JP2001521120A - ガスパネル - Google Patents

ガスパネル

Info

Publication number
JP2001521120A
JP2001521120A JP2000518223A JP2000518223A JP2001521120A JP 2001521120 A JP2001521120 A JP 2001521120A JP 2000518223 A JP2000518223 A JP 2000518223A JP 2000518223 A JP2000518223 A JP 2000518223A JP 2001521120 A JP2001521120 A JP 2001521120A
Authority
JP
Japan
Prior art keywords
gas
manifold
gas panel
inlet
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000518223A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001521120A5 (https=
Inventor
リードマン，エリック・ジェイ
ヴ，キム・エヌ
Original Assignee
ユニット・インストゥルメンツ・インコーポレーテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25503189&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP2001521120(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by ユニット・インストゥルメンツ・インコーポレーテッド filed Critical ユニット・インストゥルメンツ・インコーポレーテッド
Publication of JP2001521120A publication Critical patent/JP2001521120A/ja
Publication of JP2001521120A5 publication Critical patent/JP2001521120A5/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • F16K11/22—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members with an actuating member for each valve, e.g. interconnected to form multiple-way valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Valve Housings (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Multiple-Way Valves (AREA)
JP2000518223A 1997-10-29 1998-10-28 ガスパネル Pending JP2001521120A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/960,464 1997-10-29
US08/960,464 US6293310B1 (en) 1996-10-30 1997-10-29 Gas panel
PCT/US1998/022912 WO1999022165A1 (en) 1997-10-29 1998-10-28 Gas panel

Publications (2)

Publication Number Publication Date
JP2001521120A true JP2001521120A (ja) 2001-11-06
JP2001521120A5 JP2001521120A5 (https=) 2006-01-05

Family

ID=25503189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000518223A Pending JP2001521120A (ja) 1997-10-29 1998-10-28 ガスパネル

Country Status (9)

Country Link
US (2) US6293310B1 (https=)
EP (2) EP1683994B1 (https=)
JP (1) JP2001521120A (https=)
KR (1) KR100706147B1 (https=)
CN (1) CN1105256C (https=)
AU (1) AU1285199A (https=)
CA (1) CA2307663A1 (https=)
DE (2) DE69839083T2 (https=)
WO (1) WO1999022165A1 (https=)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004051125A1 (ja) * 2002-12-02 2004-06-17 Fujikin Incorporated 流体制御装置
JP2005514561A (ja) * 2001-12-21 2005-05-19 フリースケール セミコンダクター インコーポレイテッド 流体の搬送装置及びベースプレート
WO2011040268A1 (ja) * 2009-09-30 2011-04-07 株式会社堀場エステック 流量算出システム、集積型ガスパネル装置及びベースプレート
JP2012197941A (ja) * 2012-05-21 2012-10-18 Ulvac Japan Ltd 流体制御装置およびこれを用いたガス処理装置
WO2015098333A1 (ja) * 2013-12-27 2015-07-02 株式会社フジキン 流体制御装置
JP2015519724A (ja) * 2012-03-27 2015-07-09 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ プラズマ処理システムにおける共有ガスパネル
KR20190122233A (ko) 2017-03-28 2019-10-29 가부시키가이샤 후지킨 이음매 블록 및 이것을 사용한 유체제어장치
JP2021505826A (ja) * 2017-12-05 2021-02-18 鑑鋒國際股▲ふん▼有限公司Ｓｉｗ Ｅｎｇｉｎｅｅｒｉｎｇ Ｐｔｅ．，Ｌｔｄ． 流体制御装置及び流体制御装置用の継手

