TW426623B - Intelligent minienvironment - Google Patents
Intelligent minienvironment Download PDFInfo
- Publication number
- TW426623B TW426623B TW088104061A TW88104061A TW426623B TW 426623 B TW426623 B TW 426623B TW 088104061 A TW088104061 A TW 088104061A TW 88104061 A TW88104061 A TW 88104061A TW 426623 B TW426623 B TW 426623B
- Authority
- TW
- Taiwan
- Prior art keywords
- microenvironment
- control
- environment
- micro
- environmental parameters
- Prior art date
Links
- 230000007613 environmental effect Effects 0.000 claims abstract description 16
- 239000002245 particle Substances 0.000 claims description 25
- 238000001514 detection method Methods 0.000 claims description 13
- 238000012544 monitoring process Methods 0.000 abstract description 16
- 235000012431 wafers Nutrition 0.000 description 23
- 230000008901 benefit Effects 0.000 description 11
- 239000000779 smoke Substances 0.000 description 11
- 238000012545 processing Methods 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 9
- 238000007726 management method Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 description 6
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000013500 data storage Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- -1 fire Substances 0.000 description 2
- 231100001261 hazardous Toxicity 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000005574 cross-species transmission Effects 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000010977 jade Substances 0.000 description 1
- 238000002372 labelling Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D27/00—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00
- G05D27/02—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00 characterised by the use of electric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/62—Control or safety arrangements characterised by the type of control or by internal processing, e.g. using fuzzy logic, adaptive control or estimation of values
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/50—Control or safety arrangements characterised by user interfaces or communication
- F24F11/54—Control or safety arrangements characterised by user interfaces or communication using one central controller connected to several sub-controllers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Fuzzy Systems (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Signal Processing (AREA)
- Automation & Control Theory (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Ventilation (AREA)
- Air Conditioning Control Device (AREA)
- Testing And Monitoring For Control Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US3980898A | 1998-03-16 | 1998-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW426623B true TW426623B (en) | 2001-03-21 |
Family
ID=21907449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW088104061A TW426623B (en) | 1998-03-16 | 1999-05-13 | Intelligent minienvironment |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6473668B2 (enExample) |
| EP (1) | EP1064503A4 (enExample) |
| JP (1) | JP2002506962A (enExample) |
| KR (1) | KR100626857B1 (enExample) |
| TW (1) | TW426623B (enExample) |
| WO (1) | WO1999047864A1 (enExample) |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2805601B1 (fr) * | 2000-02-29 | 2002-06-07 | Aldes Aeraulique | Groupe de ventilation auto-pilote a regulation electronique |
| EP1184724A1 (en) | 2000-08-29 | 2002-03-06 | Motorola, Inc. | Electronic device for a lithography mask container and method using the same |
| US6671564B1 (en) * | 2000-10-03 | 2003-12-30 | Data I/O Corporation | Portable programming system and control method therefor |
| US7302313B2 (en) * | 2001-02-07 | 2007-11-27 | Aircuity, Inc. | Air quality monitoring systems and methods |
| JP2003083591A (ja) * | 2001-09-10 | 2003-03-19 | Daikin Ind Ltd | 空気調和機および空気調和システム |
| CA2397185A1 (fr) * | 2002-08-05 | 2004-02-05 | Christian Cloutier | Moniteur d'activite pour bebe |
| US20040162996A1 (en) * | 2003-02-18 | 2004-08-19 | Nortel Networks Limited | Distributed security for industrial networks |
| US7088239B2 (en) | 2004-03-02 | 2006-08-08 | Vann Basinger | Method and apparatus for all-purpose, automatic remote utility meter reading, utility shut off, and hazard warning and correction |
