KR100635962B1 - 규화몰리브덴 타입의 발열 소자와 그 제조 방법 - Google Patents
규화몰리브덴 타입의 발열 소자와 그 제조 방법 Download PDFInfo
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- KR100635962B1 KR100635962B1 KR1020047015772A KR20047015772A KR100635962B1 KR 100635962 B1 KR100635962 B1 KR 100635962B1 KR 1020047015772 A KR1020047015772 A KR 1020047015772A KR 20047015772 A KR20047015772 A KR 20047015772A KR 100635962 B1 KR100635962 B1 KR 100635962B1
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- South Korea
- Prior art keywords
- heating element
- molybdenum
- molybdenum silicide
- sio
- range
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 title claims abstract description 10
- 229910021344 molybdenum silicide Inorganic materials 0.000 title claims abstract description 10
- 238000010438 heat treatment Methods 0.000 title claims description 29
- 239000000463 material Substances 0.000 claims abstract description 30
- 229910004298 SiO 2 Inorganic materials 0.000 claims abstract description 14
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 11
- 239000011733 molybdenum Substances 0.000 claims abstract description 10
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims abstract description 8
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 6
- 239000000956 alloy Substances 0.000 claims abstract description 6
- 229910021332 silicide Inorganic materials 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 5
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims description 2
- 229910052863 mullite Inorganic materials 0.000 claims description 2
- -1 molybdenum aluminate Chemical class 0.000 claims 2
- 238000005485 electric heating Methods 0.000 claims 1
- 150000004760 silicates Chemical class 0.000 claims 1
- 239000000203 mixture Substances 0.000 abstract description 3
- 229910000323 aluminium silicate Inorganic materials 0.000 abstract description 2
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 abstract description 2
- 235000012216 bentonite Nutrition 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000000440 bentonite Substances 0.000 description 6
- 229910000278 bentonite Inorganic materials 0.000 description 6
- SVPXDRXYRYOSEX-UHFFFAOYSA-N bentoquatam Chemical compound O.O=[Si]=O.O=[Al]O[Al]=O SVPXDRXYRYOSEX-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000004927 clay Substances 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 229910016006 MoSi Inorganic materials 0.000 description 3
- 241000607479 Yersinia pestis Species 0.000 description 3
- YKTSYUJCYHOUJP-UHFFFAOYSA-N [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] Chemical compound [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] YKTSYUJCYHOUJP-UHFFFAOYSA-N 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/148—Silicon, e.g. silicon carbide, magnesium silicide, heating transistors or diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
- H01C17/06506—Precursor compositions therefor, e.g. pastes, inks, glass frits
- H01C17/06513—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component
- H01C17/0656—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component composed of silicides
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/26—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on ferrites
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/58085—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicides
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/58085—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicides
- C04B35/58092—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicides based on refractory metal silicides
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3418—Silicon oxide, silicic acids, or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3427—Silicates other than clay, e.g. water glass
- C04B2235/3463—Alumino-silicates other than clay, e.g. mullite
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3891—Silicides, e.g. molybdenum disilicide, iron silicide
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- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/40—Metallic constituents or additives not added as binding phase
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49083—Heater type
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- Manufacturing & Machinery (AREA)
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- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Resistance Heating (AREA)
- Ceramic Products (AREA)
Abstract
Description
Claims (9)
- 규화몰리브덴 타입의 재료와 이 기본 재료의 합금을 포함하는 발열 소자의 제조 방법에 있어서,98% 이상의 순도를 갖는 SiO2와 몰리브덴 알루미노 규화물 Mo(Si1-yAly)2를 혼합하여 Mo(Si1-xAlx)2 및 Al2O3를 함유하는 재료를 제조하는 것을 특징으로 하는 발열 소자 제조 방법.
- 제1항에 있어서, 상기 SiO2는 멀라이트 및 규선석 등의 규산염에 존재하고, 규화몰리브덴의 결정격자의 대칭에 영향을 미치지 않는 것을 특징으로 하는 발열 소자 제조 방법.
- 제1항 또는 제2항에 있어서, x는 0.4 ~ 0.6의 범위 내에 있도록 되어 있는 것을 특징으로 하는 발열 소자 제조 방법.
- 제1항 또는 제2항에 있어서, x는 0.45 ~ 0.55의 범위 내에 있도록 되어 있는 것을 특징으로 하는 발열 소자 제조 방법.
- 제1항 또는 제2항에 있어서, Mo(Si1-xAlx)2 재료의 몰리브덴을 부분적으로 Re 또는 W로 대체할 수 있는 것을 특징으로 하는 발열 소자 제조 방법.
- 규화몰리브덴 타입의 재료와 이 기본 재료의 합금을 포함하는 전기 발열 소자에 있어서,상기 발열 소자는 Mo(Si1-xAlx)2 및 Al2O3를 포함하고, 98% 이상의 순도를 갖는 SiO2가 제조 공정 중에 첨가되는 것을 특징으로 하는 발열 소자.
- 제6항에 있어서, x는 0.4 ~ 0.6의 범위 내에 있도록 되어 있는 것을 특징으로 하는 발열 소자.
- 제7항에 있어서, x는 0.45 ~ 0.55의 범위 내에 있도록 되어 있는 것을 특징으로 하는 발열 소자.
