KR100706147B1 - 가스 패널 - Google Patents

가스 패널 Download PDF

Info

Publication number
KR100706147B1
KR100706147B1 KR1020007004589A KR20007004589A KR100706147B1 KR 100706147 B1 KR100706147 B1 KR 100706147B1 KR 1020007004589 A KR1020007004589 A KR 1020007004589A KR 20007004589 A KR20007004589 A KR 20007004589A KR 100706147 B1 KR100706147 B1 KR 100706147B1
Authority
KR
South Korea
Prior art keywords
gas
delete delete
manifold
inlet
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020007004589A
Other languages
English (en)
Korean (ko)
Other versions
KR20010031546A (ko
Inventor
레데만에릭제이.
뷰킴엔.
Original Assignee
셀레리티 인크.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25503189&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR100706147(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 셀레리티 인크. filed Critical 셀레리티 인크.
Publication of KR20010031546A publication Critical patent/KR20010031546A/ko
Application granted granted Critical
Publication of KR100706147B1 publication Critical patent/KR100706147B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • F16K11/22—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members with an actuating member for each valve, e.g. interconnected to form multiple-way valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Valve Housings (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Multiple-Way Valves (AREA)
KR1020007004589A 1997-10-29 1998-10-28 가스 패널 Expired - Fee Related KR100706147B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US08/960,464 1997-10-29
US8/960,464 1997-10-29
US08/960,464 US6293310B1 (en) 1996-10-30 1997-10-29 Gas panel
PCT/US1998/022912 WO1999022165A1 (en) 1997-10-29 1998-10-28 Gas panel

Publications (2)

Publication Number Publication Date
KR20010031546A KR20010031546A (ko) 2001-04-16
KR100706147B1 true KR100706147B1 (ko) 2007-04-11

Family

ID=25503189

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020007004589A Expired - Fee Related KR100706147B1 (ko) 1997-10-29 1998-10-28 가스 패널

Country Status (9)

Country Link
US (2) US6293310B1 (https=)
EP (2) EP1683994B1 (https=)
JP (1) JP2001521120A (https=)
KR (1) KR100706147B1 (https=)
CN (1) CN1105256C (https=)
AU (1) AU1285199A (https=)
CA (1) CA2307663A1 (https=)
DE (2) DE69839083T2 (https=)
WO (1) WO1999022165A1 (https=)