| JP3861918B2 (ja) * | 2004-11-30 | 2006-12-27 | ダイキン工業株式会社 | 空気調和機 |
| US10651063B2 (en) | 2005-06-18 | 2020-05-12 | Frederick A. Flitsch | Methods of prototyping and manufacturing with cleanspace fabricators |
| US7513822B2 (en) * | 2005-06-18 | 2009-04-07 | Flitsch Frederick A | Method and apparatus for a cleanspace fabricator |
| US10627809B2 (en) | 2005-06-18 | 2020-04-21 | Frederick A. Flitsch | Multilevel fabricators |
| US11024527B2 (en) | 2005-06-18 | 2021-06-01 | Frederick A. Flitsch | Methods and apparatus for novel fabricators with Cleanspace |
| US8635784B2 (en) | 2005-10-04 | 2014-01-28 | Applied Materials, Inc. | Methods and apparatus for drying a substrate |
| US7766734B2 (en) | 2005-12-27 | 2010-08-03 | American Aldes Ventilation Corporation | Method and apparatus for passively controlling airflow |
| US9759442B2 (en) | 2005-12-27 | 2017-09-12 | American Aldes Ventilation Corporation | Method and apparatus for passively controlling airflow |
| US20070190474A1 (en) * | 2006-02-01 | 2007-08-16 | Su Chao A | Systems and methods of controlling systems |
| CA2653808C (en) * | 2006-06-01 | 2014-10-14 | Exaflop Llc | Controlled warm air capture |
| US7819934B2 (en) * | 2006-07-14 | 2010-10-26 | Xcellerex, Inc. | Environmental containment systems |
| JP2008032335A (ja) * | 2006-07-31 | 2008-02-14 | Hitachi High-Technologies Corp | ミニエンバイロメント装置、検査装置、製造装置、及び空間の清浄化方法 |
| US20080310967A1 (en) * | 2007-06-13 | 2008-12-18 | Franz John P | Intelligent air moving apparatus |
| US9681587B2 (en) * | 2007-08-30 | 2017-06-13 | Pce, Inc. | System and method for cooling electronic equipment |
| CN101849142A (zh) * | 2007-11-06 | 2010-09-29 | 开利公司 | 可变空气量经济器最小位置重置 |
| DE102008009623A1 (de) * | 2008-02-18 | 2009-08-20 | Kaltenbach & Voigt Gmbh | Vorrichtung zum Betreiben eines elektrisch betriebenen medizinischen Instruments |
| JP5394850B2 (ja) * | 2009-08-07 | 2014-01-22 | 株式会社堀場製作所 | Ｐｌｃを用いた分析システム |
| DE102009037567B4 (de) * | 2009-08-14 | 2011-09-22 | Sinitec Vertriebsgesellschaft Mbh | Kühlanordnung, Serverrack und Verfahren zur Steuerung einer Kühlanordnung |
| DE102010061242A1 (de) * | 2010-12-15 | 2012-06-21 | Phoenix Conveyor Belt Systems Gmbh | Förderanlage mit einer Einrichtung zur Funkenerkennung |
| JP5828097B2 (ja) * | 2011-08-08 | 2015-12-02 | パナソニックＩｐマネジメント株式会社 | 電動車両及びその制御方法 |
| TWI447059B (zh) * | 2012-01-10 | 2014-08-01 | Inotera Memories Inc | 晶圓倉儲系統 |
| US20130218518A1 (en) * | 2012-02-21 | 2013-08-22 | International Business Machines Corporation | Automated, three dimensional mappable environmental sampling system and methods of use |
| KR101387976B1 (ko) * | 2012-06-12 | 2014-04-25 | 한경대학교 산학협력단 | 공조 시스템의 에너지 저감을 위한 에너지 관리 시스템 |
| US12189828B2 (en) | 2013-01-05 | 2025-01-07 | Frederick A. Flitsch | Customized smart devices and touchscreen devices and cleanspace manufacturing methods to make them |
| US10646734B2 (en) * | 2014-05-05 | 2020-05-12 | Wayne Fueling Systems Sweden Ab | Purge and pressurization system with feedback control |
| US20160061476A1 (en) * | 2014-09-03 | 2016-03-03 | Oberon, Inc. | Environmental Sensor Device |
| US9280884B1 (en) * | 2014-09-03 | 2016-03-08 | Oberon, Inc. | Environmental sensor device with alarms |
| CN104298284A (zh) * | 2014-09-23 | 2015-01-21 | 国网安徽省电力公司阜阳供电公司 | 高压开关柜除湿装置 |
| CN104298286A (zh) * | 2014-10-30 | 2015-01-21 | 浙江群力电气有限公司 | 一种开关柜的内环境调控系统 |
| US10578465B2 (en) * | 2015-02-03 | 2020-03-03 | Infineon Technologies Ag | Sensor bus system and unit with internal event verification |
| CN104968122B (zh) * | 2015-07-16 | 2017-07-21 | 周焕英 | 一种通过穿戴设备自动识别并管理调节的智能系统 |
| US10192762B2 (en) * | 2016-01-26 | 2019-01-29 | Applied Materials, Inc. | Systems and methods for detecting the existence of one or more environmental conditions within a substrate processing system |
| CN105786058B (zh) * | 2016-03-31 | 2019-05-14 | 中国农业大学 | 一种基于电商预售模式的智能温室控制系统及方法 |
| CN106569532A (zh) * | 2016-11-10 | 2017-04-19 | 向往 | 一种电力配电机房环境控制系统 |
| AU2020267490A1 (en) * | 2019-05-06 | 2021-12-23 | Strong Force Iot Portfolio 2016, Llc | Platform for facilitating development of intelligence in an industrial internet of things system |