- 제6항 내지 제8항 중 어느 한 항에 있어서, Mo(Si1-xAlx)2 재료의 몰리브덴을 부분적으로 Re 또는 W로 대체할 수 있는 것을 특징으로 하는 발열 소자.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0201042-9 | 2002-04-05 | ||
SE0201042A SE521794C2 (sv) | 2002-04-05 | 2002-04-05 | Tillverkningsförfarande för ett värmeelement av molybdensilicidtyp, jämte ett värmeelement |
PCT/SE2003/000379 WO2003087014A1 (en) | 2002-04-05 | 2003-03-06 | Method of making a heating element of the molybdenum silicide type and a heating element |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20040105844A KR20040105844A (ko) | 2004-12-16 |
KR100635962B1 true KR100635962B1 (ko) | 2006-10-19 |
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ID=20287505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020047015772A KR100635962B1 (ko) | 2002-04-05 | 2003-03-06 | 규화몰리브덴 타입의 발열 소자와 그 제조 방법 |
Country Status (11)
Country | Link |
---|---|
US (1) | US8053710B2 (ko) |
EP (1) | EP1492739B1 (ko) |
JP (1) | JP2005522401A (ko) |
KR (1) | KR100635962B1 (ko) |
CN (1) | CN100340528C (ko) |
AT (1) | ATE383324T1 (ko) |
AU (1) | AU2003208687A1 (ko) |
DE (1) | DE60318563T2 (ko) |
ES (1) | ES2298501T3 (ko) |
SE (1) | SE521794C2 (ko) |
WO (1) | WO2003087014A1 (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN100460111C (zh) * | 2007-01-04 | 2009-02-11 | 北京科技大学 | 一种高强度的二硅化钼复合材料及其制备方法 |
US20120168431A1 (en) * | 2009-05-05 | 2012-07-05 | Sandvik Intellectual Property Ab | Heating element |
US10995036B2 (en) | 2018-03-18 | 2021-05-04 | Sandvik Intellectual Property Ab | Heating element |
WO2019185291A1 (de) * | 2018-03-26 | 2019-10-03 | Leister Technologies Ag | Keramischer heizwiderstand, elektrisches heizelement sowie vorrichtung zur erwärmung eines fluides |
Family Cites Families (27)
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SE204116C1 (ko) * | 1965-01-01 | |||
GB795004A (en) * | 1954-09-18 | 1958-05-14 | Siemens Planiawerke Ag | Improvements in or relating to working elements, for example resistance heating elements, for use at high temperatures in an atmosphere containing oxygen |
US2992959A (en) * | 1958-02-20 | 1961-07-18 | Kanthal Ab | Production of shaped bodies from heat resistant oxidation proof materials |
US2955145A (en) * | 1958-07-16 | 1960-10-04 | Kanthal Ab | Thermo-electric alloys |
DE1243078B (de) | 1961-11-09 | 1967-06-22 | Sigri Elektrographit Gmbh | Sinterkoerper, vorzugsweise zur Verwendung als Heizelement |
SE301519B (ko) * | 1966-10-24 | 1968-06-10 | Kanthal Ab | |
US3662222A (en) * | 1970-05-07 | 1972-05-09 | Itt | Electric resistance wire igniter with a cooling terminal posts construction |
US3725091A (en) * | 1971-04-12 | 1973-04-03 | Corning Glass Works | Glass-ceramic metal cermets and method |
US4101724A (en) * | 1976-06-30 | 1978-07-18 | Brown Boveri Corporation | Furnace conversion method and apparatus |
JPS58209084A (ja) | 1982-05-28 | 1983-12-05 | 株式会社日立製作所 | 直熱形ヒ−タ材 |
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-
2002
- 2002-04-05 SE SE0201042A patent/SE521794C2/sv not_active IP Right Cessation
-
2003
- 2003-03-06 AU AU2003208687A patent/AU2003208687A1/en not_active Abandoned
- 2003-03-06 AT AT03707280T patent/ATE383324T1/de not_active IP Right Cessation
- 2003-03-06 US US10/510,145 patent/US8053710B2/en not_active Expired - Fee Related
- 2003-03-06 EP EP03707280A patent/EP1492739B1/en not_active Expired - Lifetime
- 2003-03-06 JP JP2003583973A patent/JP2005522401A/ja active Pending
- 2003-03-06 WO PCT/SE2003/000379 patent/WO2003087014A1/en active IP Right Grant
- 2003-03-06 ES ES03707280T patent/ES2298501T3/es not_active Expired - Lifetime
- 2003-03-06 KR KR1020047015772A patent/KR100635962B1/ko active IP Right Grant
- 2003-03-06 DE DE60318563T patent/DE60318563T2/de not_active Expired - Lifetime
- 2003-03-06 CN CNB038074680A patent/CN100340528C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE60318563D1 (de) | 2008-02-21 |
US8053710B2 (en) | 2011-11-08 |
SE521794C2 (sv) | 2003-12-09 |
CN100340528C (zh) | 2007-10-03 |
US20050236399A1 (en) | 2005-10-27 |
SE0201042D0 (sv) | 2002-04-05 |
AU2003208687A1 (en) | 2003-10-27 |
EP1492739A1 (en) | 2005-01-05 |
ES2298501T3 (es) | 2008-05-16 |
JP2005522401A (ja) | 2005-07-28 |
WO2003087014A1 (en) | 2003-10-23 |
DE60318563T2 (de) | 2008-12-24 |
CN1642873A (zh) | 2005-07-20 |
ATE383324T1 (de) | 2008-01-15 |
SE0201042L (sv) | 2003-10-06 |
EP1492739B1 (en) | 2008-01-09 |
KR20040105844A (ko) | 2004-12-16 |
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