Families Citing this family (64)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1289851C (zh) * 1998-03-05 2006-12-13 斯瓦戈洛克公司 歧管系统
US6546960B1 (en) * 2000-03-03 2003-04-15 Creative Pathways, Inc. Self-aligning SmartStrate™
DE10026086A1 (de) * 2000-05-26 2001-12-13 Audi Ag Vorrichtung zum Anordnen zumindest eines Fluidsteuerventiles
JP2002089798A (ja) * 2000-09-11 2002-03-27 Ulvac Japan Ltd 流体制御装置およびこれを用いたガス処理装置
US6550368B2 (en) * 2000-10-31 2003-04-22 Festo Corporation Fluid power interlock system
TW524944B (en) 2001-05-16 2003-03-21 Unit Instr Inc Fluid flow system
US6634385B2 (en) * 2001-12-21 2003-10-21 Motorola, Inc. Apparatus for conveying fluids and base plate
US7005268B2 (en) * 2002-03-13 2006-02-28 Agilent Technologies, Inc. Detection of biopolymers utilizing photo-initiated charge separation
JP2003280745A (ja) * 2002-03-25 2003-10-02 Stec Inc マスフローコントローラ
AU2003262953A1 (en) * 2002-08-27 2004-03-19 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
JP4314425B2 (ja) * 2002-12-02 2009-08-19 株式会社フジキン 流体制御装置
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
CN1887029A (zh) * 2003-11-07 2006-12-27 迅捷公司 表面安装的加热器
DE102004008490A1 (de) * 2004-02-20 2005-09-08 Sig Technology Ltd. Vorrichtung zur pneumatischen Steuerung
US20060070674A1 (en) * 2004-10-01 2006-04-06 Eidsmore Paul G Substrate with offset flow passage
US7610648B2 (en) * 2005-01-12 2009-11-03 Bon Tool Company Stainless steel tool and method of forming
US7628168B2 (en) 2005-06-10 2009-12-08 Lam Research Corporation Optimized activation prevention assembly for a gas delivery system and methods therefor
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
JP4221425B2 (ja) * 2006-08-11 2009-02-12 シーケーディ株式会社 パージガスユニット及びパージガス供給集積ユニット
US20080072977A1 (en) * 2006-09-27 2008-03-27 Curtiss-Wright Flow Control Corporation Pilot-operated valves and manifold assemblies
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US7806143B2 (en) 2007-06-11 2010-10-05 Lam Research Corporation Flexible manifold for integrated gas system gas panels
US7784496B2 (en) * 2007-06-11 2010-08-31 Lam Research Corporation Triple valve inlet assembly
US7784497B2 (en) * 2007-07-12 2010-08-31 Eriksson Mark L MSM component and associated gas panel assembly
US8322380B2 (en) 2007-10-12 2012-12-04 Lam Research Corporation Universal fluid flow adaptor
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
WO2010144541A2 (en) 2009-06-10 2010-12-16 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
WO2011040268A1 (ja) * 2009-09-30 2011-04-07 株式会社堀場エステック 流量算出システム、集積型ガスパネル装置及びベースプレート
WO2011047088A1 (en) * 2009-10-13 2011-04-21 Coast Pneumatics, Inc. Flow controller
US8327879B2 (en) * 2010-03-10 2012-12-11 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8336573B2 (en) * 2010-03-10 2012-12-25 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8333214B2 (en) * 2010-03-10 2012-12-18 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8528399B2 (en) 2010-05-21 2013-09-10 The Mercury Iron and Steel Co. Methods and apparatuses for measuring properties of a substance in a process stream
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
US8746272B2 (en) * 2011-09-26 2014-06-10 Air Products And Chemicals, Inc. Solenoid bypass system for continuous operation of pneumatic valve
US8851113B2 (en) * 2012-03-27 2014-10-07 Lam Research Coporation Shared gas panels in plasma processing systems
JP5478666B2 (ja) * 2012-05-21 2014-04-23 株式会社アルバック 流体制御装置およびこれを用いたガス処理装置
US10167975B2 (en) * 2012-06-25 2019-01-01 Norgren Gmbh Coupling system for an expandable fluid distribution system
CN103062494B (zh) * 2012-08-29 2014-10-08 北京理加联合科技有限公司 带侧向通孔的多通路阀板及其控制多个气路的方法
JP5616416B2 (ja) * 2012-11-02 2014-10-29 株式会社フジキン 集積型ガス供給装置
JP6186275B2 (ja) * 2013-12-27 2017-08-23 株式会社フジキン 流体制御装置
JP6054471B2 (ja) 2015-05-26 2016-12-27 株式会社日本製鋼所 原子層成長装置および原子層成長装置排気部
JP5990626B1 (ja) * 2015-05-26 2016-09-14 株式会社日本製鋼所 原子層成長装置
JP6054470B2 (ja) 2015-05-26 2016-12-27 株式会社日本製鋼所 原子層成長装置
US10460960B2 (en) * 2016-05-09 2019-10-29 Applied Materials, Inc. Gas panel apparatus and method for reducing exhaust requirements
US20180082870A1 (en) * 2016-09-16 2018-03-22 Applied Materials, Inc. Assemblies and methods of process gas flow control
WO2018180449A1 (ja) 2017-03-28 2018-10-04 株式会社フジキン 継手ブロックおよびこれを用いた流体制御装置
PL3690293T3 (pl) * 2017-09-29 2024-03-11 Zhejiang Sanhua Intelligent Controls Co., Ltd. Blok i sterujące płynem urządzenie
KR102308335B1 (ko) * 2017-12-05 2021-10-01 에스아이더블유 엔지니어링 피티이. 엘티디. 유체 제어 디바이스 및 유체 제어 디바이스를 위한 커넥터
US11662038B1 (en) * 2019-01-11 2023-05-30 Humphrey Products Company Modular valve assembly
CN113994460B (zh) * 2019-04-15 2025-05-20 朗姆研究公司 用于气体输送的模块部件系统
CN114729711A (zh) * 2019-12-20 2022-07-08 斯瓦戈洛克公司 具有泄漏测试通道的流体部件主体
CN111370744B (zh) * 2020-03-06 2021-07-02 武汉理工大学 一种用于燃料电池电堆组的分配歧管
WO2021231537A1 (en) * 2020-05-12 2021-11-18 Ichor Systems, Inc. Seal retainer for a component assembly and method of installing a component into an apparatus for controlling flow
CN111945136B (zh) * 2020-08-13 2022-10-21 北京北方华创微电子装备有限公司 半导体工艺设备及其集成供气系统
KR20220117150A (ko) 2021-02-16 2022-08-23 에이에스엠 아이피 홀딩 비.브이. 기판 처리 장치
WO2022186971A1 (en) 2021-03-03 2022-09-09 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly
US12140241B2 (en) * 2021-05-24 2024-11-12 Festo Se & Co. Kg Fluid control system
US12424414B2 (en) * 2021-10-19 2025-09-23 Applied Materials, Inc. Semiconductor processing system with a manifold for equal splitting and common divert architecture
US20230139688A1 (en) * 2021-10-29 2023-05-04 Applied Materials, Inc. Modular multi-directional gas mixing block
KR20240158338A (ko) 2022-03-10 2024-11-04 어플라이드 머티어리얼스, 인코포레이티드 모듈식 다방향 가스 혼합 블록
KR102893093B1 (ko) * 2023-06-02 2025-12-03 대동모벨시스템 주식회사 차량용 시트의 돌출량 조절용 에어 분배기
US20260029061A1 (en) * 2024-07-25 2026-01-29 Applied Materials, Inc. Gas panel enclosure
US20260096371A1 (en) * 2024-09-27 2026-04-02 Applied Materials, Inc. Modular multi-directional gas mixing block