Families Citing this family (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1289851C (zh) * 1998-03-05 2006-12-13 斯瓦戈洛克公司 歧管系统
US6546960B1 (en) * 2000-03-03 2003-04-15 Creative Pathways, Inc. Self-aligning SmartStrate™
DE10026086A1 (de) * 2000-05-26 2001-12-13 Audi Ag Vorrichtung zum Anordnen zumindest eines Fluidsteuerventiles
JP2002089798A (ja) * 2000-09-11 2002-03-27 Ulvac Japan Ltd 流体制御装置およびこれを用いたガス処理装置
US6550368B2 (en) * 2000-10-31 2003-04-22 Festo Corporation Fluid power interlock system
TW524944B (en) 2001-05-16 2003-03-21 Unit Instr Inc Fluid flow system
US7005268B2 (en) * 2002-03-13 2006-02-28 Agilent Technologies, Inc. Detection of biopolymers utilizing photo-initiated charge separation
JP2003280745A (ja) * 2002-03-25 2003-10-02 Stec Inc マスフローコントローラ
AU2003262953A1 (en) * 2002-08-27 2004-03-19 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
CN1887029A (zh) * 2003-11-07 2006-12-27 迅捷公司 表面安装的加热器
DE102004008490A1 (de) * 2004-02-20 2005-09-08 Sig Technology Ltd. Vorrichtung zur pneumatischen Steuerung
US20060070674A1 (en) * 2004-10-01 2006-04-06 Eidsmore Paul G Substrate with offset flow passage
US7610648B2 (en) * 2005-01-12 2009-11-03 Bon Tool Company Stainless steel tool and method of forming
US7628168B2 (en) 2005-06-10 2009-12-08 Lam Research Corporation Optimized activation prevention assembly for a gas delivery system and methods therefor
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
JP4221425B2 (ja) * 2006-08-11 2009-02-12 シーケーディ株式会社 パージガスユニット及びパージガス供給集積ユニット
US20080072977A1 (en) * 2006-09-27 2008-03-27 Curtiss-Wright Flow Control Corporation Pilot-operated valves and manifold assemblies
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US7806143B2 (en) 2007-06-11 2010-10-05 Lam Research Corporation Flexible manifold for integrated gas system gas panels
US7784496B2 (en) * 2007-06-11 2010-08-31 Lam Research Corporation Triple valve inlet assembly
US7784497B2 (en) * 2007-07-12 2010-08-31 Eriksson Mark L MSM component and associated gas panel assembly
US8322380B2 (en) 2007-10-12 2012-12-04 Lam Research Corporation Universal fluid flow adaptor
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
WO2010144541A2 (en) 2009-06-10 2010-12-16 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
WO2011047088A1 (en) * 2009-10-13 2011-04-21 Coast Pneumatics, Inc. Flow controller
US8327879B2 (en) * 2010-03-10 2012-12-11 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8336573B2 (en) * 2010-03-10 2012-12-25 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8333214B2 (en) * 2010-03-10 2012-12-18 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8528399B2 (en) 2010-05-21 2013-09-10 The Mercury Iron and Steel Co. Methods and apparatuses for measuring properties of a substance in a process stream
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
US8746272B2 (en) * 2011-09-26 2014-06-10 Air Products And Chemicals, Inc. Solenoid bypass system for continuous operation of pneumatic valve
US10167975B2 (en) * 2012-06-25 2019-01-01 Norgren Gmbh Coupling system for an expandable fluid distribution system
CN103062494B (zh) * 2012-08-29 2014-10-08 北京理加联合科技有限公司 带侧向通孔的多通路阀板及其控制多个气路的方法
JP5616416B2 (ja) * 2012-11-02 2014-10-29 株式会社フジキン 集積型ガス供給装置
JP6054471B2 (ja) 2015-05-26 2016-12-27 株式会社日本製鋼所 原子層成長装置および原子層成長装置排気部
JP5990626B1 (ja) * 2015-05-26 2016-09-14 株式会社日本製鋼所 原子層成長装置
JP6054470B2 (ja) 2015-05-26 2016-12-27 株式会社日本製鋼所 原子層成長装置
US10460960B2 (en) * 2016-05-09 2019-10-29 Applied Materials, Inc. Gas panel apparatus and method for reducing exhaust requirements
US20180082870A1 (en) * 2016-09-16 2018-03-22 Applied Materials, Inc. Assemblies and methods of process gas flow control
PL3690293T3 (pl) * 2017-09-29 2024-03-11 Zhejiang Sanhua Intelligent Controls Co., Ltd. Blok i sterujące płynem urządzenie
US11662038B1 (en) * 2019-01-11 2023-05-30 Humphrey Products Company Modular valve assembly
CN113994460B (zh) * 2019-04-15 2025-05-20 朗姆研究公司 用于气体输送的模块部件系统
CN114729711A (zh) * 2019-12-20 2022-07-08 斯瓦戈洛克公司 具有泄漏测试通道的流体部件主体
CN111370744B (zh) * 2020-03-06 2021-07-02 武汉理工大学 一种用于燃料电池电堆组的分配歧管
WO2021231537A1 (en) * 2020-05-12 2021-11-18 Ichor Systems, Inc. Seal retainer for a component assembly and method of installing a component into an apparatus for controlling flow
CN111945136B (zh) * 2020-08-13 2022-10-21 北京北方华创微电子装备有限公司 半导体工艺设备及其集成供气系统
KR20220117150A (ko) 2021-02-16 2022-08-23 에이에스엠 아이피 홀딩 비.브이. 기판 처리 장치
WO2022186971A1 (en) 2021-03-03 2022-09-09 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly
US12140241B2 (en) * 2021-05-24 2024-11-12 Festo Se & Co. Kg Fluid control system
US12424414B2 (en) * 2021-10-19 2025-09-23 Applied Materials, Inc. Semiconductor processing system with a manifold for equal splitting and common divert architecture
US20230139688A1 (en) * 2021-10-29 2023-05-04 Applied Materials, Inc. Modular multi-directional gas mixing block
KR20240158338A (ko) 2022-03-10 2024-11-04 어플라이드 머티어리얼스, 인코포레이티드 모듈식 다방향 가스 혼합 블록
KR102893093B1 (ko) * 2023-06-02 2025-12-03 대동모벨시스템 주식회사 차량용 시트의 돌출량 조절용 에어 분배기
US20260029061A1 (en) * 2024-07-25 2026-01-29 Applied Materials, Inc. Gas panel enclosure
US20260096371A1 (en) * 2024-09-27 2026-04-02 Applied Materials, Inc. Modular multi-directional gas mixing block