| JP7520961B2 (ja) * | 2019-10-07 | 2024-07-23 | パーティクル・メージャーリング・システムズ・インコーポレーテッド | 遠隔警報監視及び制御を有する粒子検出器 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4532970A (en) | 1983-09-28 | 1985-08-06 | Hewlett-Packard Company | Particle-free dockable interface for integrated circuit processing |
| US4534389A (en) | 1984-03-29 | 1985-08-13 | Hewlett-Packard Company | Interlocking door latch for dockable interface for integrated circuit processing |
| JPS60164141A (ja) * | 1984-02-06 | 1985-08-27 | Takasago Thermal Eng Co Lts | 清浄度と室圧の同時制御機構を備えたクリ−ンル−ム装置 |
| US5166884A (en) | 1984-12-24 | 1992-11-24 | Asyst Technologies, Inc. | Intelligent system for processing and storing articles |
| US5097421A (en) | 1984-12-24 | 1992-03-17 | Asyst Technologies, Inc. | Intelligent waxer carrier |
| US4974166A (en) | 1987-05-18 | 1990-11-27 | Asyst Technologies, Inc. | Processing systems with intelligent article tracking |
| JP2673835B2 (ja) * | 1990-08-21 | 1997-11-05 | 高砂熱学工業 株式会社 | クリーンルームの風量制御方法 |
| US5279458A (en) * | 1991-08-12 | 1994-01-18 | Carrier Corporation | Network management control |
| CA2069273A1 (en) * | 1992-05-22 | 1993-11-23 | Edward L. Ratcliffe | Energy management systems |
| JPH06260379A (ja) * | 1993-03-02 | 1994-09-16 | Toshiba Corp | クリーンルームのガス監視システム |
| US5538471A (en) * | 1994-11-15 | 1996-07-23 | Innovative Air Systems, Inc. | Dynamic particulate control system and method of operation |
| JPH0953847A (ja) * | 1995-08-11 | 1997-02-25 | Ohbayashi Corp | クリーンルームの制御装置 |
| US5943230A (en) * | 1996-12-19 | 1999-08-24 | Applied Materials, Inc. | Computer-implemented inter-chamber synchronization in a multiple chamber substrate processing system |
| US6000830A (en) * | 1997-04-18 | 1999-12-14 | Tokyo Electron Limited | System for applying recipe of semiconductor manufacturing apparatus |
-
1999
- 1999-03-15 EP EP99912462A patent/EP1064503A4/en not_active Withdrawn
- 1999-03-15 KR KR1020007010251A patent/KR100626857B1/ko not_active Expired - Fee Related
- 1999-03-15 WO PCT/US1999/005430 patent/WO1999047864A1/en not_active Ceased
- 1999-03-15 JP JP2000537015A patent/JP2002506962A/ja active Pending
- 1999-05-13 TW TW088104061A patent/TW426623B/zh not_active IP Right Cessation
-
2001
- 2001-06-04 US US09/873,691 patent/US6473668B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| WO1999047864A1 (en) | 1999-09-23 |
| US6473668B2 (en) | 2002-10-29 |
| EP1064503A1 (en) | 2001-01-03 |
| EP1064503A4 (en) | 2002-06-19 |
| KR100626857B1 (ko) | 2006-09-22 |
| US20020030113A1 (en) | 2002-03-14 |
| KR20010041939A (ko) | 2001-05-25 |
| JP2002506962A (ja) | 2002-03-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW426623B (en) | Intelligent minienvironment | |
| JP4677517B2 (ja) | Ｓｍｉｆポッドシステム、可搬式ｓｍｉｆポッド及びｓｍｉｆポッドシステムの内部環境をモニタするための方法 | |
| US20090053017A1 (en) | Storage and purge system for semiconductor wafers | |
| KR102419959B1 (ko) | 물류자동화이송장비의 실시간 감시 시스템 | |
| US20160329225A1 (en) | Flexible Purge Management System | |
| US20200251365A1 (en) | Metrology method in wafer transportation | |
| CN210775144U (zh) | 半导体检测机台 | |
| KR20170142360A (ko) | 오염물질 모니터링 시스템 및 그 모니터링 방법 | |
| CN118372270A (zh) | 一种正压型防爆机器人智能控制方法 | |
| KR101486015B1 (ko) | 덕트 무게 실시간 모니터링 시스템 | |
| JP4304323B2 (ja) | ガス供給システム | |
| JPH0438185Y2 (enExample) | ||
| JP5142353B2 (ja) | 基板処理装置、基板処理装置の異常検出方法、基板処理システム、基板処理装置の異常検出プログラム及び半導体装置の製造方法 | |
| KR20010035519A (ko) | 위치 불량 감지 장치 및 방법 | |
| KR20230033614A (ko) | 안전 상호잠금 시스템, 저장 매체 및 안전 검증 방법이 있는 인터페이스 모듈 | |
| TW556252B (en) | Transportable container including an internal environment monitor | |
| KR102839763B1 (ko) | 반송실 유입 공기에 대한 바이패스 기능을 구비한 efem 운용 시스템 | |
| CN217605656U (zh) | 一种用于高温气冷堆的可移动式湿度仪比对装置 | |
| US20070139854A1 (en) | Monitoring device for transport pods | |
| JP2011243759A (ja) | 半導体搬送装置 | |
| TW202107599A (zh) | 具有粒子感測器的晶圓處理設備 | |
| KR100792331B1 (ko) | 반도체 제조공정의 화학약품 제어시스템 | |
| CN119812024A (zh) | 半导体制造设施的污染监测系统及方法 | |
| CN118113004A (zh) | 基于N2 Purge的新型LoadPort控制方法 | |
| JPH0927987A (ja) | ガス供給系統における遠隔監視装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MK4A | Expiration of patent term of an invention patent |