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990037044A (ko) * 1997-10-13 1999-05-25 오오미 다다히로 유체 제어 장치

Family Cites Families (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3025878A (en) 1959-06-02 1962-03-20 Robert C Hupp Mounting panel for fluid control components
AT255802B (de) 1964-09-29 1967-07-25 Zd Y Prumyslove Automatisace N Pneumatisches logisches System
US3476214A (en) * 1968-02-01 1969-11-04 Mccord Corp Divisional lubricant feeder with bypass means
DE2302267B1 (de) * 1973-01-18 1974-06-12 Abex Gmbh Denison, 4010 Hilden Leitungssäule für hydraulische Ventile
FR2257846B1 (https=) * 1973-07-03 1976-05-28 Legris France Sa
FR2250907A1 (en) 1973-11-09 1975-06-06 Bouteille Daniel Assembly baseplates for pneumatic or hydraulic distributors - tongue and groove are standard modules which connect with into rigid block
DE2413703C3 (de) * 1974-03-21 1979-01-04 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Ventilanordnung für die Zuführung flüssiger oder gasförmiger Substanzen zu einem Verarbeitungsgefäß
FR2307151A1 (fr) * 1975-04-07 1976-11-05 Crouzet Sa Dispositif d'alimentation modulaire pour commande pneumatique
US4080752A (en) 1975-05-01 1978-03-28 Burge David A Toy blocks with conduits and fluid seal means
US3993091A (en) * 1975-10-06 1976-11-23 General Gas Light Company Manifold and valve system
DE2648751C2 (de) * 1976-10-27 1986-04-30 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Vorrichtung für die Zuführung flüssiger oder gasförmiger Substanzen zu einem Verarbeitungsgefäß
DE2704869C3 (de) 1977-02-05 1980-11-20 Festo-Maschinenfabrik Gottlieb Stoll, 7300 Esslingen In modularer Bauweise aus gleichen, logische Schaltungselemente enthaltenden Baugruppen zusammengesetzte fluidische Steuerschaltung
US4093329A (en) 1977-03-22 1978-06-06 Robertshaw Controls Company Manifolding means and system for electrical and/or pneumatic control devices and methods
DE2852685C2 (de) * 1978-12-06 1987-04-02 Wabco Westinghouse Fahrzeugbremsen GmbH, 3000 Hannover Einrichtung mit Grundplatten für eine Ventilbatterie
US4352532A (en) 1980-09-15 1982-10-05 Robertshaw Controls Company Manifolding means for electrical and/or pneumatic control units and parts and methods therefor
US4524807A (en) 1982-05-21 1985-06-25 Humphrey Products Company Snap-together modular manifold construction
US4558845A (en) * 1982-09-22 1985-12-17 Hunkapiller Michael W Zero dead volume valve
GB2176270B (en) * 1985-06-10 1989-08-23 Emcore Inc Modular gas handling apparatus
IT1222940B (it) 1987-10-19 1990-09-12 Dropsa Spa Distributore idraulico progressivo modulare per impianti di lubrificazione
DE8813778U1 (de) * 1988-11-04 1989-02-23 Colt International Holdings AG, Steinhausen Integrationsblock
EP0392072A1 (en) 1989-04-13 1990-10-17 Unit Instruments, Inc. Fluid mass flow control system
JP2633060B2 (ja) 1990-05-30 1997-07-23 ファナック株式会社 段積み式ワーク供給装置
US5178191A (en) 1990-09-05 1993-01-12 Newmatic Controls Inc. Modular pneumatic control systems
US5368062A (en) 1992-01-29 1994-11-29 Kabushiki Kaisha Toshiba Gas supplying system and gas supplying apparatus
AU5405694A (en) 1992-10-16 1994-05-09 Unit Instruments, Inc. Thermal mass flow controller having orthogonal thermal mass flow sensor
EP0619450A1 (en) * 1993-04-09 1994-10-12 The Boc Group, Inc. Zero Dead-Leg Gas Cabinet
JPH0778128A (ja) 1993-06-17 1995-03-20 Kanebo Ltd 逆離散コサイン変換方法および逆離散コサイン変換装置
FR2708702B1 (fr) * 1993-08-06 1995-10-20 Vygon Rampe de robinets.
JPH0758721A (ja) 1993-08-17 1995-03-03 Fujitsu Denso Ltd 多重伝送方式
JP2695745B2 (ja) * 1993-09-02 1998-01-14 シーケーディ株式会社 ガス供給装置
DE69427645T2 (de) 1993-10-06 2002-05-08 Unit Instruments, Inc. Apparat zur handhabung von prozess fluiden
US5730181A (en) 1994-07-15 1998-03-24 Unit Instruments, Inc. Mass flow controller with vertical purifier
US5653259A (en) 1994-10-17 1997-08-05 Applied Biosystems, Inc. Valve block
US5605179A (en) 1995-03-17 1997-02-25 Insync Systems, Inc. Integrated gas panel
EP0733810B1 (de) * 1995-03-24 2002-09-11 Rexroth Mecman GmbH Modulare Ventilanordnung
AU5386396A (en) 1995-05-05 1996-11-21 Insync Systems, Inc. Mfc-quick change method and apparatus
JP2832166B2 (ja) 1995-05-19 1998-12-02 シーケーディ株式会社 ガス供給集積ユニット
JP3546275B2 (ja) 1995-06-30 2004-07-21 忠弘 大見 流体制御装置
JP3605705B2 (ja) 1995-07-19 2004-12-22 株式会社フジキン 流体制御器
DE19535235A1 (de) * 1995-09-22 1997-03-27 Bosch Gmbh Robert Hydraulikaggregat
TW347460B (en) 1995-11-29 1998-12-11 Applied Materials Inc Flat bottom components and flat bottom architecture for fluid and gas systems
KR100232112B1 (ko) * 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
US5662143A (en) 1996-05-16 1997-09-02 Gasonics International Modular gas box system
US5720317A (en) * 1996-08-21 1998-02-24 Pgi International, Ltd. Low profile flanged manifold valve
US5992463A (en) 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
JP4022696B2 (ja) 1996-11-20 2007-12-19 忠弘 大見 遮断開放器
US6302141B1 (en) 1996-12-03 2001-10-16 Insync Systems, Inc. Building blocks for integrated gas panel
US5860676A (en) 1997-06-13 1999-01-19 Swagelok Marketing Co. Modular block assembly using angled fasteners for interconnecting fluid components