Family Cites Families (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3025878A (en) 1959-06-02 1962-03-20 Robert C Hupp Mounting panel for fluid control components
AT255802B (de) 1964-09-29 1967-07-25 Zd Y Prumyslove Automatisace N Pneumatisches logisches System
US3476214A (en) * 1968-02-01 1969-11-04 Mccord Corp Divisional lubricant feeder with bypass means
DE2302267B1 (de) * 1973-01-18 1974-06-12 Abex Gmbh Denison, 4010 Hilden Leitungssäule für hydraulische Ventile
FR2257846B1 (https=) * 1973-07-03 1976-05-28 Legris France Sa
FR2250907A1 (en) 1973-11-09 1975-06-06 Bouteille Daniel Assembly baseplates for pneumatic or hydraulic distributors - tongue and groove are standard modules which connect with into rigid block
DE2413703C3 (de) * 1974-03-21 1979-01-04 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Ventilanordnung für die Zuführung flüssiger oder gasförmiger Substanzen zu einem Verarbeitungsgefäß
FR2307151A1 (fr) * 1975-04-07 1976-11-05 Crouzet Sa Dispositif d'alimentation modulaire pour commande pneumatique
US4080752A (en) 1975-05-01 1978-03-28 Burge David A Toy blocks with conduits and fluid seal means
US3993091A (en) * 1975-10-06 1976-11-23 General Gas Light Company Manifold and valve system
DE2648751C2 (de) * 1976-10-27 1986-04-30 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Vorrichtung für die Zuführung flüssiger oder gasförmiger Substanzen zu einem Verarbeitungsgefäß
DE2704869C3 (de) 1977-02-05 1980-11-20 Festo-Maschinenfabrik Gottlieb Stoll, 7300 Esslingen In modularer Bauweise aus gleichen, logische Schaltungselemente enthaltenden Baugruppen zusammengesetzte fluidische Steuerschaltung
US4093329A (en) 1977-03-22 1978-06-06 Robertshaw Controls Company Manifolding means and system for electrical and/or pneumatic control devices and methods
DE2852685C2 (de) * 1978-12-06 1987-04-02 Wabco Westinghouse Fahrzeugbremsen GmbH, 3000 Hannover Einrichtung mit Grundplatten für eine Ventilbatterie
US4352532A (en) 1980-09-15 1982-10-05 Robertshaw Controls Company Manifolding means for electrical and/or pneumatic control units and parts and methods therefor
US4524807A (en) 1982-05-21 1985-06-25 Humphrey Products Company Snap-together modular manifold construction
US4558845A (en) * 1982-09-22 1985-12-17 Hunkapiller Michael W Zero dead volume valve
GB2176270B (en) * 1985-06-10 1989-08-23 Emcore Inc Modular gas handling apparatus
IT1222940B (it) 1987-10-19 1990-09-12 Dropsa Spa Distributore idraulico progressivo modulare per impianti di lubrificazione
DE8813778U1 (de) * 1988-11-04 1989-02-23 Colt International Holdings AG, Steinhausen Integrationsblock
EP0392072A1 (en) 1989-04-13 1990-10-17 Unit Instruments, Inc. Fluid mass flow control system
JP2633060B2 (ja) 1990-05-30 1997-07-23 ファナック株式会社 段積み式ワーク供給装置
US5178191A (en) 1990-09-05 1993-01-12 Newmatic Controls Inc. Modular pneumatic control systems
US5368062A (en) 1992-01-29 1994-11-29 Kabushiki Kaisha Toshiba Gas supplying system and gas supplying apparatus
AU5405694A (en) 1992-10-16 1994-05-09 Unit Instruments, Inc. Thermal mass flow controller having orthogonal thermal mass flow sensor
EP0619450A1 (en) * 1993-04-09 1994-10-12 The Boc Group, Inc. Zero Dead-Leg Gas Cabinet
JPH0778128A (ja) 1993-06-17 1995-03-20 Kanebo Ltd 逆離散コサイン変換方法および逆離散コサイン変換装置
FR2708702B1 (fr) * 1993-08-06 1995-10-20 Vygon Rampe de robinets.
JPH0758721A (ja) 1993-08-17 1995-03-03 Fujitsu Denso Ltd 多重伝送方式
JP2695745B2 (ja) * 1993-09-02 1998-01-14 シーケーディ株式会社 ガス供給装置
DE69427645T2 (de) 1993-10-06 2002-05-08 Unit Instruments, Inc. Apparat zur handhabung von prozess fluiden
US5730181A (en) 1994-07-15 1998-03-24 Unit Instruments, Inc. Mass flow controller with vertical purifier
US5653259A (en) 1994-10-17 1997-08-05 Applied Biosystems, Inc. Valve block
US5605179A (en) 1995-03-17 1997-02-25 Insync Systems, Inc. Integrated gas panel
EP0733810B1 (de) * 1995-03-24 2002-09-11 Rexroth Mecman GmbH Modulare Ventilanordnung
AU5386396A (en) 1995-05-05 1996-11-21 Insync Systems, Inc. Mfc-quick change method and apparatus
JP2832166B2 (ja) 1995-05-19 1998-12-02 シーケーディ株式会社 ガス供給集積ユニット
JP3546275B2 (ja) 1995-06-30 2004-07-21 忠弘 大見 流体制御装置
JP3605705B2 (ja) 1995-07-19 2004-12-22 株式会社フジキン 流体制御器
DE19535235A1 (de) * 1995-09-22 1997-03-27 Bosch Gmbh Robert Hydraulikaggregat
TW347460B (en) 1995-11-29 1998-12-11 Applied Materials Inc Flat bottom components and flat bottom architecture for fluid and gas systems
KR100232112B1 (ko) * 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
US5662143A (en) 1996-05-16 1997-09-02 Gasonics International Modular gas box system
US5720317A (en) * 1996-08-21 1998-02-24 Pgi International, Ltd. Low profile flanged manifold valve
US5992463A (en) 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
JP4022696B2 (ja) 1996-11-20 2007-12-19 忠弘 大見 遮断開放器
US6302141B1 (en) 1996-12-03 2001-10-16 Insync Systems, Inc. Building blocks for integrated gas panel
US5860676A (en) 1997-06-13 1999-01-19 Swagelok Marketing Co. Modular block assembly using angled fasteners for interconnecting fluid components
JP4378553B2 (ja) * 1997-10-13 2009-12-09 忠弘 大見 流体制御装置

