KR100626857B1 - 지능적 소형 환경 - Google Patents

지능적 소형 환경 Download PDF

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Publication number
KR100626857B1
KR100626857B1 KR1020007010251A KR20007010251A KR100626857B1 KR 100626857 B1 KR100626857 B1 KR 100626857B1 KR 1020007010251 A KR1020007010251 A KR 1020007010251A KR 20007010251 A KR20007010251 A KR 20007010251A KR 100626857 B1 KR100626857 B1 KR 100626857B1
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KR
South Korea
Prior art keywords
control
signals
environment
isolated
environmental
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020007010251A
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English (en)
Korean (ko)
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KR20010041939A (ko
Inventor
아부자이드살렘
헤시아오후아조지
탄노우스조지
Original Assignee
어사이스트 테크놀로지스, 인코포레이티드
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Publication of KR20010041939A publication Critical patent/KR20010041939A/ko
Application granted granted Critical
Publication of KR100626857B1 publication Critical patent/KR100626857B1/ko
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D27/00—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00
    • G05D27/02—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00 characterised by the use of electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/62—Control or safety arrangements characterised by the type of control or by internal processing, e.g. using fuzzy logic, adaptive control or estimation of values
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/50—Control or safety arrangements characterised by user interfaces or communication
    • F24F11/54—Control or safety arrangements characterised by user interfaces or communication using one central controller connected to several sub-controllers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fuzzy Systems (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Signal Processing (AREA)
  • Automation & Control Theory (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ventilation (AREA)
  • Air Conditioning Control Device (AREA)
  • Testing And Monitoring For Control Systems (AREA)
KR1020007010251A 1998-03-16 1999-03-15 지능적 소형 환경 Expired - Fee Related KR100626857B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US3980898A 1998-03-16 1998-03-16
US9/039,808 1998-03-16
US09/039,808 1998-03-16

Publications (2)

Publication Number Publication Date
KR20010041939A KR20010041939A (ko) 2001-05-25
KR100626857B1 true KR100626857B1 (ko) 2006-09-22

Family

ID=21907449

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020007010251A Expired - Fee Related KR100626857B1 (ko) 1998-03-16 1999-03-15 지능적 소형 환경

Country Status (6)

Country Link
US (1) US6473668B2 (enExample)
EP (1) EP1064503A4 (enExample)
JP (1) JP2002506962A (enExample)
KR (1) KR100626857B1 (enExample)
TW (1) TW426623B (enExample)
WO (1) WO1999047864A1 (enExample)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN106569532A (zh) * 2016-11-10 2017-04-19 向往 一种电力配电机房环境控制系统