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990037044A (ko) * 1997-10-13 1999-05-25 오오미 다다히로 유체 제어 장치

Also Published As

Publication number Publication date
DE69839083T2 (de) 2009-01-22
DE69837218T2 (de) 2007-11-15
US6293310B1 (en) 2001-09-25
JP2001521120A (ja) 2001-11-06
KR20010031546A (ko) 2001-04-16
EP1040292A4 (en) 2004-06-16
DE69839083D1 (de) 2008-03-20
EP1040292B1 (en) 2007-02-28
EP1683994A2 (en) 2006-07-26
AU1285199A (en) 1999-05-17
EP1683994B1 (en) 2008-01-30
HK1031756A1 (en) 2001-06-22
EP1683994A3 (en) 2006-08-16
US6374859B1 (en) 2002-04-23
CN1105256C (zh) 2003-04-09
EP1040292A1 (en) 2000-10-04
WO1999022165A1 (en) 1999-05-06
DE69837218D1 (de) 2007-04-12
CA2307663A1 (en) 1999-05-06
CN1280657A (zh) 2001-01-17

Similar Documents

Publication Publication Date Title
KR100706147B1 (ko) 가스 패널
US6435215B1 (en) Gas panel
US6394138B1 (en) Manifold system of removable components for distribution of fluids
US5065794A (en) Gas flow distribution system
US5605179A (en) Integrated gas panel
US6283143B1 (en) System and method for providing an integrated gas stick
US6349744B1 (en) Manifold for modular gas box system
US20080302426A1 (en) System and method of securing removable components for distribution of fluids
KR20000052397A (ko) 가스공급장치와 성막장치
US5230721A (en) Apparatus for supplying ultrahigh purity gas
HK1031756B (en) Gas panel
MXPA00004198A (en) Gas panel
JPS60207337A (ja) 局部的汚染ガスを有するモジユールプラズマ反応装置

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

N231 Notification of change of applicant
PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20100405

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20100405