KR100752007B1 - 3족 질화물계 화합물 반도체 발광 소자 및 그 제조 방법 - Google Patents
3족 질화물계 화합물 반도체 발광 소자 및 그 제조 방법 Download PDFInfo
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- KR100752007B1 KR100752007B1 KR1020050126528A KR20050126528A KR100752007B1 KR 100752007 B1 KR100752007 B1 KR 100752007B1 KR 1020050126528 A KR1020050126528 A KR 1020050126528A KR 20050126528 A KR20050126528 A KR 20050126528A KR 100752007 B1 KR100752007 B1 KR 100752007B1
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 59
- -1 nitride compound Chemical class 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims abstract description 24
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- 229910052738 indium Inorganic materials 0.000 claims abstract description 14
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000001947 vapour-phase growth Methods 0.000 claims abstract description 11
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- 239000010410 layer Substances 0.000 description 309
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- 239000000758 substrate Substances 0.000 description 31
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 30
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 25
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 25
- 229910002601 GaN Inorganic materials 0.000 description 24
- 230000015572 biosynthetic process Effects 0.000 description 15
- 239000011777 magnesium Substances 0.000 description 12
- 239000007789 gas Substances 0.000 description 9
- 239000010931 gold Substances 0.000 description 9
- 229910002704 AlGaN Inorganic materials 0.000 description 8
- 238000005253 cladding Methods 0.000 description 8
- 230000003247 decreasing effect Effects 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 229910052594 sapphire Inorganic materials 0.000 description 7
- 239000010980 sapphire Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 4
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- 238000010586 diagram Methods 0.000 description 4
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- 238000005215 recombination Methods 0.000 description 4
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- 239000013256 coordination polymer Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
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- 125000002524 organometallic group Chemical group 0.000 description 3
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- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- MHYQBXJRURFKIN-UHFFFAOYSA-N C1(C=CC=C1)[Mg] Chemical compound C1(C=CC=C1)[Mg] MHYQBXJRURFKIN-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 235000005811 Viola adunca Nutrition 0.000 description 2
- 235000013487 Viola odorata Nutrition 0.000 description 2
- 235000002254 Viola papilionacea Nutrition 0.000 description 2
- 238000005275 alloying Methods 0.000 description 2
- 229910002056 binary alloy Inorganic materials 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004020 luminiscence type Methods 0.000 description 2
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- 230000000116 mitigating effect Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 244000154870 Viola adunca Species 0.000 description 1
- 240000009038 Viola odorata Species 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
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- 229910052733 gallium Inorganic materials 0.000 description 1
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- 238000010438 heat treatment Methods 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
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- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Led Devices (AREA)
Abstract
Description
Claims (13)
- 삭제
- 삭제
- 삭제
- 삭제
- 양자 우물 구조를 갖는 3족 질화물계 화합물 반도체 발광 소자이며, 우물층의 상하에 형성되는 층과 우물층과의 접합부에 상기 우물층의 상하에 형성되는 층의 격자 정수와 상기 우물층의 격자 정수와의 차이가 작아지도록 변화하여 형성되어 있는 영역을 갖고,상기 우물층의 상하에 형성되는 층은 AlxGa1-xN(0 < x <1)이고, 상기 우물층은 InyGa1-yN(0 ≤ y < 1)이고, 상기 영역은 Alx'Ga1-x'N(0 ≤ x' <1)이고, 상기 영역에 있어서의 x'가 x' = x로부터 x' = 0의 방향으로 변화하여 형성되어 있는 것을 특징으로 하는 3족 질화물계 화합물 반도체 발광 소자.