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005514561A (ja) * 2001-12-21 2005-05-19 フリースケール セミコンダクター インコーポレイテッド 流体の搬送装置及びベースプレート
WO2004051125A1 (ja) * 2002-12-02 2004-06-17 Fujikin Incorporated 流体制御装置
WO2011040268A1 (ja) * 2009-09-30 2011-04-07 株式会社堀場エステック 流量算出システム、集積型ガスパネル装置及びベースプレート
JP5669583B2 (ja) * 2009-09-30 2015-02-12 株式会社堀場エステック 流量算出システム、集積型ガスパネル装置及びベースプレート
JP2015519724A (ja) * 2012-03-27 2015-07-09 ラム リサーチ コーポレーションＬａｍ Ｒｅｓｅａｒｃｈ Ｃｏｒｐｏｒａｔｉｏｎ プラズマ処理システムにおける共有ガスパネル
JP2012197941A (ja) * 2012-05-21 2012-10-18 Ulvac Japan Ltd 流体制御装置およびこれを用いたガス処理装置
JP2015124851A (ja) * 2013-12-27 2015-07-06 株式会社フジキン 流体制御装置
WO2015098333A1 (ja) * 2013-12-27 2015-07-02 株式会社フジキン 流体制御装置
CN105431661A (zh) * 2013-12-27 2016-03-23 株式会社富士金 流体控制装置
CN105431661B (zh) * 2013-12-27 2017-07-28 株式会社富士金 流体控制装置
US9719599B2 (en) 2013-12-27 2017-08-01 Fujikin Incorporated Fluid control device
KR20190122233A (ko) 2017-03-28 2019-10-29 가부시키가이샤 후지킨 이음매 블록 및 이것을 사용한 유체제어장치
JP2021505826A (ja) * 2017-12-05 2021-02-18 鑑鋒國際股▲ふん▼有限公司Ｓｉｗ Ｅｎｇｉｎｅｅｒｉｎｇ Ｐｔｅ．，Ｌｔｄ． 流体制御装置及び流体制御装置用の継手
JP6992183B2 (ja) 2017-12-05 2022-02-03 鑑鋒國際股▲ふん▼有限公司 流体制御装置及び流体制御装置用の継手

