KR100678734B1 - 어레이 기판 불량 검출 장치 - Google Patents
어레이 기판 불량 검출 장치 Download PDFInfo
- Publication number
- KR100678734B1 KR100678734B1 KR1020040061930A KR20040061930A KR100678734B1 KR 100678734 B1 KR100678734 B1 KR 100678734B1 KR 1020040061930 A KR1020040061930 A KR 1020040061930A KR 20040061930 A KR20040061930 A KR 20040061930A KR 100678734 B1 KR100678734 B1 KR 100678734B1
- Authority
- KR
- South Korea
- Prior art keywords
- ito
- array substrate
- visible light
- defect
- filter
- Prior art date
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
Claims (1)
- 어레이기판 상의 ITO 패턴과,400∼800㎚ 파장 영역을 갖는 가시광선으로 이루어진 광원과,ITO 박막이 투명기판상에 증착된 ITO 필터가 상기 ITO 패턴과 상기 광원과의 사이에 설치되어 구성되며,상기 어레이기판 상의 ITO 패턴 불량을 검출할 때에는 상기 가시광선이 상기 ITO 필터를 통과하여 상기 투명기판을 조사하도록 하고,상기 어레이기판 상의 ITO 패턴 불량검출이 아닌 다른 불량검출을 할 때에는 상기 ITO 필터를 제거하여 상기 가시광선이 직접 상기 어레이기판을 조사하도록 한 것을 특징으로 하는 어레이 기판 불량 검출 장치.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040061930A KR100678734B1 (ko) | 2004-08-06 | 2004-08-06 | 어레이 기판 불량 검출 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040061930A KR100678734B1 (ko) | 2004-08-06 | 2004-08-06 | 어레이 기판 불량 검출 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060013107A KR20060013107A (ko) | 2006-02-09 |
KR100678734B1 true KR100678734B1 (ko) | 2007-02-02 |
Family
ID=37122582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020040061930A KR100678734B1 (ko) | 2004-08-06 | 2004-08-06 | 어레이 기판 불량 검출 장치 |
Country Status (1)
Country | Link |
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KR (1) | KR100678734B1 (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102437095B1 (ko) | 2019-04-19 | 2022-08-26 | 주식회사 엘지화학 | 캐스파제 저해제의 프로드럭 |
CN113767097A (zh) | 2019-04-30 | 2021-12-07 | 株式会社Lg化学 | 半胱天冬酶抑制剂的前药 |
EP3970698A4 (en) | 2019-05-31 | 2022-08-31 | LG Chem, Ltd. | INJECTABLE COMPOSITION WITH PRODRUG OF CASPASE INHIBITORS AND METHOD OF MANUFACTURE THEREOF |
US20220226306A1 (en) | 2019-05-31 | 2022-07-21 | Lg Chem, Ltd. | Composition for caspase inhibitor prodrug injection |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06250137A (ja) * | 1993-02-23 | 1994-09-09 | Casio Comput Co Ltd | 外観検査方法及びその装置 |
KR980010522A (ko) * | 1996-07-24 | 1998-04-30 | 정치섭 | 배향막 검사장치 및 그 장치를 이용한 배향막 검사방법 |
KR19990065522A (ko) * | 1998-01-14 | 1999-08-05 | 구본준 | 웨이퍼의 이물질 검사장치 |
-
2004
- 2004-08-06 KR KR1020040061930A patent/KR100678734B1/ko active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06250137A (ja) * | 1993-02-23 | 1994-09-09 | Casio Comput Co Ltd | 外観検査方法及びその装置 |
KR980010522A (ko) * | 1996-07-24 | 1998-04-30 | 정치섭 | 배향막 검사장치 및 그 장치를 이용한 배향막 검사방법 |
KR19990065522A (ko) * | 1998-01-14 | 1999-08-05 | 구본준 | 웨이퍼의 이물질 검사장치 |
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Publication number | Publication date |
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KR20060013107A (ko) | 2006-02-09 |
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