KR100751557B1 - 화학기상증착법에 의한 탄소나노튜브 담지 백금촉매의제조방법 - Google Patents
화학기상증착법에 의한 탄소나노튜브 담지 백금촉매의제조방법 Download PDFInfo
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- KR100751557B1 KR100751557B1 KR1020060020524A KR20060020524A KR100751557B1 KR 100751557 B1 KR100751557 B1 KR 100751557B1 KR 1020060020524 A KR1020060020524 A KR 1020060020524A KR 20060020524 A KR20060020524 A KR 20060020524A KR 100751557 B1 KR100751557 B1 KR 100751557B1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/205—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy using reduction or decomposition of a gaseous compound yielding a solid condensate, i.e. chemical deposition
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/20—Carbon compounds, e.g. carbon nanotubes or fullerenes
- H10K85/221—Carbon nanotubes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Abstract
Description
Claims (4)
- 탄소나노튜브를 열처리한 후 염산용액과 황산-질산 혼합용액으로 처리하여 불순물을 제거하고 탄소나노튜브 표면에 산화기를 치환시키는 전처리단계와;백금전구체로는 메틸트리메틸사이클로펜타디에닐백금을 사용하고, 이것을 기화기에 넣은 후 60~80oC로 가열하여 기화되도록 하는 기화단계와;반응기의 내부에는 탄소나노튜브를 설치하고, 기화기를 거친 60 ~ 80oC로 예열된 질소와 추가의 산소를 동시에 흘려주면서 반응기의 온도를 상승시킴으로써 탄소나노튜브의 표면에 백금 입자가 담지되는 담지단계;를 포함하여 이루어지되,상기 담지단계에서 반응기의 온도는 80 ~ 240oC, 반응기체는 질소, 질소와 산소, 질소와 수소로 변화시키고, 5 ~ 10 Torr의 압력에서 수행되는 것을 특징으로 하는 화학기상증착법에 의한 탄소나노튜브 담지 백금촉매의 제조방법.
- 제 1항에 있어서,상기 기화단계에서 기화된 기상의 전구체는 60 ~ 80oC로 가열된 연결관을 통하여 전처리를 거친 탄소나노튜브가 설치된 반응기에 도달되도록 하는 주입단계가 더 이루어짐을 특징으로 하는 화학기상증착법에 의한 탄소나노튜브 담지 백금촉매의 제조방법.
- 제 1항에 있어서,상기 전처리단계에서 탄소나노튜브의 정제 및 표면구조개선을 위하여 대기 중에서 30 ~ 120분 동안 350 ~ 500oC로 가열하고, 다음으로 6 M의 염산 용액에서 20 ~ 30 시간 동안 처리하고 세척 및 건조를 거친 후, 마지막으로 혼합산 용액(14 M, 50 ml의 질산과 98%, 50 ml의 황산)에 탄소나노튜브를 담그고 50 ~ 70oC에서 리플럭스 시키면서 5 ~ 360분 동안 전처리하는 것을 특징으로 하는 화학기상증착법에 의한 탄소나노튜브 담지 백금촉매의 제조방법.
- 삭제
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KR1020060020524A KR100751557B1 (ko) | 2006-03-03 | 2006-03-03 | 화학기상증착법에 의한 탄소나노튜브 담지 백금촉매의제조방법 |
JP2007032312A JP4861849B2 (ja) | 2006-03-03 | 2007-02-13 | 化学気相蒸着法によるカーボンナノチューブ担持白金触媒の製造方法 |
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Cited By (5)
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WO2009112738A1 (fr) * | 2008-03-11 | 2009-09-17 | Arkema France | Procede et systeme de depot d'un metal ou metalloïde sur des nanotubes de carbone |
KR101030252B1 (ko) | 2010-10-20 | 2011-04-22 | 한국과학기술연구원 | 나노촉매 제조장치 |
KR101038750B1 (ko) | 2009-05-20 | 2011-06-03 | 한국에너지기술연구원 | 탄소나노튜브의 내부 채널에 금속촉매 나노입자가 담지된 탄소나노튜브 촉매 및 이의 제조방법 |
KR101436030B1 (ko) * | 2012-07-18 | 2014-08-29 | 한국에너지기술연구원 | 나노탄소와 코어-쉘 구조의 백금-탄소 복합체를 포함하는 연료전지용 전극의 제조방법 및 이에 의해 제조된 연료전지용 전극 |
CN110649272A (zh) * | 2019-09-29 | 2020-01-03 | 先进储能材料国家工程研究中心有限责任公司 | 质子交换膜燃料电池用催化剂的制备工艺 |
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JP6524628B2 (ja) * | 2014-09-26 | 2019-06-05 | 株式会社豊田中央研究所 | 燃料電池電極 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2009112738A1 (fr) * | 2008-03-11 | 2009-09-17 | Arkema France | Procede et systeme de depot d'un metal ou metalloïde sur des nanotubes de carbone |
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KR101038750B1 (ko) | 2009-05-20 | 2011-06-03 | 한국에너지기술연구원 | 탄소나노튜브의 내부 채널에 금속촉매 나노입자가 담지된 탄소나노튜브 촉매 및 이의 제조방법 |
KR101030252B1 (ko) | 2010-10-20 | 2011-04-22 | 한국과학기술연구원 | 나노촉매 제조장치 |
KR101436030B1 (ko) * | 2012-07-18 | 2014-08-29 | 한국에너지기술연구원 | 나노탄소와 코어-쉘 구조의 백금-탄소 복합체를 포함하는 연료전지용 전극의 제조방법 및 이에 의해 제조된 연료전지용 전극 |
US9172095B2 (en) | 2012-07-18 | 2015-10-27 | Korea Institute Of Energy Research | Method for manufacturing electrode for fuel cell comprising nanocarbon and core-shell-structured platinum-carbon composite and the electrode for fuel cell manufactured by the same |
CN110649272A (zh) * | 2019-09-29 | 2020-01-03 | 先进储能材料国家工程研究中心有限责任公司 | 质子交换膜燃料电池用催化剂的制备工艺 |
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