Also Published As

Publication number Publication date
DE69839083T2 (de) 2009-01-22
DE69837218T2 (de) 2007-11-15
US6293310B1 (en) 2001-09-25
KR20010031546A (ko) 2001-04-16
EP1040292A4 (en) 2004-06-16
DE69839083D1 (de) 2008-03-20
EP1040292B1 (en) 2007-02-28
EP1683994A2 (en) 2006-07-26
AU1285199A (en) 1999-05-17
EP1683994B1 (en) 2008-01-30
HK1031756A1 (en) 2001-06-22
EP1683994A3 (en) 2006-08-16
US6374859B1 (en) 2002-04-23
CN1105256C (zh) 2003-04-09
EP1040292A1 (en) 2000-10-04
KR100706147B1 (ko) 2007-04-11
WO1999022165A1 (en) 1999-05-06
DE69837218D1 (de) 2007-04-12
CA2307663A1 (en) 1999-05-06
CN1280657A (zh) 2001-01-17

Similar Documents

Publication Publication Date Title
JP2001521120A (ja) ガスパネル
US6435215B1 (en) Gas panel
EP1133652B1 (en) Manifold system of removable components for distribution of fluids
KR101571162B1 (ko) 범용 유체 흐름 어댑터
US5065794A (en) Gas flow distribution system
US5605179A (en) Integrated gas panel
US20080302426A1 (en) System and method of securing removable components for distribution of fluids
US20230303416A1 (en) Ultrapure water suppy apparatus, substrate processing system including the same, and substrate processing method using the same
HK1031756B (en) Gas panel
MXPA00004198A (en) Gas panel
KR950002278Y1 (ko) 가스배관 시스템
KR19990074455A (ko) 반응로의 반응 인라인 모니터링장치

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20051026

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20051026

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20070518

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080925

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20081222

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20090106

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090108

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20090304