- 양자 우물 구조를 갖는 3족 질화물계 화합물 반도체 발광 소자이며, 우물층의 상하에 형성되는 층과 우물층과의 접합부에 상기 우물층의 상하에 형성되는 층의 격자 정수와 상기 우물층의 격자 정수와의 차이가 작아지도록 변화하여 형성되어 있는 영역을 갖고,상기 우물층의 상하에 형성되는 층은 AlxGa1-xN(0 < x < 1)으로 이루어지고, 상기 우물층은 InyGa1-yN(0 < y < 1)으로 이루어지고,상기 영역은 상기 우물층측으로부터 Iny'Ga1-y'N(0 ≤ y' < 1)과 Alx'Ga1-x'N(0 ≤ x' < 1)으로 형성되고,상기 Iny'Ga1-y'N의 조성비(y')는 상기 우물층으로부터 멀어지는 방향에 따라 y' = y로부터 y' = 0으로 변화하고,상기 Alx'Ga1-x'N의 조성비(x')는 상기 우물층측으로부터 멀어지는 방향으로 x' = 0으로부터 x' = x로 변화하는 것을 특징으로 하는 3족 질화물계 화합물 반도체 발광 소자.
- 제5항 또는 제6항에 있어서, 상기 영역은 상기 우물층의 상하에 형성되는 층 내에 형성되어 있는 것을 특징으로 하는 3족 질화물계 화합물 반도체 발광 소자.
- 제5항 또는 제6항에 있어서, 상기 우물층의 상하에 형성되는 층은 클래드층인 것을 특징으로 하는 3족 질화물계 화합물 반도체 발광 소자.
- 제7항에 있어서, 상기 우물층의 상하에 형성되는 층은 클래드층인 것을 특징으로 하는 3족 질화물계 화합물 반도체 발광 소자.
- 제5항 또는 제6항에 있어서, 상기 우물층의 상하에 형성되는 층은 배리어층(장벽층)인 것을 특징으로 하는 3족 질화물계 화합물 반도체 발광 소자.
- 제7항에 있어서, 상기 우물층의 상하에 형성되는 층은 배리어층(장벽층)인 것을 특징으로 하는 3족 질화물계 화합물 반도체 발광 소자.
- 적어도 인듐(In)을 포함하는 우물층을 갖는 단일 또는 다중 양자 우물 구조의 발광층을 갖는 3족 질화물계 화합물 반도체 발광 소자의 제조 방법에 있어서,상기 우물층을 기상 성장법에 의해 형성할 때에,In원의 공급량을 최저 공급량으로부터 공급을 개시하고,그 후 In원의 공급량을 목표 공급량까지 증가시킨 후 일정 공급량으로 하여, 그 후 목표 공급량으로부터 최저 공급량까지 감소시키는 것으로 하고,In원 이외의 3족 원료원에 대해서는 In원 공급의 개시로부터 공급 종료까지의 동안 일정 공급량으로 공급하는 것을 특징으로 하는 3족 질화물계 화합물 반도체 발광 소자의 제조 방법.
- 적어도 인듐(In)을 포함하는 층을, 2개의 층으로 협지한 구조의 3족 질화물계 화합물 반도체 소자의 제조 방법에 있어서,상기 In을 포함하는 층을 기상 성장법에 의해 형성할 때에,In원의 공급량을 최저 공급량으로부터 공급을 개시하고,그 후 In원의 공급량을 목표 공급량까지 증가시킨 후 일정 공급량으로 하여, 그 후 목표 공급량으로부터 최저 공급량까지 감소시키는 것으로 하고,In원 이외의 3족 원료원에 대해서는 In원 공급의 개시로부터 공급 종료까지의 동안 일정 공급량으로 공급하는 것을 특징으로 하는 3족 질화물계 화합물 반도체 소자의 제조 방법.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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JPJP-P-2005-00021445 | 2005-01-28 | ||
JP2005021445A JP2006210692A (ja) | 2005-01-28 | 2005-01-28 | 3族窒化物系化合物半導体発光素子 |
JP2005046283A JP4591111B2 (ja) | 2005-02-22 | 2005-02-22 | Iii族窒化物系化合物半導体素子又は発光素子の製造方法 |
JPJP-P-2005-00046283 | 2005-02-22 |
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KR20060087398A KR20060087398A (ko) | 2006-08-02 |
KR100752007B1 true KR100752007B1 (ko) | 2007-08-28 |
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Country | Link |
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US (1) | US7629619B2 (ko) |
KR (1) | KR100752007B1 (ko) |
CN (1) | CN100403566C (ko) |
TW (1) | TWI284994B (ko) |
Families Citing this family (17)
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KR101283233B1 (ko) * | 2007-06-25 | 2013-07-11 | 엘지이노텍 주식회사 | 발광 소자 및 그 제조방법 |
JP2009099893A (ja) * | 2007-10-19 | 2009-05-07 | Showa Denko Kk | Iii族窒化物半導体発光素子 |
CN102067347B (zh) * | 2008-08-19 | 2012-09-05 | 晶能光电(江西)有限公司 | 一种制备InGaN基多量子阱层的方法 |