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EP1184724A1 (en) 2000-08-29 2002-03-06 Motorola, Inc. Electronic device for a lithography mask container and method using the same
US6671564B1 (en) * 2000-10-03 2003-12-30 Data I/O Corporation Portable programming system and control method therefor
US7302313B2 (en) * 2001-02-07 2007-11-27 Aircuity, Inc. Air quality monitoring systems and methods
JP2003083591A (ja) * 2001-09-10 2003-03-19 Daikin Ind Ltd 空気調和機および空気調和システム
CA2397185A1 (fr) * 2002-08-05 2004-02-05 Christian Cloutier Moniteur d'activite pour bebe
US20040162996A1 (en) * 2003-02-18 2004-08-19 Nortel Networks Limited Distributed security for industrial networks
US7088239B2 (en) 2004-03-02 2006-08-08 Vann Basinger Method and apparatus for all-purpose, automatic remote utility meter reading, utility shut off, and hazard warning and correction
JP3861918B2 (ja) * 2004-11-30 2006-12-27 ダイキン工業株式会社 空気調和機
US10651063B2 (en) 2005-06-18 2020-05-12 Frederick A. Flitsch Methods of prototyping and manufacturing with cleanspace fabricators
US7513822B2 (en) * 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
US10627809B2 (en) 2005-06-18 2020-04-21 Frederick A. Flitsch Multilevel fabricators
US11024527B2 (en) 2005-06-18 2021-06-01 Frederick A. Flitsch Methods and apparatus for novel fabricators with Cleanspace
US8635784B2 (en) 2005-10-04 2014-01-28 Applied Materials, Inc. Methods and apparatus for drying a substrate
US7766734B2 (en) 2005-12-27 2010-08-03 American Aldes Ventilation Corporation Method and apparatus for passively controlling airflow
US9759442B2 (en) 2005-12-27 2017-09-12 American Aldes Ventilation Corporation Method and apparatus for passively controlling airflow
US20070190474A1 (en) * 2006-02-01 2007-08-16 Su Chao A Systems and methods of controlling systems
CA2653808C (en) * 2006-06-01 2014-10-14 Exaflop Llc Controlled warm air capture
US7819934B2 (en) * 2006-07-14 2010-10-26 Xcellerex, Inc. Environmental containment systems
JP2008032335A (ja) * 2006-07-31 2008-02-14 Hitachi High-Technologies Corp ミニエンバイロメント装置、検査装置、製造装置、及び空間の清浄化方法
US20080310967A1 (en) * 2007-06-13 2008-12-18 Franz John P Intelligent air moving apparatus
US9681587B2 (en) * 2007-08-30 2017-06-13 Pce, Inc. System and method for cooling electronic equipment
CN101849142A (zh) * 2007-11-06 2010-09-29 开利公司 可变空气量经济器最小位置重置
DE102008009623A1 (de) * 2008-02-18 2009-08-20 Kaltenbach & Voigt Gmbh Vorrichtung zum Betreiben eines elektrisch betriebenen medizinischen Instruments
JP5394850B2 (ja) * 2009-08-07 2014-01-22 株式会社堀場製作所 Ｐｌｃを用いた分析システム
DE102009037567B4 (de) * 2009-08-14 2011-09-22 Sinitec Vertriebsgesellschaft Mbh Kühlanordnung, Serverrack und Verfahren zur Steuerung einer Kühlanordnung
DE102010061242A1 (de) * 2010-12-15 2012-06-21 Phoenix Conveyor Belt Systems Gmbh Förderanlage mit einer Einrichtung zur Funkenerkennung
JP5828097B2 (ja) * 2011-08-08 2015-12-02 パナソニックＩｐマネジメント株式会社 電動車両及びその制御方法
TWI447059B (zh) * 2012-01-10 2014-08-01 Inotera Memories Inc 晶圓倉儲系統
US20130218518A1 (en) * 2012-02-21 2013-08-22 International Business Machines Corporation Automated, three dimensional mappable environmental sampling system and methods of use
KR101387976B1 (ko) * 2012-06-12 2014-04-25 한경대학교 산학협력단 공조 시스템의 에너지 저감을 위한 에너지 관리 시스템
US12189828B2 (en) 2013-01-05 2025-01-07 Frederick A. Flitsch Customized smart devices and touchscreen devices and cleanspace manufacturing methods to make them
US10646734B2 (en) * 2014-05-05 2020-05-12 Wayne Fueling Systems Sweden Ab Purge and pressurization system with feedback control
US20160061476A1 (en) * 2014-09-03 2016-03-03 Oberon, Inc. Environmental Sensor Device
US9280884B1 (en) * 2014-09-03 2016-03-08 Oberon, Inc. Environmental sensor device with alarms
CN104298284A (zh) * 2014-09-23 2015-01-21 国网安徽省电力公司阜阳供电公司 高压开关柜除湿装置
CN104298286A (zh) * 2014-10-30 2015-01-21 浙江群力电气有限公司 一种开关柜的内环境调控系统
US10578465B2 (en) * 2015-02-03 2020-03-03 Infineon Technologies Ag Sensor bus system and unit with internal event verification
CN104968122B (zh) * 2015-07-16 2017-07-21 周焕英 一种通过穿戴设备自动识别并管理调节的智能系统
US10192762B2 (en) * 2016-01-26 2019-01-29 Applied Materials, Inc. Systems and methods for detecting the existence of one or more environmental conditions within a substrate processing system
CN105786058B (zh) * 2016-03-31 2019-05-14 中国农业大学 一种基于电商预售模式的智能温室控制系统及方法
AU2020267490A1 (en) * 2019-05-06 2021-12-23 Strong Force Iot Portfolio 2016, Llc Platform for facilitating development of intelligence in an industrial internet of things system
JP7520961B2 (ja) * 2019-10-07 2024-07-23 パーティクル・メージャーリング・システムズ・インコーポレーテッド 遠隔警報監視及び制御を有する粒子検出器

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106569532A (zh) * 2016-11-10 2017-04-19 向往 一种电力配电机房环境控制系统

Also Published As

Publication number Publication date
WO1999047864A1 (en) 1999-09-23
US6473668B2 (en) 2002-10-29
EP1064503A1 (en) 2001-01-03
EP1064503A4 (en) 2002-06-19
TW426623B (en) 2001-03-21
US20020030113A1 (en) 2002-03-14
KR20010041939A (ko) 2001-05-25
JP2002506962A (ja) 2002-03-05

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