991 IEEE 논문 A NOVEL HIGH-PERFORMANCE LATERAL BIPOLAR ON SOI |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003510849A (ja) | 2003-03-18 |
| TW552709B (en) | 2003-09-11 |
| US6376880B1 (en) | 2002-04-23 |
| EP1218943A1 (en) | 2002-07-03 |
| WO2001024273A1 (en) | 2001-04-05 |
| KR20020064291A (ko) | 2002-08-07 |
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