TWI407596B (zh) * | 2009-03-06 | 2013-09-01 | Advanced Optoelectronic Tech | 側邊散熱型發光二極體及其製程 |
JP2010251390A (ja) * | 2009-04-13 | 2010-11-04 | Oki Electric Ind Co Ltd | 発光ダイオード及びその製造方法 |
US8907321B2 (en) * | 2009-12-16 | 2014-12-09 | Lehigh Univeristy | Nitride based quantum well light-emitting devices having improved current injection efficiency |
JP5423390B2 (ja) * | 2009-12-26 | 2014-02-19 | 豊田合成株式会社 | Iii族窒化物系化合物半導体素子及びその製造方法 |
JP5533744B2 (ja) * | 2010-03-31 | 2014-06-25 | 豊田合成株式会社 | Iii族窒化物半導体発光素子 |
US20120126198A1 (en) * | 2010-10-27 | 2012-05-24 | The Regents Of The University Of California | Light emitting diode for droop improvement |
CN102637793B (zh) * | 2011-02-15 | 2015-08-12 | 展晶科技(深圳)有限公司 | 三族氮化合物半导体紫外光发光二极管 |
CN102208500A (zh) * | 2011-05-20 | 2011-10-05 | 武汉迪源光电科技有限公司 | 一种led外延生长方法和led外延结构 |
EP2718988A2 (en) | 2011-06-10 | 2014-04-16 | The Regents of the University of California | Low droop light emitting diode structure on gallium nitride semipolar substrates |
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TWI474504B (zh) * | 2012-06-21 | 2015-02-21 | Lextar Electronics Corp | 發光二極體結構及其製作方法 |
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CN104465930B (zh) * | 2014-12-17 | 2017-06-13 | 厦门市三安光电科技有限公司 | 氮化物发光二极管 |
EP3350844B1 (en) * | 2015-09-17 | 2021-10-27 | Crystal Is, Inc. | Ultraviolet light-emitting devices incorporating two-dimensional hole gases |
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US5684309A (en) * | 1996-07-11 | 1997-11-04 | North Carolina State University | Stacked quantum well aluminum indium gallium nitride light emitting diodes |
JP3304782B2 (ja) * | 1996-09-08 | 2002-07-22 | 豊田合成株式会社 | 半導体発光素子 |
JP3700283B2 (ja) | 1996-10-02 | 2005-09-28 | 昭和電工株式会社 | 窒化物化合物半導体素子 |
JPH1126812A (ja) | 1997-07-01 | 1999-01-29 | Toyoda Gosei Co Ltd | 3族窒化物半導体素子及びその製造方法 |
GB2327145A (en) * | 1997-07-10 | 1999-01-13 | Sharp Kk | Graded layers in an optoelectronic semiconductor device |
JP4277363B2 (ja) | 1999-05-27 | 2009-06-10 | 昭和電工株式会社 | Iii族窒化物半導体発光素子 |
JP2001230447A (ja) | 2000-02-16 | 2001-08-24 | Toyoda Gosei Co Ltd | Iii族窒化物系化合物半導体素子の製造方法 |
US6674778B1 (en) * | 2002-01-09 | 2004-01-06 | Sandia Corporation | Electrically pumped edge-emitting photonic bandgap semiconductor laser |
US6927412B2 (en) * | 2002-11-21 | 2005-08-09 | Ricoh Company, Ltd. | Semiconductor light emitter |
CN1431722A (zh) * | 2003-02-18 | 2003-07-23 | 华南师范大学 | Ⅲ族氮化物半导体蓝色发光器件 |
JP2004253819A (ja) | 2004-05-27 | 2004-09-09 | Showa Denko Kk | Iii族窒化物半導体発光素子 |
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